KR950030227A - X-Y Stage Unit in Semiconductor Manufacturing Equipment - Google Patents

X-Y Stage Unit in Semiconductor Manufacturing Equipment Download PDF

Info

Publication number
KR950030227A
KR950030227A KR1019940007172A KR19940007172A KR950030227A KR 950030227 A KR950030227 A KR 950030227A KR 1019940007172 A KR1019940007172 A KR 1019940007172A KR 19940007172 A KR19940007172 A KR 19940007172A KR 950030227 A KR950030227 A KR 950030227A
Authority
KR
South Korea
Prior art keywords
base plate
stage unit
semiconductor manufacturing
manufacturing equipment
unit
Prior art date
Application number
KR1019940007172A
Other languages
Korean (ko)
Inventor
김태규
Original Assignee
문정환
금성일렉트론 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 문정환, 금성일렉트론 주식회사 filed Critical 문정환
Priority to KR1019940007172A priority Critical patent/KR950030227A/en
Publication of KR950030227A publication Critical patent/KR950030227A/en

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

본원은 반도체 장비인 엑스-와이 스테이지 유니트(X-Y stage unit)에 관한 것으로서, 그 목적은 피에조유니트의 진동에 의한 파손 및 마모가 적은 엑스-와이 스테이지 유니트를 제공하는데 있다. 이러한 목적은 베이스 플레이트(11)와, 상기 베이스 플레이트(11)의 중심부에 설치된 피에조 유니트(12)와, 상기 베이스 플레이트(11)의 상부에 고정나사(14)로 고정되는 세라믹척(13)을 구비한 엑스-와이 스테이지 유니트에 있어서, 상기 세라믹척(13)과 베이스플레이트(11) 사이에 다수개의 신축성 고무(15)가 개재됨으로서 실현된다.The present invention relates to an X-Y stage unit, which is a semiconductor device, and an object thereof is to provide an X-Y stage unit having less damage and abrasion caused by vibration of a piezo unit. The purpose is to provide a base plate 11, a piezo unit 12 installed at the center of the base plate 11, and a ceramic chuck 13 fixed to the upper portion of the base plate 11 with fixing screws 14. In the provided X-Y stage unit, a plurality of elastic rubbers 15 are interposed between the ceramic chuck 13 and the base plate 11.

Description

반도체 제조 장비의 엑스-와이 스테이지 유니트X-Y Stage Unit in Semiconductor Manufacturing Equipment

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제2도는 본 발명에 따른 엑스-와이 스테이지 유니트의 분해 조립도.2 is an exploded view of the X-Y stage unit according to the present invention.

Claims (2)

베이스플레이트(11)와, 상기 베이스 플레이트(11)의 중심부에 설치된 피에조 유니트(12)와, 상기 베이스 플레이트(11)의 상부에 고정 나사(14)로 고정되는 세라믹척(13)을 구비한 엑스-와이 스테이지 유니트에 있어서, 상기 세라믹척(13)과 베이스플레이트(11)사이에 다수개의 신축성 고무(15)가 개재된 것을 특징으로 하는 엑스-와이 스테이지 유니트.X having a base plate 11, a piezo unit 12 installed in the center of the base plate 11, and a ceramic chuck 13 fixed to the upper portion of the base plate 11 with a fixing screw 14 -Y stage unit, characterized in that a plurality of elastic rubber (15) is interposed between the ceramic chuck (13) and the base plate (11). 제1항에 있어서, 상기 고무(15)의 신축성 정도는 적어도 30마이크로미터 이상이고, 강도는 세라믹척(13)의 강도보다 약한 것을 특징으로 하는 엑스-와이 스테이지 유니트.2. The X-Y stage unit according to claim 1, wherein the degree of elasticity of the rubber (15) is at least 30 micrometers or more and the strength is weaker than that of the ceramic chuck (13). ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임※ Note: The disclosure is based on the initial application.
KR1019940007172A 1994-04-06 1994-04-06 X-Y Stage Unit in Semiconductor Manufacturing Equipment KR950030227A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019940007172A KR950030227A (en) 1994-04-06 1994-04-06 X-Y Stage Unit in Semiconductor Manufacturing Equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019940007172A KR950030227A (en) 1994-04-06 1994-04-06 X-Y Stage Unit in Semiconductor Manufacturing Equipment

Publications (1)

Publication Number Publication Date
KR950030227A true KR950030227A (en) 1995-11-24

Family

ID=66677403

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019940007172A KR950030227A (en) 1994-04-06 1994-04-06 X-Y Stage Unit in Semiconductor Manufacturing Equipment

Country Status (1)

Country Link
KR (1) KR950030227A (en)

Similar Documents

Publication Publication Date Title
ES2034234T3 (en) THERMOCONDUCTOR SET.
BR9303897A (en) Machine assembly component and assembly process
ATE15777T1 (en) BUFFER SYSTEM FOR IMPACT DEVICES.
KR970053294A (en) Semiconductor Wafer Fixture
FR2650355B1 (en) IMPROVEMENTS ON VIBRATION DAMPING DEVICES
MX172724B (en) RUBBER SUPPORT WITH HYDRAULIC DAMPING
EP1367290A3 (en) V-ribbed belt
FR2710454B1 (en) Semiconductor device, of the semiconductor on insulator type, with tolerance towards electrostatic discharges.
DE69830645D1 (en) Support element for instruments or speakers
ATE197840T1 (en) ELECTRICALLY CONDUCTIVE PIPE OR CABLE CLAMP
KR950030227A (en) X-Y Stage Unit in Semiconductor Manufacturing Equipment
DE50103697D1 (en) Spring pad
ATE441795T1 (en) VIBRATION DAMPING MOUNT
KR900012504A (en) Speaker
NO912811L (en) SURFACE PLATE.
DE69403247D1 (en) Wave-receiving piezoelectric arrangement
MY131046A (en) Split foot damper
BR9713790A (en) Device for stamping a substrate, using it, and processes for forming an elastomeric coating on a device for stamping a substrate and for stamping a detergent bar.
KR900000536A (en) Bridge device
ATE309425T1 (en) ANTI-VIBRATION MOUNT WITH TWO DEGREES OF FREEDOM
ATE289371T1 (en) NOISE PROTECTION WALL SEGMENT WITH PLASTIC PANELS
SE0102491D0 (en) Contact element
DE59806389D1 (en) Elastic holder for vibration-sensitive or vibration-emitting assemblies
SE8206035L (en) DEVICE TOOLS DEVICE
KR900005877Y1 (en) Leg of electronic range

Legal Events

Date Code Title Description
WITN Withdrawal due to no request for examination