MXPA03003658A - Cabezas de impresion mejoradas para chorro de tinta y los metodos para producirlas. - Google Patents

Cabezas de impresion mejoradas para chorro de tinta y los metodos para producirlas.

Info

Publication number
MXPA03003658A
MXPA03003658A MXPA03003658A MXPA03003658A MXPA03003658A MX PA03003658 A MXPA03003658 A MX PA03003658A MX PA03003658 A MXPA03003658 A MX PA03003658A MX PA03003658 A MXPA03003658 A MX PA03003658A MX PA03003658 A MXPA03003658 A MX PA03003658A
Authority
MX
Mexico
Prior art keywords
ink
vias
silicon chip
ink jet
stop layer
Prior art date
Application number
MXPA03003658A
Other languages
English (en)
Inventor
Carl Edmond Sullivan
Original Assignee
Lexmark Int Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lexmark Int Inc filed Critical Lexmark Int Inc
Publication of MXPA03003658A publication Critical patent/MXPA03003658A/es

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B41J2/1634—Manufacturing processes machining laser machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)

Abstract

La invencion proporciona un metodo para producir vias (14) para alimentacion de tinta en chips (10) de sustrato de silicio semiconductor para una cabeza de impresion (26) de chorro de tinta y las cabezas de impresion de chorro de tinta que contienen los chips de silicio elaborados mediante el metodo. El metodo incluye aplicar una capa de obstruccion para grabado a una primera superficie del chip de silicio que tiene un espesor que varia entre aproximadamente 300 y 800 micras, grabar en seco las vias de tinta individuales a traves del espesor del chip de silicio hasta la capa de obstruccion para grabado desde una superficie opuesta a la primera superficie y formar agujeros en la capa de obstruccion para grabado para una conexion fluida individualmente con las vias de tinta que utilizan una tecnica mecanica. Las vias de pared practicamente vertical se graban a traves del espesor del chip de silicio utilizando el metodo. Segun se opone a las tecnicas de formacion de la via de tinta convencional, el metodo mejora significativamente el rendimiento del chip de silicio y reduce las perdidas debidas a la ruptura y cuartiadura del chip. Los chips resultantes son mas confiables para utilizar la cabeza de impresion a largo plazo.
MXPA03003658A 2000-10-27 2001-10-22 Cabezas de impresion mejoradas para chorro de tinta y los metodos para producirlas. MXPA03003658A (es)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/698,765 US6402301B1 (en) 2000-10-27 2000-10-27 Ink jet printheads and methods therefor
PCT/US2001/047666 WO2002057084A2 (en) 2000-10-27 2001-10-22 Improved ink jet printheads and methods therefor

Publications (1)

Publication Number Publication Date
MXPA03003658A true MXPA03003658A (es) 2004-05-04

Family

ID=24806574

Family Applications (1)

Application Number Title Priority Date Filing Date
MXPA03003658A MXPA03003658A (es) 2000-10-27 2001-10-22 Cabezas de impresion mejoradas para chorro de tinta y los metodos para producirlas.

Country Status (5)

Country Link
US (1) US6402301B1 (es)
EP (1) EP1339549A4 (es)
JP (1) JP2004517755A (es)
MX (1) MXPA03003658A (es)
WO (1) WO2002057084A2 (es)

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Also Published As

Publication number Publication date
JP2004517755A (ja) 2004-06-17
WO2002057084A2 (en) 2002-07-25
US6402301B1 (en) 2002-06-11
WO2002057084A3 (en) 2002-09-19
EP1339549A4 (en) 2004-12-08
EP1339549A2 (en) 2003-09-03

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