NL2002998A1 - Lithographic apparatus. - Google Patents
Lithographic apparatus. Download PDFInfo
- Publication number
- NL2002998A1 NL2002998A1 NL2002998A NL2002998A NL2002998A1 NL 2002998 A1 NL2002998 A1 NL 2002998A1 NL 2002998 A NL2002998 A NL 2002998A NL 2002998 A NL2002998 A NL 2002998A NL 2002998 A1 NL2002998 A1 NL 2002998A1
- Authority
- NL
- Netherlands
- Prior art keywords
- radiation beam
- substrate
- sensor
- lithographic apparatus
- front side
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B27/00—Photographic printing apparatus
- G03B27/32—Projection printing apparatus, e.g. enlarger, copying camera
- G03B27/52—Details
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70341—Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/707—Chucks, e.g. chucking or un-chucking operations or structural details
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70716—Stages
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/7085—Detection arrangement, e.g. detectors of apparatus alignment possibly mounted on wafers, exposure dose, photo-cleaning flux, stray light, thermal load
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Epidemiology (AREA)
- Public Health (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12931508P | 2008-06-18 | 2008-06-18 | |
US10246708P | 2008-10-03 | 2008-10-03 |
Publications (1)
Publication Number | Publication Date |
---|---|
NL2002998A1 true NL2002998A1 (nl) | 2009-12-22 |
Family
ID=41430884
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NL2002998A NL2002998A1 (nl) | 2008-06-18 | 2009-06-11 | Lithographic apparatus. |
Country Status (6)
Country | Link |
---|---|
US (1) | US8243259B2 (nl) |
JP (1) | JP5066140B2 (nl) |
KR (1) | KR101149841B1 (nl) |
CN (1) | CN101609267B (nl) |
NL (1) | NL2002998A1 (nl) |
TW (1) | TWI411896B (nl) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5477862B2 (ja) * | 2010-09-06 | 2014-04-23 | 株式会社ブイ・テクノロジー | フィルム露光装置及びフィルム露光方法 |
WO2014068116A1 (en) | 2012-11-05 | 2014-05-08 | Asml Netherlands B.V. | Method and apparatus for measuring asymmetry of a microstructure, position measuring method, position measuring apparatus, lithographic apparatus and device manufacturing method |
JP6207671B1 (ja) * | 2016-06-01 | 2017-10-04 | キヤノン株式会社 | パターン形成装置、基板配置方法及び物品の製造方法 |
CN110753861A (zh) * | 2017-06-19 | 2020-02-04 | 奇跃公司 | 动态可致动衍射光学元件 |
WO2020212196A1 (en) * | 2019-04-16 | 2020-10-22 | Asml Netherlands B.V. | Image sensor for immersion lithography |
US11275312B1 (en) | 2020-11-30 | 2022-03-15 | Waymo Llc | Systems and methods for verifying photomask cleanliness |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4509852A (en) * | 1980-10-06 | 1985-04-09 | Werner Tabarelli | Apparatus for the photolithographic manufacture of integrated circuit elements |
JPS587823A (ja) * | 1981-07-06 | 1983-01-17 | Hitachi Ltd | アライメント方法およびその装置 |
JPH0437113A (ja) * | 1990-06-01 | 1992-02-07 | Mitsubishi Electric Corp | 縮小投影露光装置 |
WO1998039689A1 (en) * | 1997-03-07 | 1998-09-11 | Asm Lithography B.V. | Lithographic projection apparatus with off-axis alignment unit |
US20020041377A1 (en) * | 2000-04-25 | 2002-04-11 | Nikon Corporation | Aerial image measurement method and unit, optical properties measurement method and unit, adjustment method of projection optical system, exposure method and apparatus, making method of exposure apparatus, and device manufacturing method |
JP2002014005A (ja) * | 2000-04-25 | 2002-01-18 | Nikon Corp | 空間像計測方法、結像特性計測方法、空間像計測装置及び露光装置 |
JP4579376B2 (ja) * | 2000-06-19 | 2010-11-10 | キヤノン株式会社 | 露光装置およびデバイス製造方法 |
JP2002140005A (ja) | 2000-10-31 | 2002-05-17 | Yoshino Kogyosho Co Ltd | ロール型タックラベルとその製造方法及びタックラベルを貼着したプラスチック製品 |
US7113258B2 (en) * | 2001-01-15 | 2006-09-26 | Asml Netherlands B.V. | Lithographic apparatus |
TW201738932A (zh) * | 2003-10-09 | 2017-11-01 | Nippon Kogaku Kk | 曝光裝置及曝光方法、元件製造方法 |
JP4524601B2 (ja) * | 2003-10-09 | 2010-08-18 | 株式会社ニコン | 露光装置及び露光方法、デバイス製造方法 |
JP4018647B2 (ja) * | 2004-02-09 | 2007-12-05 | キヤノン株式会社 | 投影露光装置およびデバイス製造方法 |
US7463330B2 (en) * | 2004-07-07 | 2008-12-09 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US7333175B2 (en) * | 2004-09-13 | 2008-02-19 | Asml Netherlands, B.V. | Method and system for aligning a first and second marker |
WO2006040890A1 (ja) * | 2004-10-08 | 2006-04-20 | Nikon Corporation | 露光装置及びデバイス製造方法 |
US7652746B2 (en) * | 2005-06-21 | 2010-01-26 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
JP2007103658A (ja) * | 2005-10-04 | 2007-04-19 | Canon Inc | 露光方法および装置ならびにデバイス製造方法 |
US20080062385A1 (en) * | 2006-04-07 | 2008-03-13 | Asml Netherlands B.V. | Method of monitoring polarization performance, polarization measurement assembly, lithographic apparatus and computer program product using the same |
JP2007329289A (ja) * | 2006-06-07 | 2007-12-20 | Canon Inc | 光学部品の製造方法 |
JP2008066572A (ja) * | 2006-09-08 | 2008-03-21 | Canon Inc | マーク基板、マーク基板の製造方法、液浸露光装置およびデバイス製造方法 |
CN100535761C (zh) * | 2007-10-11 | 2009-09-02 | 上海微电子装备有限公司 | 光刻装置的传感器 |
EP2264528A1 (en) * | 2009-06-19 | 2010-12-22 | ASML Netherlands B.V. | Sensor and lithographic apparatus |
-
2009
- 2009-06-11 NL NL2002998A patent/NL2002998A1/nl not_active Application Discontinuation
- 2009-06-12 JP JP2009140853A patent/JP5066140B2/ja not_active Expired - Fee Related
- 2009-06-17 KR KR1020090053944A patent/KR101149841B1/ko not_active IP Right Cessation
- 2009-06-17 US US12/486,458 patent/US8243259B2/en not_active Expired - Fee Related
- 2009-06-18 CN CN2009101475365A patent/CN101609267B/zh not_active Expired - Fee Related
- 2009-06-18 TW TW098120485A patent/TWI411896B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
JP2010004040A (ja) | 2010-01-07 |
TWI411896B (zh) | 2013-10-11 |
US8243259B2 (en) | 2012-08-14 |
JP5066140B2 (ja) | 2012-11-07 |
KR20090131662A (ko) | 2009-12-29 |
CN101609267A (zh) | 2009-12-23 |
TW201007390A (en) | 2010-02-16 |
US20090316122A1 (en) | 2009-12-24 |
CN101609267B (zh) | 2012-01-11 |
KR101149841B1 (ko) | 2012-05-24 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
AD1A | A request for search or an international type search has been filed | ||
WDAP | Patent application withdrawn |
Effective date: 20101118 |