NL2028552B1 - Component Processing Apparatus and Method Allowing to Selectively Apply Force to a Component Processed - Google Patents

Component Processing Apparatus and Method Allowing to Selectively Apply Force to a Component Processed Download PDF

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Publication number
NL2028552B1
NL2028552B1 NL2028552A NL2028552A NL2028552B1 NL 2028552 B1 NL2028552 B1 NL 2028552B1 NL 2028552 A NL2028552 A NL 2028552A NL 2028552 A NL2028552 A NL 2028552A NL 2028552 B1 NL2028552 B1 NL 2028552B1
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Netherlands
Prior art keywords
component
actuator
tool part
actuators
force
Prior art date
Application number
NL2028552A
Other languages
Dutch (nl)
Inventor
De Beijer Jan
Hendrikus Lambertus Van Lent Dion
Original Assignee
Boschman Tech Bv
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Filing date
Publication date
Application filed by Boschman Tech Bv filed Critical Boschman Tech Bv
Priority to NL2028552A priority Critical patent/NL2028552B1/en
Priority to TW111123883A priority patent/TW202312317A/en
Priority to PCT/NL2022/050366 priority patent/WO2022271029A1/en
Application granted granted Critical
Publication of NL2028552B1 publication Critical patent/NL2028552B1/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B30—PRESSES
    • B30B—PRESSES IN GENERAL
    • B30B11/00—Presses specially adapted for forming shaped articles from material in particulate or plastic state, e.g. briquetting presses, tabletting presses
    • B30B11/02—Presses specially adapted for forming shaped articles from material in particulate or plastic state, e.g. briquetting presses, tabletting presses using a ram exerting pressure on the material in a moulding space
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B30—PRESSES
    • B30B—PRESSES IN GENERAL
    • B30B1/00—Presses, using a press ram, characterised by the features of the drive therefor, pressure being transmitted directly, or through simple thrust or tension members only, to the press ram or platen
    • B30B1/32—Presses, using a press ram, characterised by the features of the drive therefor, pressure being transmitted directly, or through simple thrust or tension members only, to the press ram or platen by plungers under fluid pressure
    • B30B1/34—Presses, using a press ram, characterised by the features of the drive therefor, pressure being transmitted directly, or through simple thrust or tension members only, to the press ram or platen by plungers under fluid pressure involving a plurality of plungers acting on the platen
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B30—PRESSES
    • B30B—PRESSES IN GENERAL
    • B30B1/00—Presses, using a press ram, characterised by the features of the drive therefor, pressure being transmitted directly, or through simple thrust or tension members only, to the press ram or platen
    • B30B1/32—Presses, using a press ram, characterised by the features of the drive therefor, pressure being transmitted directly, or through simple thrust or tension members only, to the press ram or platen by plungers under fluid pressure
    • B30B1/38—Presses, using a press ram, characterised by the features of the drive therefor, pressure being transmitted directly, or through simple thrust or tension members only, to the press ram or platen by plungers under fluid pressure wherein the plungers are operated by pressure of a gas, e.g. steam, air
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B30—PRESSES
    • B30B—PRESSES IN GENERAL
    • B30B15/00—Details of, or accessories for, presses; Auxiliary measures in connection with pressing
    • B30B15/06—Platens or press rams

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Press Drives And Press Lines (AREA)
  • Devices For Post-Treatments, Processing, Supply, Discharge, And Other Processes (AREA)

Abstract

A component processing apparatus, such as a sintering apparatus or a packaging apparatus for sintering or packaging a component, respectively, comprises a holding tool part for 5 holding a component to be processed; a press tool part configured and arranged for applying a force onto the component held by the holding tool part along a pressure direction A, wherein the press tool part comprises a plurality of actuators for applying the force onto the component, and is configured for selectively actuating at least one actuator ofthe plurality of actuators to allow varying the force applied onto the component.

Description

-1- Component Processing Apparatus and Method Allowing to Selectively Apply Force to a Component Processed
FIELD OF THE INVENTION
[01] The invention relates to a component processing apparatus, such as a sintering apparatus, or a packaging apparatus for sintering or packaging a component. The invention further relates to a corresponding component processing method.
BACKGROUND OF THE INVENTION
[02] Such a component processing apparatus and method can be used for sinter bonding an electronic component on a component carrier or substrate. In particular, in a sintering apparatus, a good bond between the component, such as semiconductor device like a power IC, and its substrate or carrier is achieved by applying pressure onto components. Initially, the devices to be sintered are positioned onto the carrier or substrate together with a sintering material in between. Subsequently, a pressure is applied using, for instance, an actuator exerting a pressure on the associated component and the sintering material. Generally, during the sintering process, the component is heated while pressure is applied. The sintering process allows the creation of a particularly solid bond.
