DE69205676D1 - Intensive, kohärente gepulste Elektronenquelle. - Google Patents

Intensive, kohärente gepulste Elektronenquelle.

Info

Publication number
DE69205676D1
DE69205676D1 DE69205676T DE69205676T DE69205676D1 DE 69205676 D1 DE69205676 D1 DE 69205676D1 DE 69205676 T DE69205676 T DE 69205676T DE 69205676 T DE69205676 T DE 69205676T DE 69205676 D1 DE69205676 D1 DE 69205676D1
Authority
DE
Germany
Prior art keywords
intense
electron source
pulsed electron
coherent pulsed
coherent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69205676T
Other languages
English (en)
Inventor
Hans-Werner Dr Fink
Heinz Schmid
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of DE69205676D1 publication Critical patent/DE69205676D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/021—Electron guns using a field emission, photo emission, or secondary emission electron source
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
DE69205676T 1992-04-01 1992-04-01 Intensive, kohärente gepulste Elektronenquelle. Expired - Lifetime DE69205676D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP19920810245 EP0563500B1 (de) 1992-04-01 1992-04-01 Intensive, kohärente gepulste Elektronenquelle

Publications (1)

Publication Number Publication Date
DE69205676D1 true DE69205676D1 (de) 1995-11-30

Family

ID=8211900

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69205676T Expired - Lifetime DE69205676D1 (de) 1992-04-01 1992-04-01 Intensive, kohärente gepulste Elektronenquelle.

Country Status (3)

Country Link
EP (1) EP0563500B1 (de)
JP (1) JP2720907B2 (de)
DE (1) DE69205676D1 (de)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5520635B2 (de) * 1972-08-17 1980-06-04
JPS50138767A (de) * 1974-04-10 1975-11-05
DE3605735A1 (de) * 1986-02-22 1986-10-30 Holger Dr. 7400 Tübingen Hübner Vorrichtung zur erzeugung kurzer elektronen- ionen- oder roentgenimpulse mit hohem richtstrahlwert
EP0366851B1 (de) * 1988-11-01 1994-02-16 International Business Machines Corporation Niederspannungsquelle für schmale Elektronen-/Ionenstrahlenbündel

Also Published As

Publication number Publication date
EP0563500B1 (de) 1995-10-25
EP0563500A1 (de) 1993-10-06
JPH0689679A (ja) 1994-03-29
JP2720907B2 (ja) 1998-03-04

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Legal Events

Date Code Title Description
8332 No legal effect for de