GB1420803A - Electron microscopes - Google Patents
Electron microscopesInfo
- Publication number
- GB1420803A GB1420803A GB3076473A GB3076473A GB1420803A GB 1420803 A GB1420803 A GB 1420803A GB 3076473 A GB3076473 A GB 3076473A GB 3076473 A GB3076473 A GB 3076473A GB 1420803 A GB1420803 A GB 1420803A
- Authority
- GB
- United Kingdom
- Prior art keywords
- sample
- condenser
- june
- detector
- image
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/295—Electron or ion diffraction tubes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/10—Lenses
- H01J37/14—Lenses magnetic
- H01J37/141—Electromagnetic lenses
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/244—Detectors; Associated components or circuits therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/245—Detection characterised by the variable being measured
- H01J2237/24507—Intensity, dose or other characteristics of particle beams or electromagnetic radiation
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
1420803 Electron microscope lenses ASSOCIATED ELECTRICAL INDUSTRIES Ltd 26 June 1974 [28 June 1973] 30764/73 Heading H1D In a transmission electron microscope and X- ray probe analyser the electrons diverging from the image of the tungsten filament thermionic cathode formed by a first condenser lens (11, Fig. 1, not shown) enter from above and are focused on to a sample on support 33, forming an image of the filament source 100 nm in size, by means of the gap field in the upper part of combined second condenser and objective lens 12. Each part comprises a gapped iron magnetic circuit 23, 29 or 24, 30 having annular symmetry and surrounding an energizing winding 31 or 32, the currents being independently adjustable and the radial fields produced in dished iron plate 25 tending to cancel. The condenser component 23 holds four pairs of deflector coils 37 (only two shown) for adjustment of the beam position or for scanning. X-rays emitted by the electron irradiated area of the sample in holder 33 within the lower gap produce a signal from detector 38, its siting in direct line from the sample necessitating enlargement of hole 26. In an alternative embodiment hole 26 is reduced, the X-rays emerging through oblique holes 39 arranged symmetrically, one or more pointing at detector or detectors 38.
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB3076473A GB1420803A (en) | 1973-06-28 | 1973-06-28 | Electron microscopes |
NL7408601A NL7408601A (en) | 1973-06-28 | 1974-06-26 | |
DE2430696A DE2430696A1 (en) | 1973-06-28 | 1974-06-26 | ELECTRON MICROSCOPE |
US483126A US3924126A (en) | 1973-06-28 | 1974-06-26 | Electron microscopes |
JP49073741A JPS5034462A (en) | 1973-06-28 | 1974-06-27 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB3076473A GB1420803A (en) | 1973-06-28 | 1973-06-28 | Electron microscopes |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1420803A true GB1420803A (en) | 1976-01-14 |
Family
ID=10312780
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB3076473A Expired GB1420803A (en) | 1973-06-28 | 1973-06-28 | Electron microscopes |
Country Status (5)
Country | Link |
---|---|
US (1) | US3924126A (en) |
JP (1) | JPS5034462A (en) |
DE (1) | DE2430696A1 (en) |
GB (1) | GB1420803A (en) |
NL (1) | NL7408601A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3201889A1 (en) * | 1981-01-30 | 1982-08-26 | Naamloze Vennootschap Philips' Gloeilampenfabrieken, 5621 Eindhoven | ELECTRON MICROSCOPE WITH X-RAY DETECTOR |
GB2118361A (en) * | 1982-03-19 | 1983-10-26 | Int Precision Inc | Scanning electron beam apparatus |
GB2161018A (en) * | 1984-04-17 | 1986-01-02 | Jeol Ltd | Electron microscope lenses |
GB2238426A (en) * | 1989-11-16 | 1991-05-29 | Jeol Ltd | Electromagnetic lens. |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2541915A1 (en) * | 1975-09-19 | 1977-03-31 | Max Planck Gesellschaft | BODY RAY MICROSCOPE WITH RING ZONE SEGMENT IMAGE |
