NL7804691A - Ionenimplantatie-inrichting. - Google Patents

Ionenimplantatie-inrichting.

Info

Publication number: NL7804691A
Authority: NL; Netherlands
Prior art keywords: implant device; ion implant; ion; implant
Prior art date: 1977-05-05

Application number

NL7804691A

Other languages

English (en)

Original Assignee

Ibm

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1977-05-05

Filing date

1978-05-02

Publication date

1978-11-07

1977-05-05 Priority claimed from US05/794,276 external-priority patent/US4135097A/en

1977-05-05 Priority claimed from US05/794,275 external-priority patent/US4118630A/en

1978-05-02 Application filed by Ibm filed Critical Ibm

1978-11-07 Publication of NL7804691A publication Critical patent/NL7804691A/nl

Links

239000007943 implant Substances 0.000 title 1

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/026—Means for avoiding or neutralising unwanted electrical charges on tube components
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/244—Detectors; Associated components or circuits therefor
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/24405—Faraday cages
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/245—Detection characterised by the variable being measured
- H01J2237/24507—Intensity, dose or other characteristics of particle beams or electromagnetic radiation

Landscapes

Chemical & Material Sciences (AREA)
Analytical Chemistry (AREA)
Physical Vapour Deposition (AREA)

NL7804691A 1977-05-05 1978-05-02 Ionenimplantatie-inrichting. NL7804691A (nl)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
US05/794,276 US4135097A (en)	1977-05-05	1977-05-05	Ion implantation apparatus for controlling the surface potential of a target surface
US05/794,275 US4118630A (en)	1977-05-05	1977-05-05	Ion implantation apparatus with a cooled structure controlling the surface potential of a target surface

Publications (1)

Publication Number	Publication Date
NL7804691A true NL7804691A (nl)	1978-11-07

Family

ID=27121491

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
NL7804691A NL7804691A (nl)	1977-05-05	1978-05-02	Ionenimplantatie-inrichting.

Country Status (5)

Country	Link
DE (1)	DE2819114C3 (nl)
FR (1)	FR2389998B1 (nl)
GB (1)	GB1584224A (nl)
IT (1)	IT1112625B (nl)
NL (1)	NL7804691A (nl)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
FR2490873A1 (fr) *	1980-09-24	1982-03-26	Varian Associates	Procede et dispositif destines a produire une neutralisation amelioree d'un faisceau d'ions positifs
FR2793951B1 (fr) *	1999-05-21	2001-08-17	Centre Nat Etd Spatiales	Procede et installation de traitement d'un substrat tel qu'un circuit integre par un faisceau focalise de particules electriquement neutres

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US2890342A (en) *	1954-09-29	1959-06-09	Gen Electric	System for charge neutralization
US3313969A (en) *	1966-03-25	1967-04-11	Boeing Co	Charged particle deflecting apparatus having hemispherical electrodes
US3507709A (en) *	1967-09-15	1970-04-21	Hughes Aircraft Co	Method of irradiating dielectriccoated semiconductor bodies with low energy electrons
US3997846A (en) *	1975-06-30	1976-12-14	International Business Machines Corporation	Method and apparatus for electrostatic deflection of high current ion beams in scanning apparatus
US4011449A (en) *	1975-11-05	1977-03-08	Ibm Corporation	Apparatus for measuring the beam current of charged particle beam
US4013891A (en) *	1975-12-15	1977-03-22	Ibm Corporation	Method for varying the diameter of a beam of charged particles

1978
- 1978-03-23 FR FR7809182A patent/FR2389998B1/fr not_active Expired
- 1978-04-07 GB GB13696/78A patent/GB1584224A/en not_active Expired
- 1978-04-28 IT IT22795/78A patent/IT1112625B/it active
- 1978-04-29 DE DE2819114A patent/DE2819114C3/de not_active Expired
- 1978-05-02 NL NL7804691A patent/NL7804691A/nl not_active Application Discontinuation

Also Published As

Publication number	Publication date
DE2819114A1 (de)	1978-11-16
DE2819114C3 (de)	1982-03-04
IT1112625B (it)	1986-01-20
FR2389998B1 (nl)	1981-11-20
GB1584224A (en)	1981-02-11
DE2819114B2 (de)	1981-07-16
IT7822795A0 (it)	1978-04-28
FR2389998A1 (nl)	1978-12-01

Legal Events

Date	Code	Title
1981-03-25	BA	A request for search or an international-type search has been filed
1981-03-25	BB	A search report has been drawn up
1985-01-01	A85	Still pending on 85-01-01
1985-06-03	BC	A request for examination has been filed
1996-02-01	BV	The patent application has lapsed

Publication	Publication Date	Title
NL7806723A (nl)	1978-12-27	Hemodialysatorinrichting.
NL7802260A (nl)	1979-05-30	Halfgeleiderinrichting.
NL7812026A (nl)	1979-06-19	Veldeffektinrichting.
NL7711963A (nl)	1979-05-02	Afscheidingsinrichting.
NL7808105A (nl)	1979-02-06	Ladingsgekoppelde inrichting.
NL7812190A (nl)	1979-06-19	Elektrochemische inrichting.
IT7928361A0 (it)	1979-12-21	Dispositivo di impianto.
NL7807236A (nl)	1979-01-09	Halfgeleiderinrichting.
NL7700879A (nl)	1978-08-01	Halfgeleiderinrichting.
NL7805992A (nl)	1978-12-05	Halfgeleiderinrichting.
NL7802222A (nl)	1978-09-05	Halfgeleiderinrichting.
NL7713758A (nl)	1979-06-15	Halfgeleiderinrichting.
NO782252L (no)	1979-01-03	Tuftenaalanordning.
NL189173C (nl)	1993-02-01	Instelinrichting.
NL185750C (nl)	1990-07-16	Computertomografische inrichting.
NL7801082A (nl)	1978-08-04	Halfgeleiderinrichting.
NL7812462A (nl)	1979-07-03	Halfgeleiderinrichting.
NL7712482A (nl)	1979-05-16	Peilinrichting.
IT7825723A0 (it)	1978-07-14	Dispositivo antiriverberazione.
NL7705729A (nl)	1978-11-28	Halfgeleiderinrichting.
NL7806714A (nl)	1979-01-29	Hef-kantelinrichting.
NL187658C (nl)	1991-12-02	Elektrochemische inrichting.
IT7825676A0 (it)	1978-07-14	Dispositivo di controllo.
NL7709916A (nl)	1979-03-13	Ladingsgekoppelde inrichting.
NL7809703A (nl)	1979-03-27	Bestralingsapparaat.