NO20030814D0 - Måling av veggtykkelse i et elektrisk ledende legeme - Google Patents
Måling av veggtykkelse i et elektrisk ledende legemeInfo
- Publication number
- NO20030814D0 NO20030814D0 NO20030814A NO20030814A NO20030814D0 NO 20030814 D0 NO20030814 D0 NO 20030814D0 NO 20030814 A NO20030814 A NO 20030814A NO 20030814 A NO20030814 A NO 20030814A NO 20030814 D0 NO20030814 D0 NO 20030814D0
- Authority
- NO
- Norway
- Prior art keywords
- wall thickness
- probe
- electrically conductive
- signals
- conductive body
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
- G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
- G01B7/10—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Extrusion Moulding Of Plastics Or The Like (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP00307298 | 2000-08-24 | ||
PCT/EP2001/009720 WO2002016863A1 (en) | 2000-08-24 | 2001-08-22 | Measuring the wall thickness of an electrically conductive object |
Publications (2)
Publication Number | Publication Date |
---|---|
NO20030814D0 true NO20030814D0 (no) | 2003-02-21 |
NO20030814L NO20030814L (no) | 2003-04-22 |
Family
ID=8173218
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NO20030814A NO20030814L (no) | 2000-08-24 | 2003-02-21 | Måling av veggtykkelse i et elektrisk ledende legeme |
Country Status (11)
Country | Link |
---|---|
US (1) | US6593737B2 (no) |
EP (1) | EP1311800B1 (no) |
JP (1) | JP2004507721A (no) |
CN (1) | CN1447902A (no) |
AT (1) | ATE433092T1 (no) |
AU (1) | AU2001287701A1 (no) |
CA (1) | CA2420309A1 (no) |
DE (1) | DE60138891D1 (no) |
NO (1) | NO20030814L (no) |
RU (1) | RU2260172C2 (no) |
WO (1) | WO2002016863A1 (no) |
Families Citing this family (34)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6640151B1 (en) | 1999-12-22 | 2003-10-28 | Applied Materials, Inc. | Multi-tool control system, method and medium |
US6708074B1 (en) | 2000-08-11 | 2004-03-16 | Applied Materials, Inc. | Generic interface builder |
US6538435B2 (en) * | 2000-08-24 | 2003-03-25 | Shell Oil Company | Method for detecting an anomaly in an object of electrically conductive material along first and second direction at inspection points |
US6570379B2 (en) * | 2000-08-24 | 2003-05-27 | Shell Oil Company | Method for inspecting an object of electrically conducting material |
US7188142B2 (en) | 2000-11-30 | 2007-03-06 | Applied Materials, Inc. | Dynamic subject information generation in message services of distributed object systems in a semiconductor assembly line facility |
US7698012B2 (en) | 2001-06-19 | 2010-04-13 | Applied Materials, Inc. | Dynamic metrology schemes and sampling schemes for advanced process control in semiconductor processing |
US7160739B2 (en) | 2001-06-19 | 2007-01-09 | Applied Materials, Inc. | Feedback control of a chemical mechanical polishing device providing manipulation of removal rate profiles |
US20030199112A1 (en) | 2002-03-22 | 2003-10-23 | Applied Materials, Inc. | Copper wiring module control |
US6672716B2 (en) * | 2002-04-29 | 2004-01-06 | Xerox Corporation | Multiple portion solid ink stick |
CN1720490B (zh) | 2002-11-15 | 2010-12-08 | 应用材料有限公司 | 用于控制具有多变量输入参数的制造工艺的方法和*** |
ATE365904T1 (de) * | 2002-12-19 | 2007-07-15 | Shell Int Research | Überwachung der wanddicke eines objektes |
JP4718482B2 (ja) * | 2003-12-10 | 2011-07-06 | メッツォ ペーパー インコーポレイテッド | 繊維状ウェブを処理するための装置における稼働パラメータを制御する方法及びその方法を提供するための機器 |
SE527125C2 (sv) * | 2003-12-31 | 2005-12-27 | Abb Ab | Metod och anordning för beröringsfri mätning av tjocklek eller ledningsförmåga med elektromagnetisk induktion |
SE527091C2 (sv) * | 2003-12-31 | 2005-12-20 | Abb Ab | Metod och anordning för beröringsfri mätning av tjocklek och elektriska ledningsförmåga hos ett mätobjekt |
JP4542973B2 (ja) * | 2005-09-15 | 2010-09-15 | 株式会社東芝 | 移動距離計測装置および移動距離計測方法 |
AU2007298994A1 (en) | 2006-09-21 | 2008-03-27 | Shell Internationale Research Maatschappij B.V. | Inspection of an electrically conductive object using eddy currents |
GB2450112B (en) * | 2007-06-12 | 2010-12-08 | Ge Inspection Technologies Ltd | Automatic lift-off compensation for pulsed eddy current inspection |
