RU94028284A - Способ фотонной сканирующей туннельной микроскопии и фотонный сканирующий туннельный микроскоп - Google Patents

Способ фотонной сканирующей туннельной микроскопии и фотонный сканирующий туннельный микроскоп

Info

Publication number
RU94028284A
RU94028284A RU94028284/07A RU94028284A RU94028284A RU 94028284 A RU94028284 A RU 94028284A RU 94028284/07 A RU94028284/07 A RU 94028284/07A RU 94028284 A RU94028284 A RU 94028284A RU 94028284 A RU94028284 A RU 94028284A
Authority
RU
Russia
Prior art keywords
sample
area
photon scanning
photons
sonde
Prior art date
Application number
RU94028284/07A
Other languages
English (en)
Inventor
Л.Феррелл Томас (FR)
Томас Л.Феррелл (FR), Роберт Д.Вармек (FR), Робин С.Реддик
Д.Вармек Роберт (FR)
С.Реддик Робин (FR)
Original Assignee
Сосьете Д
Сосьете Д, Инвестиссеман Дан Ля Микроскопи (СИМ С.А.)
Инвестиссеман Дан Ля Микроскопи (СИМ С.А.) (FR)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Сосьете Д, Сосьете Д, Инвестиссеман Дан Ля Микроскопи (СИМ С.А.), Инвестиссеман Дан Ля Микроскопи (СИМ С.А.) (FR) filed Critical Сосьете Д
Publication of RU94028284A publication Critical patent/RU94028284A/ru

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
    • G01Q60/22—Probes, their manufacture, or their related instrumentation, e.g. holders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/04—Measuring microscopes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/103—Scanning systems having movable or deformable optical fibres, light guides or waveguides as scanning elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/262—Optical details of coupling light into, or out of, or between fibre ends, e.g. special fibre end shapes or associated optical elements
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/862—Near-field probe

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Engineering & Computer Science (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • General Health & Medical Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Radiology & Medical Imaging (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biophysics (AREA)
  • Analytical Chemistry (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Microscoopes, Condenser (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Glass Compositions (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Cosmetics (AREA)
  • Seasonings (AREA)
  • Enzymes And Modification Thereof (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)

Abstract

Способ фотонной сканирующей туннельной микроскопии и фотонный сканирующий туннельный микроскоп предназначены для излучения образца в сканируемой зоне. Способ представляет собой генерацию ближнего поля света в зоне образца, которое имеет возрастающую интенсивность в направлении, нормальном к поверхности. Ближнее поле света проверяется зондом, получающим фотоны из этого ближнего поля, которые проходят за счет туннельного эффекта к поверхности зонда. Полученные фотоны детектируются, а детектор вырабатывает выходной сигнал, который пропорционален числу фотонов, полученных зондом. Сканирование осуществляется в зоне образца зондом по меньшей мере в одном направлении. Контроль выходного сигнала при движении зонда для определения выходной информации осуществляют по распределению интенсивности света в направлении к зоне образца. Также описан фотонный сканирующий туннельный микроскоп для осуществления указанного способа.

Claims (1)

  1. Способ фотонной сканирующей туннельной микроскопии и фотонный сканирующий туннельный микроскоп предназначены для излучения образца в сканируемой зоне. Способ представляет собой генерацию ближнего поля света в зоне образца, которое имеет возрастающую интенсивность в направлении, нормальном к поверхности. Ближнее поле света проверяется зондом, получающим фотоны из этого ближнего поля, которые проходят за счет туннельного эффекта к поверхности зонда. Полученные фотоны детектируются, а детектор вырабатывает выходной сигнал, который пропорционален числу фотонов, полученных зондом. Сканирование осуществляется в зоне образца зондом по меньшей мере в одном направлении. Контроль выходного сигнала при движении зонда для определения выходной информации осуществляют по распределению интенсивности света в направлении к зоне образца. Также описан фотонный сканирующий туннельный микроскоп для осуществления указанного способа.
RU94028284/07A 1988-10-21 1989-10-20 Способ фотонной сканирующей туннельной микроскопии и фотонный сканирующий туннельный микроскоп RU94028284A (ru)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US260926 1988-10-21
US07/260,926 US5018865A (en) 1988-10-21 1988-10-21 Photon scanning tunneling microscopy

