KR970077101A - Feeding device for semiconductor chemicals - Google Patents

Feeding device for semiconductor chemicals Download PDF

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Publication number
KR970077101A
KR970077101A KR1019960016959A KR19960016959A KR970077101A KR 970077101 A KR970077101 A KR 970077101A KR 1019960016959 A KR1019960016959 A KR 1019960016959A KR 19960016959 A KR19960016959 A KR 19960016959A KR 970077101 A KR970077101 A KR 970077101A
Authority
KR
South Korea
Prior art keywords
container
photoresist
cap
chemical agent
jig
Prior art date
Application number
KR1019960016959A
Other languages
Korean (ko)
Other versions
KR0183858B1 (en
Inventor
김해근
김용수
정주효
김민훈
Original Assignee
김광호
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김광호, 삼성전자 주식회사 filed Critical 김광호
Priority to KR1019960016959A priority Critical patent/KR0183858B1/en
Publication of KR970077101A publication Critical patent/KR970077101A/en
Application granted granted Critical
Publication of KR0183858B1 publication Critical patent/KR0183858B1/en

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Closures For Containers (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)

Abstract

포토레지스트 용기의 입구에 부착되어 이 포토레지스트를 소정의 공정장비로 공급하기 위해 사용되는 캡을 다른 화학약품 용기에도 적용하여 사용할 수 있도록 상기 캡과 화학약품 용기 사이에 개재되는 지그에 대해 기재되어 있다. 본 발명의 반도체용 화학약품의 공급장치는 포토레지스트 용기의 입구부에 부착하여 상기 포토레지스트를 소정의 공정장비로 공급하기 위한 배출구 및 상기 포토레지스트 용기내에 배출압력을 가하기 위한 가압부로 이루어진 캡을 구비하는 반도체용 화학약품의 공급장치에 있어서, 상기 캡을 포토레지스트 용기 이외의 소정의 화학약품 용기에 적용하고자 할 때, 상기 소정의 화학약품 용기와 캡 사이를 연결시켜 주기 위한 지그를 더 구비하는 것을 특징으로 한다. 따라서, 본 발명에 따른 반도체용 화학약품의 공급장치에 의하면, 상기 지그를 사용함으로써 화학약품을 옮겨 담는 과정에서 발생되는 종래의 환경악화나 오염의 문제를 해소할 수 있게 된다. 또한, 종래의 경우에 예컨대 티너를 포토레지스트의 용기에 완전히 옮겨 담기에 앞서 티너를 이용하여 포토레지스트의 용기의 내부를 수차례 세정해야 하는 번거로움이 있었으나 이 또한 해소할 수 있게 된다.There is described a jig interposed between the cap and the chemical agent container so that the cap used for supplying the photoresist to the predetermined process equipment can be applied to other chemical agent containers, . The apparatus for supplying a chemical agent for semiconductors of the present invention includes a cap having a discharge port for supplying the photoresist to a predetermined process equipment attached to an inlet of a photoresist container and a pressing unit for applying a discharge pressure to the photoresist container The apparatus further comprises a jig for connecting the predetermined chemical agent container to the cap when the cap is to be applied to a predetermined chemical agent container other than the photoresist container . Therefore, according to the apparatus for supplying a chemical agent for semiconductor according to the present invention, it is possible to solve the problems of environmental deterioration and pollution caused in the process of transferring chemicals by using the jig. In addition, in the conventional case, it is troublesome to clean the inside of the container of the photoresist a number of times by using a tiner prior to completely transferring the toner to the container of the photoresist, but this can also be solved.

Description

반도체용 화학약품의 공급장치Feeding device for semiconductor chemicals

내용없음No content

Claims (2)

포토레지스트 용기의 입구부에 부착하여 상기 포토레지스트를 소정의 공정장비로 공급하기 위한 배출구 및 상기 포토레지스트 용기내에 배출압력을 가하기 위한 가압부로 이루어진 캡을 구비하는 반도체용 화학약품의 공급장치에 있어서, 상기 캡을 포토레지스트 용기 이외의 소정의 화학약품 용기에 적용하고자 할 때, 상기 소정의 화학약품 용기와 캡 사이를 연결시켜 주기 위한 지그를 더 구비하는 것을 특징으로 하는 반도체용 화학약품의 공급장치.And a cap provided at an inlet of the photoresist container to supply the photoresist to predetermined process equipment and a pressurizing unit to apply a discharge pressure to the photoresist container, Further comprising a jig for connecting the predetermined chemical container to the cap when the cap is to be applied to a predetermined chemical container other than the photoresist container. 제1항에 있어서, 상기 지그의 상부에는 상기 캡에 맞추어 끼워지도록 소정 크기의 나사홈을 구비하고, 하부에는 소정의 화학약품 용기 각각에 맞추어 끼워질 수 있는 나사홈을 구비하여 이루어진 것을 특징으로 하는 반도체용 화학약품의 공급장치.[2] The apparatus of claim 1, wherein the jig has a screw groove having a predetermined size to fit into the cap, and a screw groove is formed in the lower portion of the jig, Supply apparatus for chemicals for semiconductors. ※ 참고사항 : 최초출원 내용에 의하여 공개되는 것임.※ Note: It is disclosed by the contents of the first application.
KR1019960016959A 1996-05-20 1996-05-20 Apparatus for supplying chemical drug for semiconductor KR0183858B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019960016959A KR0183858B1 (en) 1996-05-20 1996-05-20 Apparatus for supplying chemical drug for semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019960016959A KR0183858B1 (en) 1996-05-20 1996-05-20 Apparatus for supplying chemical drug for semiconductor

Publications (2)

Publication Number Publication Date
KR970077101A true KR970077101A (en) 1997-12-12
KR0183858B1 KR0183858B1 (en) 1999-04-15

Family

ID=19459181

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960016959A KR0183858B1 (en) 1996-05-20 1996-05-20 Apparatus for supplying chemical drug for semiconductor

Country Status (1)

Country Link
KR (1) KR0183858B1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100770361B1 (en) * 2007-01-17 2007-10-26 (주)지오엘리먼트 High purity charging method and apparatus for chemical substance into container without contamination

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100770361B1 (en) * 2007-01-17 2007-10-26 (주)지오엘리먼트 High purity charging method and apparatus for chemical substance into container without contamination

Also Published As

Publication number Publication date
KR0183858B1 (en) 1999-04-15

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