NO904512L - Vindu for infraroedt. - Google Patents
Vindu for infraroedt.Info
- Publication number
- NO904512L NO904512L NO90904512A NO904512A NO904512L NO 904512 L NO904512 L NO 904512L NO 90904512 A NO90904512 A NO 90904512A NO 904512 A NO904512 A NO 904512A NO 904512 L NO904512 L NO 904512L
- Authority
- NO
- Norway
- Prior art keywords
- infrared window
- infrared
- window
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
- C23C16/16—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metal carbonyl compounds
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/48—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation
- C23C16/481—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation by radiant heating of the substrate
Landscapes
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Toxicology (AREA)
- Health & Medical Sciences (AREA)
- Chemical Vapour Deposition (AREA)
- Chemically Coating (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CA002001009A CA2001009C (en) | 1989-10-19 | 1989-10-19 | Infrared window |
Publications (3)
Publication Number | Publication Date |
---|---|
NO904512D0 NO904512D0 (no) | 1990-10-18 |
NO904512L true NO904512L (no) | 1991-04-22 |
NO303231B1 NO303231B1 (no) | 1998-06-15 |
Family
ID=4143356
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NO904512A NO303231B1 (no) | 1989-10-19 | 1990-10-18 | Apparat for metallplettering av et substrat og fremgangsmÕte for nedbryting av metallkarbonyl-gass pÕ et substrat |
Country Status (7)
Country | Link |
---|---|
US (1) | US5145716A (no) |
EP (1) | EP0424183B1 (no) |
JP (1) | JPH0765175B2 (no) |
CA (1) | CA2001009C (no) |
DE (1) | DE69002812T2 (no) |
FI (1) | FI93554C (no) |
NO (1) | NO303231B1 (no) |
Families Citing this family (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2686967B1 (fr) * | 1992-02-04 | 1999-04-09 | France Telecom | Dispositif de refroidissement d'un four de traitement d'un element et four equipe d'un tel dispositif. |
CA2098073C (en) * | 1993-06-09 | 1996-10-08 | Paul Anthony Hynek | Apparatus and method for measuring the density of metal bearing foam |
EP0628706A2 (en) * | 1993-06-10 | 1994-12-14 | Inco Limited | Catalytic conversion of internal combustion engine exhaust gases |
JPH0978239A (ja) * | 1994-08-26 | 1997-03-25 | Kyokuto Giken:Kk | プラスチック成形型の製造方法 |
US5960158A (en) | 1997-07-11 | 1999-09-28 | Ag Associates | Apparatus and method for filtering light in a thermal processing chamber |
US6284051B1 (en) * | 1999-05-27 | 2001-09-04 | Ag Associates (Israel) Ltd. | Cooled window |
US6559424B2 (en) | 2001-01-02 | 2003-05-06 | Mattson Technology, Inc. | Windows used in thermal processing chambers |
ATE451961T1 (de) * | 2003-01-28 | 2010-01-15 | Fluor Corp | Konfiguration und verfahren zur carbonylentfernung |
US20070036913A1 (en) * | 2005-08-10 | 2007-02-15 | Mercuri Robert A | Process and apparatus for the production of engineered catalyst materials formed of non-noble metals |
US20070037701A1 (en) * | 2005-08-10 | 2007-02-15 | Mercuri Robert A | Process and apparatus for the production of catalyst-coated support materials |
US20070036911A1 (en) * | 2005-08-10 | 2007-02-15 | Mercuri Robert A | Process and apparatus for the production of catalyst-coated support materials formed of non-noble metals |
US20070283782A1 (en) * | 2005-08-10 | 2007-12-13 | Mercuri Robert A | Continuous process for the production of nano-scale metal particles |
US20070036689A1 (en) * | 2005-08-10 | 2007-02-15 | Mercuri Robert A | Production of nano-scale metal particles |
US20070286778A1 (en) * | 2005-08-10 | 2007-12-13 | Mercuri Robert A | Apparatus for the continuous production of nano-scale metal particles |
US7794521B2 (en) * | 2005-08-10 | 2010-09-14 | Directa Plus Srl | Production of chain agglomerations of nano-scale metal particles |
US20070036912A1 (en) * | 2005-08-10 | 2007-02-15 | Mercuri Robert A | Continuous process and apparatus for the production of engineered catalyst materials |
US20070034049A1 (en) * | 2005-08-10 | 2007-02-15 | Mercuri Robert A | Continuous process for the use of metal carbonyls for the production of nano-scale metal particles |
US20070037700A1 (en) * | 2005-08-10 | 2007-02-15 | Mercuri Robert A | Continuous process and apparatus for the production of catalyst-coated support materials |
US20070034051A1 (en) * | 2005-08-10 | 2007-02-15 | Mercuri Robert A | Process for the use of metal carbonyls for the production of nano-scale metal particles |
US7972761B2 (en) * | 2006-08-04 | 2011-07-05 | Taiwan Semiconductor Manufacturing Company, Ltd. | Photoresist materials and photolithography process |