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
RU4895573 Division

Publications (1)

Publication Number Publication Date
RU94028284A true RU94028284A (ru) 1996-04-10

Family

ID=22991232

Family Applications (2)

Application Number Title Priority Date Filing Date
RU94028284/07A RU94028284A (ru) 1988-10-21 1989-10-20 Способ фотонной сканирующей туннельной микроскопии и фотонный сканирующий туннельный микроскоп
SU894895573A RU2049327C1 (ru) 1988-10-21 1989-10-20 Способ определения свойств ближнего поля света в области образца на поверхности

Family Applications After (1)

Application Number Title Priority Date Filing Date
SU894895573A RU2049327C1 (ru) 1988-10-21 1989-10-20 Способ определения свойств ближнего поля света в области образца на поверхности

Country Status (12)

Country Link
US (1) US5018865A (ru)
EP (1) EP0439534B1 (ru)
JP (1) JP3095226B2 (ru)
AT (1) ATE118087T1 (ru)
AU (1) AU623703B2 (ru)
BR (1) BR8907735A (ru)
DE (1) DE68921008T2 (ru)
DK (1) DK170596B1 (ru)
FI (1) FI96990C (ru)
NO (1) NO303247B1 (ru)
RU (2) RU94028284A (ru)
WO (1) WO1990004753A1 (ru)

