KR950030227A - X-Y Stage Unit in Semiconductor Manufacturing Equipment - Google Patents
X-Y Stage Unit in Semiconductor Manufacturing Equipment Download PDFInfo
- Publication number
- KR950030227A KR950030227A KR1019940007172A KR19940007172A KR950030227A KR 950030227 A KR950030227 A KR 950030227A KR 1019940007172 A KR1019940007172 A KR 1019940007172A KR 19940007172 A KR19940007172 A KR 19940007172A KR 950030227 A KR950030227 A KR 950030227A
- Authority
- KR
- South Korea
- Prior art keywords
- base plate
- stage unit
- semiconductor manufacturing
- manufacturing equipment
- unit
- Prior art date
Links
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
본원은 반도체 장비인 엑스-와이 스테이지 유니트(X-Y stage unit)에 관한 것으로서, 그 목적은 피에조유니트의 진동에 의한 파손 및 마모가 적은 엑스-와이 스테이지 유니트를 제공하는데 있다. 이러한 목적은 베이스 플레이트(11)와, 상기 베이스 플레이트(11)의 중심부에 설치된 피에조 유니트(12)와, 상기 베이스 플레이트(11)의 상부에 고정나사(14)로 고정되는 세라믹척(13)을 구비한 엑스-와이 스테이지 유니트에 있어서, 상기 세라믹척(13)과 베이스플레이트(11) 사이에 다수개의 신축성 고무(15)가 개재됨으로서 실현된다.The present invention relates to an X-Y stage unit, which is a semiconductor device, and an object thereof is to provide an X-Y stage unit having less damage and abrasion caused by vibration of a piezo unit. The purpose is to provide a base plate 11, a piezo unit 12 installed at the center of the base plate 11, and a ceramic chuck 13 fixed to the upper portion of the base plate 11 with fixing screws 14. In the provided X-Y stage unit, a plurality of elastic rubbers 15 are interposed between the ceramic chuck 13 and the base plate 11.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.
제2도는 본 발명에 따른 엑스-와이 스테이지 유니트의 분해 조립도.2 is an exploded view of the X-Y stage unit according to the present invention.
Claims (2)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019940007172A KR950030227A (en) | 1994-04-06 | 1994-04-06 | X-Y Stage Unit in Semiconductor Manufacturing Equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019940007172A KR950030227A (en) | 1994-04-06 | 1994-04-06 | X-Y Stage Unit in Semiconductor Manufacturing Equipment |
Publications (1)
Publication Number | Publication Date |
---|---|
KR950030227A true KR950030227A (en) | 1995-11-24 |
Family
ID=66677403
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019940007172A KR950030227A (en) | 1994-04-06 | 1994-04-06 | X-Y Stage Unit in Semiconductor Manufacturing Equipment |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR950030227A (en) |
-
1994
- 1994-04-06 KR KR1019940007172A patent/KR950030227A/en not_active Application Discontinuation
Similar Documents
Publication | Publication Date | Title |
---|---|---|
ES2034234T3 (en) | THERMOCONDUCTOR SET. | |
BR9303897A (en) | Machine assembly component and assembly process | |
ATE15777T1 (en) | BUFFER SYSTEM FOR IMPACT DEVICES. | |
KR970053294A (en) | Semiconductor Wafer Fixture | |
FR2650355B1 (en) | IMPROVEMENTS ON VIBRATION DAMPING DEVICES | |
MX172724B (en) | RUBBER SUPPORT WITH HYDRAULIC DAMPING | |
EP1367290A3 (en) | V-ribbed belt | |
FR2710454B1 (en) | Semiconductor device, of the semiconductor on insulator type, with tolerance towards electrostatic discharges. | |
DE69830645D1 (en) | Support element for instruments or speakers | |
ATE197840T1 (en) | ELECTRICALLY CONDUCTIVE PIPE OR CABLE CLAMP | |
KR950030227A (en) | X-Y Stage Unit in Semiconductor Manufacturing Equipment | |
DE50103697D1 (en) | Spring pad | |
ATE441795T1 (en) | VIBRATION DAMPING MOUNT | |
KR900012504A (en) | Speaker | |
NO912811L (en) | SURFACE PLATE. | |
DE69403247D1 (en) | Wave-receiving piezoelectric arrangement | |
MY131046A (en) | Split foot damper | |
BR9713790A (en) | Device for stamping a substrate, using it, and processes for forming an elastomeric coating on a device for stamping a substrate and for stamping a detergent bar. | |
KR900000536A (en) | Bridge device | |
ATE309425T1 (en) | ANTI-VIBRATION MOUNT WITH TWO DEGREES OF FREEDOM | |
ATE289371T1 (en) | NOISE PROTECTION WALL SEGMENT WITH PLASTIC PANELS | |
SE0102491D0 (en) | Contact element | |
DE59806389D1 (en) | Elastic holder for vibration-sensitive or vibration-emitting assemblies | |
SE8206035L (en) | DEVICE TOOLS DEVICE | |
KR900005877Y1 (en) | Leg of electronic range |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
WITN | Withdrawal due to no request for examination |