CA2618830A1 (en) * | 2005-08-10 | 2007-12-13 | Directa Plus Patent & Technology Limited | Production of nano-scale metal particles |
US20070034050A1 (en) * | 2005-08-10 | 2007-02-15 | Mercuri Robert A | Process for the use of metal carbonyls for the production of nano-scale metal particles formed of non-noble metals |
WO2010056324A1 (en) * | 2008-11-12 | 2010-05-20 | Neos International, Llc | Device and method for cooling chips and leds |
US20110171399A1 (en) * | 2010-01-08 | 2011-07-14 | General Electric Company | Process and apparatus for continuous coating of fibrous materials |
DE102010003431B4 (de) | 2010-03-30 | 2019-05-16 | Seg Automotive Germany Gmbh | Startvorrichtung mit Hohlrad- und Zwischenlagerdämpfung |
EP2425916B1 (en) | 2010-09-01 | 2014-11-12 | Directa Plus S.p.A. | Multiple feeder reactor for the production of nanoparticles of metal |
US10410890B2 (en) * | 2013-06-21 | 2019-09-10 | Applied Materials, Inc. | Light pipe window structure for thermal chamber applications and processes |
US11143459B1 (en) | 2017-04-04 | 2021-10-12 | Mainstream Engineering Corporation | Advanced cooling system using throttled internal cooling passage flow for a window assembly, and methods of fabrication and use thereof |
US10591221B1 (en) | 2017-04-04 | 2020-03-17 | Mainstream Engineering Corporation | Advanced cooling system using throttled internal cooling passage flow for a window assembly, and methods of fabrication and use thereof |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2649754A (en) * | 1949-07-14 | 1953-08-25 | Ohio Commw Eng Co | Apparatus for plating metal objects |
US2867552A (en) * | 1954-06-01 | 1959-01-06 | Ohio Commw Eng Co | Metallized filamentary materials |
US3213827A (en) * | 1962-03-13 | 1965-10-26 | Union Carbide Corp | Apparatus for gas plating bulk material to metallize the same |
US3900646A (en) * | 1973-02-21 | 1975-08-19 | Robert A Clyde | Method of plating metal uniformly on and throughout porous structures |
US4312794A (en) * | 1980-04-02 | 1982-01-26 | Electric Power Research Institute, Inc. | Ultra pure tetrachloroethylene dielectric fluid |
DE3037205C2 (de) * | 1980-10-02 | 1982-12-16 | Messerschmitt-Bölkow-Blohm GmbH, 8000 München | Schutzeinrichtung für optische bzw. IR-Fenster |
GB2124253B (en) * | 1982-07-02 | 1985-02-13 | Electricity Council | Dielectric fluids |
JPS6021381A (ja) * | 1983-07-12 | 1985-02-02 | Kokusai Electric Co Ltd | 光cvd装置の薄膜生成反応炉 |
US4550684A (en) * | 1983-08-11 | 1985-11-05 | Genus, Inc. | Cooled optical window for semiconductor wafer heating |
JPS60209246A (ja) * | 1984-04-02 | 1985-10-21 | Ushio Inc | 光化学反応装置 |
JPS60212220A (ja) * | 1984-04-06 | 1985-10-24 | Ushio Inc | 光化学反応装置 |
JPS60212225A (ja) * | 1984-04-06 | 1985-10-24 | Ushio Inc | 光化学反応装置 |
JPS60212221A (ja) * | 1984-04-06 | 1985-10-24 | Ushio Inc | 光化学反応装置 |
JPS61170573A (ja) * | 1985-01-23 | 1986-08-01 | Canon Inc | 光cvd装置 |
JPS62188781A (ja) * | 1986-02-15 | 1987-08-18 | Canon Inc | 光化学気相成長装置 |
US4749950A (en) * | 1986-03-14 | 1988-06-07 | Farkas Zoltan D | Binary power multiplier for electromagnetic energy |
US4759950A (en) * | 1986-09-26 | 1988-07-26 | Advance Technology Materials, Inc. | Method for metallizing filaments |
JPS63172421A (ja) * | 1987-01-12 | 1988-07-16 | Mitsubishi Electric Corp | 薄膜形成装置 |
US4766665A (en) * | 1987-09-11 | 1988-08-30 | Gte Products Corporation | Method for machining parts made of tungsten and of tungsten with thoria |
-
1989
- 1989-10-19 CA CA002001009A patent/CA2001009C/en not_active Expired - Lifetime
-
1990
- 1990-07-27 US US07/560,859 patent/US5145716A/en not_active Expired - Lifetime
- 1990-08-28 JP JP2226440A patent/JPH0765175B2/ja not_active Expired - Lifetime
- 1990-10-18 FI FI905152A patent/FI93554C/fi active IP Right Grant
- 1990-10-18 NO NO904512A patent/NO303231B1/no not_active IP Right Cessation
- 1990-10-19 EP EP90311534A patent/EP0424183B1/en not_active Expired - Lifetime
- 1990-10-19 DE DE90311534T patent/DE69002812T2/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
FI905152A0 (fi) | 1990-10-18 |
NO303231B1 (no) | 1998-06-15 |
US5145716A (en) | 1992-09-08 |
JPH0765175B2 (ja) | 1995-07-12 |
JPH03134171A (ja) | 1991-06-07 |
CA2001009A1 (en) | 1991-04-19 |
CA2001009C (en) | 2000-11-28 |
FI93554C (fi) | 1995-04-25 |
EP0424183A1 (en) | 1991-04-24 |
DE69002812T2 (de) | 1993-12-09 |
NO904512D0 (no) | 1990-10-18 |
FI93554B (fi) | 1995-01-13 |
EP0424183B1 (en) | 1993-08-18 |
DE69002812D1 (de) | 1993-09-23 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MK1K | Patent expired |