KR970007080Y1 - Interlock device - Google Patents
Interlock device Download PDFInfo
- Publication number
- KR970007080Y1 KR970007080Y1 KR2019940013525U KR19940013525U KR970007080Y1 KR 970007080 Y1 KR970007080 Y1 KR 970007080Y1 KR 2019940013525 U KR2019940013525 U KR 2019940013525U KR 19940013525 U KR19940013525 U KR 19940013525U KR 970007080 Y1 KR970007080 Y1 KR 970007080Y1
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- KR
- South Korea
- Prior art keywords
- relay
- transistor
- door
- board
- optical sensor
- Prior art date
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Electronic Switches (AREA)
Abstract
내용없음No content
Description
제1도는 본 고안의 일실시예에 따른 상세 회로도.1 is a detailed circuit diagram according to an embodiment of the present invention.
제2도는 본 고안의 보드와 도어 사이에 물체가 없을 때의 동작상태도.2 is an operation state when there is no object between the board and the door of the present invention.
제3도는 본 고안의 보드와 도어 사이에 물체가 있을 때의 동작 상태도.3 is an operating state when there is an object between the board and the door of the present invention.
*도면의 주요 부분에 대한 부호의 설명** Description of the symbols for the main parts of the drawings *
11 : 전원공급원12 : 감지부11 power supply source 12 detection unit
13 : 릴레이 제어부14 : 솔레이드 밸브13 relay control 14 Solade valve
21 : 리플회로22 : 전원 표시부21: ripple circuit 22: power display
23 : 광학센서31 : 릴레이 스위치23 optical sensor 31 relay switch
32 : 릴레이 동작 표시부32: relay operation display unit
본 고안은 반도체 공정에서 밸브 제어회로에 관한 것으로서, 특히 센터파인더 보드(Centerfinder Board: 이하 보드라 칭함)와 공정챔버(chamber)의 입출력 슬릿도어(I/O slit door:이하 도어라 칭함) 사이에 웨이퍼가 있을 때 도어가 닫히지 않도록 된 릴레이 제어회로를 이용한 인터락(Interlock) 장치에 관한 것이다.The present invention relates to a valve control circuit in a semiconductor process, and in particular, between a centerfinder board (hereinafter referred to as a board) and an input / output slit door (hereinafter referred to as a door) of a process chamber. The present invention relates to an interlock device using a relay control circuit in which a door is not closed when a wafer is present.
일반적으로 종래에는 광학 센서에 의해 그 신호가 중앙처리장치(CPU) 보드를 거쳐 디지탈 입출력 보드로 들어가 솔레노이드 밸브를 열고 닫게 하는 프로그램으로 되어 있어 웨이퍼의 유, 무에 관계없이 도어를 열고 닫을 수 있어서 웨이퍼가 깨질 위험이 많았고, 장비 자체를 설계할 당시 모방이 불가능하도록 메인보드(Mail Board)를 거쳐야 하는 원리로 되어 있어 타 장비에서는 사용할 수 없는 문제점이 있었다.In general, the optical sensor uses the optical sensor to enter the digital I / O board through the central processing unit (CPU) board to open and close the solenoid valve.The door can be opened or closed regardless of the presence or absence of the wafer. There was a lot of risk of breaking, and when designing the equipment itself, the principle to go through the main board (Mail Board) so that imitation is impossible, there was a problem that can not be used in other equipment.
따라서, 상기 종래의 기술의 문제점을 해결하기 위하여 안출된 본 고안은 반도체 공정에서 보드와 도어 사이에 웨이퍼의 유,무를 감지하여 보드와 도어 사이에 웨이퍼가 있을 경우에 도어가 닫히지 않도록 제어할 수 있는 릴레이 제어회로를 이용한 인터락 장치를 제공하는데 그 목적이 있다.Therefore, the present invention devised to solve the problems of the prior art can detect the presence or absence of the wafer between the board and the door in the semiconductor process to control the door not to close when there is a wafer between the board and the door. It is an object of the present invention to provide an interlock device using a relay control circuit.
