KR910017165A - 형상측정장치 - Google Patents

형상측정장치 Download PDF

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Publication number
KR910017165A
KR910017165A KR1019910003677A KR910003677A KR910017165A KR 910017165 A KR910017165 A KR 910017165A KR 1019910003677 A KR1019910003677 A KR 1019910003677A KR 910003677 A KR910003677 A KR 910003677A KR 910017165 A KR910017165 A KR 910017165A
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KR
South Korea
Prior art keywords
optical probe
coordinate
shape measuring
reflective surface
support member
Prior art date
Application number
KR1019910003677A
Other languages
English (en)
Other versions
KR940003918B1 (ko
Inventor
게이아찌 요시즈미
케이시 쿠보
Original Assignee
다니이 아끼오
마쯔시다덴기산교 가부시기가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by 다니이 아끼오, 마쯔시다덴기산교 가부시기가이샤 filed Critical 다니이 아끼오
Publication of KR910017165A publication Critical patent/KR910017165A/ko
Application granted granted Critical
Publication of KR940003918B1 publication Critical patent/KR940003918B1/ko

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
    • G01B11/007—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines feeler heads therefor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/861—Scanning tunneling probe
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/868—Scanning probe structure with optical means
    • Y10S977/869—Optical microscope
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/872—Positioner
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/902—Specified use of nanostructure
    • Y10S977/932—Specified use of nanostructure for electronic or optoelectronic application
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/902—Specified use of nanostructure
    • Y10S977/932—Specified use of nanostructure for electronic or optoelectronic application
    • Y10S977/949—Radiation emitter using nanostructure
    • Y10S977/95—Electromagnetic energy
    • Y10S977/951—Laser

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

내용 없음

Description

형상측정장치
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명의 일실시예에 있어서의 주요부의 설명도, 제2도는 동장치의 기구제의 전체구성도, 제3도는 동장치의 Z좌표측정광학계의 원리도.

Claims (3)

  1. 레이저광을 집광시키는 대물렌즈의 촛점위치에 있어야할 반사면의 위치가 어긋나도, 항상 이 반사면에 촛점위치가 오도록 상기 대물렌즈를 광측방향인 Z방향으로 이동시키게 되는 자동촛점맞추기 기능과, 이 반사면으로부터 반사한 레이저광을 참조광과 간섭시키므로서, 반사면의 Z좌표를 측정하는 것이 가능한 수단을 가진 광프로우브와, 이 광프로우브부에 지지부재를 개재해서 Z방향으로 이동가능하게 장착되고 또한 상기 반사면을 구비한 접촉자와, 상기 광프로우브부를 X 또는 XY방향으로 이동시키는 구동수단과, X 또는 XY방향의 광프로우브부의 위치를 측정하는 X 또는 XY좌표측정수단을 가지고, 상기 접촉자를 측정면에 트레이스시키므로서, 측정면의 XZ좌표 또는 XYZ좌표에 있어서의 상기 측정면의 형상을 측정하도록 구성한 것을 특징으로 하는 형상측정장치.
  2. 제1항에 있어서, 상기 지지부재가 스프링에 의해서 구성된 것임을 특징으로 하는 형상측정장치.
  3. 제1항에 있어서, 상기 지지부재가 슬라이드기구에 구성된 것임을 특징으로 하는 형상측정장치.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019910003677A 1990-03-07 1991-03-07 형상측정장치 KR940003918B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2055330A JP2661314B2 (ja) 1990-03-07 1990-03-07 形状測定装置及び形状測定方法
JP2-55330 1990-03-07

Publications (2)

Publication Number Publication Date
KR910017165A true KR910017165A (ko) 1991-11-05
KR940003918B1 KR940003918B1 (ko) 1994-05-09

Family

ID=12995528

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019910003677A KR940003918B1 (ko) 1990-03-07 1991-03-07 형상측정장치

Country Status (3)

Country Link
US (1) US5144150A (ko)
JP (1) JP2661314B2 (ko)
KR (1) KR940003918B1 (ko)

