RU2016121873A - Препятствующий оксидированию барьерный слой - Google Patents
Препятствующий оксидированию барьерный слой Download PDFInfo
- Publication number
- RU2016121873A RU2016121873A RU2016121873A RU2016121873A RU2016121873A RU 2016121873 A RU2016121873 A RU 2016121873A RU 2016121873 A RU2016121873 A RU 2016121873A RU 2016121873 A RU2016121873 A RU 2016121873A RU 2016121873 A RU2016121873 A RU 2016121873A
- Authority
- RU
- Russia
- Prior art keywords
- barrier layer
- oxidation
- pvd
- oxidation barrier
- workpiece
- Prior art date
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/04—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/081—Oxides of aluminium, magnesium or beryllium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/083—Oxides of refractory metals or yttrium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5826—Treatment with charged particles
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5846—Reactive treatment
- C23C14/5853—Oxidation
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
- Physical Vapour Deposition (AREA)
- Laminated Bodies (AREA)
Claims (6)
1. Способ изготовления препятствующего оксидированию барьерного слоя на подложке детали, причем препятствующий оксидированию барьерный слой изготавливают физическим осаждением из газовой фазы (PVD), и оксид является таким, который родственен по материалу непокрытой поверхности заготовки.
2. Способ по п.1, отличающийся тем, что способ PVD представляет собой способ катодно-дугового испарения.
3. Способ изготовления препятствующего оксидированию барьерного слоя на подложке обрабатываемой детали, причем препятствующий оксидированию барьерный слой изготавливают физическим осаждением из газовой фазы (PVD), и препятствующий оксидированию барьерный слой включает Al-Cr-О-слой.
4. Способ по п.3, отличающийся тем, что способ PVD представляет собой способ катодно-дугового испарения, и препятствующий оксидированию барьерный слой включает брызги.
5. Способ по одному из предшествующих пунктов, отличающийся тем, что синтезированные оксидные слои подвергают дополнительному окислению в плазме или доокислению обычным путем.
6. Подложка детали с изготовленным по методу PVD препятствующим оксидированию барьерным слоем, отличающаяся тем, что препятствующий оксидированию барьерный слой представляет собой оксид, который является родственным по материалу непокрытой поверхности заготовки.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP13005182 | 2013-11-03 | ||
EP13005182.4 | 2013-11-03 | ||
PCT/EP2014/002924 WO2015062733A1 (de) | 2013-11-03 | 2014-10-31 | Oxidationsbarriereschicht |
Publications (3)
Publication Number | Publication Date |
---|---|
RU2016121873A true RU2016121873A (ru) | 2017-12-07 |
RU2016121873A3 RU2016121873A3 (ru) | 2018-06-27 |
RU2701801C2 RU2701801C2 (ru) | 2019-10-01 |
Family
ID=49578064
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
RU2016121873A RU2701801C2 (ru) | 2013-11-03 | 2014-10-31 | Препятствующий оксидированию барьерный слой |
Country Status (10)
Country | Link |
---|---|
US (1) | US10487391B2 (ru) |
EP (1) | EP3063309B1 (ru) |
JP (1) | JP2016537515A (ru) |
KR (1) | KR102252440B1 (ru) |
CN (1) | CN105917020B (ru) |
CA (1) | CA2929460C (ru) |
ES (1) | ES2932411T3 (ru) |
MX (1) | MX2016005564A (ru) |
RU (1) | RU2701801C2 (ru) |
WO (1) | WO2015062733A1 (ru) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR3052463B1 (fr) * | 2016-06-10 | 2020-05-08 | Safran | Procede de fabrication d'une piece en superalliage a base de nickel contenant de l'hafnium |
WO2018193036A1 (en) * | 2017-04-21 | 2018-10-25 | Oerlikon Surface Solutions Ag, Pfäffikon | Superalloy sputtering target |
JP7315931B2 (ja) * | 2017-09-15 | 2023-07-27 | エリコン サーフェス ソリューションズ アーゲー、 プフェフィコン | より高い熱安定性を有するAl-CrO系コーティングおよびその製造方法 |
PL3728695T3 (pl) * | 2017-12-22 | 2023-02-06 | Oerlikon Surface Solutions Ag, Pfäffikon | Powłoka odporna na korozję i erozję do łopatek turbinowych turbin gazowych |
CN111954728A (zh) * | 2018-04-05 | 2020-11-17 | Dmc全球公司 | 铝熔炉用的多层过渡接头及其制造方法 |
EP3921455A1 (en) * | 2019-02-08 | 2021-12-15 | Oerlikon Surface Solutions AG, Pfäffikon | Coated tool with coating comprising boride-containing diffusion barrier layer |
CN111500987B (zh) * | 2019-12-17 | 2022-06-10 | 西南技术物理研究所 | 一种基于金属铪沉积二氧化铪薄膜的方法 |
EP3933066A1 (de) * | 2020-06-30 | 2022-01-05 | Oerlikon Surface Solutions AG, Pfäffikon | Schutzschicht gegen umwelteinflüsse (umweltbarriereschicht) für ti-al material |