[03] The devices to be processed may concern chips, DBC's, spacers, heatsinks, sensors, power ICs, flip chips, MEMs, etcetera. Generally, for manufacturing, sintering apparatuses are tailored on particular needs of the manufacturer and/or on particular (geometric) characteristics of the product to be sintered. For this reason, usually, a sintering apparatus only allows the processing of components having similar, if not the same, geometric characteristics. The limited variety of products that a usual sintering apparatus can process may be disadvantageous when the apparatus is used for creating prototypes or when it is necessary to produce a vast assortment of different products, i.e. in the scientific and technologic research. For the purpose of creating a large variety of products with the same sintering apparatus, it may be advantageous to have an apparatus configured to process components having a large variety of geometries, i.e. components spanning over a wide range of surfaces.
[04] In a usual sintering apparatus, an actuator, like a piston, is used to transfer a force onto the component so that the pressure needed for sintering is exerted on the component and the sintering material. The magnitude of the applied force may vary depending on the specific sintering application. When the sintering apparatus is used for sintering components having different geometries, the limited range of the forces that the actuator can exert onto the component may generate an erroneous low or high pressure, at the limits of the pressure range that can be provided by the tool, on the component and the sintering material. This may result in an incomplete sintering process 40 and, therefore, in failures and/or malfunctions of the final product. To have a correct
-2- sintering pressure applied in the sintering process one would need to develop and build a specific tool for the purpose, Present apparatuses do not provide much flexibility in pressures that can be applied. For the purpose of exerting the correct pressure on different components with the same sintering apparatus, it would be advantageous to have an apparatus that allows for a very large range of forces to be exerted on the component processed.
[05] In addition, to prevent failures of the processed product, it is very important that the pressure exerted on the component, during any process in which a pressure is applied to a component, is measured or monitored. Especially, when using an actuator for exerting a pressure, it is very important to verify in real time the pressure exerted on a component. Indeed, it is important to avoid that uneven pressure is applied throughout the whole surface of the component to be processed due to a malfunction of one or more actuators or any other cause leading to a failure in force generation. The actuator may, for instance, get stuck during the process sequence. Therefore, it may be very important as well to have the real time pressure exerted available.
[06] Reference is made above to a sintering apparatus and method. However, there are more processes that require applying a pressure to a component when processing the component, such as a packaging apparatus and method. In such apparatus and method a component can packaged by partly surrounding the component with a suitable resin, while, for instance, leaving a surface area uncovered by covering and applying a suitable pressure to that area. The limitations, drawbacks and disadvantages of the sintering apparatus and method described apply equally well to such apparatuses and methods.
SUMMARY OF THE INVENTION
[07] It is an objective of the invention to provide component processing apparatus allowing the processing of components spanning over a wide range of surfaces.
[08] It is another or alternative objective of the invention to provide an apparatus configured to provide a broad range of forces over a wide range of surfaces.
[09] lt is another or alternative objective of the invention to provide a flexible apparatus that can be used for processing a wide variety of components.
[10] lt is another or alternative objective of the invention to provide a flexible apparatus that can be easily converted to be used with different components.
[11] According to an aspect of the invention, at least one of the above objectives is achieved by a component processing apparatus, such as a sintering apparatus or a packaging apparatus for sintering or packaging a component, respectively, comprising a holding tool part for holding a component to be processed, and a press tool part configured and arranged for applying a force onto the component held by the holding tool part along a pressure direction A, wherein the press tool part comprises a plurality 40 of actuators for applying the force onto the component, and is configured for selectively
-3- actuating at least one actuator of the plurality of actuators to allow varying the force applied onto the component.
[12] According to another aspect of the invention at least one of the above objectives is achieved by a component processing method, such as a sintering method or a packaging method for sintering or packaging a component, respectively, the method comprising the steps of: providing a holding tool part for holding a component to be processed; providing a component to be processed onto the holding tool part; providing a press tool part configured and arranged for applying a force onto the component held by the holding tool part along a pressure direction A, wherein the press tool part comprises a plurality of actuators for applying the force onto the component, and is configured for selectively actuating at least one actuator of the plurality of actuators to allow varying the force applied onto the component; applying a force onto the component held by the holding tool part by selectively actuating at least one actuator of the plurality of actuators of the press tool part; and processing the component when applying said force onto the component held by the holding tool part along the pressure direction A.
[13] In an embodiment, the plurality of actuators are symmetrically arranged with respect to one another.
[14] In an embodiment, the plurality of actuators include a central actuator (310.1) located at a central position within the plurality of actuators.
[15] In an embodiment, the plurality of actuators are symmetrically arranged with respect to the central actuator.
[16] In an embodiment, the plurality of actuators are concentrically arranged with respect to one another.
[17] In an embodiment, the plurality of actuators comprises a plurality of pneumatic or hydraulic actuator pistons that are movable in respective cylinders.
[18] In an embodiment, the plurality of actuator pistons comprise concentrically- arranged annularly-shaped actuator pistons.
[19] In an embodiment, a cross-sectional surface area, transverse to the pressure direction A, of the concentrically-arranged annularly-shaped actuator pistons increases from a most inner actuator piston to a most outer actuator piston.
