RU94028284A - Способ фотонной сканирующей туннельной микроскопии и фотонный сканирующий туннельный микроскоп - Google Patents
Способ фотонной сканирующей туннельной микроскопии и фотонный сканирующий туннельный микроскопInfo
- Publication number
- RU94028284A RU94028284A RU94028284/07A RU94028284A RU94028284A RU 94028284 A RU94028284 A RU 94028284A RU 94028284/07 A RU94028284/07 A RU 94028284/07A RU 94028284 A RU94028284 A RU 94028284A RU 94028284 A RU94028284 A RU 94028284A
- Authority
- RU
- Russia
- Prior art keywords
- sample
- area
- photon scanning
- photons
- sonde
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
- G01Q60/22—Probes, their manufacture, or their related instrumentation, e.g. holders
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/04—Measuring microscopes
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/103—Scanning systems having movable or deformable optical fibres, light guides or waveguides as scanning elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/262—Optical details of coupling light into, or out of, or between fibre ends, e.g. special fibre end shapes or associated optical elements
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
- Y10S977/86—Scanning probe structure
- Y10S977/862—Near-field probe
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Engineering & Computer Science (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- General Health & Medical Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Radiology & Medical Imaging (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biophysics (AREA)
- Analytical Chemistry (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Microscoopes, Condenser (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Glass Compositions (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Cosmetics (AREA)
- Seasonings (AREA)
- Enzymes And Modification Thereof (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Abstract
Способ фотонной сканирующей туннельной микроскопии и фотонный сканирующий туннельный микроскоп предназначены для излучения образца в сканируемой зоне. Способ представляет собой генерацию ближнего поля света в зоне образца, которое имеет возрастающую интенсивность в направлении, нормальном к поверхности. Ближнее поле света проверяется зондом, получающим фотоны из этого ближнего поля, которые проходят за счет туннельного эффекта к поверхности зонда. Полученные фотоны детектируются, а детектор вырабатывает выходной сигнал, который пропорционален числу фотонов, полученных зондом. Сканирование осуществляется в зоне образца зондом по меньшей мере в одном направлении. Контроль выходного сигнала при движении зонда для определения выходной информации осуществляют по распределению интенсивности света в направлении к зоне образца. Также описан фотонный сканирующий туннельный микроскоп для осуществления указанного способа.
Claims (1)
- Способ фотонной сканирующей туннельной микроскопии и фотонный сканирующий туннельный микроскоп предназначены для излучения образца в сканируемой зоне. Способ представляет собой генерацию ближнего поля света в зоне образца, которое имеет возрастающую интенсивность в направлении, нормальном к поверхности. Ближнее поле света проверяется зондом, получающим фотоны из этого ближнего поля, которые проходят за счет туннельного эффекта к поверхности зонда. Полученные фотоны детектируются, а детектор вырабатывает выходной сигнал, который пропорционален числу фотонов, полученных зондом. Сканирование осуществляется в зоне образца зондом по меньшей мере в одном направлении. Контроль выходного сигнала при движении зонда для определения выходной информации осуществляют по распределению интенсивности света в направлении к зоне образца. Также описан фотонный сканирующий туннельный микроскоп для осуществления указанного способа.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US260926 | 1988-10-21 | ||
