KR970051926A - - Google Patents

Info

Publication number: KR970051926A
Authority: KR; South Korea

Application number

KR19950066154A

Other languages

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1995-12-29

Filing date

1995-12-29

Publication date

1997-07-29

1995-12-29 Application filed filed Critical

1997-07-29 Publication of KR970051926A publication Critical patent/KR970051926A/ko

Links

KR19950066154A 1995-12-29 1995-12-29 KR970051926A (en)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
KR19950066134		1995-12-29

Publications (1)

Publication Number	Publication Date
KR970051926A true KR970051926A (en)	1997-07-29

Family

ID=85705047

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
KR19950066154A KR970051926A (en)	1995-12-29	1995-12-29

Country Status (1)

Country	Link
KR (1)	KR970051926A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
KR19990054914A (en) *	1997-12-26	1999-07-15	김영환	Ultrafine Sorting Method Using Radioactive Isotopes

Citations (7)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4374915A (en) *	1981-07-30	1983-02-22	Intel Corporation	High contrast alignment marker for integrated circuit fabrication
JPS62296435A (en) *	1986-06-16	1987-12-23	Nec Corp	Geometry of alignment mark
JPH01140624A (en) *	1987-11-27	1989-06-01	Hitachi Ltd	Manufacture of semiconductor device
JPH021901A (en) *	1988-06-09	1990-01-08	Fujitsu Ltd	Formation of alignment mark
JPH02266512A (en) *	1989-04-07	1990-10-31	Oki Electric Ind Co Ltd	Manufacture of semiconductor element
KR900019132A (en) *	1989-05-16	1990-12-24	오끼뎅끼 고오교오 가부시끼가이샤	Wafer alignment mark and its manufacturing method
JPH03138920A (en) *	1989-10-24	1991-06-13	Sony Corp	Semiconductor device

1995
- 1995-12-29 KR KR19950066154A patent/KR970051926A/ko not_active Application Discontinuation

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4374915A (en) *	1981-07-30	1983-02-22	Intel Corporation	High contrast alignment marker for integrated circuit fabrication
JPS62296435A (en) *	1986-06-16	1987-12-23	Nec Corp	Geometry of alignment mark
JPH01140624A (en) *	1987-11-27	1989-06-01	Hitachi Ltd	Manufacture of semiconductor device
JPH021901A (en) *	1988-06-09	1990-01-08	Fujitsu Ltd	Formation of alignment mark
JPH02266512A (en) *	1989-04-07	1990-10-31	Oki Electric Ind Co Ltd	Manufacture of semiconductor element
KR900019132A (en) *	1989-05-16	1990-12-24	오끼뎅끼 고오교오 가부시끼가이샤	Wafer alignment mark and its manufacturing method
JPH03138920A (en) *	1989-10-24	1991-06-13	Sony Corp	Semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
KR19990054914A (en) *	1997-12-26	1999-07-15	김영환	Ultrafine Sorting Method Using Radioactive Isotopes

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Legal Events

Date	Code	Title
2000-02-29	A201	Request for examination
2002-01-25	E902	Notification of reason for refusal
2002-09-03	E601	Decision to refuse application