[20] In an embodiment, the press tool part is configured to allow selective blocking of one or more actuator pistons to prevent applying force onto the component by selectively blocked one or more actuator pistons.
[21] In a further embodiment, a return piston is associated with each actuator piston, wherein the return piston acts along the pressure direction A, and is configured and arranged to allow blocking the associated actuator piston and preventing the associated actuator piston from applying force onto the component.
[22] In yet another embodiment, at least one movable insert member is associated with each actuator and is arranged at an intermediate position between the associated 40 actuator and the component to apply force onto the component when the associated
-4- actuator is actuated.
[23] In an embodiment, at least one movable insert member is mechanically connected to the associated actuator.
[24] In another embodiment, the apparatus comprises a press plate configured and arranged to be acted upon by at least a part of the plurality of actuators and to act on the component to apply force on the component
[25] In an embodiment, a positioning actuator, optionally a centrally-located pushpin, configured and arranged for maintaining the component or the press plate in a predetermined position by applying a pressure onto the component or the press plate.
[26] In an embodiment, at least one pressure sensor is configured to measure and/or monitor the force exerted onto the component by the associated actuator.
[27] In an embodiment, at least one pressure sensor is associated to at least one of the plurality of actuators and/or is located in the holding tool part .
[28] In an embodiment, processing the component further includes applying force onto the component according to a predetermined time-dependent function.
[29] In an embodiment, processing the component includes regulating a temperature of the component by providing heat to the component.
[30] In an embodiment, processing the component further includes regulating the temperature of the component based on a time-dependent temperature profile.
[31] In yet another embodiment, processing the component further includes applying force onto the component according to a temperature of the component.
BRIEF DESCRIPTION OF THE DRAWINGS
[32] Further features and advantages of the invention will become apparent from the description of the invention by way of non-limiting and non-exclusive embodiments. These embodiments are not to be construed as limiting the scope of protection. The person skilled in the art will realize that other alternatives and equivalent embodiments of the invention can be conceived and reduced to practice without departing from the scope of the present invention. Embodiments of the invention will be described with reference to the accompanying drawings, in which like or same reference symbols denote like, same or corresponding parts, and in which Figures 1A and 1B schematically represent cross sections of a component processing apparatus according to an embodiment of the invention; Figures 2A and 2B schematically represent cross section views of a press tool part apparatus according to embodiments of the invention; Figure 3A represents a view of a press part tool of a component processing apparatus according to an embodiment of the invention; 40 Figure 3B, 3C, 3D, 3E, 3F and 3G represent cross sections of a press part tool of a
-5. component processing apparatus according to an embodiment of the invention.
DETAILED DESCRIPTION OF EMBODIMENTS
[33] Figure 1A schematically shows a cross section of a component processing apparatus 100 according to an embodiment of the invention. The component processing apparatus 100, such as a sintering apparatus or a packaging apparatus for sintering or packaging a component, respectively, comprises a holding tool part 200 for holding a component 10 to be processed and a press tool part 300 comprising a plurality of actuators 310. The component 10 to be processed, for instance, a power IC 10b provided on its carrier or substrate 10a together with a sintering material in between power IC and substrate, is positioned and placed onto the holding tool part 200. The press tool part 300 is configured and arranged for applying force onto the component 10 held by the holding tool part 200 along a pressure direction A by selectively actuating at least one of the plurality of actuators 310. Actuators 310 are pneumatic actuator pistons slidable mounted in actuator cylinders 304 in the embodiment shown. Actuator pistons 310 are actuated by applying a pressure on them at their top sides, i.e. by filling the associated actuator cylinder 304 with a pressurized gas. In case that more than one actuator piston 310 is actuated, pressure by the pressurized gas is applied to all the actuated actuator pistons. Gas is collectively provided at a common pressure to all actuated actuator pistons . As a result, the force exerted by the press tool part 300 onto the component 10 can be varied within a considerable range, depending on the number, combination and geometry of the actuated actuator pistons 310.
[34] The press tool part 300 additionally comprises at least one movable insert member 320 mechanically connected to each piston 310. The movable insert member 320 is located at an intermediate position between the associated piston 310 and the component 10. When an actuator piston 310 is actuated, it applies a force onto the associated movable insert member(s) 320 to exert force on the component 10 along the direction A.
[35] The press tool part 300 and the holding tool part 200 are generally moved apart from one another before processing the component 10. The component 10 is provided onto the holding tool part 200 and the component carrier or substrate 10a is fixed to a determined position relative to the holding tool part 200. The press tool part 300 and the holding tool part 200 are then moved towards one another to bring them together until the movable insert members 320 and the component 10 to be processed are located one above the other at a predetermined position. When the press tool part 300 and the holding part 200 are at the predetermined position, at least a part of the movable insert members 320 of the press tool part 300 touch the component 10 to be processed, while the remaining part of the movable insert members 320 are arranged to leave a gap between them and the component 10. Alternatively, all movable insert members 320 40 touch the component 10 to be processed or are arranged to leave a gap between them
-6- and the component 10.