US07/260,926 US5018865A (en) | 1988-10-21 | 1988-10-21 | Photon scanning tunneling microscopy |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
RU4895573 Division |
Publications (1)
Publication Number | Publication Date |
---|---|
RU94028284A true RU94028284A (ru) | 1996-04-10 |
Family
ID=22991232
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
RU94028284/07A RU94028284A (ru) | 1988-10-21 | 1989-10-20 | Способ фотонной сканирующей туннельной микроскопии и фотонный сканирующий туннельный микроскоп |
SU894895573A RU2049327C1 (ru) | 1988-10-21 | 1989-10-20 | Способ определения свойств ближнего поля света в области образца на поверхности |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SU894895573A RU2049327C1 (ru) | 1988-10-21 | 1989-10-20 | Способ определения свойств ближнего поля света в области образца на поверхности |
Country Status (12)
Country | Link |
---|---|
US (1) | US5018865A (ru) |
EP (1) | EP0439534B1 (ru) |
JP (1) | JP3095226B2 (ru) |
AT (1) | ATE118087T1 (ru) |
AU (1) | AU623703B2 (ru) |
BR (1) | BR8907735A (ru) |
DE (1) | DE68921008T2 (ru) |
DK (1) | DK170596B1 (ru) |
FI (1) | FI96990C (ru) |
NO (1) | NO303247B1 (ru) |
RU (2) | RU94028284A (ru) |
WO (1) | WO1990004753A1 (ru) |
Families Citing this family (81)
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US5177351A (en) * | 1988-08-23 | 1993-01-05 | Lagowski Jacek J | Method and apparatus for determining the minority carrier diffusion length from linear constant photon flux photovoltage measurements |
EP0437170B1 (en) * | 1990-01-09 | 1996-04-24 | International Business Machines Corporation | Magneto-optic method and system for recording and retrieving high-density digital data |
JPH0432704A (ja) * | 1990-05-29 | 1992-02-04 | Dainippon Screen Mfg Co Ltd | ギャップ測定装置および表面形状測定装置 |
EP0459392B1 (en) * | 1990-05-30 | 1999-08-18 | Hitachi, Ltd. | Method and apparatus for processing a minute portion of a specimen |
JP2744339B2 (ja) * | 1990-08-03 | 1998-04-28 | キヤノン株式会社 | 情報処理装置及び情報処理方法 |
US5144833A (en) * | 1990-09-27 | 1992-09-08 | International Business Machines Corporation | Atomic force microscopy |
US5286970A (en) * | 1990-11-19 | 1994-02-15 | At&T Bell Laboratories | Near field optical microscopic examination of a biological specimen |
US5286971A (en) * | 1990-11-19 | 1994-02-15 | At&T Bell Laboratories | Data recording using a near field optical probe |
US5272330A (en) * | 1990-11-19 | 1993-12-21 | At&T Bell Laboratories | Near field scanning optical microscope having a tapered waveguide |
US5288997A (en) * | 1990-11-19 | 1994-02-22 | At&T Bell Laboratories | Manufacturing method, including near-field optical microscopic examination of a magnetic bit pattern |
US5288999A (en) * | 1990-11-19 | 1994-02-22 | At&T Bell Laboratories | Manufacturing method including near-field optical microscopic examination of a semiconductor wafer |
IL97362A0 (en) * | 1991-02-26 | 1992-08-18 | Aaron Lewis | Method for external excitation of subwavelength light sources that is integrated into feedback methodologies |
US5239183A (en) * | 1991-04-30 | 1993-08-24 | Dainippon Screen Mfg. Co., Ltd. | Optical gap measuring device using frustrated internal reflection |
US5155361A (en) * | 1991-07-26 | 1992-10-13 | The Arizona Board Of Regents, A Body Corporate Acting For And On Behalf Of Arizona State University | Potentiostatic preparation of molecular adsorbates for scanning probe microscopy |
