FR2017451A1 - - Google Patents

Info

Publication number
FR2017451A1
FR2017451A1 FR6930232A FR6930232A FR2017451A1 FR 2017451 A1 FR2017451 A1 FR 2017451A1 FR 6930232 A FR6930232 A FR 6930232A FR 6930232 A FR6930232 A FR 6930232A FR 2017451 A1 FR2017451 A1 FR 2017451A1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
FR6930232A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
UK Atomic Energy Authority
Original Assignee
UK Atomic Energy Authority
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by UK Atomic Energy Authority filed Critical UK Atomic Energy Authority
Publication of FR2017451A1 publication Critical patent/FR2017451A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J17/00—Gas-filled discharge tubes with solid cathode
    • H01J17/38—Cold-cathode tubes
    • H01J17/40—Cold-cathode tubes with one cathode and one anode, e.g. glow tubes, tuning-indicator glow tubes, voltage-stabiliser tubes, voltage-indicator tubes
    • H01J17/44—Cold-cathode tubes with one cathode and one anode, e.g. glow tubes, tuning-indicator glow tubes, voltage-stabiliser tubes, voltage-indicator tubes having one or more control electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/077—Electron guns using discharge in gases or vapours as electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2893/00—Discharge tubes and lamps
    • H01J2893/0064—Tubes with cold main electrodes (including cold cathodes)
    • H01J2893/0065—Electrode systems
    • H01J2893/0068—Electrode systems electrode assembly with control electrodes, e.g. including a screen

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
FR6930232A 1968-09-05 1969-09-04 Withdrawn FR2017451A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB42371/68A GB1287262A (en) 1968-09-05 1968-09-05 Improvements in or relating to non-thermionic glow discharge devices

Publications (1)

Publication Number Publication Date
FR2017451A1 true FR2017451A1 (en) 1970-05-22

Family

ID=10424129

Family Applications (1)

Application Number Title Priority Date Filing Date
FR6930232A Withdrawn FR2017451A1 (en) 1968-09-05 1969-09-04

Country Status (5)

Country Link
US (1) US3678334A (en)
DE (1) DE1944882A1 (en)
FR (1) FR2017451A1 (en)
GB (1) GB1287262A (en)
NL (1) NL6913601A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0015391A1 (en) * 1979-03-03 1980-09-17 Vacuumschmelze GmbH Glow discharge lamp for qualitative and quantitative spectral analysis

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT312121B (en) * 1972-10-09 1973-12-27 Boris Grigorievich Sokolov Electron beam system for heat treatment of objects by electron bombardment
NL7407254A (en) * 1974-05-30 1975-12-02 Philips Nv REFILLABLE COLD CATHOD IN A GAS DISCHARGE ELECTRONIC ION CANNON.
GB1454196A (en) * 1974-07-04 1976-10-27 Sokolov B G Electron beam apparatus
FR2294793A1 (en) * 1974-12-20 1976-07-16 Inst Kerntechnik Energiewand BEAM CURRENT CONTROL IN AN ELECTRONIC HARNESS WELDING MACHINE
GB2033704B (en) * 1978-10-30 1982-09-29 Electricity Council Electron discharge heating device
DE3014151C2 (en) * 1980-04-12 1982-11-18 Kernforschungszentrum Karlsruhe Gmbh, 7500 Karlsruhe Pulsed electron beam generator
DE3026164A1 (en) * 1980-07-08 1982-01-28 Europäische Atomgemeinschaft (EURATOM), Kirchberg METHOD AND DEVICE FOR DISCHARGING CHEMICAL TREATMENT OF SENSITIVE WORKPIECES BY USE OF GLIMMENT DISCHARGE
US4475063A (en) * 1981-06-22 1984-10-02 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Hollow cathode apparatus
US4570106A (en) * 1982-02-18 1986-02-11 Elscint, Inc. Plasma electron source for cold-cathode discharge device or the like
US4458180A (en) * 1982-02-18 1984-07-03 Elscint Ltd. Plasma electron source for cold-cathode discharge device or the like
US4684848A (en) * 1983-09-26 1987-08-04 Kaufman & Robinson, Inc. Broad-beam electron source
US4531077A (en) * 1983-12-16 1985-07-23 The United States Of America As Represented By The United States Department Of Energy Ion source with improved primary arc collimation
US4716340A (en) * 1985-12-10 1987-12-29 Denton Vacuum Inc Pre-ionization aided sputter gun
US4841197A (en) * 1986-05-28 1989-06-20 Nihon Shinku Gijutsu Kabushiki Kaisha Double-chamber ion source
US4739214A (en) * 1986-11-13 1988-04-19 Anatech Ltd. Dynamic electron emitter
US4956582A (en) * 1988-04-19 1990-09-11 The Boeing Company Low temperature plasma generator with minimal RF emissions
US5216690A (en) * 1992-03-11 1993-06-01 Hanks Charles W Electron beam gun with grounded shield to prevent arc down
CN107078004B (en) * 2014-11-07 2019-10-15 应用材料公司 For having the device and method of big width flexible base board using electron beam treatment
WO2019016857A1 (en) * 2017-07-18 2019-01-24 株式会社日立ハイテクノロジーズ Charged particle beam device

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3218431A (en) * 1962-12-27 1965-11-16 Gen Electric Self-focusing electron beam apparatus
US3225251A (en) * 1963-01-15 1965-12-21 Martin Marietta Corp Cathode glow display using a single cathode electrode
US3223885A (en) * 1963-04-29 1965-12-14 Gen Electric Stabilization circuit for electron beam apparatus
US3320475A (en) * 1963-04-30 1967-05-16 Gen Electric Nonthermionic hollow cathode electron beam apparatus
US3414702A (en) * 1965-05-28 1968-12-03 Gen Electric Nonthermionic electron beam apparatus
GB1154379A (en) * 1965-12-30 1969-06-04 Atomic Energy Authority Uk Improvements in or relating to Cold-Cathode Discharge Devices
US3377506A (en) * 1966-03-30 1968-04-09 United Aircraft Corp Electromagnetic current control for a hollow cathode
US3411035A (en) * 1966-05-31 1968-11-12 Gen Electric Multi-chamber hollow cathode low voltage electron beam apparatus
GB1209026A (en) * 1966-10-26 1970-10-14 Atomic Energy Authority Uk Improvements in or relating to cold cathode, glow discharge device
US3454827A (en) * 1967-06-16 1969-07-08 United Aircraft Corp Current control for a cold cathode

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0015391A1 (en) * 1979-03-03 1980-09-17 Vacuumschmelze GmbH Glow discharge lamp for qualitative and quantitative spectral analysis

Also Published As

Publication number Publication date
DE1944882A1 (en) 1970-03-12
US3678334A (en) 1972-07-18
NL6913601A (en) 1970-03-09
GB1287262A (en) 1972-08-31

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Legal Events

Date Code Title Description
ST Notification of lapse