[36] Subsequently, a force is applied onto the component 10 held by the holding tool part 200 along a pressure direction A by selectively actuating at least one of the actuator pistons 310. To exert a homogenous and uniform pressure onto the component 10 when multiple actuator pistons and/or inserts are employed, the plurality of actuator pistons 310 and the plurality of movable insert members 320 are symmetrically arranged in the embodiments disclosed.
[37] According to the force needed for processing the component 10 and/or according to the geometry of the component 10, a selected number of actuator pistons 310 are actuated. To prevent that a non-actuated actuator piston exerts a force, e.g. the weight force, on the component 10, at least one return piston 311, arranged in the press tool part 300, is associated to each actuator piston 310. The return piston 311 is movably inserted into a return cylinder 312 and, when actuated, moves along a direction opposed to the direction A to push the associated actuator piston 310 away from the component 10 so as to block the associated actuator piston 310 at a predetermined position within its actuator cylinder 304. The return pistons 311 are actuated by applying a pressure on them at their bottom sides, i.e. by filling the associated cylinder 312 with a pressurized gas When a blocked actuator piston is pushed away from the component 10 by the associated return piston(s) 311, the associated movable insert member(s) 320 follow(s) the actuator piston 310 and move(s) away from the component 10. This prevents that movable insert member(s) 320, associated with a non-actuated actuator piston 310, exert a force onto the component 10.
[38] The actuators 310 of apparatus 100 have been described as pneumatic pistons. However, the person skilled in the art will realize that electric actuators, hydraulic pistons movable in cylinders, or other kinds of actuators can be used in the press tool part 300 of this embodiment and of the other embodiments of this invention.
[39] When the process is a sintering process, as referred to above, the component 10 is generally heated to sinter the sintering material and to achieve a bond between the respective parts being sintered together. Heat can be provided in various ways to the component 10, for instance, by heating elements provided in the holding tool part 200, in the press tool part 300, and/or in the movable insert members 320. Optionally, a time-dependent temperature profile is applied during the sintering process, and the applied pressure can be set as a function of time and/or temperature. Heating may be provided before the pressure is applied to pre-heat the component 10 and increased during the sintering process while the actuated actuators 310 exert a pressure on the component 10. Heat may also be provided by a heating element, not shown, included in the apparatus 100, wherein the heating element is configured to generate heat and arranged to be in thermal contact with the component to be processed for 40 transferring heat to it.
-7-
[40] Figure 1B shows a press tool part 300 and a holding tool part 200, according to an embodiment of the invention. The working principles of the press tool part 300 of figure 1B are the same as the working principles of the press tool part 300 described in relation to figure 1A, to which reference is made. The actuator pistons 310 of figure 1A correspond to the actuator pistons 310.1, 310.2, and 310.3 of figure 1B, wherein peripheral actuator pistons 310.2 and 310.3 are symmetrically arranged with respect to the central actuator piston 310.1. The person skilled in the art will realize that the number of actuator pistons is not limited to the number of pistons shown in figure 1B. Optionally, the plurality of peripheral actuator pistons 310.2 and 310.3 are concentric to each other and to the central actuator piston 310.1, so that actuator piston 310.2 is nested within actuator piston 310.3.
[41] The movable insert members 320 of figure 1A correspond to the movable insert member 320.1, 320.2, and 320.3 of figure 1B associated with actuator pistons 310.1,
310.2, and 310.3, respectively. The working principles of the movable insert members 320.1, 320.2, and 320.3 are the same as the working principles of the movable insert members 320 described in relation to figure 1A, to which reference is made.
[42] In relation to figure 1B, a press plate 230 is located between the press tool part 300 and the component 10 to be processed. The press plate 230 is configured to be acted upon by the selectively actuated movable insert members 320.1, 320.2, and
320.3. When the actuator pistons 310.1, 310.2, and 310.3 are actuated, the movable insert member(s) 320.1, 320.2, and 320.3 act upon the press plate 230 which transfers the force onto the component 10 and the sintering material. The presence of the press plate 230 allows a uniform and homogeneous application of the force onto the component 10. The press plate 230 can be designed based on the geometry of the component so that the same apparatus 100 can be used for different components having a large variety of geometries. Additionally, when it is necessary to heat the component 10 during processing, the press plate 230 can be made of a thermally conductive material.
[43] The total force exerted onto the component 10 depends on the pressure of the gas used to actuate the actuator pistons, on the number and combination of actuated actuator pistons, on the cross-section surface of each piston, etc. The possibility of actuating only a part of the actuator pistons provides also flexibility to the apparatus 100 which can be used for components 10 having a large variety of geometries and/or for different processes needing the application of a wide range of forces.
