LU48214A1 - - Google Patents

Info

Publication number
LU48214A1
LU48214A1 LU48214A LU48214A LU48214A1 LU 48214 A1 LU48214 A1 LU 48214A1 LU 48214 A LU48214 A LU 48214A LU 48214 A LU48214 A LU 48214A LU 48214 A1 LU48214 A1 LU 48214A1
Authority
LU
Luxembourg
Application number
LU48214A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of LU48214A1 publication Critical patent/LU48214A1/xx

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G01L9/0047Diaphragm with non uniform thickness, e.g. with grooves, bosses or continuously varying thickness

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
LU48214A 1964-03-18 1965-03-18 LU48214A1 (xx)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1153264A GB1088723A (en) 1964-03-18 1964-03-18 Improvements in and relating to transducers

Publications (1)

Publication Number Publication Date
LU48214A1 true LU48214A1 (xx) 1965-05-18

Family

ID=9987961

Family Applications (1)

Application Number Title Priority Date Filing Date
LU48214A LU48214A1 (xx) 1964-03-18 1965-03-18

Country Status (4)

Country Link
DE (1) DE6602312U (xx)
GB (1) GB1088723A (xx)
LU (1) LU48214A1 (xx)
NL (1) NL6503394A (xx)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2741523A1 (de) * 1976-09-20 1978-03-23 Honeywell Inc Druckmesseinrichtung
JPS5952727A (ja) * 1982-09-20 1984-03-27 Hitachi Ltd 半導体圧力センサ
IL82960A0 (en) * 1986-06-30 1987-12-20 Rosemount Inc Differential pressure sensor
US4774843A (en) * 1987-08-14 1988-10-04 Gulton Industries, Inc. Strain gage
US4905575A (en) * 1988-10-20 1990-03-06 Rosemount Inc. Solid state differential pressure sensor with overpressure stop and free edge construction
DE10034460A1 (de) 2000-07-15 2002-01-31 Bosch Gmbh Robert Hochdrucksensor, Verfahren und Werkzeug zu seiner Herstellung
CN102564684B (zh) * 2011-12-27 2013-12-11 中国科学院合肥物质科学研究院 基于稳态正弦激振力的多维力传感器动态实验装置的方法

Also Published As

Publication number Publication date
DE6602312U (de) 1969-05-22
GB1088723A (en) 1967-10-25
NL6503394A (xx) 1965-09-20

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