KR940022787A - Semiconductor Device Insulation Method - Google Patents
Semiconductor Device Insulation Method Download PDFInfo
- Publication number
- KR940022787A KR940022787A KR1019930003568A KR930003568A KR940022787A KR 940022787 A KR940022787 A KR 940022787A KR 1019930003568 A KR1019930003568 A KR 1019930003568A KR 930003568 A KR930003568 A KR 930003568A KR 940022787 A KR940022787 A KR 940022787A
- Authority
- KR
- South Korea
- Prior art keywords
- oxide film
- width
- semiconductor device
- budvik
- insulation
- Prior art date
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Element Separation (AREA)
- Local Oxidation Of Silicon (AREA)
- Formation Of Insulating Films (AREA)
Abstract
본 발명은 반도체 소자 절연방법에 관한 것으로, 종래의 반도체 소자 절연방법은 버드빅 확산방지를 위해 2회의 질화막증착 및 에칭을 하므로 실리콘의 결정적소자가 급격히 변화되고, 불순물의 양을 필요보다 크게 해야 하기 때문에 접합기생캐패시턴스가 커지며, 절연폭을 1㎛ 이내로 줄이기 어렵고, 2회에 걸쳐 필드산 화막을 형성함으로 공정에 번거로운 문제점이 있었다.The present invention relates to a method for insulating a semiconductor device, and the conventional method for insulating a semiconductor device performs two deposition and etching of nitride films to prevent Budvik diffusion. Therefore, the critical device of silicon is rapidly changed and the amount of impurities must be larger than necessary. Therefore, the parasitic capacitance of the junction becomes large, and it is difficult to reduce the insulation width to within 1 μm, and there is a troublesome process in forming the field oxide film twice.
본 발명은 이러한 문제점을 해결하기 위하여 확실한 매몰산화가 이루어지면서 HSG폴리실리콘을 마스크로 사용하여 절연을 하는 것으로써 버드빅 폭을 필드산화시간으로 조정가능하고, 불순물양을 적게 할 수 있어 접합기생캐패시턴스를 줄일수 있으며, 절연폭을 버드빅 폭을 포함하여 0.5㎛ 수준으로 만들수 있게 된다.In order to solve the above problems, the present invention is able to adjust Budvik width by field oxidation time and reduce the amount of impurities by performing insulation using HSG polysilicon as a mask while making sure investment oxidation. The insulation width can be reduced to 0.5㎛ including Budvik width.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.
제2도의 (가) 내지 (사)는 본 발명 반도체소자 절연방법 공정 순서도이다.2A to 2G are process flowcharts of the semiconductor device insulation method of the present invention.
Claims (2)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019930003568A KR100253268B1 (en) | 1993-03-10 | 1993-03-10 | Semiconductor element isolation method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019930003568A KR100253268B1 (en) | 1993-03-10 | 1993-03-10 | Semiconductor element isolation method |
Publications (2)
Publication Number | Publication Date |
---|---|
KR940022787A true KR940022787A (en) | 1994-10-21 |
KR100253268B1 KR100253268B1 (en) | 2000-04-15 |
Family
ID=19351902
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019930003568A KR100253268B1 (en) | 1993-03-10 | 1993-03-10 | Semiconductor element isolation method |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR100253268B1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR19990077613A (en) * | 1998-03-06 | 1999-10-25 | 클라크 3세 존 엠. | Electronic isolation utilizing lateral fill recessed locos |
-
1993
- 1993-03-10 KR KR1019930003568A patent/KR100253268B1/en not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR19990077613A (en) * | 1998-03-06 | 1999-10-25 | 클라크 3세 존 엠. | Electronic isolation utilizing lateral fill recessed locos |
Also Published As
Publication number | Publication date |
---|---|
KR100253268B1 (en) | 2000-04-15 |
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