JP3074357B2 (ja) * | 1991-10-03 | 2000-08-07 | セイコーインスツルメンツ株式会社 | 微細表面観察装置 |
JP3268797B2 (ja) * | 1991-10-09 | 2002-03-25 | オリンパス光学工業株式会社 | 光導入装置 |
JP2802868B2 (ja) * | 1992-12-22 | 1998-09-24 | 大日本スクリーン製造株式会社 | 半導体ウエハの非接触電気測定用センサおよびその製造方法、並びに、そのセンサを用いた測定方法 |
US5394268A (en) * | 1993-02-05 | 1995-02-28 | Carnegie Mellon University | Field synthesis and optical subsectioning for standing wave microscopy |
US5442443A (en) * | 1993-04-08 | 1995-08-15 | Polaroid Corporation | Stereoscopic photon tunneling microscope |
JP2704601B2 (ja) * | 1993-04-12 | 1998-01-26 | セイコーインスツルメンツ株式会社 | 走査型近視野原子間力顕微鏡、及びその顕微鏡に使用されるプローブ、及びそのプローブの製造方法 |
US5426302A (en) * | 1993-04-28 | 1995-06-20 | Board Of Regents, University Of Texas | Optically guided macroscopic-scan-range/nanometer resolution probing system |
JPH06349920A (ja) * | 1993-06-08 | 1994-12-22 | Dainippon Screen Mfg Co Ltd | 半導体ウェハの電荷量測定方法 |
US5531343A (en) * | 1993-07-15 | 1996-07-02 | At&T Corp. | Cylindrical fiber probe devices and methods of making them |
US5570441A (en) * | 1993-07-15 | 1996-10-29 | At&T Corp. | Cylindrical fiber probes and methods of making them |
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US5395741A (en) * | 1993-12-22 | 1995-03-07 | At&T Corp. | Method of making fiber probe devices using patterned reactive ion etching |
US5480046A (en) * | 1993-12-22 | 1996-01-02 | At&T Corp. | Fiber probe fabrication having a tip with concave sidewalls |
US5394500A (en) * | 1993-12-22 | 1995-02-28 | At&T Corp. | Fiber probe device having multiple diameters |
US5440920A (en) * | 1994-02-03 | 1995-08-15 | Molecular Imaging Systems | Scanning force microscope with beam tracking lens |
US5548113A (en) * | 1994-03-24 | 1996-08-20 | Trustees Of Boston University | Co-axial detection and illumination with shear force dithering in a near-field scanning optical microscope |
US5866805A (en) * | 1994-05-19 | 1999-02-02 | Molecular Imaging Corporation Arizona Board Of Regents | Cantilevers for a magnetically driven atomic force microscope |
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JP3290586B2 (ja) * | 1996-03-13 | 2002-06-10 | セイコーインスツルメンツ株式会社 | 走査型近視野光学顕微鏡 |
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US5939709A (en) * | 1997-06-19 | 1999-08-17 | Ghislain; Lucien P. | Scanning probe optical microscope using a solid immersion lens |
DE19741122C2 (de) * | 1997-09-12 | 2003-09-25 | Forschungsverbund Berlin Ev | Anordnung zur Vermessung und Strukturierung (Nahfeldanordnung) |
US6923044B1 (en) | 2001-03-08 | 2005-08-02 | General Nanotechnology Llc | Active cantilever for nanomachining and metrology |
US6787768B1 (en) | 2001-03-08 | 2004-09-07 | General Nanotechnology Llc | Method and apparatus for tool and tip design for nanomachining and measurement |
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US6802646B1 (en) * | 2001-04-30 | 2004-10-12 | General Nanotechnology Llc | Low-friction moving interfaces in micromachines and nanomachines |
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US6931710B2 (en) * | 2001-01-30 | 2005-08-23 | General Nanotechnology Llc | Manufacturing of micro-objects such as miniature diamond tool tips |
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US6897436B2 (en) * | 2002-06-06 | 2005-05-24 | University Of Maryland | System and method for optical processing based on light-controlled photon tunneling |
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JP3760196B2 (ja) * | 2002-06-27 | 2006-03-29 | 独立行政法人科学技術振興機構 | 赤外光集光装置 |
JP2005538855A (ja) | 2002-09-09 | 2005-12-22 | ジェネラル ナノテクノロジー エルエルシー | 走査型プローブ顕微鏡の流体送達 |
