NL169934C - Ionenbron. - Google Patents

Ionenbron.

Info

Publication number
NL169934C
NL169934C NL7703162A NL7703162A NL169934C NL 169934 C NL169934 C NL 169934C NL 7703162 A NL7703162 A NL 7703162A NL 7703162 A NL7703162 A NL 7703162A NL 169934 C NL169934 C NL 169934C
Authority
NL
Netherlands
Prior art keywords
ion source
ion
source
Prior art date
Application number
NL7703162A
Other languages
English (en)
Other versions
NL7703162A (nl
NL169934B (nl
Original Assignee
Georgy Alexandrovich Kovalsky
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Georgy Alexandrovich Kovalsky filed Critical Georgy Alexandrovich Kovalsky
Priority to NL7703162A priority Critical patent/NL169934C/nl
Publication of NL7703162A publication Critical patent/NL7703162A/nl
Publication of NL169934B publication Critical patent/NL169934B/nl
Application granted granted Critical
Publication of NL169934C publication Critical patent/NL169934C/nl

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/08—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
NL7703162A 1977-03-23 1977-03-23 Ionenbron. NL169934C (nl)

Priority Applications (1)

Application Number Priority Date Filing Date Title
NL7703162A NL169934C (nl) 1977-03-23 1977-03-23 Ionenbron.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7703162A NL169934C (nl) 1977-03-23 1977-03-23 Ionenbron.

Publications (3)

Publication Number Publication Date
NL7703162A NL7703162A (nl) 1978-09-26
NL169934B NL169934B (nl) 1982-04-01
NL169934C true NL169934C (nl) 1982-09-01

Family

ID=19828218

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7703162A NL169934C (nl) 1977-03-23 1977-03-23 Ionenbron.

Country Status (1)

Country Link
NL (1) NL169934C (nl)

Also Published As

Publication number Publication date
NL7703162A (nl) 1978-09-26
NL169934B (nl) 1982-04-01

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Legal Events

Date Code Title Description
V1 Lapsed because of non-payment of the annual fee