KR920001672A - 반송방법 및 반송장치 - Google Patents

반송방법 및 반송장치

Info

Publication number
KR920001672A
KR920001672A KR1019900009189A KR900009189A KR920001672A KR 920001672 A KR920001672 A KR 920001672A KR 1019900009189 A KR1019900009189 A KR 1019900009189A KR 900009189 A KR900009189 A KR 900009189A KR 920001672 A KR920001672 A KR 920001672A
Authority
KR
South Korea
Prior art keywords
transfer
transfer device
transfer method
Prior art date
Application number
KR1019900009189A
Other languages
English (en)
Other versions
KR0155157B1 (ko
Inventor
카쓰미 이시이
요시토쿠 모치즈키
Original Assignee
도오교오 에레구토론 사가미 가부시끼가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 도오교오 에레구토론 사가미 가부시끼가이샤 filed Critical 도오교오 에레구토론 사가미 가부시끼가이샤
Publication of KR920001672A publication Critical patent/KR920001672A/ko
Application granted granted Critical
Publication of KR0155157B1 publication Critical patent/KR0155157B1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR1019900009189A 1988-12-29 1990-06-21 반송방법 및 반송장치 KR0155157B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP33092188A JP2639424B2 (ja) 1988-12-29 1988-12-29 搬送方法
JP330921 1988-12-29

Publications (2)

Publication Number Publication Date
KR920001672A true KR920001672A (ko) 1992-01-30
KR0155157B1 KR0155157B1 (ko) 1998-12-01

Family

ID=18237948

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019900009189A KR0155157B1 (ko) 1988-12-29 1990-06-21 반송방법 및 반송장치

Country Status (2)

Country Link
JP (1) JP2639424B2 (ko)
KR (1) KR0155157B1 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100558471B1 (ko) * 1999-12-07 2006-03-07 삼성전자주식회사 반도체 디바이스 반송 시스템

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3258748B2 (ja) * 1993-02-08 2002-02-18 東京エレクトロン株式会社 熱処理装置
JP4860975B2 (ja) * 2005-10-04 2012-01-25 株式会社日立国際電気 基板処理装置および半導体装置の製造方法
KR100946994B1 (ko) * 2005-10-04 2010-03-10 가부시키가이샤 히다치 고쿠사이 덴키 기판 처리 장치 및 반도체 장치의 제조 방법
JP2010283402A (ja) * 2010-09-24 2010-12-16 Tokyo Electron Ltd 基板処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100558471B1 (ko) * 1999-12-07 2006-03-07 삼성전자주식회사 반도체 디바이스 반송 시스템

Also Published As

Publication number Publication date
JP2639424B2 (ja) 1997-08-13
KR0155157B1 (ko) 1998-12-01
JPH02178945A (ja) 1990-07-11

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Legal Events

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Year of fee payment: 6

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