KR970056043U - Inner Tube for Low Pressure Chemical Vapor Deposition - Google Patents

Inner Tube for Low Pressure Chemical Vapor Deposition

Info

Publication number
KR970056043U
KR970056043U KR2019960004864U KR19960004864U KR970056043U KR 970056043 U KR970056043 U KR 970056043U KR 2019960004864 U KR2019960004864 U KR 2019960004864U KR 19960004864 U KR19960004864 U KR 19960004864U KR 970056043 U KR970056043 U KR 970056043U
Authority
KR
South Korea
Prior art keywords
vapor deposition
low pressure
inner tube
chemical vapor
pressure chemical
Prior art date
Application number
KR2019960004864U
Other languages
Korean (ko)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019960004864U priority Critical patent/KR970056043U/en
Publication of KR970056043U publication Critical patent/KR970056043U/en

Links

KR2019960004864U 1996-03-14 1996-03-14 Inner Tube for Low Pressure Chemical Vapor Deposition KR970056043U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019960004864U KR970056043U (en) 1996-03-14 1996-03-14 Inner Tube for Low Pressure Chemical Vapor Deposition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019960004864U KR970056043U (en) 1996-03-14 1996-03-14 Inner Tube for Low Pressure Chemical Vapor Deposition

Publications (1)

Publication Number Publication Date
KR970056043U true KR970056043U (en) 1997-10-13

Family

ID=60838033

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019960004864U KR970056043U (en) 1996-03-14 1996-03-14 Inner Tube for Low Pressure Chemical Vapor Deposition

Country Status (1)

Country Link
KR (1) KR970056043U (en)

Similar Documents

Publication Publication Date Title
SG54564A1 (en) Semi-selective chemical vapor deposition
DE69920511D1 (en) PRESSURE RESISTANT TUBE CONSTRUCTION
AU5461998A (en) Chemical vapor deposition apparatus
SG76499A1 (en) Chemical vapor deposition system including dedicated cleaning gas injection
DK0836491T3 (en) Oriented medical tube
FR2724716B1 (en) TUBE WEAPON.
DE69927814D1 (en) ELECTRON TUBE
DK0824656T3 (en) tube evaporator
EE03755B1 (en) Method for lining the outer tube
KR970056043U (en) Inner Tube for Low Pressure Chemical Vapor Deposition
KR950034350U (en) Inner Tube for Low Pressure Chemical Vapor Deposition
DE69906151D1 (en) GAS DISCHARGE TUBE
DE69821260D1 (en) ELECTRON TUBE
IL129750A (en) Precision replication by chemical vapor deposition
KR950021370U (en) Low Pressure Chemical Vapor Deposition Liner Tube
GB9421335D0 (en) Chemical vapour deposition
KR970056053U (en) Horizontal Low Pressure Chemical Vapor Deposition System
KR950025872U (en) Vertical plasma low pressure chemical vapor deposition system
KR970015293U (en) Atmospheric pressure chemical vapor deposition system
KR970056046U (en) Horizontal Low Pressure Chemical Vapor Deposition System
KR960019073U (en) Low pressure chemical vapor deposition device quartz tube transfer device
KR960003072U (en) Chemical vapor deposition process tube
KR960035591U (en) Sheet-fed plasma low pressure chemical vapor deposition equipment
KR960003077U (en) Wafer boat for low pressure chemical vapor deposition equipment
KR950023949U (en) Gas nozzle integrated vertical low pressure chemical vapor deposition device

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
C193 Request for withdrawal (abandonment)