상기 목적을 달성하기 위하여 본 고안은, 전원공급원에 연결되어 광학센서 사이에 물체의 유, 무를 감지하는 감지수단과, 상기 감지수단에 연결되어 솔레노이드 밸브의 개폐를 제어하는 릴레이 제어수단과, 이 릴레이 제어수단의 제어를 받아 개폐되는 솔레노이드 밸브를 구비하는 것을 특징으로 한다.In order to achieve the above object, the present invention provides a sensing means connected to a power supply for sensing the presence or absence of an object between optical sensors, a relay control means connected to the sensing means to control the opening and closing of a solenoid valve, and the relay. And a solenoid valve opened and closed under the control of the control means.
이하, 첨부된 도면을 참조하여 본 고안의 일실시예를 상세히 설명한다.Hereinafter, with reference to the accompanying drawings will be described an embodiment of the present invention;
먼저, 제1도는 본 고안의 일실시예에 따른 상세 회로도로서, 도면에서 11은 전원공급원, 12는 감지부, 13은 릴레이 제어부, 14는 솔레노이드 밸브, 21은 리플회로, 22는 전원표시부, 23은 광학센서부, 31은 릴레이 스위치, 32는 릴레이 작동표시부, R1, R2, R4, R5, R6은 저항, R3은 가변저항, TR1, TR2, Q1은 트랜지스터, L1,2L는 인덕터, C1은 커패시터, LED1, LED2, CR1은 발광다이오드를 각각 나타낸다.First, Figure 1 is a detailed circuit diagram according to an embodiment of the present invention, 11 is a power supply source, 12 is a sensing unit, 13 is a relay controller, 14 is a solenoid valve, 21 is a ripple circuit, 22 is a power display, 23 Is optical sensor, 31 is relay switch, 32 is relay operation indicator, R 1 , R 2 , R 4 , R 5 , R 6 is resistor, R 3 is variable resistor, TR 1 , TR 2 , Q 1 is transistor, L 1 and 2 L represent an inductor, C 1 represents a capacitor, and LED 1 , LED 2 , and CR 1 represent a light emitting diode, respectively.
본 고안은 도면에 도시한 바와같이, 전워공급원(11)에 연결되어 광학센서 사이에 물체의 유, 무를 감지하는 감지부(12)와, 상기 감지부(12)에 연결되어 솔레노이드 밸브의 개폐를 제어하는 릴레이 제어부(13)와, 이 릴레이 제어부(13)의 제어를 받아 개폐되는 솔레노이드 밸브(14)로 구성되어 있다.The present invention is connected to the power supply source 11, as shown in the drawing, the sensing unit 12 for detecting the presence or absence of the object between the optical sensor, and connected to the sensing unit 12 to open and close the solenoid valve It consists of the relay control part 13 to control, and the solenoid valve 14 which opens and closes under control of this relay control part 13.
상기 감지부(12)는 전원공급원(11)에 연결되어 공급된 전원을 정류하는 리플회로(21)와, 이 리플회로에 의해 정류된 전원의 인가를 나타내는 전원표시부(22)와, 상기 전원표시부(22)에 연결되어 웨이퍼의 유,무를 감지하는 광학센서부(23)와, 상기 광학센서부(23)의 출력신호에 따라 스위칭되는 트랜지스터(TR1)로 구성되어 있다.The sensing unit 12 includes a ripple circuit 21 connected to the power supply source 11 to rectify the supplied power, a power display unit 22 indicating the application of the power rectified by the ripple circuit, and the power display unit. And an optical sensor unit 23 connected to 22 to sense the presence or absence of a wafer, and a transistor TR 1 switched according to the output signal of the optical sensor unit 23.
그리고, 상기의 릴레이 제어부(13)는 상기 감지부(12)의 감지신호에 따라 스위칭되는 트랜지스터(TR2)와, 이 트랜지스터(TR2)의 스위칭 동작에 따라 구동되는 릴레이 스위치(31)와, 이 릴레이 스위치(31)의 구동여부를 나타내는 표시부(32)로 구성되어 있다.In addition, the relay control unit 13 may include a transistor TR 2 switched according to a detection signal of the detection unit 12, a relay switch 31 driven according to a switching operation of the transistor TR 2 , It is comprised by the display part 32 which shows whether this relay switch 31 is driven.
이러한 구성을 갖는 본 고안의 일실시예에 따른 세부동작을 제2도 및 제3도를 통하여 살펴본다.A detailed operation according to an embodiment of the present invention having such a configuration will be described with reference to FIGS. 2 and 3.
