NL7012388A - - Google Patents
Info
- Publication number
- NL7012388A NL7012388A NL7012388A NL7012388A NL7012388A NL 7012388 A NL7012388 A NL 7012388A NL 7012388 A NL7012388 A NL 7012388A NL 7012388 A NL7012388 A NL 7012388A NL 7012388 A NL7012388 A NL 7012388A
- Authority
- NL
- Netherlands
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
- H01J29/84—Traps for removing or diverting unwanted particles, e.g. negative ions, fringing electrons; Arrangements for velocity or mass selection
- H01J29/845—Traps for removing or diverting unwanted particles, e.g. negative ions, fringing electrons; Arrangements for velocity or mass selection by means of magnetic systems
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Tubes For Measurement (AREA)
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL7012388A NL7012388A (de) | 1970-08-21 | 1970-08-21 | |
DE19712137510 DE2137510C3 (de) | 1970-08-21 | 1971-07-27 | Elektronenoptische Anordnung mit einer Energieselektionsanordnung |
CA120799A CA934075A (en) | 1970-08-21 | 1971-08-18 | Electron-optical device comprising an energy-selection filter |
GB3875371A GB1364930A (en) | 1970-08-21 | 1971-08-18 | Microscope employing a beam of chargedparticles |
FR7130437A FR2104604A5 (de) | 1970-08-21 | 1971-08-20 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL7012388A NL7012388A (de) | 1970-08-21 | 1970-08-21 |
Publications (1)
Publication Number | Publication Date |
---|---|
NL7012388A true NL7012388A (de) | 1972-02-23 |
Family
ID=19810828
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NL7012388A NL7012388A (de) | 1970-08-21 | 1970-08-21 |
Country Status (5)
Country | Link |
---|---|
CA (1) | CA934075A (de) |
DE (1) | DE2137510C3 (de) |
FR (1) | FR2104604A5 (de) |
GB (1) | GB1364930A (de) |
NL (1) | NL7012388A (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0555911A1 (de) * | 1992-02-12 | 1993-08-18 | Koninklijke Philips Electronics N.V. | Verfahren zur Verringerung einer räumlichen energiedispersiven Streuung eines Elektronenstrahlenbündels und eine für den Einsatz eines solchen Verfahrens geeignete Elektronenstrahlvorrichtung |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL7404363A (nl) * | 1974-04-01 | 1975-10-03 | Philips Nv | Elektronenmikroskoop met energieanalysator. |
FR2584234B1 (fr) * | 1985-06-28 | 1988-12-09 | Cameca | Testeur de circuit integre a faisceau d'electrons |
US6184524B1 (en) | 1996-08-07 | 2001-02-06 | Gatan, Inc. | Automated set up of an energy filtering transmission electron microscope |
US5798524A (en) * | 1996-08-07 | 1998-08-25 | Gatan, Inc. | Automated adjustment of an energy filtering transmission electron microscope |
DE69920182T2 (de) * | 1998-12-17 | 2005-02-17 | Fei Co., Hillsboro | Korpuskularstrahloptisches gerät mit auger-elektronendetektion |
JP3757371B2 (ja) * | 1999-07-05 | 2006-03-22 | 日本電子株式会社 | エネルギーフィルタ及びそれを用いた電子顕微鏡 |
US6410924B1 (en) * | 1999-11-16 | 2002-06-25 | Schlumberger Technologies, Inc. | Energy filtered focused ion beam column |
EP1521289B1 (de) * | 2003-09-11 | 2008-06-25 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Einstufiges System zur Reduktion der Energieverteilung eines Teilchenstrahls für ein Teilchenstrahlsystem |
EP1783811A3 (de) | 2005-11-02 | 2008-02-27 | FEI Company | Korrektor zur Korrektion von chromatischen Aberrationen in einem korpuskularoptiachen Apparat |
GB0700754D0 (en) * | 2007-01-15 | 2007-02-21 | Oxford Instr Analytical Ltd | Charged particle analyser and method |
EP2166557A1 (de) | 2008-09-22 | 2010-03-24 | FEI Company | Verfahren zur Berichtigung von Verzerrungen in einer teilchenoptischen Vorrichtung |
EP2325862A1 (de) | 2009-11-18 | 2011-05-25 | Fei Company | Korrektor für axiale Aberrationen einer teilchenoptischen Linse |
EP2511936B1 (de) | 2011-04-13 | 2013-10-02 | Fei Company | Verzerrungsfreie Stigmation eines TEM |
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1970
- 1970-08-21 NL NL7012388A patent/NL7012388A/xx unknown
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1971
- 1971-07-27 DE DE19712137510 patent/DE2137510C3/de not_active Expired
- 1971-08-18 GB GB3875371A patent/GB1364930A/en not_active Expired
- 1971-08-18 CA CA120799A patent/CA934075A/en not_active Expired
- 1971-08-20 FR FR7130437A patent/FR2104604A5/fr not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0555911A1 (de) * | 1992-02-12 | 1993-08-18 | Koninklijke Philips Electronics N.V. | Verfahren zur Verringerung einer räumlichen energiedispersiven Streuung eines Elektronenstrahlenbündels und eine für den Einsatz eines solchen Verfahrens geeignete Elektronenstrahlvorrichtung |
Also Published As
Publication number | Publication date |
---|---|
CA934075A (en) | 1973-09-18 |
DE2137510B2 (de) | 1978-03-16 |
FR2104604A5 (de) | 1972-04-14 |
DE2137510C3 (de) | 1978-11-09 |
DE2137510A1 (de) | 1972-02-24 |
GB1364930A (en) | 1974-08-29 |