NL1002246A1 - Door een laser bestraald electronenkanon. - Google Patents
Door een laser bestraald electronenkanon.Info
- Publication number
- NL1002246A1 NL1002246A1 NL1002246A NL1002246A NL1002246A1 NL 1002246 A1 NL1002246 A1 NL 1002246A1 NL 1002246 A NL1002246 A NL 1002246A NL 1002246 A NL1002246 A NL 1002246A NL 1002246 A1 NL1002246 A1 NL 1002246A1
- Authority
- NL
- Netherlands
- Prior art keywords
- gun
- irradiated
- laser
- electron
- electron gun
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/34—Photo-emissive cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/06—Sources
- H01J2237/063—Electron sources
- H01J2237/06325—Cold-cathode sources
- H01J2237/06333—Photo emission
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1825895 | 1995-02-06 | ||
JP7018258A JPH08212952A (ja) | 1995-02-06 | 1995-02-06 | レーザー照射型電子銃 |
Publications (2)
Publication Number | Publication Date |
---|---|
NL1002246A1 true NL1002246A1 (nl) | 1996-08-06 |
NL1002246C2 NL1002246C2 (nl) | 1998-07-13 |
Family
ID=11966663
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NL1002246A NL1002246C2 (nl) | 1995-02-06 | 1996-02-05 | Door een laser bestraald electronenkanon. |
Country Status (3)
Country | Link |
---|---|
JP (1) | JPH08212952A (nl) |
DE (1) | DE19604272A1 (nl) |
NL (1) | NL1002246C2 (nl) |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10113064B4 (de) * | 2001-03-15 | 2004-05-19 | Lzh Laserzentrum Hannover E.V. | Verfahren und Einrichtung zur Erzeugung von UV-Strahlung, insbesondere von EUV-Strahlung |
DE10245052A1 (de) * | 2002-09-26 | 2004-04-08 | Leo Elektronenmikroskopie Gmbh | Elektronenstrahlquelle und elektronenoptischer Apparat mit einer solchen |
DE10255767A1 (de) * | 2002-11-28 | 2004-06-17 | Von Ardenne Anlagentechnik Gmbh | Verfahren zum Erzeugen eines Elektronenstrahls und Elektronenstrahlerzeuger |
US7786452B2 (en) | 2003-10-16 | 2010-08-31 | Alis Corporation | Ion sources, systems and methods |
US7557360B2 (en) | 2003-10-16 | 2009-07-07 | Alis Corporation | Ion sources, systems and methods |
US7554097B2 (en) | 2003-10-16 | 2009-06-30 | Alis Corporation | Ion sources, systems and methods |
US7554096B2 (en) | 2003-10-16 | 2009-06-30 | Alis Corporation | Ion sources, systems and methods |
US7786451B2 (en) | 2003-10-16 | 2010-08-31 | Alis Corporation | Ion sources, systems and methods |
US9159527B2 (en) | 2003-10-16 | 2015-10-13 | Carl Zeiss Microscopy, Llc | Systems and methods for a gas field ionization source |
US7557359B2 (en) | 2003-10-16 | 2009-07-07 | Alis Corporation | Ion sources, systems and methods |
US7557358B2 (en) | 2003-10-16 | 2009-07-07 | Alis Corporation | Ion sources, systems and methods |
US7557361B2 (en) | 2003-10-16 | 2009-07-07 | Alis Corporation | Ion sources, systems and methods |
US8110814B2 (en) | 2003-10-16 | 2012-02-07 | Alis Corporation | Ion sources, systems and methods |
JP2007531876A (ja) * | 2004-04-02 | 2007-11-08 | カリフォルニア インスティテュート オブ テクノロジー | 超高速光電子顕微鏡のための方法およびシステム |
JP5071699B2 (ja) * | 2004-11-04 | 2012-11-14 | 独立行政法人物質・材料研究機構 | フォトカソード型電子線源の陰極先端部への高量子効率物質の局所被覆装置 |
US7804068B2 (en) | 2006-11-15 | 2010-09-28 | Alis Corporation | Determining dopant information |
EP2301058A1 (en) * | 2008-06-13 | 2011-03-30 | Carl Zeiss NTS, LLC. | Ion sources, systems and methods |
WO2012114521A1 (ja) | 2011-02-25 | 2012-08-30 | 株式会社Param | 電子銃および電子ビーム装置 |
FR2987165B1 (fr) | 2012-02-16 | 2014-02-28 | Centre Nat Rech Scient | Dispositif et procede d'emission d'electrons et dispositif comportant un tel systeme d'emission d'electrons |
JP5709922B2 (ja) * | 2013-03-29 | 2015-04-30 | 株式会社Param | 電子銃および電子ビーム装置 |
DE102013108603B4 (de) * | 2013-08-08 | 2015-05-13 | Von Ardenne Gmbh | Strahlungsquelle, Vorrichtung und Verfahren zur schnellen Wärmebehandlung von Beschichtungen |
CN104766776B (zh) * | 2014-01-07 | 2016-09-28 | 中国科学院物理研究所 | 多功能超快透射电子显微镜电子枪 |
EP3561850A1 (en) * | 2018-04-27 | 2019-10-30 | Friedrich-Alexander-Universität Erlangen-Nürnberg | Electron emitting apparatus and method for emitting electrons |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS557656B2 (nl) * | 1972-07-17 | 1980-02-27 | ||
JPS4961595A (nl) * | 1972-10-11 | 1974-06-14 | ||
NL7605820A (nl) * | 1976-05-31 | 1977-12-02 | Philips Nv | Elektronenstraalbuis met veldemissieelektronen- bron, veldemissieelektronenbron voor een der- gelijke elektronenstraalbuis en werkwijze voor de vervaardiging van een dergelijke veldemis- sieelektronenbron. |
KR970005769B1 (ko) * | 1992-08-27 | 1997-04-19 | 가부시끼가이샤 도시바 | 자계 계침형 전자총 |
JPH06333525A (ja) * | 1993-05-21 | 1994-12-02 | Beam Tec:Kk | 荷電粒子線照射装置 |
JPH0714503A (ja) * | 1993-06-25 | 1995-01-17 | Laser Gijutsu Sogo Kenkyusho | レーザー熱陰極構造体 |
-
1995
- 1995-02-06 JP JP7018258A patent/JPH08212952A/ja active Pending
-
1996
- 1996-02-05 NL NL1002246A patent/NL1002246C2/nl not_active IP Right Cessation
- 1996-02-06 DE DE1996104272 patent/DE19604272A1/de not_active Ceased
Also Published As
Publication number | Publication date |
---|---|
NL1002246C2 (nl) | 1998-07-13 |
JPH08212952A (ja) | 1996-08-20 |
DE19604272A1 (de) | 1996-08-08 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
AD1A | A request for search or an international type search has been filed | ||
PD2B | A search report has been drawn up | ||
VD1 | Lapsed due to non-payment of the annual fee |
Effective date: 20060901 |