NL6913601A - - Google Patents

Info

Publication number
NL6913601A
NL6913601A NL6913601A NL6913601A NL6913601A NL 6913601 A NL6913601 A NL 6913601A NL 6913601 A NL6913601 A NL 6913601A NL 6913601 A NL6913601 A NL 6913601A NL 6913601 A NL6913601 A NL 6913601A
Authority
NL
Netherlands
Application number
NL6913601A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of NL6913601A publication Critical patent/NL6913601A/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J17/00—Gas-filled discharge tubes with solid cathode
    • H01J17/38—Cold-cathode tubes
    • H01J17/40—Cold-cathode tubes with one cathode and one anode, e.g. glow tubes, tuning-indicator glow tubes, voltage-stabiliser tubes, voltage-indicator tubes
    • H01J17/44—Cold-cathode tubes with one cathode and one anode, e.g. glow tubes, tuning-indicator glow tubes, voltage-stabiliser tubes, voltage-indicator tubes having one or more control electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/077—Electron guns using discharge in gases or vapours as electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2893/00—Discharge tubes and lamps
    • H01J2893/0064—Tubes with cold main electrodes (including cold cathodes)
    • H01J2893/0065—Electrode systems
    • H01J2893/0068—Electrode systems electrode assembly with control electrodes, e.g. including a screen
NL6913601A 1968-09-05 1969-09-05 NL6913601A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB42371/68A GB1287262A (en) 1968-09-05 1968-09-05 Improvements in or relating to non-thermionic glow discharge devices

Publications (1)

Publication Number Publication Date
NL6913601A true NL6913601A (en) 1970-03-09

Family

ID=10424129

Family Applications (1)

Application Number Title Priority Date Filing Date
NL6913601A NL6913601A (en) 1968-09-05 1969-09-05

Country Status (5)

Country Link
US (1) US3678334A (en)
DE (1) DE1944882A1 (en)
FR (1) FR2017451A1 (en)
GB (1) GB1287262A (en)
NL (1) NL6913601A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0015391A1 (en) * 1979-03-03 1980-09-17 Vacuumschmelze GmbH Glow discharge lamp for qualitative and quantitative spectral analysis

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT312121B (en) * 1972-10-09 1973-12-27 Boris Grigorievich Sokolov Electron beam system for heat treatment of objects by electron bombardment
NL7407254A (en) * 1974-05-30 1975-12-02 Philips Nv REFILLABLE COLD CATHOD IN A GAS DISCHARGE ELECTRONIC ION CANNON.
GB1454196A (en) * 1974-07-04 1976-10-27 Sokolov B G Electron beam apparatus
FR2294793A1 (en) * 1974-12-20 1976-07-16 Inst Kerntechnik Energiewand BEAM CURRENT CONTROL IN AN ELECTRONIC HARNESS WELDING MACHINE
GB2033704B (en) * 1978-10-30 1982-09-29 Electricity Council Electron discharge heating device
DE3014151C2 (en) * 1980-04-12 1982-11-18 Kernforschungszentrum Karlsruhe Gmbh, 7500 Karlsruhe Pulsed electron beam generator
DE3026164A1 (en) * 1980-07-08 1982-01-28 Europäische Atomgemeinschaft (EURATOM), Kirchberg METHOD AND DEVICE FOR DISCHARGING CHEMICAL TREATMENT OF SENSITIVE WORKPIECES BY USE OF GLIMMENT DISCHARGE
US4475063A (en) * 1981-06-22 1984-10-02 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Hollow cathode apparatus
US4458180A (en) * 1982-02-18 1984-07-03 Elscint Ltd. Plasma electron source for cold-cathode discharge device or the like
US4570106A (en) * 1982-02-18 1986-02-11 Elscint, Inc. Plasma electron source for cold-cathode discharge device or the like
US4684848A (en) * 1983-09-26 1987-08-04 Kaufman & Robinson, Inc. Broad-beam electron source
US4531077A (en) * 1983-12-16 1985-07-23 The United States Of America As Represented By The United States Department Of Energy Ion source with improved primary arc collimation
US4716340A (en) * 1985-12-10 1987-12-29 Denton Vacuum Inc Pre-ionization aided sputter gun
US4841197A (en) * 1986-05-28 1989-06-20 Nihon Shinku Gijutsu Kabushiki Kaisha Double-chamber ion source
US4739214A (en) * 1986-11-13 1988-04-19 Anatech Ltd. Dynamic electron emitter
US4956582A (en) * 1988-04-19 1990-09-11 The Boeing Company Low temperature plasma generator with minimal RF emissions
US5216690A (en) * 1992-03-11 1993-06-01 Hanks Charles W Electron beam gun with grounded shield to prevent arc down
CN107078004B (en) * 2014-11-07 2019-10-15 应用材料公司 For having the device and method of big width flexible base board using electron beam treatment
WO2019016857A1 (en) * 2017-07-18 2019-01-24 株式会社日立ハイテクノロジーズ Charged particle beam device

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3218431A (en) * 1962-12-27 1965-11-16 Gen Electric Self-focusing electron beam apparatus
US3225251A (en) * 1963-01-15 1965-12-21 Martin Marietta Corp Cathode glow display using a single cathode electrode
US3223885A (en) * 1963-04-29 1965-12-14 Gen Electric Stabilization circuit for electron beam apparatus
US3320475A (en) * 1963-04-30 1967-05-16 Gen Electric Nonthermionic hollow cathode electron beam apparatus
US3414702A (en) * 1965-05-28 1968-12-03 Gen Electric Nonthermionic electron beam apparatus
GB1154379A (en) * 1965-12-30 1969-06-04 Atomic Energy Authority Uk Improvements in or relating to Cold-Cathode Discharge Devices
US3377506A (en) * 1966-03-30 1968-04-09 United Aircraft Corp Electromagnetic current control for a hollow cathode
US3411035A (en) * 1966-05-31 1968-11-12 Gen Electric Multi-chamber hollow cathode low voltage electron beam apparatus
GB1209026A (en) * 1966-10-26 1970-10-14 Atomic Energy Authority Uk Improvements in or relating to cold cathode, glow discharge device
US3454827A (en) * 1967-06-16 1969-07-08 United Aircraft Corp Current control for a cold cathode

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0015391A1 (en) * 1979-03-03 1980-09-17 Vacuumschmelze GmbH Glow discharge lamp for qualitative and quantitative spectral analysis

Also Published As

Publication number Publication date
DE1944882A1 (en) 1970-03-12
FR2017451A1 (en) 1970-05-22
GB1287262A (en) 1972-08-31
US3678334A (en) 1972-07-18

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