DE10258283B4 (de) * | 2002-12-13 | 2011-02-17 | Carl Mahr Holding Gmbh | Tasteinrichtung zur Werkstückvermessung |
US6831747B2 (en) * | 2003-01-08 | 2004-12-14 | Ut-Battelle, Llc | Spectrometry and filtering with high rejection of stray light |
JP2008522492A (ja) * | 2004-11-20 | 2008-06-26 | センテラ インコーポレイテッド | 高周波信号放出装置 |
US7280078B2 (en) | 2004-11-20 | 2007-10-09 | Scenterra, Inc. | Sensor for detecting high frequency signals |
WO2007129325A2 (en) * | 2006-05-09 | 2007-11-15 | Xceed Imaging Ltd. | Optical sub wavelength super resolution imaging system and method |
US8173965B2 (en) | 2006-09-12 | 2012-05-08 | International Business Machines Corporation | Thermally excited near-field source |
US8390817B2 (en) * | 2008-01-03 | 2013-03-05 | Koninklijke Philips Electronics N.V. | Evanescent field modulation in a biosensor |
DE102010004774A1 (de) * | 2010-01-14 | 2011-07-28 | IMM Photonics GmbH, 85716 | Verfahren und Einrichtung zum sicheren Emittieren einer Anregungsstrahlung |
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US10436813B1 (en) | 2018-05-09 | 2019-10-08 | Institute for Electronics and Information Technology in Tianjin Tsinghua University | Surface plasmon scanning-tunneling chemical mapping (SPSTM) system |
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US3975084A (en) * | 1973-09-27 | 1976-08-17 | Block Engineering, Inc. | Particle detecting system |
EP0112401B1 (en) * | 1982-12-27 | 1987-04-22 | International Business Machines Corporation | Optical near-field scanning microscope |
US4662747A (en) * | 1983-08-03 | 1987-05-05 | Cornell Research Foundation, Inc. | Method and apparatus for production and use of nanometer scale light beams |
DE3477271D1 (en) * | 1984-12-28 | 1989-04-20 | Ibm | Waveguide for an optical near-field microscope |
US4917462A (en) * | 1988-06-15 | 1990-04-17 | Cornell Research Foundation, Inc. | Near field scanning optical microscopy |
-
1988
- 1988-10-21 US US07/260,926 patent/US5018865A/en not_active Expired - Fee Related
-
1989
- 1989-10-20 WO PCT/US1989/004725 patent/WO1990004753A1/en active IP Right Grant
- 1989-10-20 JP JP01511463A patent/JP3095226B2/ja not_active Expired - Fee Related
- 1989-10-20 EP EP89912339A patent/EP0439534B1/en not_active Expired - Lifetime
- 1989-10-20 RU RU94028284/07A patent/RU94028284A/ru unknown
- 1989-10-20 BR BR898907735A patent/BR8907735A/pt not_active IP Right Cessation
- 1989-10-20 DE DE68921008T patent/DE68921008T2/de not_active Expired - Fee Related
- 1989-10-20 RU SU894895573A patent/RU2049327C1/ru active
- 1989-10-20 AU AU44930/89A patent/AU623703B2/en not_active Ceased
- 1989-10-20 AT AT89912339T patent/ATE118087T1/de not_active IP Right Cessation
-
1991
- 1991-04-19 FI FI911922A patent/FI96990C/fi active
- 1991-04-19 NO NO911563A patent/NO303247B1/no not_active IP Right Cessation
- 1991-04-22 DK DK073491A patent/DK170596B1/da not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
BR8907735A (pt) | 1991-08-20 |
EP0439534A4 (en) | 1993-05-12 |
DE68921008T2 (de) | 1995-07-20 |
JPH04505653A (ja) | 1992-10-01 |
FI96990C (fi) | 1996-09-25 |
JP3095226B2 (ja) | 2000-10-03 |
DE68921008D1 (de) | 1995-03-16 |
DK73491D0 (da) | 1991-04-22 |
DK73491A (da) | 1991-06-12 |
NO911563L (no) | 1991-06-19 |
NO303247B1 (no) | 1998-06-15 |
DK170596B1 (da) | 1995-11-06 |
FI911922A0 (fi) | 1991-04-19 |
US5018865A (en) | 1991-05-28 |
FI96990B (fi) | 1996-06-14 |
AU4493089A (en) | 1990-05-14 |
RU2049327C1 (ru) | 1995-11-27 |
NO911563D0 (no) | 1991-04-19 |
AU623703B2 (en) | 1992-05-21 |
ATE118087T1 (de) | 1995-02-15 |
WO1990004753A1 (en) | 1990-05-03 |
EP0439534A1 (en) | 1991-08-07 |
EP0439534B1 (en) | 1995-02-01 |
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