KR970003334B1 - Soft magnetic alloy material - Google Patents
Soft magnetic alloy material Download PDFInfo
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- KR970003334B1 KR970003334B1 KR1019930026356A KR930026356A KR970003334B1 KR 970003334 B1 KR970003334 B1 KR 970003334B1 KR 1019930026356 A KR1019930026356 A KR 1019930026356A KR 930026356 A KR930026356 A KR 930026356A KR 970003334 B1 KR970003334 B1 KR 970003334B1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F1/00—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
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Abstract
Description
제1도는 본 발명인 자성합금박막의 B-H 곡선도.1 is a B-H curve of the magnetic alloy thin film of the present invention.
제2도는 본 발명인 자성합금박막의 주파수에 따른 투자율 특성을 나타낸 그래프.2 is a graph showing the magnetic permeability characteristics according to the frequency of the magnetic alloy thin film of the present invention.
제3도는 본 발명인 자성합금박막의 온도에 따른 보자력 특성을 나타낸 그래프.Figure 3 is a graph showing the coercive force characteristics according to the temperature of the magnetic alloy thin film of the present invention.
본 발명의 자기변환소자(특히 자기헤드)에 사용되는 자성합급에 관한 것으로, 특히 우수한 연자기 특성을 갖는 자성합금재료를 사용하여 높은 포화자화값과 고주파 투자율 특성이 우수한 자기 변환 소자의 재료에 관한 것이다.The present invention relates to a magnetic alloy used in a magnetic conversion element (particularly a magnetic head) of the present invention, and more particularly to a material of a magnetic conversion element having a high saturation magnetization value and a high frequency permeability characteristic using a magnetic alloy material having excellent soft magnetic properties. will be.
오디오(Audio), 비디오(Video), 컴퓨터(Computer)보조기억장치 등에 사용되는 자기 기록의 최근 기술 추세는 기록밀도의 고밀도화와 이에 따른 사용 주파수의 고주파화로 진행되고 있다.The recent technology trend of magnetic recording used in audio, video, and computer auxiliary storage devices is proceeding with higher density of recording density and higher frequency of use frequency.
기록밀도를 높이기 위해서는 사용되는 매체의 고보자력이 요구된다.In order to increase the recording density, a high coercive force of the medium to be used is required.
따라서 이에 대응하여 기록-재생을 하는 자기변환소자인 자기헤드 재료는, 고포화 자속밀도(Bs), 고주파 영역에서 고투자율(μ), 낮은 보자력(Hc), 낮은 자기이방성(Hk), 낮은 자왜(λ), 고전기비저항(9), 내식성, 내마모성 등과 같은 특성이 요구되고 있다.Accordingly, the magnetic head material, which is a recording / reproducing magnetic conversion element, has a high magnetic flux density (B s ), a high permeability (μ) in the high frequency region, a low coercive force (H c ), and a low magnetic anisotropy (H k ). Properties such as low magnetostriction (λ), high air resistivity (9), corrosion resistance and abrasion resistance are required.
현재 자기헤드로 사용되고 있는 재료는 (표 1)과 같은 특성을 갖는 것으로, Mn-Zn Ferrite 헤드의 갭(Gap)사이에 고포화 자속밀도값을 갖는 박막을 스파터링(sputtering)방법으로 성막한 MIG(Metal In Gap)헤드가 사용되고 있고, 그 재료는 주로 센더스트(sendust)합금이 사용되며, 최근에는 Fe-N계 합금이 개발되어 응용이 시도되고 있다.The material currently used as a magnetic head has the characteristics as shown in Table 1, and MIG formed by sputtering a thin film having a high saturation magnetic flux density value between gaps of a Mn-Zn Ferrite head. (Metal In Gap) heads are used, and the material is mainly used as sender (sendust) alloy, and recently, Fe-N-based alloys have been developed and applied.
일반적으로 자기헤드재료는 기록-재생을 원활히 하기 위해서는 매체의 보자력보다 5∼7배의 포화자화값을 가져야 되고, 투자율이 높아야 된다.In general, the magnetic head material should have a saturation magnetization value of 5 to 7 times the coercive force of the medium in order to facilitate recording and reproducing, and has a high permeability.
그러나 현재 사용되고 있는 매체에는 샌더스트 등의 헤드 재료로 어느 정도는 가능하지만 더 높은 기록밀도를 가지는 매체에는 어렵기 때문에 높은 포화자속밀도와 고투자율을 갖는 새로운 재료의 개발이 요구되고 있다.However, the presently used medium is possible to some extent with a head material such as sanddust, but is difficult for a medium having a higher recording density. Therefore, development of a new material having high saturation magnetic flux density and high permeability is required.
본 발명은 종래와 다른 합금 조성물로 하여 더 높은 포화자화값을 갖고, 고주파 투자율 특성이 우수한 자기변환소자를 갖는 자성합금재료를 제공하고자 하는데 그 목적이 있다.An object of the present invention is to provide a magnetic alloy material having a magnetic conversion element having a higher saturation magnetization value and excellent high-frequency permeability characteristics as an alloy composition different from the prior art.