제2도는 보드와 도어 사이에 물체가 없을 때 동작 상태도이고, 제3도는 보드와 도어 사이에 물체가 있을 때의 동작 상태도이다.2 is an operation state diagram when there is no object between the board and the door, and FIG. 3 is an operation state diagram when there is an object between the board and the door.
먼저, 제2도에 도시한 바와 같이 보드와 도어 사이에 물체가 없을 경우에는 전원공급원(11)에서 인가된 전원을 리플회로(21)에서 정류하고, 이 정류된 전원이 내부로 인가됨을 전원표시부(22)에서 표시하고 광학센서부(23)의 발광다이오드 빛에 의해 트랜지스터(Q1)가 온(ON) 되고 이에 따라 트랜지스터(TR1)도 온 되어 회로의 모든 전류는 Q1, R3, TR1을 차례로 통해 빠져 나가게 된다. 이때는 트랜지스터(TR2)의 베이스 단에 전압이 걸리지 않게 되므로 릴레이 스위치(31)가 구동되지 않아 릴레이 스위치(31)는 노말상태인 A, A' 접점이 되어 폐회로가 형성되고 밸브가 동작하여 도어가 닫히게 된다.First, as shown in FIG. 2, when there is no object between the board and the door, the power applied from the power supply 11 is rectified by the ripple circuit 21, and the rectified power is applied internally. The transistor Q 1 is turned on by the light emitting diode light of the optical sensor unit 23 and the transistor TR 1 is turned on as indicated by (22), so that all currents in the circuit are Q 1 , R 3 ,. Exit through TR 1 in turn. At this time, since the voltage is not applied to the base terminal of the transistor TR 2 , the relay switch 31 is not driven so that the relay switch 31 becomes the normal A, A 'contact, and a closed circuit is formed. It is closed.
그러나, 제3도와 같이 보드와 도어 사이에 물체가 있을 경우에는 트랜지스터(Q1)가 오프(OFF) 되고 전원 전압이 저항 R4를 거쳐 트랜지스터(TR2)의 베이스 단에 걸리므로 트랜지스터(TR2)는 온 되어 릴레이 스위치(31)가 구동되고 릴레이 스위치(31)는 B, B' 접점이 되어 밸브가 동작하지 않으므로 도어가 닫히지 않게 된다.However, the transistor it takes to 3 help as board is off, the transistor (Q 1) if there is an object between the door (OFF) and the base of the power supply voltage via a resistor R 4 transistor (TR 2) (TR 2 ) Is turned on so that the relay switch 31 is driven and the relay switch 31 becomes the B and B 'contacts so that the valve does not operate so that the door does not close.
따라서, 상기와 같이 구성되어 동작하는 본 고안은 보드와 도어 사이에 웨이퍼가 있을 경우 도어가 닫히지 않도록 하여 반도체 공정에서 웨이퍼가 파손되는 것을 방지할 수 있는 효과가 있다.Therefore, the present invention constructed and operated as described above has an effect of preventing the wafer from being broken in the semiconductor process by preventing the door from closing when there is a wafer between the board and the door.
Claims (3)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019940013525U KR970007080Y1 (en) | 1994-06-10 | 1994-06-10 | Interlock device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019940013525U KR970007080Y1 (en) | 1994-06-10 | 1994-06-10 | Interlock device |
Publications (2)
Publication Number | Publication Date |
---|---|
KR960003123U KR960003123U (en) | 1996-01-22 |
KR970007080Y1 true KR970007080Y1 (en) | 1997-07-15 |
Family
ID=19385362
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019940013525U KR970007080Y1 (en) | 1994-06-10 | 1994-06-10 | Interlock device |
Country Status (1)
Country | Link |
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KR (1) | KR970007080Y1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100643496B1 (en) * | 2004-12-23 | 2006-11-10 | 삼성전자주식회사 | Optic sensor board for combined using normal open and close type |
-
1994
- 1994-06-10 KR KR2019940013525U patent/KR970007080Y1/en not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100643496B1 (en) * | 2004-12-23 | 2006-11-10 | 삼성전자주식회사 | Optic sensor board for combined using normal open and close type |
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Publication number | Publication date |
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KR960003123U (en) | 1996-01-22 |
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