NL2024950A - Method for controlling a manufacturing process and associated apparatuses - Google Patents

Method for controlling a manufacturing process and associated apparatuses Download PDF

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Publication number
NL2024950A
NL2024950A NL2024950A NL2024950A NL2024950A NL 2024950 A NL2024950 A NL 2024950A NL 2024950 A NL2024950 A NL 2024950A NL 2024950 A NL2024950 A NL 2024950A NL 2024950 A NL2024950 A NL 2024950A
Authority
NL
Netherlands
Prior art keywords
substrate
control
optimization
objective
opw
Prior art date
Application number
NL2024950A
Other languages
English (en)
Inventor
Sebastiaan Wildenberg Jochem
Adrianus Dillen Hermanus
Feng Fan
Original Assignee
Asml Netherlands Bv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=70412411&utm_source=***_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=NL2024950(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Asml Netherlands Bv filed Critical Asml Netherlands Bv
Priority to NL2024950A priority Critical patent/NL2024950A/en
Publication of NL2024950A publication Critical patent/NL2024950A/en

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  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Claims (1)

  1. CONCLUSIE:
    1. Een inrichting ingericht voor het belichten van een substraat.
NL2024950A 2020-02-20 2020-02-20 Method for controlling a manufacturing process and associated apparatuses NL2024950A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
NL2024950A NL2024950A (en) 2020-02-20 2020-02-20 Method for controlling a manufacturing process and associated apparatuses

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL2024950A NL2024950A (en) 2020-02-20 2020-02-20 Method for controlling a manufacturing process and associated apparatuses

Publications (1)

Publication Number Publication Date
NL2024950A true NL2024950A (en) 2020-04-24

Family

ID=70412411

Family Applications (1)

Application Number Title Priority Date Filing Date
NL2024950A NL2024950A (en) 2020-02-20 2020-02-20 Method for controlling a manufacturing process and associated apparatuses

Country Status (1)

Country Link
NL (1) NL2024950A (nl)

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