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US5351122A (en) * 1992-05-22 1994-09-27 Micro-G Solutions, Inc. Absolute gravity inline measuring apparatus incorporating improved operating features
JP3000819B2 (ja) * 1993-03-15 2000-01-17 松下電器産業株式会社 三次元測定用プローブ及び形状測定方法
US5419631A (en) * 1994-01-12 1995-05-30 Nearfield Systems Incorporated Three-axis motion tracking interferometer for measurement and correction of positional errors between an article under test and a measurement probe
US5825666A (en) * 1995-06-07 1998-10-20 Freifeld; Daniel Optical coordinate measuring machines and optical touch probes
US5854487A (en) * 1997-02-28 1998-12-29 Park Scientific Instruments Scanning probe microscope providing unobstructed top down and bottom up views
DE19816272C2 (de) * 1998-04-11 2000-05-11 Werth Messtechnik Gmbh Verfahren und Anordnung zur Messung von Strukturen eines Objekts
JP2004529330A (ja) 2001-03-02 2004-09-24 アクセント オプティカル テクノロジーズ，インク． スキャタロメトリを使用するライン・プロファイルの非対称測定
JP3647378B2 (ja) * 2001-03-02 2005-05-11 キヤノン株式会社 マルチプローブを用いた形状測定装置及び測定方法
US7515279B2 (en) 2001-03-02 2009-04-07 Nanometrics Incorporated Line profile asymmetry measurement
US7227647B2 (en) * 2001-07-16 2007-06-05 Werth Messtechnik Gmbh Method for measuring surface properties and co-ordinate measuring device
WO2006050494A2 (en) * 2004-11-03 2006-05-11 Omniprobe, Inc. Apparatus and method of detecting probe tip contact with a surface
JP4933775B2 (ja) * 2005-12-02 2012-05-16 独立行政法人理化学研究所 微小表面形状測定プローブ
KR100764465B1 (ko) * 2006-07-04 2007-10-08 (주)가하 접촉식 삼차원 표면 형상 측정장치
TWI364540B (en) * 2007-12-28 2012-05-21 Ind Tech Res Inst Cantilever sensor system and profilers and biosensors using the same
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GB201215546D0 (en) 2012-08-31 2012-10-17 Infinitesima Ltd Multiple probe detection and actuation
GB201218350D0 (en) 2012-10-12 2012-11-28 Infinitesima Ltd Multiple probe actuation
US10254306B2 (en) 2012-11-29 2019-04-09 Infinitesima Limited Probe calibration or measurement routine
US9383386B2 (en) 2013-03-14 2016-07-05 Oxford Instruments Asylum Research, Inc. Optical beam positioning unit for atomic force microscope
WO2014158290A1 (en) * 2013-03-14 2014-10-02 Aleksander Labuda Optical beam positioning unit for atomic force microscope
EP2913682A1 (en) 2014-02-28 2015-09-02 Infinitesima Limited Probe actuation system with feedback controller
EP2913681A1 (en) 2014-02-28 2015-09-02 Infinitesima Limited Probe system with multiple actuation locations
US10705114B2 (en) 2014-03-12 2020-07-07 Oxford Instruments Asylum Research Inc Metrological scanning probe microscope
US9804193B2 (en) 2014-03-12 2017-10-31 Oxford Instruments Asylum Research, Inc Metrological scanning probe microscope
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US9803972B2 (en) * 2015-12-17 2017-10-31 Mitutoyo Corporation Optical configuration for measurement device
JP6623883B2 (ja) * 2016-03-28 2019-12-25 株式会社デンソー 切削ユニット
GB201705613D0 (en) 2017-04-07 2017-05-24 Infinitesima Ltd Scanning probe system
US10983244B2 (en) * 2017-12-21 2021-04-20 University Of Rochester Method for scanning an object using a gravimeter
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Also Published As

Publication number Publication date
JP2661314B2 (ja) 1997-10-08
JPH03255907A (ja) 1991-11-14
US5144150A (en) 1992-09-01
KR940003918B1 (ko) 1994-05-09

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