SE462717B - Anordning och foerfarande foer behandling av innervaeggen i ett roer medelst en elektrisk glimurladdning - Google Patents

Anordning och foerfarande foer behandling av innervaeggen i ett roer medelst en elektrisk glimurladdning

Info

Publication number
SE462717B
SE462717B SE8402504A SE8402504A SE462717B SE 462717 B SE462717 B SE 462717B SE 8402504 A SE8402504 A SE 8402504A SE 8402504 A SE8402504 A SE 8402504A SE 462717 B SE462717 B SE 462717B
Authority
SE
Sweden
Prior art keywords
tube
auxiliary electrode
wall
pipe
treating
Prior art date
Application number
SE8402504A
Other languages
English (en)
Swedish (sv)
Other versions
SE8402504L (sv
SE8402504D0 (sv
Inventor
E Moll
R Buhl
Original Assignee
Balzers Hochvakuum
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers Hochvakuum filed Critical Balzers Hochvakuum
Publication of SE8402504D0 publication Critical patent/SE8402504D0/xx
Publication of SE8402504L publication Critical patent/SE8402504L/
Publication of SE462717B publication Critical patent/SE462717B/sv

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/046—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B7/00—Heating by electric discharge
    • H05B7/16—Heating by glow discharge

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Analytical Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Chemical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
  • Heat Treatment Of Articles (AREA)
SE8402504A 1983-05-10 1984-05-09 Anordning och foerfarande foer behandling av innervaeggen i ett roer medelst en elektrisk glimurladdning SE462717B (sv)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH2544/83A CH659346A5 (de) 1983-05-10 1983-05-10 Vorrichtung zum behandeln der innenwand eines rohres.

Publications (3)

Publication Number Publication Date
SE8402504D0 SE8402504D0 (sv) 1984-05-09
SE8402504L SE8402504L (sv) 1984-11-11
SE462717B true SE462717B (sv) 1990-08-20

Family

ID=4236183

Family Applications (1)

Application Number Title Priority Date Filing Date
SE8402504A SE462717B (sv) 1983-05-10 1984-05-09 Anordning och foerfarande foer behandling av innervaeggen i ett roer medelst en elektrisk glimurladdning

Country Status (10)

Country Link
US (1) US4598663A (de)
JP (1) JPS59226175A (de)
CH (1) CH659346A5 (de)
DE (1) DE3408053A1 (de)
FR (1) FR2546023A1 (de)
GB (1) GB2145434B (de)
IT (1) IT1175473B (de)
NL (1) NL8401160A (de)
SE (1) SE462717B (de)
ZA (1) ZA843411B (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH663455A5 (de) * 1984-04-19 1987-12-15 Balzers Hochvakuum Rohr mit einer innenbeschichtung.
MXPA99002496A (es) * 1996-09-13 2003-07-21 Euromat Gmbh Procedimiento y aparato para revestir la cara interna de componentes de construccion de metal.

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL83318C (de) * 1953-02-17
CH349284A (de) * 1955-11-22 1960-10-15 Berghaus Elektrophysik Anst Verfahren und Vorrichtung zur Behandlung der Oberfläche von Körpern
GB915568A (en) * 1960-09-23 1963-01-16 Gen Electric Co Ltd Improvements in or relating to the formation of thin films
ZA755786B (en) * 1974-10-07 1976-08-25 Baxter Laboratories Inc Diagnostic electrode assembly
AU507748B2 (en) * 1976-06-10 1980-02-28 University Of Sydney, The Reactive sputtering
NL7607473A (nl) * 1976-07-07 1978-01-10 Philips Nv Verstuifinrichting en werkwijze voor het ver- stuiven met een dergelijke inrichting.
DE2820301B2 (de) * 1978-05-10 1980-11-06 Messerschmitt-Boelkow-Blohm Gmbh, 8000 Muenchen Anordnung zur Innenbeschichtung von Rohren
US4262035A (en) * 1980-03-07 1981-04-14 Bell Telephone Laboratories, Incorporated Modified chemical vapor deposition of an optical fiber using an rf plasma
DE3010314C2 (de) * 1980-03-18 1982-01-07 Beerwald, Hans, Dr.Rer.Nat., 5370 Kall Verfahren zur innenbeschichtung von elektrisch nicht leitfähigen Rohren mittels Gasentladungen
US4419202A (en) * 1980-12-22 1983-12-06 The Secretary Of State For Defence In Her Britannic Majesty's Government Of The United Kingdom Of Great Britain And Northern Ireland Metal coatings
US4418645A (en) * 1982-03-26 1983-12-06 Xerox Corporation Glow discharge apparatus with squirrel cage electrode
US4508748A (en) * 1983-01-05 1985-04-02 Xis, Incorporated Manufacturing process for selenium photoreceptors

Also Published As

Publication number Publication date
DE3408053C2 (de) 1988-09-29
IT1175473B (it) 1987-07-01
FR2546023A1 (fr) 1984-11-16
ZA843411B (en) 1985-08-28
DE3408053A1 (de) 1984-11-15
US4598663A (en) 1986-07-08
SE8402504L (sv) 1984-11-11
GB2145434B (en) 1987-01-14
JPS59226175A (ja) 1984-12-19
GB2145434A (en) 1985-03-27
SE8402504D0 (sv) 1984-05-09
CH659346A5 (de) 1987-01-15
IT8420448A0 (it) 1984-04-09
GB8411268D0 (en) 1984-06-06
IT8420448A1 (it) 1985-10-09
NL8401160A (nl) 1984-12-03

Similar Documents

Publication Publication Date Title
US5895586A (en) Plasma processing apparatus and plasma processing method in which a part of the processing chamber is formed using a pre-fluorinated material of aluminum
US20140315392A1 (en) Cold spray barrier coated component of a plasma processing chamber and method of manufacture thereof
KR20010080470A (ko) 반도체 웨이퍼 처리 시스템에서 고주파 복귀 전류 경로제어를 제공하는 장치
KR101927422B1 (ko) 진공내 회전 장치
CN104996000A (zh) 等离子体源
SE462717B (sv) Anordning och foerfarande foer behandling av innervaeggen i ett roer medelst en elektrisk glimurladdning
JP2000073167A (ja) 真空チャンバ内で基板をコ―ティングするための装置
JP3986513B2 (ja) 薄膜形成装置
US5948294A (en) Device for cathodic cleaning of wire
US10541169B2 (en) Method and system for balancing the electrostatic chucking force on a substrate
KR100274433B1 (ko) 스퍼트링장치 및 스퍼트링방법
JP3958869B2 (ja) ＭｇＯ膜形成方法およびパネル
JP4902054B2 (ja) スパッタリング装置
JP3958870B2 (ja) 真空成膜装置
JP2004076160A (ja) シールド装置
JP4251713B2 (ja) スパッタ装置
JPH07258844A (ja) 磁気中性線放電プラズマを利用した成膜装置
JPH04228566A (ja) スパッターイオンめっきによる導電性繊維被覆方法および装置
JP3156176B2 (ja) 真空成膜装置
JP2002069629A (ja) 高周波スパッタリング装置
US1501070A (en) Vacuum pump
RU2390579C2 (ru) Способ нанесения покрытия на внутреннюю поверхность трубы
CN107916406B (zh) 用于双极磁控溅射的方法和磁控装置
JP2009191363A (ja) 基板を処理するための装置
RU2622549C2 (ru) Способ получения покрытия из карбида титана на внутренней поверхности медного анода генераторной лампы

Legal Events

Date Code Title Description
NUG Patent has lapsed

Ref document number: 8402504-8

Effective date: 19911209

Format of ref document f/p: F