Families Citing this family (81)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5177351A (en) * 1988-08-23 1993-01-05 Lagowski Jacek J Method and apparatus for determining the minority carrier diffusion length from linear constant photon flux photovoltage measurements
EP0437170B1 (en) * 1990-01-09 1996-04-24 International Business Machines Corporation Magneto-optic method and system for recording and retrieving high-density digital data
JPH0432704A (ja) * 1990-05-29 1992-02-04 Dainippon Screen Mfg Co Ltd ギャップ測定装置および表面形状測定装置
EP0459392B1 (en) * 1990-05-30 1999-08-18 Hitachi, Ltd. Method and apparatus for processing a minute portion of a specimen
JP2744339B2 (ja) * 1990-08-03 1998-04-28 キヤノン株式会社 情報処理装置及び情報処理方法
US5144833A (en) * 1990-09-27 1992-09-08 International Business Machines Corporation Atomic force microscopy
US5286970A (en) * 1990-11-19 1994-02-15 At&T Bell Laboratories Near field optical microscopic examination of a biological specimen
US5286971A (en) * 1990-11-19 1994-02-15 At&T Bell Laboratories Data recording using a near field optical probe
US5272330A (en) * 1990-11-19 1993-12-21 At&T Bell Laboratories Near field scanning optical microscope having a tapered waveguide
US5288997A (en) * 1990-11-19 1994-02-22 At&T Bell Laboratories Manufacturing method, including near-field optical microscopic examination of a magnetic bit pattern
US5288999A (en) * 1990-11-19 1994-02-22 At&T Bell Laboratories Manufacturing method including near-field optical microscopic examination of a semiconductor wafer
IL97362A0 (en) * 1991-02-26 1992-08-18 Aaron Lewis Method for external excitation of subwavelength light sources that is integrated into feedback methodologies
US5239183A (en) * 1991-04-30 1993-08-24 Dainippon Screen Mfg. Co., Ltd. Optical gap measuring device using frustrated internal reflection
US5155361A (en) * 1991-07-26 1992-10-13 The Arizona Board Of Regents, A Body Corporate Acting For And On Behalf Of Arizona State University Potentiostatic preparation of molecular adsorbates for scanning probe microscopy
JP3074357B2 (ja) * 1991-10-03 2000-08-07 セイコーインスツルメンツ株式会社 微細表面観察装置
JP3268797B2 (ja) * 1991-10-09 2002-03-25 オリンパス光学工業株式会社 光導入装置
JP2802868B2 (ja) * 1992-12-22 1998-09-24 大日本スクリーン製造株式会社 半導体ウエハの非接触電気測定用センサおよびその製造方法、並びに、そのセンサを用いた測定方法
US5394268A (en) * 1993-02-05 1995-02-28 Carnegie Mellon University Field synthesis and optical subsectioning for standing wave microscopy
US5442443A (en) * 1993-04-08 1995-08-15 Polaroid Corporation Stereoscopic photon tunneling microscope
JP2704601B2 (ja) * 1993-04-12 1998-01-26 セイコーインスツルメンツ株式会社 走査型近視野原子間力顕微鏡、及びその顕微鏡に使用されるプローブ、及びそのプローブの製造方法
US5426302A (en) * 1993-04-28 1995-06-20 Board Of Regents, University Of Texas Optically guided macroscopic-scan-range/nanometer resolution probing system
JPH06349920A (ja) * 1993-06-08 1994-12-22 Dainippon Screen Mfg Co Ltd 半導体ウェハの電荷量測定方法
US5531343A (en) * 1993-07-15 1996-07-02 At&T Corp. Cylindrical fiber probe devices and methods of making them
US5570441A (en) * 1993-07-15 1996-10-29 At&T Corp. Cylindrical fiber probes and methods of making them
CA2170860C (en) * 1993-10-04 2002-07-23 Bert Hecht Near-field optical microscope
US5395741A (en) * 1993-12-22 1995-03-07 At&T Corp. Method of making fiber probe devices using patterned reactive ion etching
US5480046A (en) * 1993-12-22 1996-01-02 At&T Corp. Fiber probe fabrication having a tip with concave sidewalls
US5394500A (en) * 1993-12-22 1995-02-28 At&T Corp. Fiber probe device having multiple diameters
US5440920A (en) * 1994-02-03 1995-08-15 Molecular Imaging Systems Scanning force microscope with beam tracking lens
US5548113A (en) * 1994-03-24 1996-08-20 Trustees Of Boston University Co-axial detection and illumination with shear force dithering in a near-field scanning optical microscope
US5866805A (en) * 1994-05-19 1999-02-02 Molecular Imaging Corporation Arizona Board Of Regents Cantilevers for a magnetically driven atomic force microscope
US5753814A (en) * 1994-05-19 1998-05-19 Molecular Imaging Corporation Magnetically-oscillated probe microscope for operation in liquids
US5515719A (en) * 1994-05-19 1996-05-14 Molecular Imaging Corporation Controlled force microscope for operation in liquids
US5513518A (en) * 1994-05-19 1996-05-07 Molecular Imaging Corporation Magnetic modulation of force sensor for AC detection in an atomic force microscope
US5751683A (en) * 1995-07-24 1998-05-12 General Nanotechnology, L.L.C. Nanometer scale data storage device and associated positioning system
US6339217B1 (en) * 1995-07-28 2002-01-15 General Nanotechnology Llc Scanning probe microscope assembly and method for making spectrophotometric, near-field, and scanning probe measurements
US6337479B1 (en) * 1994-07-28 2002-01-08 Victor B. Kley Object inspection and/or modification system and method
US6265711B1 (en) * 1994-07-28 2001-07-24 General Nanotechnology L.L.C. Scanning probe microscope assembly and method for making spectrophotometric near-field optical and scanning measurements
