NL6802476A - - Google Patents
Info
- Publication number
- NL6802476A NL6802476A NL6802476A NL6802476A NL6802476A NL 6802476 A NL6802476 A NL 6802476A NL 6802476 A NL6802476 A NL 6802476A NL 6802476 A NL6802476 A NL 6802476A NL 6802476 A NL6802476 A NL 6802476A
- Authority
- NL
- Netherlands
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
- Microscoopes, Condenser (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DEM0072925 | 1967-02-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL6802476A true NL6802476A (xx) | 1968-08-28 |
Family
ID=7314746
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL6802476A NL6802476A (xx) | 1967-02-27 | 1968-02-21 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US3508049A (xx) |
| DE (1) | DE1614126B1 (xx) |
| GB (1) | GB1194012A (xx) |
| NL (1) | NL6802476A (xx) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1238889A (xx) * | 1968-11-26 | 1971-07-14 | ||
| DE2223367C3 (de) * | 1972-05-12 | 1978-11-30 | Max-Planck-Gesellschaft Zur Foerderung Der Wissenschaften E.V., 3400 Goettingen | Mikrostrahlsonde zur quantitativen Erfassung von geladenen Sekundärteilchen |
| JPS5138578B2 (xx) * | 1972-10-23 | 1976-10-22 | ||
| GB1420803A (en) * | 1973-06-28 | 1976-01-14 | Ass Elect Ind | Electron microscopes |
| US4012112A (en) * | 1975-08-25 | 1977-03-15 | Honeywell Inc. | Microscope stage positioning system |
| JPS58161235A (ja) * | 1982-03-19 | 1983-09-24 | Internatl Precision Inc | 走査型電子線装置 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2714678A (en) * | 1950-09-03 | 1955-08-02 | Siemens Ag | Electron microscopes |
| DE1049988B (xx) * | 1953-09-04 | |||
| NL261531A (xx) * | 1960-02-22 | |||
| US3191028A (en) * | 1963-04-22 | 1965-06-22 | Albert V Crewe | Scanning electron microscope |
-
1967
- 1967-02-27 DE DE19671614126 patent/DE1614126B1/de not_active Withdrawn
- 1967-07-27 US US656402A patent/US3508049A/en not_active Expired - Lifetime
- 1967-10-05 GB GB45413/67A patent/GB1194012A/en not_active Expired
-
1968
- 1968-02-21 NL NL6802476A patent/NL6802476A/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| GB1194012A (en) | 1970-06-10 |
| US3508049A (en) | 1970-04-21 |
| DE1614126B1 (de) | 1970-11-19 |