NL8402801A - In temperatuur gecompenseerde optische druksensor. - Google Patents

In temperatuur gecompenseerde optische druksensor. Download PDF

Info

Publication number: NL8402801A
Authority: NL; Netherlands
Prior art keywords: pressure; waveguide loop; waveguide; membrane; loop
Prior art date: 1983-12-27

Application number

NL8402801A

Other languages

English (en)

Dutch (nl)

Original Assignee

United Technologies Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1983-12-27

Filing date

1984-09-13

Publication date

1985-07-16

1984-09-13 Application filed by United Technologies Corp filed Critical United Technologies Corp

1985-07-16 Publication of NL8402801A publication Critical patent/NL8402801A/nl

Links

230000003287 optical effect Effects 0.000 title claims description 46
239000012528 membrane Substances 0.000 claims description 30
230000008878 coupling Effects 0.000 claims description 8
238000010168 coupling process Methods 0.000 claims description 8
238000005859 coupling reaction Methods 0.000 claims description 8
230000003595 spectral effect Effects 0.000 claims description 7
239000011521 glass Substances 0.000 claims description 3
238000005342 ion exchange Methods 0.000 claims description 3
238000005452 bending Methods 0.000 claims description 2
230000001427 coherent effect Effects 0.000 claims description 2
238000005468 ion implantation Methods 0.000 claims description 2
230000008859 change Effects 0.000 description 10
238000000926 separation method Methods 0.000 description 7
239000000463 material Substances 0.000 description 6
238000009530 blood pressure measurement Methods 0.000 description 3
238000000034 method Methods 0.000 description 3
230000010287 polarization Effects 0.000 description 3
PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
150000001768 cations Chemical class 0.000 description 2
239000004020 conductor Substances 0.000 description 2
230000001419 dependent effect Effects 0.000 description 2
239000003792 electrolyte Substances 0.000 description 2
238000004519 manufacturing process Methods 0.000 description 2
239000013307 optical fiber Substances 0.000 description 2
239000004065 semiconductor Substances 0.000 description 2
241001342895 Chorus Species 0.000 description 1
239000004115 Sodium Silicate Substances 0.000 description 1
239000002253 acid Substances 0.000 description 1
230000009471 action Effects 0.000 description 1
229910052910 alkali metal silicate Inorganic materials 0.000 description 1
XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
229910052782 aluminium Inorganic materials 0.000 description 1
230000003466 anti-cipated effect Effects 0.000 description 1
230000005540 biological transmission Effects 0.000 description 1
HAORKNGNJCEJBX-UHFFFAOYSA-N cyprodinil Chemical compound N=1C(C)=CC(C2CC2)=NC=1NC1=CC=CC=C1 HAORKNGNJCEJBX-UHFFFAOYSA-N 0.000 description 1
230000000694 effects Effects 0.000 description 1
238000002265 electronic spectrum Methods 0.000 description 1
239000000835 fiber Substances 0.000 description 1
239000012530 fluid Substances 0.000 description 1
239000007789 gas Substances 0.000 description 1
239000007788 liquid Substances 0.000 description 1
230000000873 masking effect Effects 0.000 description 1
229910052759 nickel Inorganic materials 0.000 description 1
229920002120 photoresistant polymer Polymers 0.000 description 1
230000000644 propagated effect Effects 0.000 description 1
239000005368 silicate glass Substances 0.000 description 1
239000000377 silicon dioxide Substances 0.000 description 1
235000012239 silicon dioxide Nutrition 0.000 description 1
229910052911 sodium silicate Inorganic materials 0.000 description 1
NTHWMYGWWRZVTN-UHFFFAOYSA-N sodium silicate Chemical compound [Na+].[Na+].[O-][Si]([O-])=O NTHWMYGWWRZVTN-UHFFFAOYSA-N 0.000 description 1
239000000758 substrate Substances 0.000 description 1
239000012780 transparent material Substances 0.000 description 1

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/24—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0076—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
- G01L11/02—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by optical means
- G01L11/025—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by optical means using a pressure-sensitive optical fibre

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Measuring Fluid Pressure (AREA)

NL8402801A 1983-12-27 1984-09-13 In temperatuur gecompenseerde optische druksensor. NL8402801A (nl)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
US56549683		1983-12-27
US06/565,496 US4577100A (en)	1983-12-27	1983-12-27	Temperature compensated optical pressure sensor

Publications (1)

Publication Number	Publication Date
NL8402801A true NL8402801A (nl)	1985-07-16

Family

ID=24258867

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
NL8402801A NL8402801A (nl)	1983-12-27	1984-09-13	In temperatuur gecompenseerde optische druksensor.