WO2022002949A1 (de) * | 2020-07-01 | 2022-01-06 | Oerlikon Surface Solutions Ag, Pfäffikon | SCHUTZSCHICHT GEGEN UMWELTEINFLÜSSE (UMWELTBARRIERESCHICHT) FÜR Ti-Al MATERIAL |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS6376861A (ja) | 1986-09-19 | 1988-04-07 | Nippon Steel Corp | 燃焼器具用ステンレス鋼およびその製造法 |
US5741596A (en) | 1989-02-21 | 1998-04-21 | Boeing North American, Inc. | Coating for oxidation protection of metal surfaces |
FR2671798B1 (fr) | 1991-01-21 | 1994-03-25 | Propulsion Ste Europeenne | Procede pour la protection anti-oxydation d'un materiau qui, au moins en surface, est constitue d'une ceramique formee par un compose du silicium, et materiau tel qu'obtenu par le procede. |
US5310607A (en) | 1991-05-16 | 1994-05-10 | Balzers Aktiengesellschaft | Hard coating; a workpiece coated by such hard coating and a method of coating such workpiece by such hard coating |
AT1669U1 (de) | 1996-11-22 | 1997-09-25 | Plansee Ag | Oxidationsschutzschicht für refraktärmetalle |
EP0944746B1 (de) * | 1996-12-10 | 2001-07-04 | Siemens Aktiengesellschaft | Erzeugnis, welches einem heissen gas aussetzbar ist, mit einer wärmedämmschicht sowie verfahren zur herstellung |
RU2154124C2 (ru) * | 1997-01-06 | 2000-08-10 | Парфенов Михаил Дмитриевич | Способ нанесения цветного защитно-декоративного покрытия с рисунком |
RU2120494C1 (ru) * | 1997-06-17 | 1998-10-20 | Международный Центр Электронно-Лучевых Технологий Института Электросварки им.Е.О.Патона НАН Украины | Способ получения на подложке защитных покрытий с градиентом химического состава и структуры по толщине с внешним керамическим слоем, его вариант |
FR2814473B1 (fr) * | 2000-09-25 | 2003-06-27 | Snecma Moteurs | Procede de realisation d'un revetement de protection formant barriere thermique avec sous-couche de liaison sur un substrat en superalliage et piece obtenue |
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JP2007196364A (ja) * | 2005-12-28 | 2007-08-09 | Sumitomo Electric Ind Ltd | 表面被覆切削工具およびその製造方法 |
NZ576185A (en) * | 2006-10-10 | 2012-10-26 | Oerlikon Trading Ag | A PVD layer system for coating workpieces with a mixed crystal layer of a polyoxide |
US7939181B2 (en) * | 2006-10-11 | 2011-05-10 | Oerlikon Trading Ag, Trubbach | Layer system with at least one mixed crystal layer of a multi-oxide |
US9605338B2 (en) | 2006-10-11 | 2017-03-28 | Oerlikon Surface Solutions Ag, Pfaffikon | Method for depositing electrically insulating layers |
US8652589B2 (en) | 2008-01-25 | 2014-02-18 | Oerlikon Trading Ag, Truebbach | Permeation barrier layer |
JP5445847B2 (ja) * | 2010-01-28 | 2014-03-19 | 三菱マテリアル株式会社 | 高速重切削加工で硬質被覆層がすぐれた耐チッピング性、耐摩耗性を発揮する表面被覆切削工具 |
EP2369031B1 (de) | 2010-03-18 | 2016-05-04 | Oerlikon Trading AG, Trübbach | Beschichtung auf nial2o4 basis in spinellstruktur |
DE102010028558A1 (de) * | 2010-05-04 | 2011-11-10 | Walter Ag | PVD-Hybridverfahren zum Abscheiden von Mischkristallschichten |
WO2013159870A1 (en) * | 2012-04-22 | 2013-10-31 | Oerlikon Trading Ag, Trübbach | Arc-deposited al-cr-o coatings having enhanced coating properties |
WO2014111264A1 (en) | 2013-01-18 | 2014-07-24 | Oerlikon Trading Ag, Trübbach | COATING METHOD FOR PRODUCING (Al,Cr)2O3-BASED COATINGS WITH ENHANCED PROPERTIES |
-
2014
- 2014-10-31 EP EP14795954.8A patent/EP3063309B1/de active Active
- 2014-10-31 KR KR1020167014263A patent/KR102252440B1/ko active IP Right Grant
- 2014-10-31 RU RU2016121873A patent/RU2701801C2/ru active
- 2014-10-31 CN CN201480072105.6A patent/CN105917020B/zh active Active
- 2014-10-31 US US15/034,069 patent/US10487391B2/en active Active
- 2014-10-31 JP JP2016550952A patent/JP2016537515A/ja active Pending
- 2014-10-31 MX MX2016005564A patent/MX2016005564A/es unknown
- 2014-10-31 ES ES14795954T patent/ES2932411T3/es active Active
- 2014-10-31 CA CA2929460A patent/CA2929460C/en active Active
- 2014-10-31 WO PCT/EP2014/002924 patent/WO2015062733A1/de active Application Filing
Also Published As
Publication number | Publication date |
---|---|
JP2016537515A (ja) | 2016-12-01 |
KR102252440B1 (ko) | 2021-05-17 |
CN105917020A (zh) | 2016-08-31 |
CA2929460C (en) | 2023-03-28 |
MX2016005564A (es) | 2016-12-09 |
KR20160083887A (ko) | 2016-07-12 |
RU2701801C2 (ru) | 2019-10-01 |
EP3063309B1 (de) | 2022-10-12 |
CA2929460A1 (en) | 2015-05-07 |
ES2932411T3 (es) | 2023-01-18 |
EP3063309A1 (de) | 2016-09-07 |
RU2016121873A3 (ru) | 2018-06-27 |
US20160273093A1 (en) | 2016-09-22 |
US10487391B2 (en) | 2019-11-26 |
WO2015062733A1 (de) | 2015-05-07 |
CN105917020B (zh) | 2019-09-20 |
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