[44] Figs. 2A and 2B show cross sections of a perspective view of press tool parts 300 configured to be used in the component processing apparatus 100. The press tool parts 300 of figures 2A and 2B can be used as the press tool part 300 described in relation to figures 1A and 1B, to which reference is made. The press tool part 300 of figure 2A comprises a plurality of actuator pistons 310.1, 310.2, 310.3, and 310.4 40 slidably mounted in cylinders 304.1, 304.2, 304.3, and 304.4, respectively. Actuator
-8- pistons 310.1, 310.2, 310.3, and 310.4 are symmetrically arranged with respect to the central actuator piston 301.1.
[45] In relation to figure 2B, the press tool part 300 comprises actuator pistons 301.1, and 301.2, wherein actuator piston 310.2 is concentric to the central actuator piston 310.1. In this embodiment, actuator piston 310.2 is slidably mounted in cylindrical annular-shaped peripheral cylinder 304.2, wherein the actuator cylinder 304.2 is concentric with respect to the actuator cylinder 304.1. The person skilled in the art will realize that the number of actuator pistons shown in figures 2A and 2B does not limit the number of actuator pistons that can be implemented in the press tool parts 300.
[46] Figs. 3A, 3B, 3C, 3D, 3E, 3F, and 3G show a view and cross sections according to different planes, of a press tool part 300 configured to be used in a component processing apparatus. The working principles of the press tool part of figures 3A, 3B, 3C, 3D, 3E, 3F, and 3G are similar to the working principles of the press tool part 300 of figures 1A and 1B to which reference is made. The person skilled in the art will realize that the press tool part 300 of figures 3A, 3B, 3C, 3D, 3E, 3F, and 3G can be used to act directly onto the component, as shown in figure 1A, or onto a press plate 230, as shown in Fig. 1B.
[47] The press tool part 300 comprises a housing 301 including a top part 301.1, a bottom part 301.2 and side parts 301.3 surrounding various internal fixed parts 302. The top part 301.1, the bottom part 301.2, the side parts 301.3, and the internal fixed parts 302 are provided as individual elements fastened together by means of screws, bolts 303 or the like. The position of the press tool part 300, when mounted in the component processing apparatus (not shown), is defined by positioning pins 305 protruding from the top part 301.1 and the bottom part 301.2 of the press tool part 300 and matching positioning pinholes formed in the component processing apparatus (not shown).
[48] The top, bottom, side and internal fixed parts of the press tool part 300 define a plurality of hollow actuator cylinders 304.1, 304.2, and 304.3 in each of which an actuator piston 310.1, 310.2, and 310.3, respectively, is slidably mounted. Each actuator piston 310.1, 310.2, and 310.3 can move within the actuator cylinder 304.1, 304.2, and
304.3, respectively, along a direction A toward the component to be processed.
[49] Each actuator piston 310.1, 310.2, and 310.3 is actuated by providing a pressurized gas to the respective actuator cylinder through at least one associated gas inlet 340.1, located on the outer surface of the housing 301, and conduit 350.1. Actuator pistons 310.2, and 310.3 are symmetrically arranged with respect to a central actuator piston 310.1 defining a centre 306 of the press tool part 300. In particular, actuator pistons 310.2 and 310.3 are concentric to each other and concentric with respect to the central actuator piston 310.1. In this embodiment, actuator pistons 310.2 and 310.3 are slidably mounted in cylindrical annular-shaped peripheral cylinders 304.2, and 304.3, 40 respectively, wherein intermediate actuator cylinder 304.2 is nested within outer actuator
-9- cylinder 304.3. However, the person skilled in the art will realize that the same invention can be carried out with any kind of plurality of pistons symmetrically disposed with respect to the centre 306 of the press tool part 300.
[50] A positioning actuator 330, optionally a pushpin, faces the component to be processed and is located in correspondence to the center 306 of the press tool part 300. The positioning actuator 330, protruding from the bottom part 301.1 of the press tool part 300, is configured, when actuated, to exert a pressure onto the component or onto the press plate so as to maintain the component or the press plate in a fixed position with respect to the press tool part 300.
[51] According to the force needed for processing the component and/or according to the geometry of the component, a selected number of actuator pistons 310.1, 310.2, and 310.3 are actuated. In case that more than one actuator piston 310.1, 310.2, and
310.3 is actuated, pressure by the pressurized gas is applied to all the actuated pistons by injecting the pressurized gas through conduits 350.1 in the associated cylinder 304.1,
304.2, and 304.3, respectively.
[52] The pressurized gas is provided to each actuator piston to be actuated by injecting the gas through the gas inlet(s) 340.1 and the conduit 350.1 associated with the actuator piston to be actuated. Gas is provided at a common pressure, ranging from 1 to 300 bar, to all actuated pistons. Gas pressure can be provided according to a time-dependent pressure profile. In case the process requires the heating of the component, the pressure provided to the actuator pistons can be set as a function of time and/or temperature. The control of the gas flow can be performed electronically by means of a processor, included in the component processing apparatus, configured to remotely control the gas flow or can be manually pre-set before starting to process the component.
