KR970053233A - Adsorption error inspection device and method using outline length of part image - Google Patents

Adsorption error inspection device and method using outline length of part image Download PDF

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Publication number
KR970053233A
KR970053233A KR1019950052412A KR19950052412A KR970053233A KR 970053233 A KR970053233 A KR 970053233A KR 1019950052412 A KR1019950052412 A KR 1019950052412A KR 19950052412 A KR19950052412 A KR 19950052412A KR 970053233 A KR970053233 A KR 970053233A
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South Korea
Prior art keywords
image
outline
length
nozzle
adsorption
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KR1019950052412A
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Korean (ko)
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KR100190719B1 (en
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진상훈
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배순훈
대우전자 주식회사
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Priority to KR1019950052412A priority Critical patent/KR100190719B1/en
Publication of KR970053233A publication Critical patent/KR970053233A/en
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Publication of KR100190719B1 publication Critical patent/KR100190719B1/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/10—Measuring as part of the manufacturing process
    • H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Image Processing (AREA)
  • Image Analysis (AREA)
  • Supply And Installment Of Electrical Components (AREA)

Abstract

본 발명은 부품영상의 외곽선 길이를 이용한 흡착 오류 검사 장치 및 방법에 관한 것으로, 영상 처리부로부터 노즐의 영상 데이터를 받아 노즐에 흡착된 부품의 영상의 외곽선 길이를 산출하여 그 외곽선 길이가 임계값 이하이면 부품이 흡착노즐에 흡착되지 않은 것으로 판단하고, 그 외곽선 길이가 임계값 이상이면 부품이 흡착노즐에 흡착된 것으로 판단한다.The present invention relates to an apparatus and method for detecting an error using an outline length of a part image, and receives an image data of a nozzle from an image processor, calculates an outline length of an image of a component adsorbed to the nozzle, and if the outline length is less than or equal to a threshold value. It is determined that the part is not adsorbed by the adsorption nozzle, and when the outline length is more than the threshold value, it is determined that the part is adsorbed by the adsorption nozzle.

Description

부품영상의 외곽선 길이를 이용한 흡착 오류 검사 장치 및 방법Adsorption Error Inspection Apparatus and Method Using Outline Length of Part Images

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제2도는 본 발명에 의한 부품영상의 외곽선 길이를 이용한 흡착 오류 검사 장치의 구성을 보이는 블록도이다.2 is a block diagram showing the configuration of an adsorption error inspection apparatus using the outline length of the part image according to the present invention.

Claims (2)

노즐부를 촬영하는 카메라와, 상기 카메라의 출력영상을 처리하는 영상처리부와, 상기 영상을 디스플레이하는 모니터를 구비한 칩마운터시스템에서의 부품영상의 외곽선길이를 이용한 흡착오류 검사장치에 있어서,In the adsorption error inspection apparatus using the outline length of the part image in the chip mounter system having a camera for photographing the nozzle unit, an image processing unit for processing the output image of the camera, and a monitor for displaying the image, 상기 영상처리부로부터 상기 노즐의 영상 데이터를 받아 상기 노즐에 흡착된 부품의 영상의 외곽선 길이를 산출하고, 그 산출된 외곽선 길이가 노즐의 실제 외곽선의 길이에 일정한 상수(k)를 곱한 식 Ts= k*L 으로 산출된 임계값(Ts) 이하이면 부품이 상기 흡착노즐에 흡착되지 않은 것으로 판단하고, 그 외곽선 길이가 상기 임계값(Ts) 이상이면 부품이 상기 흡착노즐에 흡착된 것으로 판단하여, 그 결과를 상기 모니터로 출력하는 주제어부를 포함하는 것을 특징으로 하는 부품영상의 외곽선 길이를 이용한 흡착 오류 검사장치.Receiving the image data of the nozzle from the image processing unit to calculate the outline length of the image of the component adsorbed by the nozzle, the calculated outline length multiplied by a constant constant (k) multiplied by a constant constant (k) of the nozzle Ts = k If it is less than or equal to the threshold value Ts calculated as * L, it is determined that the component is not adsorbed to the adsorption nozzle. If the outline length is greater than or equal to the threshold value Ts, it is determined that the component is adsorbed to the adsorption nozzle. Adsorption error inspection apparatus using the length of the outline of the part image, characterized in that it comprises a main control unit for outputting the result to the monitor. 노즐부를 촬영하는 카메라와, 상기 카메라의 출력영상을 처리하는 영상처리부와, 상기 영상을 디스프레이하는 모니터를 구비한 칩 마운터에서 부품영상의 외곽선길이를 이용한 흡착 오류 검사 방법에 있어서,In the chip mounter equipped with a camera for photographing the nozzle unit, an image processing unit for processing the output image of the camera, and a monitor for displaying the image in the adsorption error inspection method using the outline length of the parts image, 화상인식 카메라가 촬영한 흡착노즐의 영상데이타를 영상 처리부로부터 입력받고, 상기 화상처리부로부터 입력 받은 영상 데이터를 2치화 처리한 후, 상기 2 치화 처리된 영상 데이터로부터 외곽선의 길이를 산출하고,After receiving the image data of the adsorption nozzle captured by the image recognition camera from the image processing unit, binarizing the image data received from the image processing unit, calculating the length of the outline from the binarized image data, 상기 외곽선의 길이 S 가 흡착 노즐의 실제 외곽선의 길이(L)에 소정 상수를 곱한 임계값 Ts(= k*L) 보다 큰지를 판단하여, 상기 외곽선의 길이 S 가 임계값 Ts 보다 큰 경우 부품흡착 양호로 판단하고, 상기 외곽선의 길이 S 가 임계값 Ts 보다 크지 않은 경우 부품흡착 불량으로 판단하는 것을 특징으로 하는 부품영상의 외곽선의 길이를 이용한 흡착 오류 검사 방법.It is determined whether the length S of the outline is larger than the threshold value Ts (= k * L) multiplied by a predetermined constant by the length L of the actual outline of the suction nozzle, and when the length S of the outline is larger than the threshold value Ts, adsorption of parts Adsorption error inspection method using the length of the outline of the component image, if it is determined that the good, and the length S of the outline is not greater than the threshold value Ts, the component adsorption failure. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019950052412A 1995-12-20 1995-12-20 A detecting apparatus of holding fault and method thereof KR100190719B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019950052412A KR100190719B1 (en) 1995-12-20 1995-12-20 A detecting apparatus of holding fault and method thereof

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Application Number Priority Date Filing Date Title
KR1019950052412A KR100190719B1 (en) 1995-12-20 1995-12-20 A detecting apparatus of holding fault and method thereof

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KR970053233A true KR970053233A (en) 1997-07-31
KR100190719B1 KR100190719B1 (en) 1999-06-01

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KR1019950052412A KR100190719B1 (en) 1995-12-20 1995-12-20 A detecting apparatus of holding fault and method thereof

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KR100910480B1 (en) * 2002-10-11 2009-08-04 주식회사 포스코 An apparatus for removing floated sludge of sedimentation tank
KR101871172B1 (en) 2012-06-04 2018-06-26 주식회사 탑 엔지니어링 Apparatus for testing electronic parts

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