SE462717B - Anordning och foerfarande foer behandling av innervaeggen i ett roer medelst en elektrisk glimurladdning - Google Patents
Anordning och foerfarande foer behandling av innervaeggen i ett roer medelst en elektrisk glimurladdningInfo
- Publication number
- SE462717B SE462717B SE8402504A SE8402504A SE462717B SE 462717 B SE462717 B SE 462717B SE 8402504 A SE8402504 A SE 8402504A SE 8402504 A SE8402504 A SE 8402504A SE 462717 B SE462717 B SE 462717B
- Authority
- SE
- Sweden
- Prior art keywords
- tube
- auxiliary electrode
- wall
- pipe
- treating
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/046—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B7/00—Heating by electric discharge
- H05B7/16—Heating by glow discharge
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Analytical Chemistry (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
- Chemical Vapour Deposition (AREA)
- ing And Chemical Polishing (AREA)
- Heat Treatment Of Articles (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CH2544/83A CH659346A5 (de) | 1983-05-10 | 1983-05-10 | Vorrichtung zum behandeln der innenwand eines rohres. |
Publications (3)
Publication Number | Publication Date |
---|---|
SE8402504D0 SE8402504D0 (sv) | 1984-05-09 |
SE8402504L SE8402504L (sv) | 1984-11-11 |
SE462717B true SE462717B (sv) | 1990-08-20 |
Family
ID=4236183
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SE8402504A SE462717B (sv) | 1983-05-10 | 1984-05-09 | Anordning och foerfarande foer behandling av innervaeggen i ett roer medelst en elektrisk glimurladdning |
Country Status (10)
Country | Link |
---|---|
US (1) | US4598663A (de) |
JP (1) | JPS59226175A (de) |
CH (1) | CH659346A5 (de) |
DE (1) | DE3408053A1 (de) |
FR (1) | FR2546023A1 (de) |
GB (1) | GB2145434B (de) |
IT (1) | IT1175473B (de) |
NL (1) | NL8401160A (de) |
SE (1) | SE462717B (de) |
ZA (1) | ZA843411B (de) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CH663455A5 (de) * | 1984-04-19 | 1987-12-15 | Balzers Hochvakuum | Rohr mit einer innenbeschichtung. |
MXPA99002496A (es) * | 1996-09-13 | 2003-07-21 | Euromat Gmbh | Procedimiento y aparato para revestir la cara interna de componentes de construccion de metal. |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL83318C (de) * | 1953-02-17 | |||
CH349284A (de) * | 1955-11-22 | 1960-10-15 | Berghaus Elektrophysik Anst | Verfahren und Vorrichtung zur Behandlung der Oberfläche von Körpern |
GB915568A (en) * | 1960-09-23 | 1963-01-16 | Gen Electric Co Ltd | Improvements in or relating to the formation of thin films |
ZA755786B (en) * | 1974-10-07 | 1976-08-25 | Baxter Laboratories Inc | Diagnostic electrode assembly |
AU507748B2 (en) * | 1976-06-10 | 1980-02-28 | University Of Sydney, The | Reactive sputtering |
NL7607473A (nl) * | 1976-07-07 | 1978-01-10 | Philips Nv | Verstuifinrichting en werkwijze voor het ver- stuiven met een dergelijke inrichting. |
DE2820301B2 (de) * | 1978-05-10 | 1980-11-06 | Messerschmitt-Boelkow-Blohm Gmbh, 8000 Muenchen | Anordnung zur Innenbeschichtung von Rohren |
US4262035A (en) * | 1980-03-07 | 1981-04-14 | Bell Telephone Laboratories, Incorporated | Modified chemical vapor deposition of an optical fiber using an rf plasma |
DE3010314C2 (de) * | 1980-03-18 | 1982-01-07 | Beerwald, Hans, Dr.Rer.Nat., 5370 Kall | Verfahren zur innenbeschichtung von elektrisch nicht leitfähigen Rohren mittels Gasentladungen |