CN101398298B (zh) * | 2008-11-10 | 2010-09-29 | 清华大学 | 电磁超声测厚方法 |
US20100240900A1 (en) * | 2009-03-23 | 2010-09-23 | Headwaters Technology Innovation, Llc | Dispersible carbon nanospheres and methods for making same |
JP5513821B2 (ja) * | 2009-09-17 | 2014-06-04 | 株式会社荏原製作所 | 渦電流センサ、研磨装置、めっき装置、研磨方法、めっき方法 |
CN101788260B (zh) * | 2010-03-18 | 2011-12-28 | 清华大学 | 一种金属薄膜厚度的电涡流测量方法 |
JP4975142B2 (ja) * | 2010-06-17 | 2012-07-11 | トヨタ自動車株式会社 | 渦流計測用センサ及び渦流計測方法 |
FR2981741B1 (fr) * | 2011-10-20 | 2013-11-29 | Messier Bugatti Dowty | Procede de mesure d'epaisseur d'une couche de revetement par induction de champs magnetiques |
US9091664B2 (en) * | 2012-06-07 | 2015-07-28 | Thomas Krause | Pulsed eddy current sensor for precision measurement at-large lift-offs on metallic surfaces |
US9335151B2 (en) * | 2012-10-26 | 2016-05-10 | Applied Materials, Inc. | Film measurement |
CN104465481A (zh) * | 2013-09-22 | 2015-03-25 | 盛美半导体设备(上海)有限公司 | 晶圆夹盘 |
CN104034250B (zh) * | 2014-06-30 | 2016-08-24 | 山东中科普锐检测技术有限公司 | 涂层测厚仪温度补偿测量方法 |
FR3025306B1 (fr) * | 2014-08-29 | 2020-07-10 | Safran | Procede non-destructif de mesure de l'epaisseur de barriere thermique et/ou de mur en superalliage d'aube creuse de turbomachine |
US10073058B2 (en) | 2015-02-11 | 2018-09-11 | Structural Integrity Associates | Dynamic pulsed eddy current probe |
US10895555B2 (en) | 2015-03-30 | 2021-01-19 | Structural Integrity Associates, Inc. | System for in-line inspection using a dynamic pulsed eddy current probe and method thereof |
CN105509631B (zh) * | 2015-12-07 | 2018-05-18 | 天津因科新创科技有限公司 | 一种脉冲涡流壁厚检测方法和装置 |
CN106197249A (zh) * | 2016-09-30 | 2016-12-07 | 天津华海清科机电科技有限公司 | Cmp过程中铜层厚度在线测量***及其控制方法 |
CN109764800A (zh) * | 2019-01-15 | 2019-05-17 | 西南石油大学 | 一种基于涡流热成像阵列的管道腐蚀壁厚检测*** |
EP4053494A1 (en) | 2021-03-02 | 2022-09-07 | ABB Schweiz AG | Thickness measurement using a pulsed eddy current system |
Family Cites Families (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3555887A (en) | 1967-09-19 | 1971-01-19 | American Mach & Foundry | Apparatus for electroacoustically inspecting tubular members for anomalies using the magnetostrictive effect and for measuring wall thickness |
US3693075A (en) * | 1969-11-15 | 1972-09-19 | Forster F M O | Eddy current system for testing tubes for defects,eccentricity,and wall thickness |
DE2345848C3 (de) * | 1973-09-12 | 1986-06-19 | ELEKTRO-PHYSIK Hans Nix & Dr.-Ing. E. Steingroever GmbH & Co KG, 5000 Köln | Elektromagnetischer Schichtdickenmesser |
US4383218A (en) * | 1978-12-29 | 1983-05-10 | The Boeing Company | Eddy current flow detection including compensation for system variables such as lift-off |
JPS5692804U (no) * | 1979-12-17 | 1981-07-23 | ||
US4492115A (en) * | 1984-04-11 | 1985-01-08 | Pa Incorporated | Method and apparatus for measuring defects in ferromagnetic tubing |
DE3413787A1 (de) | 1984-04-12 | 1985-10-17 | Nukem Gmbh, 6450 Hanau | Verfahren und vorrichtung zur pruefung von elektrisch leitenden gegenstaenden mittels ultraschall |
FR2572175A1 (fr) | 1984-10-24 | 1986-04-25 | Stein Heurtey | Procede et dispositif pour mesurer l'epaisseur de couches metalliques minces deposees sur un support conducteur |
FR2574938B1 (fr) | 1984-12-19 | 1986-12-26 | Snecma | Methode de controle par courants de foucault sans contact et dispositif de mise en oeuvre |
JPS61151402A (ja) * | 1984-12-26 | 1986-07-10 | Nippon Kokan Kk <Nkk> | 差動相互誘導型渦流計測用センサ |
US4644271A (en) * | 1985-02-25 | 1987-02-17 | Ltv Steel Company, Inc. | Method and apparatus for examining a workpiece |
JPS62225947A (ja) * | 1986-03-26 | 1987-10-03 | Kobe Steel Ltd | 渦流測定用プロ−ブ |
US4945305A (en) | 1986-10-09 | 1990-07-31 | Ascension Technology Corporation | Device for quantitatively measuring the relative position and orientation of two bodies in the presence of metals utilizing direct current magnetic fields |
SE451886B (sv) * | 1986-10-10 | 1987-11-02 | Sten Linder | Sett och anordning for beroringsfri metning av storheter hos eller i anslutning till elektriskt ledande material |
