SE8402504D0 - Vorrichtung zum behandeln der innenwand einers rohres mittels einer elektrischen glimmentladung - Google Patents

Vorrichtung zum behandeln der innenwand einers rohres mittels einer elektrischen glimmentladung

Info

Publication number
SE8402504D0
SE8402504D0 SE8402504A SE8402504A SE8402504D0 SE 8402504 D0 SE8402504 D0 SE 8402504D0 SE 8402504 A SE8402504 A SE 8402504A SE 8402504 A SE8402504 A SE 8402504A SE 8402504 D0 SE8402504 D0 SE 8402504D0
Authority
SE
Sweden
Prior art keywords
treat
electric
einers
glimm
rohres
Prior art date
Application number
SE8402504A
Other languages
English (en)
Other versions
SE8402504L (sv
SE462717B (sv
Inventor
E Moll
R Buhl
Original Assignee
Balzers Hochvakuum
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers Hochvakuum filed Critical Balzers Hochvakuum
Publication of SE8402504D0 publication Critical patent/SE8402504D0/sv
Publication of SE8402504L publication Critical patent/SE8402504L/sv
Publication of SE462717B publication Critical patent/SE462717B/sv

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/046—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B7/00—Heating by electric discharge
    • H05B7/16—Heating by glow discharge

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Analytical Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Chemical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
  • Heat Treatment Of Articles (AREA)
SE8402504A 1983-05-10 1984-05-09 Anordning och foerfarande foer behandling av innervaeggen i ett roer medelst en elektrisk glimurladdning SE462717B (sv)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH2544/83A CH659346A5 (de) 1983-05-10 1983-05-10 Vorrichtung zum behandeln der innenwand eines rohres.

Publications (3)

Publication Number Publication Date
SE8402504D0 true SE8402504D0 (sv) 1984-05-09
SE8402504L SE8402504L (sv) 1984-11-11
SE462717B SE462717B (sv) 1990-08-20

Family

ID=4236183

Family Applications (1)

Application Number Title Priority Date Filing Date
SE8402504A SE462717B (sv) 1983-05-10 1984-05-09 Anordning och foerfarande foer behandling av innervaeggen i ett roer medelst en elektrisk glimurladdning

Country Status (10)

Country Link
US (1) US4598663A (sv)
JP (1) JPS59226175A (sv)
CH (1) CH659346A5 (sv)
DE (1) DE3408053A1 (sv)
FR (1) FR2546023A1 (sv)
GB (1) GB2145434B (sv)
IT (1) IT1175473B (sv)
NL (1) NL8401160A (sv)
SE (1) SE462717B (sv)
ZA (1) ZA843411B (sv)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH663455A5 (de) * 1984-04-19 1987-12-15 Balzers Hochvakuum Rohr mit einer innenbeschichtung.
MXPA99002496A (es) * 1996-09-13 2003-07-21 Euromat Gmbh Procedimiento y aparato para revestir la cara interna de componentes de construccion de metal.

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL83318C (sv) * 1953-02-17
CH349284A (de) * 1955-11-22 1960-10-15 Berghaus Elektrophysik Anst Verfahren und Vorrichtung zur Behandlung der Oberfläche von Körpern
GB915568A (en) * 1960-09-23 1963-01-16 Gen Electric Co Ltd Improvements in or relating to the formation of thin films
ZA755786B (en) * 1974-10-07 1976-08-25 Baxter Laboratories Inc Diagnostic electrode assembly
AU507748B2 (en) * 1976-06-10 1980-02-28 University Of Sydney, The Reactive sputtering
NL7607473A (nl) * 1976-07-07 1978-01-10 Philips Nv Verstuifinrichting en werkwijze voor het ver- stuiven met een dergelijke inrichting.
DE2820301B2 (de) * 1978-05-10 1980-11-06 Messerschmitt-Boelkow-Blohm Gmbh, 8000 Muenchen Anordnung zur Innenbeschichtung von Rohren
US4262035A (en) * 1980-03-07 1981-04-14 Bell Telephone Laboratories, Incorporated Modified chemical vapor deposition of an optical fiber using an rf plasma
DE3010314C2 (de) * 1980-03-18 1982-01-07 Beerwald, Hans, Dr.Rer.Nat., 5370 Kall Verfahren zur innenbeschichtung von elektrisch nicht leitfähigen Rohren mittels Gasentladungen
US4419202A (en) * 1980-12-22 1983-12-06 The Secretary Of State For Defence In Her Britannic Majesty's Government Of The United Kingdom Of Great Britain And Northern Ireland Metal coatings
US4418645A (en) * 1982-03-26 1983-12-06 Xerox Corporation Glow discharge apparatus with squirrel cage electrode
US4508748A (en) * 1983-01-05 1985-04-02 Xis, Incorporated Manufacturing process for selenium photoreceptors

Also Published As

Publication number Publication date
DE3408053C2 (sv) 1988-09-29
IT1175473B (it) 1987-07-01
FR2546023A1 (fr) 1984-11-16
ZA843411B (en) 1985-08-28
DE3408053A1 (de) 1984-11-15
US4598663A (en) 1986-07-08
SE8402504L (sv) 1984-11-11
GB2145434B (en) 1987-01-14
JPS59226175A (ja) 1984-12-19
GB2145434A (en) 1985-03-27
SE462717B (sv) 1990-08-20
CH659346A5 (de) 1987-01-15
IT8420448A0 (it) 1984-04-09
GB8411268D0 (en) 1984-06-06
IT8420448A1 (it) 1985-10-09
NL8401160A (nl) 1984-12-03

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