KR950008731A - Zinc oxide thin film formation method by atmospheric steam injection method - Google Patents

Zinc oxide thin film formation method by atmospheric steam injection method Download PDF

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Publication number
KR950008731A
KR950008731A KR1019930018348A KR930018348A KR950008731A KR 950008731 A KR950008731 A KR 950008731A KR 1019930018348 A KR1019930018348 A KR 1019930018348A KR 930018348 A KR930018348 A KR 930018348A KR 950008731 A KR950008731 A KR 950008731A
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KR
South Korea
Prior art keywords
thin film
film formation
formation method
zinc
zinc oxide
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KR1019930018348A
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Korean (ko)
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KR960007398B1 (en
Inventor
주승기
이환수
Original Assignee
이기준
서울대학교 공과대학 교육연구재단
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Priority to KR1019930018348A priority Critical patent/KR960007398B1/en
Publication of KR950008731A publication Critical patent/KR950008731A/en
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Publication of KR960007398B1 publication Critical patent/KR960007398B1/en

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    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)

Abstract

아연증기에 수증기를 분사하여 소정온도의 기판상에 ZnO투명박막을 형성하는 방법에 관한 것이다.The present invention relates to a method for forming a ZnO transparent thin film on a substrate at a predetermined temperature by injecting steam into zinc vapor.

Description

상압증기 분사방식에 의한 산화아연 박막형성방법Zinc oxide thin film formation method by atmospheric steam injection method

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

Claims (3)

챔버를 대기압의 비활성 분위기로 유지하고, 기판의 온도를 200 내지 400℃로 유지하고, 아연의 끓는 점보다 낮은 온도 바람직하게는 800 내지 900℃를 유지된 아연조로 부터 챔버내로 아연증기를 반송하고, 그리고 수증기를 노즐을 통해 아연증기에 분사하는 것을 특징으로 하는 ZnO박막형성방법.The chamber is kept in an inert atmosphere at atmospheric pressure, the temperature of the substrate is maintained at 200 to 400 ° C., and zinc vapor is returned into the chamber from a zinc bath maintained at a temperature lower than the boiling point of zinc, preferably 800 to 900 ° C., And ZnO thin film formation method characterized in that the injection of steam to the zinc vapor through the nozzle. 제1항에 있어서, 비활성 분위기를 유지하기 위해 에어커튼을 이용하는 것을 특징으로 하는 ZnO박막형성방법.The ZnO thin film formation method according to claim 1, wherein an air curtain is used to maintain an inert atmosphere. 제1항에 있어서, 아연증기 및 수증기의 반송을 위해 반송가스를 사용하며, 아연증기용 반송가스는 아연증기의 냉각방지를 위해 예열되는 것을 특징으로 하는 ZnO박막형성방법.The ZnO thin film forming method according to claim 1, wherein a conveying gas is used for conveying zinc vapor and steam, and the conveying gas for zinc vapor is preheated to prevent cooling of the zinc vapor. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019930018348A 1993-09-13 1993-09-13 Preparation of zno thin film by spraying vapor KR960007398B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019930018348A KR960007398B1 (en) 1993-09-13 1993-09-13 Preparation of zno thin film by spraying vapor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019930018348A KR960007398B1 (en) 1993-09-13 1993-09-13 Preparation of zno thin film by spraying vapor

Publications (2)

Publication Number Publication Date
KR950008731A true KR950008731A (en) 1995-04-19
KR960007398B1 KR960007398B1 (en) 1996-05-31

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Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019930018348A KR960007398B1 (en) 1993-09-13 1993-09-13 Preparation of zno thin film by spraying vapor

Country Status (1)

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Publication number Publication date
KR960007398B1 (en) 1996-05-31

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