JPS63139202A (ja) * | 1986-12-02 | 1988-06-11 | Nippon Telegr & Teleph Corp <Ntt> | 電磁誘導形肉厚測定方法および測定装置 |
US4843320A (en) * | 1987-12-17 | 1989-06-27 | Atlantic Richfield Company | Transient electromagnetic method for detecting corrosion on conductive containers |
US4929898A (en) * | 1987-12-17 | 1990-05-29 | Atlantic Richfield | Transient electromagnetic method for detecting irregularities on conductive containers |
US4849693A (en) * | 1988-02-29 | 1989-07-18 | Battelle Memorial Institute | Automated measurement system employing eddy currents to adjust probe position and determine metal hardness |
US4843317A (en) | 1988-10-18 | 1989-06-27 | Conoco Inc. | Method and apparatus for measuring casing wall thickness using a flux generating coil with radial sensing coils and flux leakage sensing coils |
JPH0654206B2 (ja) * | 1989-09-05 | 1994-07-20 | 株式会社ニレコ | 渦電流距離測定装置 |
US5198764A (en) | 1991-02-22 | 1993-03-30 | Sentech Corp. | Position detector apparatus and method utilizing a transient voltage waveform processor |
US5491409A (en) * | 1992-11-09 | 1996-02-13 | The Babcock & Wilcox Company | Multiple yoke eddy current technique for detection of surface defects on metal components covered with marine growth |
US5569835A (en) | 1994-08-10 | 1996-10-29 | Ultrasonic Arrays, Inc. | Reference wire compensation method and apparatus |
US5592092A (en) | 1994-10-28 | 1997-01-07 | Gas Research Institute | Pipe proximity warning device for accidental damage prevention mounted on the bucket of a backhoe |
US5541510A (en) * | 1995-04-06 | 1996-07-30 | Kaman Instrumentation Corporation | Multi-Parameter eddy current measuring system with parameter compensation technical field |
SE508354C2 (sv) | 1996-07-05 | 1998-09-28 | Asea Atom Ab | Förfarande och anordning för bestämning av skikttjocklek |
US6291992B1 (en) * | 1996-07-12 | 2001-09-18 | Shell Oil Company | Eddy current inspection technique |
NL1005160C2 (nl) * | 1997-01-31 | 1998-08-03 | Roentgen Tech Dienst Bv | Inrichting voor het bepalen van eigenschappen van een elektrisch geleidend voorwerp. |
US6037768A (en) * | 1997-04-02 | 2000-03-14 | Iowa State University Research Foundation, Inc. | Pulsed eddy current inspections and the calibration and display of inspection results |
US6201987B1 (en) | 1998-05-26 | 2001-03-13 | General Electric Company | Error compensation for device tracking systems employing electromagnetic fields |
US6344741B1 (en) * | 2000-06-20 | 2002-02-05 | Her Majesty The Queen As Represented By The Minister Of National Defence In Right Of Canada | Pulsed eddy current method for detection of corrosion in multilayer structures using the lift-off point of intersection |
-
2001
- 2001-08-18 US US09/931,993 patent/US6593737B2/en not_active Expired - Fee Related
- 2001-08-22 WO PCT/EP2001/009720 patent/WO2002016863A1/en active Application Filing
- 2001-08-22 AU AU2001287701A patent/AU2001287701A1/en not_active Abandoned
- 2001-08-22 AT AT01967295T patent/ATE433092T1/de not_active IP Right Cessation
- 2001-08-22 DE DE60138891T patent/DE60138891D1/de not_active Expired - Fee Related
- 2001-08-22 CN CN01814484.5A patent/CN1447902A/zh active Pending
- 2001-08-22 RU RU2003107828/28A patent/RU2260172C2/ru not_active IP Right Cessation
- 2001-08-22 EP EP01967295A patent/EP1311800B1/en not_active Expired - Lifetime
- 2001-08-22 JP JP2002521917A patent/JP2004507721A/ja active Pending
- 2001-08-22 CA CA002420309A patent/CA2420309A1/en not_active Abandoned
-
2003
- 2003-02-21 NO NO20030814A patent/NO20030814L/no not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
JP2004507721A (ja) | 2004-03-11 |
ATE433092T1 (de) | 2009-06-15 |
WO2002016863A1 (en) | 2002-02-28 |
US20020149359A1 (en) | 2002-10-17 |
NO20030814L (no) | 2003-04-22 |
EP1311800B1 (en) | 2009-06-03 |
AU2001287701A1 (en) | 2002-03-04 |
US6593737B2 (en) | 2003-07-15 |
CA2420309A1 (en) | 2002-02-28 |
RU2260172C2 (ru) | 2005-09-10 |
DE60138891D1 (de) | 2009-07-16 |
CN1447902A (zh) | 2003-10-08 |
EP1311800A1 (en) | 2003-05-21 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FC2A | Withdrawal, rejection or dismissal of laid open patent application |