Country Status (17)

Country	Link
US (1)	US4577100A (fr)
JP (1)	JPS60142226A (fr)
KR (1)	KR930003546B1 (fr)
AU (1)	AU572189B2 (fr)
BE (1)	BE900681A (fr)
CA (1)	CA1220048A (fr)
CH (1)	CH667735A5 (fr)
DE (1)	DE3432989A1 (fr)
DK (1)	DK461784A (fr)
ES (1)	ES8605896A1 (fr)
FR (1)	FR2557293B1 (fr)
GB (1)	GB2147412B (fr)
IL (1)	IL72874A (fr)
IT (1)	IT1175757B (fr)
NL (1)	NL8402801A (fr)
SE (1)	SE451279B (fr)
ZA (1)	ZA846885B (fr)

Families Citing this family (26)

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US4775214A (en) *	1983-12-21	1988-10-04	Rosemount Inc.	Wavelength coded resonant optical sensor
HU196259B (en) *	1984-09-06	1988-10-28	Almasine Barsi Erzsebet	Optoelktromechanical measuring transducer
GB8427744D0 (en) *	1984-11-02	1996-11-13	Plessey Co Plc	Improvements in or relating to hydrophones
US4782492A (en) *	1986-05-05	1988-11-01	Polaroid Corporation	Thermally controllable optical devices and system
US4733561A (en) *	1986-07-21	1988-03-29	The Foxboro Company	Self-oscillating, optical resonant sensor
US4725728A (en) *	1986-08-13	1988-02-16	The United States Of America As Represented By The Secretary Of The Navy	Fiber optical time delay resonant oscillating strain gauge
US4770492A (en) *	1986-10-28	1988-09-13	Spectran Corporation	Pressure or strain sensitive optical fiber
US5020379A (en) *	1986-10-30	1991-06-04	The Babcock & Wilcox Company	Microbend fiber optic strain gauge
US4794800A (en) *	1987-10-01	1989-01-03	General Dynamics Corporation	Wire sensing and measurement apparatus
US4891511A (en) *	1988-08-31	1990-01-02	The Babcock & Wilcox Co.	Fiber optic microbend sensor with braided fibers
US4904863A (en) *	1988-11-25	1990-02-27	Loral Corporation	Polarimetric optical fiber pressure sensor
US4959539A (en) *	1989-03-20	1990-09-25	The United States Of America As Represented By The Secretary Of The Navy	Flexural disk fiber optic hydrophone
US4988862A (en) *	1989-09-27	1991-01-29	Ford Motor Company	Optical occupant restraint activation sensor
US4996419A (en) *	1989-12-26	1991-02-26	United Technologies Corporation	Distributed multiplexed optical fiber Bragg grating sensor arrangeement
US5258614A (en) *	1991-05-13	1993-11-02	The Babcock & Wilcox Company	Optical fiber loop temperature sensor
US5196694A (en) *	1991-05-13	1993-03-23	The Babcock & Wilcox Company	Temperature compensated self-referenced fiber optic microbend pressure transducer
US5187983A (en) *	1991-09-04	1993-02-23	Universite Du Quebec A Hull	Fiber-optic strain gauge manometer
US5377285A (en) *	1993-02-11	1994-12-27	Honeywell Inc.	Technique for making ultrastable ring resonators and lasers
US5448586A (en) *	1993-09-20	1995-09-05	At&T Corp.	Pumping arrangements for arrays of planar optical devices
US5396805A (en) *	1993-09-30	1995-03-14	Halliburton Company	Force sensor and sensing method using crystal rods and light signals
US6016702A (en) *	1997-09-08	2000-01-25	Cidra Corporation	High sensitivity fiber optic pressure sensor for use in harsh environments
US6522797B1 (en)	1998-09-01	2003-02-18	Input/Output, Inc.	Seismic optical acoustic recursive sensor system
DE10024588A1 (de) *	2000-05-19	2001-11-22	Endress Hauser Gmbh Co	Vorrichtung zur Bestimmung bzw. zur Überwachung des Drucks oder Differenzdrucks zumindest eines Prozeßmediums
DE10114635A1 (de) *	2001-03-23	2002-09-26	Bernhard Trier	Drucksensor
GB2466929A (en) *	2009-01-09	2010-07-14	Smart Fibres Ltd	Pressure sensor device comprising flexible diaphragm with integral optical sensor
GB2558963A (en) *	2017-01-18	2018-07-25	Cirrus Logic Int Semiconductor Ltd	Flexible membrane

