PL2991095T3 - Zespół przepustowy wysokiego napięcia, urządzenie do dyfrakcji elektronów i sposób manipulowania urządzeniem elektrodowym w środowisku próżni - Google Patents
Zespół przepustowy wysokiego napięcia, urządzenie do dyfrakcji elektronów i sposób manipulowania urządzeniem elektrodowym w środowisku próżniInfo
- Publication number
- PL2991095T3 PL2991095T3 PL14002942T PL14002942T PL2991095T3 PL 2991095 T3 PL2991095 T3 PL 2991095T3 PL 14002942 T PL14002942 T PL 14002942T PL 14002942 T PL14002942 T PL 14002942T PL 2991095 T3 PL2991095 T3 PL 2991095T3
- Authority
- PL
- Poland
- Prior art keywords
- high voltage
- vacuum environment
- electron diffraction
- diffraction apparatus
- feedthrough assembly
- Prior art date
Links
- 238000002003 electron diffraction Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/023—Means for mechanically adjusting components not otherwise provided for
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/065—Construction of guns or parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/248—Components associated with high voltage supply
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/261—Details
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/295—Electron or ion diffraction tubes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/06—Sources
- H01J2237/063—Electron sources
- H01J2237/06325—Cold-cathode sources
- H01J2237/06333—Photo emission
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/06—Sources
- H01J2237/063—Electron sources
- H01J2237/06325—Cold-cathode sources
- H01J2237/06341—Field emission
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/16—Vessels
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Sources, Ion Sources (AREA)
- Particle Accelerators (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP14002942.2A EP2991095B1 (en) | 2014-08-25 | 2014-08-25 | High voltage feedthrough assembly, electron diffraction apparatus and method of electrode manipulation in a vacuum environment |
Publications (1)
Publication Number | Publication Date |
---|---|
PL2991095T3 true PL2991095T3 (pl) | 2018-07-31 |
Family
ID=51421794
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PL14002942T PL2991095T3 (pl) | 2014-08-25 | 2014-08-25 | Zespół przepustowy wysokiego napięcia, urządzenie do dyfrakcji elektronów i sposób manipulowania urządzeniem elektrodowym w środowisku próżni |
PL15778205T PL3186818T3 (pl) | 2014-08-25 | 2015-08-14 | Zespół przepustowy wysokiego napięcia, elektronowy mikroskop transmisyjny z rozdzielczością czasową i sposób manipulowania elektrodą w środowisku próżniowym |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PL15778205T PL3186818T3 (pl) | 2014-08-25 | 2015-08-14 | Zespół przepustowy wysokiego napięcia, elektronowy mikroskop transmisyjny z rozdzielczością czasową i sposób manipulowania elektrodą w środowisku próżniowym |
Country Status (5)
Country | Link |
---|---|
US (1) | US10366861B2 (pl) |
EP (2) | EP2991095B1 (pl) |
JP (1) | JP6727193B2 (pl) |
PL (2) | PL2991095T3 (pl) |
WO (1) | WO2016030004A2 (pl) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107449792B (zh) * | 2017-08-30 | 2023-05-26 | 中国科学院西安光学精密机械研究所 | 一种超紧凑型飞秒电子衍射装置 |
CN111487453B (zh) * | 2020-04-21 | 2023-04-07 | 中国科学院电工研究所 | 一种高压电气信号真空馈通装置及电位计 |
ES2899769B2 (es) * | 2020-09-14 | 2022-10-28 | Consorcio Para La Construccion Equipamiento Y Explotacion Del Laboratorio De Luz De Sincrotron | Dispositivo de conexion extraible para la excitacion de muestras con senales electricas de alta frecuencia a alto voltaje en microscopios de electrones |
CN114137371B (zh) * | 2021-11-30 | 2023-08-25 | 江西高强电瓷集团有限公司 | 一种高压绝缘子检测装置 |
Family Cites Families (35)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1281927B (de) | 1966-08-23 | 1968-10-31 | Paul Gerhard Klar Dr Ing | Vorrichtung zum Etikettieren von Verpackungs-beuteln, vorzugsweise Teebeuteln mit Haltefaden |
CH528404A (de) | 1970-06-03 | 1972-09-30 | Klar Paul Gerhard Ing Dr | Maschine zum Umpacken von mit Haltefaden und Etikett versehenen Aufgussbeuteln, insbesondere Teebeuteln |
JPS5184567A (ja) * | 1975-01-22 | 1976-07-23 | Hitachi Ltd | Denkaidenshihoshagatadenshiju |
US4008413A (en) | 1975-03-03 | 1977-02-15 | Hughes Aircraft Company | Compact high voltage feedthrough for gas discharge devices |