JPH10506457A (ja) * 1994-07-28 1998-06-23 ジェネラル ナノテクノロジー エルエルシー 走査型プローブ顕微鏡装置
US5664036A (en) * 1994-10-13 1997-09-02 Accuphotonics, Inc. High resolution fiber optic probe for near field optical microscopy and method of making same
US5485536A (en) * 1994-10-13 1996-01-16 Accuphotonics, Inc. Fiber optic probe for near field optical microscopy
US5557452A (en) * 1995-02-06 1996-09-17 University Of Hawaii Confocal microscope system
US5495109A (en) * 1995-02-10 1996-02-27 Molecular Imaging Corporation Electrochemical identification of molecules in a scanning probe microscope
WO1996028837A1 (en) * 1995-03-10 1996-09-19 Molecular Imaging Corporation Hybrid control system for scanning probe microscopes
US5874726A (en) * 1995-10-10 1999-02-23 Iowa State University Research Foundation Probe-type near-field confocal having feedback for adjusting probe distance
US5796909A (en) * 1996-02-14 1998-08-18 Islam; Mohammed N. All-fiber, high-sensitivity, near-field optical microscopy instrument employing guided wave light collector and specimen support
JP3290586B2 (ja) * 1996-03-13 2002-06-10 セイコーインスツルメンツ株式会社 走査型近視野光学顕微鏡
JP3260619B2 (ja) * 1996-03-19 2002-02-25 セイコーインスツルメンツ株式会社 光導波路プロ−ブおよび光システム
US5774221A (en) * 1996-08-21 1998-06-30 Polaroid Corporation Apparatus and methods for providing phase controlled evanescent illumination
US5910940A (en) * 1996-10-08 1999-06-08 Polaroid Corporation Storage medium having a layer of micro-optical lenses each lens generating an evanescent field
US5939709A (en) * 1997-06-19 1999-08-17 Ghislain; Lucien P. Scanning probe optical microscope using a solid immersion lens
DE19741122C2 (de) * 1997-09-12 2003-09-25 Forschungsverbund Berlin Ev Anordnung zur Vermessung und Strukturierung (Nahfeldanordnung)
US6923044B1 (en) 2001-03-08 2005-08-02 General Nanotechnology Llc Active cantilever for nanomachining and metrology
US6787768B1 (en) 2001-03-08 2004-09-07 General Nanotechnology Llc Method and apparatus for tool and tip design for nanomachining and measurement
US7196328B1 (en) 2001-03-08 2007-03-27 General Nanotechnology Llc Nanomachining method and apparatus
US6802646B1 (en) * 2001-04-30 2004-10-12 General Nanotechnology Llc Low-friction moving interfaces in micromachines and nanomachines
US6752008B1 (en) 2001-03-08 2004-06-22 General Nanotechnology Llc Method and apparatus for scanning in scanning probe microscopy and presenting results
IL124838A0 (en) 1998-06-10 1999-01-26 Yeda Res & Dev Near-field optical inspection apparatus
US6831886B1 (en) * 1998-11-27 2004-12-14 Minolta Co., Ltd. Optical head and optical head device
US6633660B1 (en) * 1999-02-05 2003-10-14 John Carl Schotland Near-field tomography
AU6061100A (en) * 1999-07-01 2001-01-22 General Nanotechnology, Llc Object inspection and/or modification system and method
WO2002001194A1 (en) * 2000-06-25 2002-01-03 Affymetrix, Inc. Optically active substrates
US6931710B2 (en) * 2001-01-30 2005-08-23 General Nanotechnology Llc Manufacturing of micro-objects such as miniature diamond tool tips
US7253407B1 (en) 2001-03-08 2007-08-07 General Nanotechnology Llc Active cantilever for nanomachining and metrology
US7053369B1 (en) * 2001-10-19 2006-05-30 Rave Llc Scan data collection for better overall data accuracy
US6813937B2 (en) 2001-11-28 2004-11-09 General Nanotechnology Llc Method and apparatus for micromachines, microstructures, nanomachines and nanostructures
US6858436B2 (en) * 2002-04-30 2005-02-22 Motorola, Inc. Near-field transform spectroscopy
US6897436B2 (en) * 2002-06-06 2005-05-24 University Of Maryland System and method for optical processing based on light-controlled photon tunneling
US20030232427A1 (en) * 2002-06-18 2003-12-18 Montagu Jean I. Optically active substrates for examination of biological materials
JP3760196B2 (ja) * 2002-06-27 2006-03-29 独立行政法人科学技術振興機構 赤外光集光装置
JP2005538855A (ja) 2002-09-09 2005-12-22 ジェネラル ナノテクノロジー エルエルシー 走査型プローブ顕微鏡の流体送達
DE10258283B4 (de) * 2002-12-13 2011-02-17 Carl Mahr Holding Gmbh Tasteinrichtung zur Werkstückvermessung
US6831747B2 (en) * 2003-01-08 2004-12-14 Ut-Battelle, Llc Spectrometry and filtering with high rejection of stray light
JP2008522492A (ja) * 2004-11-20 2008-06-26 センテラ インコーポレイテッド 高周波信号放出装置
US7280078B2 (en) 2004-11-20 2007-10-09 Scenterra, Inc. Sensor for detecting high frequency signals
WO2007129325A2 (en) * 2006-05-09 2007-11-15 Xceed Imaging Ltd. Optical sub wavelength super resolution imaging system and method
US8173965B2 (en) 2006-09-12 2012-05-08 International Business Machines Corporation Thermally excited near-field source
US8390817B2 (en) * 2008-01-03 2013-03-05 Koninklijke Philips Electronics N.V. Evanescent field modulation in a biosensor
DE102010004774A1 (de) * 2010-01-14 2011-07-28 IMM Photonics GmbH, 85716 Verfahren und Einrichtung zum sicheren Emittieren einer Anregungsstrahlung
KR102554867B1 (ko) * 2015-09-09 2023-07-14 삼성전자주식회사 기판 검사 장치
US10436813B1 (en) 2018-05-09 2019-10-08 Institute for Electronics and Information Technology in Tianjin Tsinghua University Surface plasmon scanning-tunneling chemical mapping (SPSTM) system