[53] At a given common pressure of the pressurized gas provided to the actuator pistons, the force exerted by each actuator piston 310.1, 310.2, and 310.3 depends on its cross-section surface along a plane transverse to the actuation direction A, i.e. on the surface, hereinafter annular surface, of the annulus defined by each piston 310.1, 310.2, and 310.3.
[54] Generally, the annular surface of actuator pistons 310.2 and 310.3 is larger than the annular surface of the central actuator piston 310.1, so that outer pistons generate a larger force than inner pistons at a same pressure of the gas. The actual force, generated by the press tool part 300, is determined by the number and combination of the actuator pistons selected to be actuated and by the pressure of the gas applied to the actuator pistons.
[55] Each actuator piston 310.1, 310.2, and 310.3 is mechanically connected to at least one movable insert member 320.1, 320.2, and 320.3, respectively, located at an intermediate position between the associated piston and the component to be processed 40 and protruding from the bottom part 301.2 of the press tool part 300 toward the
-10 - component to be processed. When actuated, an actuator piston transfers a force to the associated movable insert member(s) which act(s) upon the component or upon the press plate of the holding tool part.
[56] . The total force generated by the press tool plate 300 and transferred to the component through the movable insert members is the sum of the forces generated by each actuated actuator piston. To allow a uniform and homogeneous application of the force onto the component or the press plate, the plurality of movable insert members 320.1, 320.2, and 320.3 are symmetrically arranged with respect to the centre 306 of the press tool part 300.
[57] Usually, the cross-section surface, along a plane transverse to the direction A, of movable insert members and/or the number of movable insert members are inversely related to the cross-section surface, i.e. the annular surface, of the associated piston. Outermost pistons can be associated with a greater number of movable insert members than innermost pistons. In addition, outermost pistons can be associated with movable insert members having a larger cross-section surface than movable insert members associated with innermost pistons. This prevents a single movable insert member, associated with outer pistons and/or with pistons having a large cross-section surface, from damaging the component or the press plate by exerting an excessive pressure thereupon.
[58] In the shown press tool part 300, the cross-section surface of each movable insert member 320.3 associated with the peripheral piston 310.3 is greater than the cross-section surface of each movable insert member 320.2 associated with the peripheral piston 310.2. Similarly, the cross-section surface of each movable insert member 320.2 is greater than the cross-section surface of each movable insert member
320.1. In addition, the number of movable insert members 320.3 can be greater than the number of movable insert members 320.2 and the number of movable insert members 320.2 can be greater than the number of movable insert members 320.1.
[59] To prevent non-actuated pistons from moving along the direction A, e.g. as a result of the force of gravity, at least one return piston 311 fixed to the press tool part 300 is associated with each piston 310.1, 310.2, 310.3. The at least one return piston 311 is configured to block the associated piston at a determined position by pushing the associated piston 310.1, 310.2, 310.3 away from the component to be processed. When a non-actuated actuator piston is moved away from the component by the return piston{s) 311, the associated movable insert members follow the non-actuated piston and move away from the component.
[60] The at least one return piston 311 can move within a cylinder along a direction opposed to A and is actuated by providing a pressurized gas to the respective cylinder through an associated gas inlet 340.2, located on the outer surface of the housing 301, and conduit 350.2. When actuated, the return piston prevents movable insert members 40 associated with a non-actuated piston from exerting a force onto the component or onto
-11 - the press plate. The return piston 311 has been described as a pneumatic piston. However, the person skilled in the art will realize that electric actuators, hydraulic pistons movable in cylinders, or other kinds of actuators can be used in the press tool part 300 to block the associated actuator piston in this embodiment and in the other embodiments of this invention.
[61] The apparatus according to any embodiment of the invention may further comprise a thermostat configured to regulate a temperature of the component and may comprise at least one pressure sensor configured to measure and/or monitor the force exerted onto the component and the sintering material or onto the press plate by the associated actuator 310. The at least one pressure sensor may be associated to each one of the plurality of actuators 310 or may be located in the holding tool part 200.