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3517560A (en) *	1965-03-23	1970-06-30	North American Rockwell	Accelerometer
US3786681A (en) *	1971-03-04	1974-01-22	Sci Systems Inc	Electromagnetic wave modulation and measurement system and method
US3725809A (en) *	1971-04-05	1973-04-03	Bell Telephone Labor Inc	Dielectric ring lasers using waveguiding
US3949320A (en) *	1974-11-29	1976-04-06	Massachusetts Institute Of Technology	Miniature crystalline laser
US4071753A (en) *	1975-03-31	1978-01-31	Gte Laboratories Incorporated	Transducer for converting acoustic energy directly into optical energy
US4295738A (en) *	1979-08-30	1981-10-20	United Technologies Corporation	Fiber optic strain sensor
DE3142164A1 (de) *	1980-10-27	1982-06-16	Rosemount Engineering Co. Ltd., Bognor Regis, Sussex	Vorrichtung zur messung von druckunterschieden
JPS5819528A (ja) *	1981-07-28	1983-02-04	Shimadzu Corp	光圧力センサ
DE3279130D1 (en) *	1981-12-16	1988-11-24	Polaroid Corp	Optical resonant cavity filters
US4466295A (en) *	1982-09-20	1984-08-21	Trw Inc.	Photoelastic sensing means
US4519252A (en) *	1983-03-21	1985-05-28	Sperry Corporation	Pressure and temperature compensated photoelastic hydrophone
JPS63115214U (fr) *	1987-01-21	1988-07-25
JP3295445B2 (ja) *	1991-12-06	2002-06-24	富士通株式会社	スピンナ及びそれを用いた半導体装置の製造方法
JPH07240360A (ja) *	1994-03-01	1995-09-12	Fujitsu Ltd	薬液塗布装置
JP2977440B2 (ja) *	1994-03-17	1999-11-15	大日本スクリーン製造株式会社	吸引チャック式基板回転処理装置
JP3502959B2 (ja) *	1994-12-19	2004-03-02	日東電工株式会社	吸着固定に用いる多孔質シートおよび該多孔質シートを用いる吸着固定方法
KR19990028074A (ko) *	1997-09-30	1999-04-15	윤종용	반도체장치 제조설비의 척조립체
JPH11145263A (ja) *	1997-11-07	1999-05-28	Tokyo Electron Ltd	処理装置
JP2000254857A (ja) *	1999-01-06	2000-09-19	Tokyo Seimitsu Co Ltd	平面加工装置及び平面加工方法
JP4476595B2 (ja) *	2003-10-23	2010-06-09	太平洋セメント株式会社	真空吸着用治具
JP5291039B2 (ja) *	2010-03-31	2013-09-18	大日本スクリーン製造株式会社	基板保持回転装置および基板処理装置
JP5554617B2 (ja) *	2010-04-12	2014-07-23	株式会社ディスコ	保持テーブル
JP5888935B2 (ja) *	2011-10-28	2016-03-22	株式会社ディスコ	保持テーブル
JP5913162B2 (ja) *	2012-04-04	2016-04-27	東京エレクトロン株式会社	基板保持装置および基板保持方法

1983
- 1983-12-27 US US06/565,496 patent/US4577100A/en not_active Expired - Lifetime
1984
- 1984-07-19 CA CA000459286A patent/CA1220048A/fr not_active Expired
- 1984-09-03 GB GB08422229A patent/GB2147412B/en not_active Expired
- 1984-09-03 ZA ZA846885A patent/ZA846885B/xx unknown
- 1984-09-05 IL IL72874A patent/IL72874A/xx unknown
- 1984-09-07 DE DE19843432989 patent/DE3432989A1/de active Granted
- 1984-09-13 CH CH4370/84A patent/CH667735A5/de not_active IP Right Cessation
- 1984-09-13 AU AU33016/84A patent/AU572189B2/en not_active Ceased
- 1984-09-13 NL NL8402801A patent/NL8402801A/nl not_active Application Discontinuation
- 1984-09-21 ES ES536113A patent/ES8605896A1/es not_active Expired
- 1984-09-26 JP JP59201404A patent/JPS60142226A/ja active Granted
- 1984-09-26 BE BE0/213724A patent/BE900681A/fr not_active IP Right Cessation
- 1984-09-26 SE SE8404824A patent/SE451279B/sv not_active IP Right Cessation
- 1984-09-27 DK DK461784A patent/DK461784A/da not_active Application Discontinuation
- 1984-09-28 KR KR1019840006024A patent/KR930003546B1/ko not_active IP Right Cessation
- 1984-09-28 FR FR8414907A patent/FR2557293B1/fr not_active Expired
- 1984-09-28 IT IT22903/84A patent/IT1175757B/it active