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3975084A (en) * 1973-09-27 1976-08-17 Block Engineering, Inc. Particle detecting system
EP0112401B1 (en) * 1982-12-27 1987-04-22 International Business Machines Corporation Optical near-field scanning microscope
US4662747A (en) * 1983-08-03 1987-05-05 Cornell Research Foundation, Inc. Method and apparatus for production and use of nanometer scale light beams
DE3477271D1 (en) * 1984-12-28 1989-04-20 Ibm Waveguide for an optical near-field microscope
US4917462A (en) * 1988-06-15 1990-04-17 Cornell Research Foundation, Inc. Near field scanning optical microscopy

Also Published As

Publication number Publication date
BR8907735A (pt) 1991-08-20
EP0439534A4 (en) 1993-05-12
DE68921008T2 (de) 1995-07-20
JPH04505653A (ja) 1992-10-01
FI96990C (fi) 1996-09-25
JP3095226B2 (ja) 2000-10-03
DE68921008D1 (de) 1995-03-16
DK73491D0 (da) 1991-04-22
DK73491A (da) 1991-06-12
NO911563L (no) 1991-06-19
NO303247B1 (no) 1998-06-15
DK170596B1 (da) 1995-11-06
FI911922A0 (fi) 1991-04-19
US5018865A (en) 1991-05-28
FI96990B (fi) 1996-06-14
AU4493089A (en) 1990-05-14
RU2049327C1 (ru) 1995-11-27
NO911563D0 (no) 1991-04-19
AU623703B2 (en) 1992-05-21
ATE118087T1 (de) 1995-02-15
WO1990004753A1 (en) 1990-05-03
EP0439534A1 (en) 1991-08-07
EP0439534B1 (en) 1995-02-01

Similar Documents

Publication Publication Date Title
RU94028284A (ru) Способ фотонной сканирующей туннельной микроскопии и фотонный сканирующий туннельный микроскоп
US6108398A (en) X-ray microfluorescence analyzer
NL1016472C2 (nl) Werkwijze en inrichting voor het detecteren van ontoelaatbare voorwerpen en reisbagage.
EP0200342A3 (en) Evaluation of surface and subsurface characteristics of a sample
DE69331188D1 (de) Vorrichtung und verfahren zur molekularen charakterisierung
DE3586361D1 (de) Verfahren und vorrichtung zum verbesserten nachweis von elektromagnetischen signalen.
US5150043A (en) Apparatus and method for non-contact surface voltage probing by scanning photoelectron emission
ATE79952T1 (de) Verfahren zur teilchenanalyse.
US4881818A (en) Differential imaging device
KR910018798A (ko) 시료표면 분석에 있어서 백그라운드 보정을 위한 방법 및 장치
JPS6151569A (ja) 細胞識別装置
WO1986007148A1 (en) Differential imaging device
JPH0278936A (ja) 表面検査装置
JP3364950B2 (ja) 半導体検出器及びそれを用いた走査型分析顕微鏡
JPH0251046A (ja) 環境測定装置
SU785717A1 (ru) Устройство дл неразрушающего контрол объектов
US3536915A (en) Radiographic bond inspection apparatus
JPH01244344A (ja) Ｘ線吸収スペクトル測定装置
SU940013A2 (ru) Фотоэлектрический способ измерени размеров и концентрации взвешенных частиц
JPS61232544A (ja) 電位検出装置
JPH08114560A (ja) Ｘ線検査装置
JPS54105973A (en) Axis matching device for electron beam device
JPH09184807A (ja) 微弱光検出方法および微弱光検出装置
JPH0361853A (ja) ゲル電気泳動装置
JPH05322785A (ja) 蛍光検出装置