US4419202A (en) * | 1980-12-22 | 1983-12-06 | The Secretary Of State For Defence In Her Britannic Majesty's Government Of The United Kingdom Of Great Britain And Northern Ireland | Metal coatings |
US4418645A (en) * | 1982-03-26 | 1983-12-06 | Xerox Corporation | Glow discharge apparatus with squirrel cage electrode |
US4508748A (en) * | 1983-01-05 | 1985-04-02 | Xis, Incorporated | Manufacturing process for selenium photoreceptors |
-
1983
- 1983-05-10 CH CH2544/83A patent/CH659346A5/de not_active IP Right Cessation
-
1984
- 1984-03-05 DE DE19843408053 patent/DE3408053A1/de active Granted
- 1984-04-09 IT IT20448/84A patent/IT1175473B/it active
- 1984-04-11 NL NL8401160A patent/NL8401160A/nl not_active Application Discontinuation
- 1984-05-02 GB GB08411268A patent/GB2145434B/en not_active Expired
- 1984-05-04 FR FR8406978A patent/FR2546023A1/fr not_active Withdrawn
- 1984-05-04 JP JP59090078A patent/JPS59226175A/ja active Pending
- 1984-05-07 ZA ZA843411A patent/ZA843411B/xx unknown
- 1984-05-09 SE SE8402504A patent/SE462717B/sv not_active IP Right Cessation
- 1984-05-10 US US06/608,971 patent/US4598663A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
DE3408053C2 (de) | 1988-09-29 |
IT1175473B (it) | 1987-07-01 |
FR2546023A1 (fr) | 1984-11-16 |
ZA843411B (en) | 1985-08-28 |
DE3408053A1 (de) | 1984-11-15 |
US4598663A (en) | 1986-07-08 |
SE8402504L (sv) | 1984-11-11 |
GB2145434B (en) | 1987-01-14 |
JPS59226175A (ja) | 1984-12-19 |
GB2145434A (en) | 1985-03-27 |
SE8402504D0 (sv) | 1984-05-09 |
CH659346A5 (de) | 1987-01-15 |
IT8420448A0 (it) | 1984-04-09 |
GB8411268D0 (en) | 1984-06-06 |
IT8420448A1 (it) | 1985-10-09 |
NL8401160A (nl) | 1984-12-03 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US5895586A (en) | Plasma processing apparatus and plasma processing method in which a part of the processing chamber is formed using a pre-fluorinated material of aluminum | |
US20140315392A1 (en) | Cold spray barrier coated component of a plasma processing chamber and method of manufacture thereof | |
KR20010080470A (ko) | 반도체 웨이퍼 처리 시스템에서 고주파 복귀 전류 경로제어를 제공하는 장치 | |
KR101927422B1 (ko) | 진공내 회전 장치 | |
CN104996000A (zh) | 等离子体源 | |
SE462717B (sv) | Anordning och foerfarande foer behandling av innervaeggen i ett roer medelst en elektrisk glimurladdning | |
JP2000073167A (ja) | 真空チャンバ内で基板をコ―ティングするための装置 | |
JP3986513B2 (ja) | 薄膜形成装置 | |
US5948294A (en) | Device for cathodic cleaning of wire | |
US10541169B2 (en) | Method and system for balancing the electrostatic chucking force on a substrate | |
KR100274433B1 (ko) | 스퍼트링장치 및 스퍼트링방법 | |
JP3958869B2 (ja) | MgO膜形成方法およびパネル | |
JP4902054B2 (ja) | スパッタリング装置 | |
JP3958870B2 (ja) | 真空成膜装置 | |
JP2004076160A (ja) | シールド装置 | |
JP4251713B2 (ja) | スパッタ装置 | |
JPH07258844A (ja) | 磁気中性線放電プラズマを利用した成膜装置 | |
JPH04228566A (ja) | スパッターイオンめっきによる導電性繊維被覆方法および装置 | |
JP3156176B2 (ja) | 真空成膜装置 | |
JP2002069629A (ja) | 高周波スパッタリング装置 | |
US1501070A (en) | Vacuum pump | |
RU2390579C2 (ru) | Способ нанесения покрытия на внутреннюю поверхность трубы | |
CN107916406B (zh) | 用于双极磁控溅射的方法和磁控装置 | |
JP2009191363A (ja) | 基板を処理するための装置 | |
RU2622549C2 (ru) | Способ получения покрытия из карбида титана на внутренней поверхности медного анода генераторной лампы |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
NUG | Patent has lapsed |
Ref document number: 8402504-8 Effective date: 19911209 Format of ref document f/p: F |