KR970003575A - 웨이퍼 세정방법 - Google Patents
웨이퍼 세정방법 Download PDFInfo
- Publication number
- KR970003575A KR970003575A KR1019950018545A KR19950018545A KR970003575A KR 970003575 A KR970003575 A KR 970003575A KR 1019950018545 A KR1019950018545 A KR 1019950018545A KR 19950018545 A KR19950018545 A KR 19950018545A KR 970003575 A KR970003575 A KR 970003575A
- Authority
- KR
- South Korea
- Prior art keywords
- cleaning method
- wafer cleaning
- wafer
- cleaning
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950018545A KR970003575A (ko) | 1995-06-30 | 1995-06-30 | 웨이퍼 세정방법 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950018545A KR970003575A (ko) | 1995-06-30 | 1995-06-30 | 웨이퍼 세정방법 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR970003575A true KR970003575A (ko) | 1997-01-28 |
Family
ID=60934122
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019950018545A KR970003575A (ko) | 1995-06-30 | 1995-06-30 | 웨이퍼 세정방법 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR970003575A (ko) |
-
1995
- 1995-06-30 KR KR1019950018545A patent/KR970003575A/ko not_active Application Discontinuation
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
WITN | Withdrawal due to no request for examination |