이하, 본 발명을 설명한다.Hereinafter, the present invention will be described.
본 발명의 자성합금박막 조성범위는 FexMoyCz(x, y, z : at%)로 이루어지되, 여기서 70≤x≤95, 0＜y≤20, 0＜z≤20 범위이다.Magnetic alloy thin film composition range of the present invention is made of Fe x Mo y C z (x, y, z: at%), where 70≤x≤95, 0 <y≤20, 0 <z≤20.
이와 같은 조성을 이용한 자기헤드를 제조함에 있어서는 자기 헤드의 갭(Gap) 사이에 고주파 자기스퍼터링(R.F Magnetron Sputtering)방법으로 상기한 조성을 갖는 합금박막을 성막하고 열처리를 통하여 우수한 자기특성을 얻는다.In manufacturing a magnetic head using such a composition, an alloy thin film having the composition described above is formed between the gaps of the magnetic head by a high frequency magnetic sputtering method, and excellent magnetic properties are obtained through heat treatment.
(표 2)는 본 발명의 실시예를 나타낸 것으로, Fe95Mo5, Fe90Mo10, Fe85Mo15의 세가지 조성의 ø4" 타겟(target)을 사용하고 그 타겟위에 5×5×1mm의 두께의 카본칩(carbon chip)을 얹어 그 수를 변화시켜 카본(C)함량을 조절하였다.Table 2 shows an embodiment of the present invention, using a ø 4 "target with three compositions of Fe 95 Mo 5 , Fe 90 Mo 10 , and Fe 85 Mo 15 , and 5 × 5 × 1 mm on the target. Carbon (C) content was adjusted by placing a carbon chip having a thickness of.
이러한 방법으로 합금박막을 성막하고 550℃에서 1시간 열처리한 후의 합금 박막 조성에 따른 포화자속밀도(Bs) 및 투자율(μ)값의 결과는 (표 2)와 같이 나타났다.In this manner, after the alloy thin film was formed and heat treated at 550 ° C. for 1 hour, the results of the saturation magnetic flux density (B s ) and the permeability (μ) value according to the alloy thin film composition were shown in Table 2 below.
이 결과 Fe90Mo10타겟을 사용하여 Fe : 85∼88at%, Mo : 6∼8at%, C : 4∼9at%에서 자기 특성이 종래보다 가장 우수하였다.As a result, the magnetic properties were the most excellent in the Fe: 85 to 88 at%, Mo: 6 to 8 at%, C: 4 to 9 at% using the Fe 90 Mo 10 target.
이때 포화자속밀도는 약 17KG(제1도 참조), 투자율은 3000∼4000정도였고 주파수 특성으로 고주파 대역까지 우수한 특성을 보였다(제2도).At this time, the saturation magnetic flux density was about 17KG (see Fig. 1), the permeability was about 3000 ~ 4000, and the frequency characteristic was excellent up to the high frequency band (Fig. 2).
보자력은 0.30e 이하로 우수한 연자기 특성을 나타냈고, 온도에 따른 보자력 특성은 제3도와 같이 나타났다.The coercive force was less than 0.30e and showed excellent soft magnetic properties, and the coercive force with temperature was shown in FIG.
[표 1]TABLE 1
[표 2]TABLE 2
이상에서와 같이 본 발명은 자기헤드용 금속자성박막재료를 종래와는 달리 Fe-Mo-C 조성으로 하여 포화자속밀도, 투자율, 보자력 등이 우수한 연자기 특성을 갖게 함으로써 더욱 높은 밀도를 가지는 매체에 본 발명의 자기헤드를 사용할 수 있다.As described above, the present invention provides a magnetic magnetic metal thin film material having a higher magnetic density by using a Fe-Mo-C composition, which has superior magnetic flux characteristics such as saturation magnetic flux density, permeability, coercivity, and the like. The magnetic head of the present invention can be used.
Claims (2)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019930026356A KR970003334B1 (en) | 1993-12-03 | 1993-12-03 | Soft magnetic alloy material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019930026356A KR970003334B1 (en) | 1993-12-03 | 1993-12-03 | Soft magnetic alloy material |
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| Publication Number | Publication Date |
|---|---|
| KR950020775A KR950020775A (en) | 1995-07-24 |
| KR970003334B1 true KR970003334B1 (en) | 1997-03-17 |
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| Application Number | Title | Priority Date | Filing Date |
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| KR1019930026356A KR970003334B1 (en) | 1993-12-03 | 1993-12-03 | Soft magnetic alloy material |
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| KR (1) | KR970003334B1 (en) |
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1993
- 1993-12-03 KR KR1019930026356A patent/KR970003334B1/en not_active IP Right Cessation
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| KR950020775A (en) | 1995-07-24 |
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