PL2991095T3 - Zespół przepustowy wysokiego napięcia, urządzenie do dyfrakcji elektronów i sposób manipulowania urządzeniem elektrodowym w środowisku próżni - Google Patents

Zespół przepustowy wysokiego napięcia, urządzenie do dyfrakcji elektronów i sposób manipulowania urządzeniem elektrodowym w środowisku próżni

Info

Publication number
PL2991095T3
PL2991095T3 PL14002942T PL14002942T PL2991095T3 PL 2991095 T3 PL2991095 T3 PL 2991095T3 PL 14002942 T PL14002942 T PL 14002942T PL 14002942 T PL14002942 T PL 14002942T PL 2991095 T3 PL2991095 T3 PL 2991095T3
Authority
PL
Poland
Prior art keywords
high voltage
vacuum environment
electron diffraction
diffraction apparatus
feedthrough assembly
Prior art date
Application number
PL14002942T
Other languages
English (en)
Inventor
Julian Hirscht
Original Assignee
MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. filed Critical MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V.
Publication of PL2991095T3 publication Critical patent/PL2991095T3/pl

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/023—Means for mechanically adjusting components not otherwise provided for
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/065—Construction of guns or parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/248—Components associated with high voltage supply
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/261—Details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/295—Electron or ion diffraction tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/063—Electron sources
    • H01J2237/06325—Cold-cathode sources
    • H01J2237/06333—Photo emission
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/063—Electron sources
    • H01J2237/06325—Cold-cathode sources
    • H01J2237/06341—Field emission
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/16—Vessels

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Particle Accelerators (AREA)
PL14002942T 2014-08-25 2014-08-25 Zespół przepustowy wysokiego napięcia, urządzenie do dyfrakcji elektronów i sposób manipulowania urządzeniem elektrodowym w środowisku próżni PL2991095T3 (pl)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP14002942.2A EP2991095B1 (en) 2014-08-25 2014-08-25 High voltage feedthrough assembly, electron diffraction apparatus and method of electrode manipulation in a vacuum environment

Publications (1)

Publication Number Publication Date
PL2991095T3 true PL2991095T3 (pl) 2018-07-31

Family

ID=51421794

Family Applications (2)

Application Number Title Priority Date Filing Date
PL14002942T PL2991095T3 (pl) 2014-08-25 2014-08-25 Zespół przepustowy wysokiego napięcia, urządzenie do dyfrakcji elektronów i sposób manipulowania urządzeniem elektrodowym w środowisku próżni
PL15778205T PL3186818T3 (pl) 2014-08-25 2015-08-14 Zespół przepustowy wysokiego napięcia, elektronowy mikroskop transmisyjny z rozdzielczością czasową i sposób manipulowania elektrodą w środowisku próżniowym

Family Applications After (1)

Application Number Title Priority Date Filing Date
PL15778205T PL3186818T3 (pl) 2014-08-25 2015-08-14 Zespół przepustowy wysokiego napięcia, elektronowy mikroskop transmisyjny z rozdzielczością czasową i sposób manipulowania elektrodą w środowisku próżniowym

Country Status (5)

Country Link
US (1) US10366861B2 (pl)
EP (2) EP2991095B1 (pl)
JP (1) JP6727193B2 (pl)
PL (2) PL2991095T3 (pl)
WO (1) WO2016030004A2 (pl)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
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CN107449792B (zh) * 2017-08-30 2023-05-26 中国科学院西安光学精密机械研究所 一种超紧凑型飞秒电子衍射装置
CN111487453B (zh) * 2020-04-21 2023-04-07 中国科学院电工研究所 一种高压电气信号真空馈通装置及电位计
ES2899769B2 (es) * 2020-09-14 2022-10-28 Consorcio Para La Construccion Equipamiento Y Explotacion Del Laboratorio De Luz De Sincrotron Dispositivo de conexion extraible para la excitacion de muestras con senales electricas de alta frecuencia a alto voltaje en microscopios de electrones
CN114137371B (zh) * 2021-11-30 2023-08-25 江西高强电瓷集团有限公司 一种高压绝缘子检测装置

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CH528404A (de) 1970-06-03 1972-09-30 Klar Paul Gerhard Ing Dr Maschine zum Umpacken von mit Haltefaden und Etikett versehenen Aufgussbeuteln, insbesondere Teebeuteln
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US4008413A (en) 1975-03-03 1977-02-15 Hughes Aircraft Company Compact high voltage feedthrough for gas discharge devices
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IT1299331B1 (it) 1998-01-30 2000-03-16 Ima Spa Sacchetto - filtro di tipo bi-lobo per prodotti da infusione.
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JP3720711B2 (ja) * 2001-01-22 2005-11-30 株式会社日立製作所 電子線光軸補正方法
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JP5462958B2 (ja) * 2010-12-22 2014-04-02 株式会社日立ハイテクノロジーズ 荷電粒子放出銃及び荷電粒子線装置
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JP2016027525A (ja) * 2012-10-16 2016-02-18 株式会社日立ハイテクノロジーズ 荷電粒子線源の冷却機構を具備する荷電粒子線装置及び荷電粒子線源
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Also Published As

Publication number Publication date
US20170229276A1 (en) 2017-08-10
EP3186818B1 (en) 2018-01-31
JP2017529661A (ja) 2017-10-05
EP2991095B1 (en) 2018-01-31
PL3186818T3 (pl) 2018-07-31
WO2016030004A3 (en) 2016-04-21
WO2016030004A2 (en) 2016-03-03
JP6727193B2 (ja) 2020-07-22
EP3186818A2 (en) 2017-07-05
US10366861B2 (en) 2019-07-30
EP2991095A1 (en) 2016-03-02

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