KR960006349U - Semiconductor wafer transport device - Google Patents

Semiconductor wafer transport device

Info

Publication number
KR960006349U
KR960006349U KR2019940016817U KR19940016817U KR960006349U KR 960006349 U KR960006349 U KR 960006349U KR 2019940016817 U KR2019940016817 U KR 2019940016817U KR 19940016817 U KR19940016817 U KR 19940016817U KR 960006349 U KR960006349 U KR 960006349U
Authority
KR
South Korea
Prior art keywords
semiconductor wafer
transport device
wafer transport
semiconductor
wafer
Prior art date
Application number
KR2019940016817U
Other languages
Korean (ko)
Other versions
KR200194078Y1 (en
Inventor
지수연
정철원
Original Assignee
현대전자산업주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대전자산업주식회사 filed Critical 현대전자산업주식회사
Priority to KR2019940016817U priority Critical patent/KR200194078Y1/en
Publication of KR960006349U publication Critical patent/KR960006349U/en
Application granted granted Critical
Publication of KR200194078Y1 publication Critical patent/KR200194078Y1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Robotics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR2019940016817U 1994-07-07 1994-07-07 Semiconductor wafer transfer apparatus KR200194078Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940016817U KR200194078Y1 (en) 1994-07-07 1994-07-07 Semiconductor wafer transfer apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940016817U KR200194078Y1 (en) 1994-07-07 1994-07-07 Semiconductor wafer transfer apparatus

Publications (2)

Publication Number Publication Date
KR960006349U true KR960006349U (en) 1996-02-17
KR200194078Y1 KR200194078Y1 (en) 2000-09-01

Family

ID=19387869

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940016817U KR200194078Y1 (en) 1994-07-07 1994-07-07 Semiconductor wafer transfer apparatus

Country Status (1)

Country Link
KR (1) KR200194078Y1 (en)

Also Published As

Publication number Publication date
KR200194078Y1 (en) 2000-09-01

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