PL391792A1 - Sposób sterowania mocą RF modulowaną impulsowo i urządzenie dostarczające moc RF modulowaną impulsowo - Google Patents

Sposób sterowania mocą RF modulowaną impulsowo i urządzenie dostarczające moc RF modulowaną impulsowo

Info

Publication number
PL391792A1
PL391792A1 PL391792A PL39179210A PL391792A1 PL 391792 A1 PL391792 A1 PL 391792A1 PL 391792 A PL391792 A PL 391792A PL 39179210 A PL39179210 A PL 39179210A PL 391792 A1 PL391792 A1 PL 391792A1
Authority
PL
Poland
Prior art keywords
power
amplitude
pulse
output
control
Prior art date
Application number
PL391792A
Other languages
English (en)
Inventor
Itsuo Yuzurihara
Yoshihisa Hata
Original Assignee
Kyosan Electronic Mfg. Co. Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyosan Electronic Mfg. Co. Ltd. filed Critical Kyosan Electronic Mfg. Co. Ltd.
Publication of PL391792A1 publication Critical patent/PL391792A1/pl

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32174—Circuits specially adapted for controlling the RF discharge
    • H01J37/32183—Matching circuits
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03F—AMPLIFIERS
    • H03F3/00—Amplifiers with only discharge tubes or only semiconductor devices as amplifying elements
    • H03F3/189—High-frequency amplifiers, e.g. radio frequency amplifiers
    • H03F3/19—High-frequency amplifiers, e.g. radio frequency amplifiers with semiconductor devices only
    • H03F3/191—Tuned amplifiers
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03F—AMPLIFIERS
    • H03F3/00—Amplifiers with only discharge tubes or only semiconductor devices as amplifying elements
    • H03F3/20—Power amplifiers, e.g. Class B amplifiers, Class C amplifiers
    • H03F3/21—Power amplifiers, e.g. Class B amplifiers, Class C amplifiers with semiconductor devices only
    • H03F3/217—Class D power amplifiers; Switching amplifiers
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03K—PULSE TECHNIQUE
    • H03K7/00—Modulating pulses with a continuously-variable modulating signal
    • H03K7/08—Duration or width modulation ; Duty cycle modulation
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03K—PULSE TECHNIQUE
    • H03K7/00—Modulating pulses with a continuously-variable modulating signal
    • H03K7/10—Combined modulation, e.g. rate modulation and amplitude modulation
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M1/00—Details of apparatus for conversion
    • H02M1/0067—Converter structures employing plural converter units, other than for parallel operation of the units on a single load
    • H02M1/007—Plural converter units in cascade
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
    • H02M7/42—Conversion of dc power input into ac power output without possibility of reversal
    • H02M7/44—Conversion of dc power input into ac power output without possibility of reversal by static converters
    • H02M7/48—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Plasma Technology (AREA)
  • Dc-Dc Converters (AREA)
  • Drying Of Semiconductors (AREA)
PL391792A 2009-08-07 2010-07-09 Sposób sterowania mocą RF modulowaną impulsowo i urządzenie dostarczające moc RF modulowaną impulsowo PL391792A1 (pl)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009184411 2009-08-07

Publications (1)

Publication Number Publication Date
PL391792A1 true PL391792A1 (pl) 2011-02-14

Family

ID=43525307

Family Applications (2)

Application Number Title Priority Date Filing Date
PL10806266T PL2416629T3 (pl) 2009-08-07 2010-03-05 Sposób sterowania impulsowego mocą o wysokiej częstotliwości oraz urządzenie w postaci zasilacza impulsowego o wysokiej częstotliwości
PL391792A PL391792A1 (pl) 2009-08-07 2010-07-09 Sposób sterowania mocą RF modulowaną impulsowo i urządzenie dostarczające moc RF modulowaną impulsowo

Family Applications Before (1)

Application Number Title Priority Date Filing Date
PL10806266T PL2416629T3 (pl) 2009-08-07 2010-03-05 Sposób sterowania impulsowego mocą o wysokiej częstotliwości oraz urządzenie w postaci zasilacza impulsowego o wysokiej częstotliwości

Country Status (10)

Country Link
US (1) US8704607B2 (pl)
EP (1) EP2416629B1 (pl)
JP (1) JP4932942B2 (pl)
KR (1) KR101322539B1 (pl)
CN (1) CN102474971B (pl)
DE (1) DE102010015071B4 (pl)
PL (2) PL2416629T3 (pl)
SG (1) SG175695A1 (pl)
TW (1) TWI475802B (pl)
WO (1) WO2011016266A1 (pl)

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Also Published As

Publication number Publication date
EP2416629A1 (en) 2012-02-08
WO2011016266A1 (ja) 2011-02-10
US8704607B2 (en) 2014-04-22
EP2416629A4 (en) 2014-03-05
DE102010015071B4 (de) 2020-04-30
EP2416629B1 (en) 2021-04-21
CN102474971B (zh) 2015-03-04
TW201114174A (en) 2011-04-16
TWI475802B (zh) 2015-03-01
SG175695A1 (en) 2011-12-29
JP4932942B2 (ja) 2012-05-16
KR20120023603A (ko) 2012-03-13
PL2416629T3 (pl) 2021-11-02
JPWO2011016266A1 (ja) 2013-01-10
DE102010015071A1 (de) 2011-03-03
KR101322539B1 (ko) 2013-10-28
US20110032047A1 (en) 2011-02-10
CN102474971A (zh) 2012-05-23

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