Also Published As

Publication number	Publication date
JPH0319497B2 (fr)	1991-03-15
CH667735A5 (de)	1988-10-31
FR2557293B1 (fr)	1987-03-20
FR2557293A1 (fr)	1985-06-28
IT8422903A0 (it)	1984-09-28
ES536113A0 (es)	1986-04-01
CA1220048A (fr)	1987-04-07
GB8422229D0 (en)	1984-10-10
DK461784D0 (da)	1984-09-27
SE8404824D0 (sv)	1984-09-26
BE900681A (fr)	1985-01-16
IT1175757B (it)	1987-07-15
KR930003546B1 (ko)	1993-05-03
AU572189B2 (en)	1988-05-05
DE3432989C2 (fr)	1993-04-01
US4577100A (en)	1986-03-18
JPS60142226A (ja)	1985-07-27
DE3432989A1 (de)	1985-07-04
IL72874A (en)	1988-09-30
ZA846885B (en)	1985-04-24
DK461784A (da)	1985-06-28
SE8404824L (sv)	1985-06-28
SE451279B (sv)	1987-09-21
AU3301684A (en)	1985-07-04
ES8605896A1 (es)	1986-04-01
GB2147412A (en)	1985-05-09
KR850005083A (ko)	1985-08-21
IL72874A0 (en)	1984-12-31
GB2147412B (en)	1987-06-03

Legal Events

Date	Code	Title
1989-11-01	BA	A request for search or an international-type search has been filed
1989-11-01	BB	A search report has been drawn up
1991-05-01	BV	The patent application has lapsed

Publication	Publication Date	Title
NL8402801A (nl)	1985-07-16	In temperatuur gecompenseerde optische druksensor.
US4775214A (en)	1988-10-04	Wavelength coded resonant optical sensor
De Brabander et al.	1994	Integrated optical ring resonator with micromechanical diaphragms for pressure sensing
US5319435A (en)	1994-06-07	Method and apparatus for measuring the wavelength of spectrally narrow optical signals
US4329058A (en)	1982-05-11	Method and apparatus for a Fabry-Perot multiple beam fringe sensor
US5682237A (en)	1997-10-28	Fiber strain sensor and system including one intrinsic and one extrinsic fabry-perot interferometer
US6925213B2 (en)	2005-08-02	Micromachined fiber optic sensors
US4758087A (en)	1988-07-19	Fiber optic transducer
US9052291B2 (en)	2015-06-09	Optical sensor based on a broadband light source and cascaded waveguide filters
Alvarez-Herrero et al.	2000	High-sensitivity temperature sensor based on overlay on side-polished fibers
US6850654B2 (en)	2005-02-01	Passive thermal compensation of all-fiber Mach-Zehnder interferometer
EP0143583B1 (fr)	1994-08-31	Coupleur modal à fibre optique
Hatta et al.	2008	Ratiometric wavelength monitor based on singlemode‐multimode‐singlemode fiber structure
EP0650585B1 (fr)	1996-12-18	Capteur optique pour determiner pression et temperature
EP1219939A2 (fr)	2002-07-03	Dispositif de contrôle de longueur d'onde
JP3752442B2 (ja)	2006-03-08	絶縁層上シリコン結晶体光学導波マイケルソン干渉式温度センサ
US6298185B1 (en)	2001-10-02	Distributed fiber grating sensing systems using birefringence fiber interferometers for detecting wavelength shifts
JP6491611B2 (ja)	2019-03-27	電界強度測定方法
KR102402542B1 (ko)	2022-05-26	광전압 센싱 장치 및 그 방법
CN117268279B (zh)	2024-05-10	一种应变光纤传感器及其制造方法、集成波导传感器
EP3757524B1 (fr)	2024-06-05	Interféromètre composé à fibre optique multicoeur
Seng et al.	2015	Optical electric field sensor using push-pull for vibration noise reduction
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Righini et al.	1988	Integrated Optical Sensors: State-Of-The-Art And Perspectives
JPS6252808B2 (fr)	1987-11-06