RO100707A2 - Proportioning plant for gaseous doping mixture preparation - Google Patents

Proportioning plant for gaseous doping mixture preparation

Info

Publication number
RO100707A2
RO100707A2 RO1988132835A RO13283588A RO100707A2 RO 100707 A2 RO100707 A2 RO 100707A2 RO 1988132835 A RO1988132835 A RO 1988132835A RO 13283588 A RO13283588 A RO 13283588A RO 100707 A2 RO100707 A2 RO 100707A2
Authority
RO
Romania
Prior art keywords
mixture preparation
doping mixture
gaseous doping
proportioning plant
proportioning
Prior art date
Application number
RO1988132835A
Other languages
Romanian (ro)
Other versions
RO100707B1 (en
Inventor
Isaevich Dudavsky; Su Sergei
Alexandrovich Kravtsov; Su Anatoly
Mikhailovich Makarenko; Su Stefan
Iosifovich Osovsky; Su Mikhail
Petrovich Salibeev; Su Petr
Fedorovich Chervony; Su Ivan
Original Assignee
Gosudarstvenny Nauchno-Issledovatelsky I Proektn, Institut Redkometallicheskoi Promyshlennesti "Giredmei" Zaporozhsky Tino-Magnievy Kombinat Imeni 60-Letia Velikoi Oktyabrskoi Sotsialis I Hes Ol Rev
Oljutsii; Su
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gosudarstvenny Nauchno-Issledovatelsky I Proektn, Institut Redkometallicheskoi Promyshlennesti "Giredmei" Zaporozhsky Tino-Magnievy Kombinat Imeni 60-Letia Velikoi Oktyabrskoi Sotsialis I Hes Ol Rev, Oljutsii; Su filed Critical Gosudarstvenny Nauchno-Issledovatelsky I Proektn, Institut Redkometallicheskoi Promyshlennesti "Giredmei" Zaporozhsky Tino-Magnievy Kombinat Imeni 60-Letia Velikoi Oktyabrskoi Sotsialis I Hes Ol Rev
Priority to RO1988132835A priority Critical patent/RO100707A2/en
Publication of RO100707B1 publication Critical patent/RO100707B1/en
Publication of RO100707A2 publication Critical patent/RO100707A2/en

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  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

The dispenser comprises intercommunicating work and dispersing chambers with (a) valved control piston. The production of doped crystals is increased. Dispensing precision improves the doping of the semiconductor crystals, and facilitates repetition of dispensing and doping of the gas mixt.
RO1988132835A 1988-03-31 1988-03-31 Proportioning plant for gaseous doping mixture preparation RO100707A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
RO1988132835A RO100707A2 (en) 1988-03-31 1988-03-31 Proportioning plant for gaseous doping mixture preparation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
RO1988132835A RO100707A2 (en) 1988-03-31 1988-03-31 Proportioning plant for gaseous doping mixture preparation

Publications (2)

Publication Number Publication Date
RO100707B1 RO100707B1 (en) 1991-02-28
RO100707A2 true RO100707A2 (en) 1991-09-06

Family

ID=20121392

Family Applications (1)

Application Number Title Priority Date Filing Date
RO1988132835A RO100707A2 (en) 1988-03-31 1988-03-31 Proportioning plant for gaseous doping mixture preparation

Country Status (1)

Country Link
RO (1) RO100707A2 (en)

Also Published As

Publication number Publication date
RO100707B1 (en) 1991-02-28

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