KR970028809A - Phase reversal mask used in the manufacture of semiconductor devices - Google Patents

Phase reversal mask used in the manufacture of semiconductor devices Download PDF

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Publication number
KR970028809A
KR970028809A KR1019950042628A KR19950042628A KR970028809A KR 970028809 A KR970028809 A KR 970028809A KR 1019950042628 A KR1019950042628 A KR 1019950042628A KR 19950042628 A KR19950042628 A KR 19950042628A KR 970028809 A KR970028809 A KR 970028809A
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KR
South Korea
Prior art keywords
pattern layer
light shielding
shielding pattern
mask
manufacture
Prior art date
Application number
KR1019950042628A
Other languages
Korean (ko)
Inventor
손창진
한우성
Original Assignee
김광호
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김광호, 삼성전자 주식회사 filed Critical 김광호
Priority to KR1019950042628A priority Critical patent/KR970028809A/en
Publication of KR970028809A publication Critical patent/KR970028809A/en

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Abstract

차광패턴층의 일부에 위상쉬프터를 갖는 위상반전마스크에 관하여 개시한다. 본 발명은 마스크 기판상에 차광패턴층이 형성된 위상반전마스크에 있어서, 상기 차광패턴층의 일부에 위상쉬프터가 형성되어 있는 것을 특징으로 하는 위상반전마스크를 제공한다. 상기 차광패턴층은 라인/스페이스 패턴 또는 섬(island) 패턴으로 구성할 수 있다. 본 발명은 차광패턴층의 일부 또는 차광패턴층의 하부의 기판을 식각하여 위상시프터를 구성함으로써, 브릿지 없는 패턴을 얻을 수 있다.A phase inversion mask having a phase shifter in a part of a light shielding pattern layer is disclosed. The present invention provides a phase inversion mask in which a light shielding pattern layer is formed on a mask substrate, wherein a phase shifter is formed in a part of the light shielding pattern layer. The light blocking pattern layer may be configured as a line / space pattern or an island pattern. According to the present invention, a pattern without a bridge can be obtained by etching a part of the light shielding pattern layer or a substrate under the light shielding pattern layer to form a phase shifter.

Description

반도체 장치의 제조에 사용되는 위상반전마스크Phase reversal mask used in the manufacture of semiconductor devices

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.

제1도는 본 발명에 의한 위상반전마스크를 도시한 평면도이다.1 is a plan view showing a phase inversion mask according to the present invention.

Claims (3)

마스크 기판상에 차광패턴층이 형성된 위상반전마스크에 있어서, 상기 차광패턴층의 일부에 위상쉬프터가 형성되어 있는 것을 특징으로 하는 위상반전마스크.A phase inversion mask in which a light shielding pattern layer is formed on a mask substrate, wherein a phase shifter is formed in part of said light shielding pattern layer. 제1항에 있어서, 상기 차광패턴층은 라인/스페이스 패턴 또는 섬(island)패턴인 것을 특징으로 하는 위상반전 마스크.The phase shift mask of claim 1, wherein the light blocking pattern layer is a line / space pattern or an island pattern. 마스크 기판상에 차광패턴층이 형성된 위상반전마스크에 있어서, 상기 차광패턴층 하부의 마스크 기판의 일부를 식각함으로써 위상쉬프터를 구성하는 것을 특징으로 하는 위상반전마스크.A phase shift mask having a light shielding pattern layer formed on a mask substrate, wherein the phase shift mask is formed by etching a portion of the mask substrate under the light shielding pattern layer. ※ 참고사항:최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019950042628A 1995-11-21 1995-11-21 Phase reversal mask used in the manufacture of semiconductor devices KR970028809A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019950042628A KR970028809A (en) 1995-11-21 1995-11-21 Phase reversal mask used in the manufacture of semiconductor devices

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019950042628A KR970028809A (en) 1995-11-21 1995-11-21 Phase reversal mask used in the manufacture of semiconductor devices

Publications (1)

Publication Number Publication Date
KR970028809A true KR970028809A (en) 1997-06-24

Family

ID=66588599

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950042628A KR970028809A (en) 1995-11-21 1995-11-21 Phase reversal mask used in the manufacture of semiconductor devices

Country Status (1)

Country Link
KR (1) KR970028809A (en)

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