KR970003575A - 웨이퍼 세정방법 - Google Patents

웨이퍼 세정방법 Download PDF

Info

Publication number
KR970003575A
KR970003575A KR1019950018545A KR19950018545A KR970003575A KR 970003575 A KR970003575 A KR 970003575A KR 1019950018545 A KR1019950018545 A KR 1019950018545A KR 19950018545 A KR19950018545 A KR 19950018545A KR 970003575 A KR970003575 A KR 970003575A
Authority
KR
South Korea
Prior art keywords
cleaning method
wafer cleaning
wafer
cleaning
Prior art date
Application number
KR1019950018545A
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR1019950018545A priority Critical patent/KR970003575A/ko
Publication of KR970003575A publication Critical patent/KR970003575A/ko

Links

KR1019950018545A 1995-06-30 1995-06-30 웨이퍼 세정방법 KR970003575A (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019950018545A KR970003575A (ko) 1995-06-30 1995-06-30 웨이퍼 세정방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019950018545A KR970003575A (ko) 1995-06-30 1995-06-30 웨이퍼 세정방법

Publications (1)

Publication Number Publication Date
KR970003575A true KR970003575A (ko) 1997-01-28

Family

ID=60934122

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950018545A KR970003575A (ko) 1995-06-30 1995-06-30 웨이퍼 세정방법

Country Status (1)

Country Link
KR (1) KR970003575A (ko)

Similar Documents

Publication Publication Date Title
DE69740003D1 (de) Reinigungsmethode
KR960012337A (ko) 에칭방법
DE69534965D1 (de) Abscheidungsverfahren
DE69622170D1 (de) Reinigungsmittelstücke
DE69619207D1 (de) Polierverfahren
ID20353A (id) Metoda membersihkan radikal bebas menggunakan ekstrat oranye
DE69620151D1 (de) Reinigungsvorrichtung
NO980223L (no) Rengjöringsanordning
DE69823012D1 (de) Reinigungsverfahren
DE69617977D1 (de) Reinigungsverfahren
DE69627669T2 (de) Reinigungsverfahren
FI972124A0 (fi) Puhdistusmenetelmä
DE69500373D1 (de) Reinigungsverfahren
KR970003575A (ko) 웨이퍼 세정방법
FI955761A0 (fi) Kipsin puhdistusmenetelmä
KR960032734U (ko) 웨이퍼 세정장치
IT1283044B1 (it) Metodo per la sbianca di detergenti
KR970015306U (ko) 웨이퍼 세정장치
KR960003092U (ko) 웨이퍼 세정장치
KR970011198U (ko) 웨이퍼 세정조
KR960026708U (ko) 세정기구
KR970007225U (ko) 웨이퍼 세척 장치
FI941216A0 (fi) Puhdistusmenetelmä
FI961633A (fi) Puhdistusmenetelmä
KR970003198U (ko) 웨이퍼 세정장치

Legal Events

Date Code Title Description
WITN Withdrawal due to no request for examination