Claims (21)

-12 - CONCLUSIES-12 - CONCLUSIONS 1. Een componentverwerkingsapparaat (100), zoals een sinterapparaat of een verpakkingsapparaat voor het respectievelijk sinteren of verpakken van een component (10), omvattende: - een vasthoudgereedschapsdeel (200) voor het vasthouden van een te bewerken component (10); - een persgereedschapsdeel (300} dat is geconfigureerd en aangebracht voor het uitoefenen van een kracht op de component die wordt vastgehouden door het vasthoudgereedschapsdeel langs een drukrichting A, waarbij het persgereedschapsdeel omvat een veelvoud van actuatoren (310.1, 310.2, 310.3) voor het uitoefenen van de kracht op de component, en is geconfigureerd om selectief ten minste één actuator van het aantal actuatoren te activeren teneinde het variëren van de op de component uitgeoefende kracht mogelijk te maken.A component processing device (100), such as a sintering device or a packaging device for sintering or packaging a component (10), respectively, comprising: - a holding tool part (200) for holding a component (10) to be processed; - a pressing tool part (300} configured and arranged to apply a force to the component held by the holding tool part along a pressing direction A, the pressing tool part comprising a plurality of actuators (310.1, 310.2, 310.3) for applying a the force on the component, and is configured to selectively activate at least one actuator of the plurality of actuators to allow varying the force applied to the component. 2. Een componentverwerkingswerkwijze, zoals een sinterwerkwijze of een verpakkingswerkwijze voor het respectievelijk sinteren of verpakken van een component (10), waarbij de werkwijze de stappen omvat van: - het verschaffen van een vasthoudgereedschapsdeel (200) voor het vasthouden van een te verwerken component (10); - het verschaffen van een te verwerken component (10) op het vasthoudgereedschapsdeel (200); - het verschaffen van een persgereedschapsdeel (300) dat is geconfigureerd en aangebracht voor het uitoefenen van een kracht op de component die wordt vastgehouden door het vasthoudgereedschapsdeel langs een drukrichting A, waarbij het persgereedschapsdeel omvat een veelvoud van actuatoren (310.1, 310.2, 310.3) voor het uitoefenen van de kracht op de component, en is geconfigureerd om selectief ten minste één actuator van het aantal actuatoren te activeren teneinde het variëren van de op de component uitgeoefende kracht mogelijk te maken - het uitoefenen van een kracht op de component die wordt vastgehouden door het vasthoudgereedschapsdeel door het selectief activeren van ten minste één actuator van het aantal actuatoren van het perswerktuigdeel; en - het verwerken van de component wanneer de genoemde kracht wordt uitgeoefend op de component die wordt vastgehouden door het vasthoudgereedschapsdeel (200) langs de drukrichting A.A component processing method, such as a sintering method or a packaging method for sintering or packaging a component (10), respectively, the method comprising the steps of: - providing a holding tool part (200) for holding a component to be processed ( 10); - providing a component (10) to be processed on the holding tool part (200); - providing a pressing tool part (300) configured and arranged to apply a force to the component held by the holding tool part along a pressing direction A, the pressing tool part comprising a plurality of actuators (310.1, 310.2, 310.3) for applying the force to the component, and is configured to selectively activate at least one actuator of the plurality of actuators to allow varying the force applied to the component - applying a force to the component that is held by the holding tool part by selectively activating at least one actuator of the plurality of actuators of the pressing tool part; and - processing the component when said force is applied to the component held by the holding tool part (200) along the pressing direction A. 3. De inrichting of de werkwijze volgens een van de voorgaande conclusies, waarbij het aantal actuatoren symmetrisch ten opzichte van elkaar is opgesteld. 40 4. De inrichting of de werkwijze volgens een van de voorgaande conclusies,The device or the method according to any one of the preceding claims, wherein the plurality of actuators are arranged symmetrically with respect to each other. 40. The device or the method according to any one of the preceding claims, -13 - waarbij het aantal actuatoren omvat een centrale actuator (310.1) die zich op een centrale positie binnen het aantal actuatoren bevindt.-13 - wherein the plurality of actuators includes a central actuator (310.1) located at a central position within the plurality of actuators. 5. De inrichting of de werkwijze volgens de voorgaande conclusie, waarbij het aantal actuatoren symmetrisch is opgesteld ten opzichte van de centrale actuator.The device or method according to the preceding claim, wherein the plurality of actuators are arranged symmetrically with respect to the central actuator. 6. De inrichting of de werkwijze volgens een van de voorgaande conclusies, waarbij het aantal actuatoren concentrisch ten opzichte van elkaar is opgesteld.The device or method according to any one of the preceding claims, wherein the plurality of actuators are arranged concentrically with respect to each other. 7. De inrichting of de werkwijze volgens een van de voorgaande conclusies, waarbij het aantal actuatoren omvat een aantal pneumatische of hydraulische actuatorzuigers die beweegbaar zijn in respectieve cilinders.The apparatus or method of any preceding claim, wherein the plurality of actuators comprises a plurality of pneumatic or hydraulic actuator pistons movable in respective cylinders. 8. De inrichting of de werkwijze volgens de voorgaande conclusie, waarbij het aantal actuatorzuigers concentrisch opgestelde ringvormige actuatorzuigers omvat.The device or method of the preceding claim, wherein the plurality of actuator pistons comprise concentrically arranged annular actuator pistons. 