GB1594465A (en) * | 1977-03-23 | 1981-07-30 | Nat Res Dev | Electron beam apparatus |
US4475044A (en) * | 1979-04-23 | 1984-10-02 | Hitachi, Ltd. | Apparatus for focus-deflecting a charged particle beam |
JPS57118357A (en) * | 1981-01-14 | 1982-07-23 | Jeol Ltd | Objective lens for scan type electron microscope |
JP2582114B2 (en) * | 1988-04-01 | 1997-02-19 | 日本電子株式会社 | X-ray analyzer for electron microscope |
DE3825103A1 (en) * | 1988-07-23 | 1990-01-25 | Zeiss Carl Fa | METHOD FOR ILLUMINATING AN OBJECT IN A TRANSMISSION ELECTRON MICROSCOPE |
US5079428A (en) * | 1989-08-31 | 1992-01-07 | Bell Communications Research, Inc. | Electron microscope with an asymmetrical immersion lens |
US4962306A (en) * | 1989-12-04 | 1990-10-09 | Intenational Business Machines Corporation | Magnetically filtered low loss scanning electron microscopy |
DE602006020899D1 (en) * | 2005-09-06 | 2011-05-05 | Applied Materials Israel Ltd | Particle-optical arrangement with particle-optical component |
TWI275118B (en) * | 2005-12-09 | 2007-03-01 | Li Bing Huan | Sample box of electron microscope for observing a general sample/live cell |
US8080791B2 (en) * | 2008-12-12 | 2011-12-20 | Fei Company | X-ray detector for electron microscope |
US8314386B2 (en) * | 2010-03-26 | 2012-11-20 | Uchicago Argonne, Llc | High collection efficiency X-ray spectrometer system with integrated electron beam stop, electron detector and X-ray detector for use on electron-optical beam lines and microscopes |
DE102010056321B9 (en) * | 2010-12-27 | 2018-03-22 | Carl Zeiss Microscopy Gmbh | Particle beam microscope |
US9520263B2 (en) * | 2013-02-11 | 2016-12-13 | Novaray Medical Inc. | Method and apparatus for generation of a uniform-profile particle beam |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2323328A (en) * | 1940-10-31 | 1943-07-06 | Rca Corp | Projection lens for electron microscopes |
US2418349A (en) * | 1945-12-13 | 1947-04-01 | Rca Corp | Method of and means for correcting for distortion in electron lens systems |
DE1614126B1 (en) * | 1967-02-27 | 1970-11-19 | Max Planck Gesellschaft | Corpuscular beam microscope, in particular electron microscope, with a condenser lens formed by the front of an objective lens and a range diaphragm |
US3514600A (en) * | 1967-11-20 | 1970-05-26 | Parke Davis & Co | Flexible conduit means for connecting an electron microscope to a vacuum pump |
JPS5213713B2 (en) * | 1971-12-15 | 1977-04-16 |
-
1973
- 1973-06-28 GB GB3076473A patent/GB1420803A/en not_active Expired
-
1974
- 1974-06-26 US US483126A patent/US3924126A/en not_active Expired - Lifetime
- 1974-06-26 DE DE2430696A patent/DE2430696A1/en not_active Withdrawn
- 1974-06-26 NL NL7408601A patent/NL7408601A/xx not_active Application Discontinuation
- 1974-06-27 JP JP49073741A patent/JPS5034462A/ja active Pending
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3201889A1 (en) * | 1981-01-30 | 1982-08-26 | Naamloze Vennootschap Philips' Gloeilampenfabrieken, 5621 Eindhoven | ELECTRON MICROSCOPE WITH X-RAY DETECTOR |
GB2118361A (en) * | 1982-03-19 | 1983-10-26 | Int Precision Inc | Scanning electron beam apparatus |
GB2173945A (en) * | 1982-03-19 | 1986-10-22 | Int Precision Inc | Scanning electron beam apparatus |
GB2161018A (en) * | 1984-04-17 | 1986-01-02 | Jeol Ltd | Electron microscope lenses |
GB2161018B (en) * | 1984-04-17 | 1989-06-01 | Jeol Ltd | Transmission-type electron microscope |
GB2238426A (en) * | 1989-11-16 | 1991-05-29 | Jeol Ltd | Electromagnetic lens. |
GB2238426B (en) * | 1989-11-16 | 1994-04-13 | Jeol Ltd | Electromagnetic lens |
Also Published As
Publication number | Publication date |
---|---|
JPS5034462A (en) | 1975-04-02 |
NL7408601A (en) | 1974-12-31 |
DE2430696A1 (en) | 1975-01-16 |
US3924126A (en) | 1975-12-02 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed [section 19, patents act 1949] | ||
PCNP | Patent ceased through non-payment of renewal fee |