PT3336217T - Máquina para a deposição de material pela técnica de pulverização catódica - Google Patents

Máquina para a deposição de material pela técnica de pulverização catódica

Info

Publication number
PT3336217T
PT3336217T PT172072415T PT17207241T PT3336217T PT 3336217 T PT3336217 T PT 3336217T PT 172072415 T PT172072415 T PT 172072415T PT 17207241 T PT17207241 T PT 17207241T PT 3336217 T PT3336217 T PT 3336217T
Authority
PT
Portugal
Prior art keywords
deposition
machine
sputtering technique
cathodic sputtering
cathodic
Prior art date
Application number
PT172072415T
Other languages
English (en)
Original Assignee
Kenosistec S R L
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kenosistec S R L filed Critical Kenosistec S R L
Publication of PT3336217T publication Critical patent/PT3336217T/pt

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
    • H01J37/3405—Magnetron sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3414—Targets
    • H01J37/342—Hollow targets
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3435—Target holders (includes backing plates and endblocks)
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/345—Magnet arrangements in particular for cathodic sputtering apparatus
    • H01J37/3452—Magnet distribution
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/345—Magnet arrangements in particular for cathodic sputtering apparatus
    • H01J37/3455—Movable magnets

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
PT172072415T 2016-12-14 2017-12-14 Máquina para a deposição de material pela técnica de pulverização catódica PT3336217T (pt)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT102016000126397A IT201600126397A1 (it) 2016-12-14 2016-12-14 Macchina per la deposizione di materiale secondo la tecnica di polverizzazione catodica.

Publications (1)

Publication Number Publication Date
PT3336217T true PT3336217T (pt) 2021-08-26

Family

ID=58455535

Family Applications (1)

Application Number Title Priority Date Filing Date
PT172072415T PT3336217T (pt) 2016-12-14 2017-12-14 Máquina para a deposição de material pela técnica de pulverização catódica

Country Status (5)

Country Link
EP (1) EP3336217B1 (pt)
ES (1) ES2881311T3 (pt)
IT (1) IT201600126397A1 (pt)
PL (1) PL3336217T3 (pt)
PT (1) PT3336217T (pt)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11387086B2 (en) 2018-06-08 2022-07-12 Kenosistec S.R.L. Machine for the deposition of material by the cathodic sputtering technique

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4525264A (en) * 1981-12-07 1985-06-25 Ford Motor Company Cylindrical post magnetron sputtering system
US4904362A (en) * 1987-07-24 1990-02-27 Miba Gleitlager Aktiengesellschaft Bar-shaped magnetron or sputter cathode arrangement
US7520965B2 (en) * 2004-10-12 2009-04-21 Southwest Research Institute Magnetron sputtering apparatus and method for depositing a coating using same
GB2473656A (en) * 2009-09-21 2011-03-23 Mantis Deposition Ltd Sputter deposition using a cylindrical target
CN104114742A (zh) * 2012-10-26 2014-10-22 国立大学法人东北大学 磁控溅射装置以及磁控溅射方法
WO2016135693A1 (en) * 2015-02-27 2016-09-01 Istituto Nazionale Di Fisica Nucleare System for magnetron sputtering deposition of a film of a base material on the interior surface of a substrate

Also Published As

Publication number Publication date
EP3336217B1 (en) 2021-04-28
EP3336217A1 (en) 2018-06-20
PL3336217T3 (pl) 2021-11-22
IT201600126397A1 (it) 2018-06-14
ES2881311T3 (es) 2021-11-29

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