9. De inrichting of de werkwijze volgens de voorgaande conclusie, waarbij een dwarsdoorsnede-oppervlak, dwars op de drukrichting A, van de concentrisch-opgestelde ringvormig-gevormde actuatorzuigers van de binnenste actuatorzuiger naar de meest buitenste actuatorzuiger toeneemt .The device or the method according to the preceding claim, wherein a cross-sectional area, transverse to the pressure direction A, of the concentrically-arranged annular-shaped actuator pistons increases from the innermost actuator piston to the outermost actuator piston. 10. De inrichting of de werkwijze volgens een van de voorgaande conclusies 7-9, waarbij het persgereedschapsdeel is geconfigureerd om mogelijk te maken het selectief blokkeren van één of meer actuatorzuigers teneinde te voorkomen het uitoefenen van kracht op de component door selectief geblokkeerde één of meer actuatorzuigers.The apparatus or method according to any one of claims 7 to 9, wherein the pressing tool part is configured to enable selective blocking of one or more actuator pistons to prevent force being applied to the component by selectively blocked one or more actuator pistons. 11. De inrichting of de werkwijze volgens een van de voorgaande conclusies 7-10, waarbij een retourzuiger (311) is geassocieerd met elke actuatorzuiger, waarbij de retourzuiger (311) werkt langs de drukrichting A, en is geconfigureerd en aangebracht om mogelijk te maken het blokkeren van de geassocieerde actuatorzuiger en te voorkomen dat de geassocieerde actuatorzuiger kracht uitoefent op de component.The apparatus or the method of any one of claims 7 to 10, wherein a return piston (311) is associated with each actuator piston, the return piston (311) acting along the direction of pressure A, and configured and arranged to allow blocking the associated actuator piston and preventing the associated actuator piston from applying force to the component. 12. De inrichting of de werkwijze volgens een van de voorgaande conclusies, waarbij ten minste één beweegbaar inzetdeel (320) is geassocieerd met elke actuator en is aangebracht op een tussenpositie tussen de bijbehorende actuator en de component om kracht uit te oefenen op de component wanneer de bijbehorende actuator wordt geactueerd.The apparatus or method of any preceding claim, wherein at least one movable insert (320) is associated with each actuator and is disposed at an intermediate position between the associated actuator and the component to apply force to the component when the corresponding actuator is actuated. 13. De inrichting of de werkwijze volgens conclusie 12, waarbij het ten minste ene beweegbare inzetdeel mechanisch is verbonden met de bijbehorende actuator.The apparatus or method of claim 12, wherein the at least one movable insert is mechanically connected to the associated actuator. 4040 -14 --14- 14. De inrichting of de werkwijze volgens een van de voorgaande conclusies, waarbij het apparaat omvat een persplaat (230) die is geconfigureerd en aangebracht om op ingewerkt te worden door ten minste een deel van het aantal actuatoren en om in te werken op de component om kracht uit te oefenen op de component.The apparatus or method of any preceding claim, wherein the apparatus comprises a press plate (230) configured and arranged to be acted upon by at least a portion of the plurality of actuators and to act upon the component to apply force to the component. 15. De inrichting of de werkwijze volgens een van de voorgaande conclusies, verder omvattende een positioneringsactuator (330), optioneel een centraal geplaatste duwpen, geconfigureerd en aangebracht om de component of de persplaat in een vooraf bepaalde positie te houden door het uitoefenen van een druk op de component of de persplaat.The apparatus or method of any one of the preceding claims, further comprising a positioning actuator (330), optionally a centrally located push pin, configured and arranged to hold the component or press plate in a predetermined position by the application of a pressure on the component or press plate. 16. De inrichting of de werkwijze volgens een van de voorgaande conclusies, verder omvattende ten minste één druksensor die is geconfigureerd voor het meten en/of bewaken van de kracht die door de geassocieerde actuator op de component wordt uitgeoefend.The apparatus or method of any preceding claim, further comprising at least one pressure sensor configured to measure and/or monitor the force applied to the component by the associated actuator. 17. De inrichting of de werkwijze volgens conclusie 16, waarbij de ten minste ene druksensor is geassocieerd met ten minste een van het aantal actuatoren en/of zich in het vasthoudgereedschapsdeel bevindt.The apparatus or the method of claim 16, wherein the at least one pressure sensor is associated with at least one of the plurality of actuators and/or is located in the holding tool part. 18. De werkwijze volgens een van de voorgaande conclusies, waarbij het verwerken van de component verder omvat het uitoefenen van kracht op de component volgens een vooraf bepaalde tijdsafhankelijke functie.The method of any preceding claim, wherein processing the component further comprises applying force to the component according to a predetermined time-dependent function. 19. De werkwijze volgens een van de voorgaande conclusies, waarbij het verwerken van de component omvat het regelen van een temperatuur van de component door het verschaffen van warmte aan de component.The method of any preceding claim, wherein processing the component includes controlling a temperature of the component by providing heat to the component. 20. De werkwijze volgens de voorgaande conclusie, waarbij het verwerken van de component verder omvat het regelen van de temperatuur van de component op basis van een tijdsathankelijk temperatuurprofiel.The method of the preceding claim, wherein processing the component further comprises controlling the temperature of the component based on a time-dependent temperature profile. 21. Werkwijze volgens een der voorgaande twee conclusies, waarbij het verwerken van de component voorts omvat het uitoefenen van kracht op de component in overeenstemming met een temperatuur van de component.The method of any one of the preceding two claims, wherein processing the component further comprises applying force to the component in accordance with a temperature of the component.
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