US3978363A (en) | 1975-07-22 | 1976-08-31 | Hughes Aircraft Company | High-voltage mechanical support for gas discharge device |
JPS55148357A (en) * | 1979-05-09 | 1980-11-18 | Hitachi Ltd | Electric field emission type electrode gun |
FR2527383A1 (fr) * | 1982-05-24 | 1983-11-25 | Univ Reims Champagne Ardenne | Canon a electrons avec cathode a emission de champ et lentille magnetique |
JPS61131058A (ja) * | 1984-11-29 | 1986-06-18 | Fujitsu Ltd | デ−タ転送制御方式 |
JPH057725Y2 (pl) * | 1985-02-05 | 1993-02-26 | ||
JPH0254853A (ja) * | 1988-08-19 | 1990-02-23 | Jeol Ltd | 荷電粒子線装置 |
EP0383988B1 (de) | 1989-02-20 | 1993-08-11 | Siemens Aktiengesellschaft | Hochspannungsdurchführung für ölgekühlte elektrische Geräte |
IL104608A0 (en) * | 1992-02-13 | 1993-06-10 | Hughes Aircraft Co | Apparatus for programmed plasma etching tool motion to modify solid layer thickness profiles |
JP3324275B2 (ja) * | 1994-04-11 | 2002-09-17 | 日新ハイボルテージ株式会社 | 電子線照射装置 |
US5929373A (en) | 1997-06-23 | 1999-07-27 | Applied Materials, Inc. | High voltage feed through |
IT1299331B1 (it) | 1998-01-30 | 2000-03-16 | Ima Spa | Sacchetto - filtro di tipo bi-lobo per prodotti da infusione. |
JP2001143648A (ja) * | 1999-11-17 | 2001-05-25 | Hitachi Ltd | 光励起電子線源および電子線応用装置 |
US7085351B2 (en) | 2000-10-06 | 2006-08-01 | University Of North Carolina At Chapel Hill | Method and apparatus for controlling electron beam current |
JP3720711B2 (ja) * | 2001-01-22 | 2005-11-30 | 株式会社日立製作所 | 電子線光軸補正方法 |
US6570962B1 (en) * | 2002-01-30 | 2003-05-27 | Koninklijke Philips Electronics N.V. | X-ray tube envelope with integral corona shield |
DE10227703B3 (de) | 2002-06-21 | 2004-02-12 | Forschungszentrum Karlsruhe Gmbh | Durchführung für elektrische Hochspannung durch eine Wand, die einen Umgebungsbereich von einem Prozessbereich trennt |
JP2007531876A (ja) * | 2004-04-02 | 2007-11-08 | カリフォルニア インスティテュート オブ テクノロジー | 超高速光電子顕微鏡のための方法およびシステム |
JP5007034B2 (ja) * | 2005-09-14 | 2012-08-22 | 公益財団法人高輝度光科学研究センター | 光電変換素子及びそれを用いた電子線発生装置 |
JP4385048B2 (ja) * | 2006-12-12 | 2009-12-16 | 株式会社日立ハイテクノロジーズ | 荷電ビーム銃 |
JP5099756B2 (ja) * | 2007-06-18 | 2012-12-19 | Jfeエンジニアリング株式会社 | 電子線発生装置およびその制御方法 |
US8779380B2 (en) * | 2008-06-05 | 2014-07-15 | Hitachi High-Technologies Corporation | Ion beam device |
JP5394763B2 (ja) | 2009-02-04 | 2014-01-22 | 日本電子株式会社 | 冷陰極電子銃の自動入射軸合わせ方法 |
US20120217391A1 (en) * | 2009-11-06 | 2012-08-30 | Hiroyasu Shichi | Charged particle microscope |
WO2011132767A1 (ja) * | 2010-04-22 | 2011-10-27 | 株式会社日立ハイテクノロジーズ | ガス電解電離イオン源、及びイオンビーム装置 |
JP5462958B2 (ja) * | 2010-12-22 | 2014-04-02 | 株式会社日立ハイテクノロジーズ | 荷電粒子放出銃及び荷電粒子線装置 |
FR2987165B1 (fr) | 2012-02-16 | 2014-02-28 | Centre Nat Rech Scient | Dispositif et procede d'emission d'electrons et dispositif comportant un tel systeme d'emission d'electrons |
JP2016027525A (ja) * | 2012-10-16 | 2016-02-18 | 株式会社日立ハイテクノロジーズ | 荷電粒子線源の冷却機構を具備する荷電粒子線装置及び荷電粒子線源 |
US9159517B2 (en) * | 2012-11-30 | 2015-10-13 | Far-Tech, Inc. | Photocathode enhancement system |
US9269527B2 (en) * | 2012-12-17 | 2016-02-23 | Lawrence Livermore National Security, Llc | High-speed multi-frame dynamic transmission electron microscope image acquisition system with arbitrary timing |
DE102012223569B4 (de) * | 2012-12-18 | 2014-08-14 | Siemens Aktiengesellschaft | Röntgenröhre |
JP2014160547A (ja) * | 2013-02-19 | 2014-09-04 | Canon Inc | 放射線発生管及びそれを用いた放射線撮影システム |
-
2014
- 2014-08-25 PL PL14002942T patent/PL2991095T3/pl unknown
- 2014-08-25 EP EP14002942.2A patent/EP2991095B1/en not_active Not-in-force
-
2015
- 2015-08-14 EP EP15778205.3A patent/EP3186818B1/en not_active Not-in-force
- 2015-08-14 WO PCT/EP2015/001685 patent/WO2016030004A2/en active Application Filing
- 2015-08-14 JP JP2017511695A patent/JP6727193B2/ja not_active Expired - Fee Related
- 2015-08-14 PL PL15778205T patent/PL3186818T3/pl unknown
- 2015-08-14 US US15/503,571 patent/US10366861B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US20170229276A1 (en) | 2017-08-10 |
EP3186818B1 (en) | 2018-01-31 |
JP2017529661A (ja) | 2017-10-05 |
EP2991095B1 (en) | 2018-01-31 |
PL3186818T3 (pl) | 2018-07-31 |
WO2016030004A3 (en) | 2016-04-21 |
WO2016030004A2 (en) | 2016-03-03 |
JP6727193B2 (ja) | 2020-07-22 |
EP3186818A2 (en) | 2017-07-05 |
US10366861B2 (en) | 2019-07-30 |
EP2991095A1 (en) | 2016-03-02 |
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