SE399628B - Drivanordning, speciellt for anvendning vid en avsokningsanordning for framstellning av masker for mikrokretsar - Google Patents
Drivanordning, speciellt for anvendning vid en avsokningsanordning for framstellning av masker for mikrokretsarInfo
- Publication number
- SE399628B SE399628B SE7501605A SE7501605A SE399628B SE 399628 B SE399628 B SE 399628B SE 7501605 A SE7501605 A SE 7501605A SE 7501605 A SE7501605 A SE 7501605A SE 399628 B SE399628 B SE 399628B
- Authority
- SE
- Sweden
- Prior art keywords
- scream
- specifically
- drive device
- machine manufacturer
- manufacturer
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70383—Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
- G03F7/704—Scanned exposure beam, e.g. raster-, rotary- and vector scanning
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Apparatuses For Generation Of Mechanical Vibrations (AREA)
- Control Of Position Or Direction (AREA)
- Lasers (AREA)
- Electron Beam Exposure (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
Priority Applications (9)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE7501605A SE399628B (sv) | 1975-02-13 | 1975-02-13 | Drivanordning, speciellt for anvendning vid en avsokningsanordning for framstellning av masker for mikrokretsar |
GB3119/76A GB1532301A (en) | 1975-02-13 | 1976-01-27 | Scanning apparatus |
US05/656,282 US4060816A (en) | 1975-02-13 | 1976-02-09 | Scanning apparatus, for producing masks for micro circuits |
FR7603649A FR2301025A1 (fr) | 1975-02-13 | 1976-02-10 | Appareil de balayage destine en particulier a la fabrication de masques pour micro-circuits |
CH167176A CH607329A5 (sv) | 1975-02-13 | 1976-02-11 | |
CA245,879A CA1060124A (en) | 1975-02-13 | 1976-02-12 | Scanning apparatus, particularly to be used in producing masks for micro circuits |
DE2605659A DE2605659C2 (de) | 1975-02-13 | 1976-02-12 | Belichtungsvorrichtung, insbesondere zur Herstellung von Masken für Mikroschaltungen |
JP51014333A JPS5936820B2 (ja) | 1975-02-13 | 1976-02-12 | 走査装置 |
NO760460A NO141028C (no) | 1975-02-13 | 1976-02-12 | Avsoekningsanordning, saerlig for anvendelse ved fremstilling av masker for elektriske mikrokretser |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE7501605A SE399628B (sv) | 1975-02-13 | 1975-02-13 | Drivanordning, speciellt for anvendning vid en avsokningsanordning for framstellning av masker for mikrokretsar |
Publications (2)
Publication Number | Publication Date |
---|---|
SE7501605L SE7501605L (sv) | 1976-08-16 |
SE399628B true SE399628B (sv) | 1978-02-20 |
Family
ID=20323677
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SE7501605A SE399628B (sv) | 1975-02-13 | 1975-02-13 | Drivanordning, speciellt for anvendning vid en avsokningsanordning for framstellning av masker for mikrokretsar |
Country Status (9)
Country | Link |
---|---|
US (1) | US4060816A (sv) |
JP (1) | JPS5936820B2 (sv) |
CA (1) | CA1060124A (sv) |
CH (1) | CH607329A5 (sv) |
DE (1) | DE2605659C2 (sv) |
FR (1) | FR2301025A1 (sv) |
GB (1) | GB1532301A (sv) |
NO (1) | NO141028C (sv) |
SE (1) | SE399628B (sv) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SE449531B (sv) * | 1980-12-11 | 1987-05-04 | Gerhard Westerberg | Forfarande och anordning for kontroll av mikromasker |
US4608578A (en) * | 1983-11-14 | 1986-08-26 | Matrix Instruments Inc. | Braked media transport for laser scanners |
NL8401476A (nl) * | 1984-05-09 | 1985-12-02 | Philips Nv | Inrichting voor het wisselen van maskers. |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CH436751A (de) * | 1966-05-31 | 1967-05-31 | Contraves Ag | Koordinatograph |
FR2030468A5 (sv) * | 1969-01-29 | 1970-11-13 | Thomson Brandt Csf | |
US3573849A (en) * | 1969-02-04 | 1971-04-06 | Bell Telephone Labor Inc | Pattern generating apparatus |
US3903536A (en) * | 1973-11-19 | 1975-09-02 | Gerhard Westerberg | Device for generating masks for microcircuits |
US3925785A (en) * | 1974-08-09 | 1975-12-09 | Bell Telephone Labor Inc | Pattern generating apparatus |
-
1975
- 1975-02-13 SE SE7501605A patent/SE399628B/sv unknown
-
1976
- 1976-01-27 GB GB3119/76A patent/GB1532301A/en not_active Expired
- 1976-02-09 US US05/656,282 patent/US4060816A/en not_active Expired - Lifetime
- 1976-02-10 FR FR7603649A patent/FR2301025A1/fr active Granted
- 1976-02-11 CH CH167176A patent/CH607329A5/xx not_active IP Right Cessation
- 1976-02-12 DE DE2605659A patent/DE2605659C2/de not_active Expired
- 1976-02-12 JP JP51014333A patent/JPS5936820B2/ja not_active Expired
- 1976-02-12 CA CA245,879A patent/CA1060124A/en not_active Expired
- 1976-02-12 NO NO760460A patent/NO141028C/no unknown
Also Published As
Publication number | Publication date |
---|---|
JPS51135370A (en) | 1976-11-24 |
GB1532301A (en) | 1978-11-15 |
DE2605659C2 (de) | 1984-07-05 |
NO760460L (sv) | 1976-08-16 |
CH607329A5 (sv) | 1978-12-15 |
CA1060124A (en) | 1979-08-07 |
NO141028C (no) | 1979-12-27 |
NO141028B (no) | 1979-09-17 |
FR2301025B1 (sv) | 1979-08-10 |
SE7501605L (sv) | 1976-08-16 |
DE2605659A1 (de) | 1976-08-26 |
US4060816A (en) | 1977-11-29 |
JPS5936820B2 (ja) | 1984-09-06 |
FR2301025A1 (fr) | 1976-09-10 |
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