KR910011395A - 미소연마방법 및 미소연마공구 - Google Patents

미소연마방법 및 미소연마공구 Download PDF

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Publication number
KR910011395A
KR910011395A KR1019900019861A KR900019861A KR910011395A KR 910011395 A KR910011395 A KR 910011395A KR 1019900019861 A KR1019900019861 A KR 1019900019861A KR 900019861 A KR900019861 A KR 900019861A KR 910011395 A KR910011395 A KR 910011395A
Authority
KR
South Korea
Prior art keywords
polishing
abrasive
movement
magnetic
micro
Prior art date
Application number
KR1019900019861A
Other languages
English (en)
Other versions
KR940007404B1 (ko
Inventor
싱이찌 미즈구찌
슈지 우에다
코오지 카토
노리쯔구 우메하라
Original Assignee
다니이 아끼오
마쯔시다덴기산교 가부시기가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 다니이 아끼오, 마쯔시다덴기산교 가부시기가이샤 filed Critical 다니이 아끼오
Publication of KR910011395A publication Critical patent/KR910011395A/ko
Application granted granted Critical
Publication of KR940007404B1 publication Critical patent/KR940007404B1/ko

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B29/00—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
    • B24B1/005—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes using a magnetic polishing agent
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B35/00—Machines or devices designed for superfinishing surfaces on work, i.e. by means of abrading blocks reciprocating with high frequency
    • B24B35/005—Machines or devices designed for superfinishing surfaces on work, i.e. by means of abrading blocks reciprocating with high frequency for making three-dimensional objects

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)

Abstract

내용 없음

Description

미소연마방법 및 미소연마공구
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명의 실시예를 도시한 연마장치 주요부의 단면구조도,
제2도는 연마공구의 선단부방향으로부터 본 저면도,
제3도는 연마작용의 설명도.

Claims (3)

  1. 연마공구 선단부의 연마부와 피연마재 사이에 자성연마유체를 자기적으로 유지한 상태에서, 상기 연마부를 전왜소자로 이루어진 작동기로 연마면과 평행한 XY방향 또는 연마면과 수직인 Z방향을 미소 운동시키고, 이 연마부의 미소운동을 자성연마유체에 전달해서 피연마재의 연마면을 연마시키는 것을 특징으로 하는 미소연마방법.
  2. 제1항에 있어서 상기 자성연마유체로부터 피연마재에 부가되는 가압력을 압력검지수단으로 검출하고, 검출된 가압력신호로 작동기의 구동을 제어해서 피연마재에 부가되는 가압력을 제어하는 것을 특징으로 하는 미소연마방법.
  3. 선단부가 연마부로 되어 있는 중심요우크와 상기 연마부의 주위에 자기 갭을 만들기 위한 대향요우크와 이들의 요우크에 자기를 흐르게하는 자기 발생수단과, 전왜소자로 이루어지고 상기 연마부를 X-Y 방향으로 미소운동시키는 XY 방향작동기와, 전왜소자로 이루어지고 상기 연마부를 Z방향으로 미소 운동시키는 Z방향 작동기를 구비하는 것을 특징으로 하는 미소연마공구.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019900019861A 1989-12-04 1990-12-04 미소연마방법 및 미소연마공구 KR940007404B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP1-314716 1989-12-04
JP31471689A JPH0777704B2 (ja) 1989-12-04 1989-12-04 微小研磨方法

Publications (2)

Publication Number Publication Date
KR910011395A true KR910011395A (ko) 1991-08-07
KR940007404B1 KR940007404B1 (ko) 1994-08-18

Family

ID=18056705

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019900019861A KR940007404B1 (ko) 1989-12-04 1990-12-04 미소연마방법 및 미소연마공구

Country Status (5)

Country Link
US (1) US5076026A (ko)
EP (1) EP0431553B1 (ko)
JP (1) JPH0777704B2 (ko)
KR (1) KR940007404B1 (ko)
DE (1) DE69014283T2 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100395168B1 (ko) * 2000-06-29 2003-08-21 송치성 자기연마장치

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JP2827540B2 (ja) * 1991-03-11 1998-11-25 松下電器産業株式会社 研磨スピンドル
JP2682260B2 (ja) * 1991-05-09 1997-11-26 松下電器産業株式会社 微小研磨方法及び微小研磨工具
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US5795212A (en) * 1995-10-16 1998-08-18 Byelocorp Scientific, Inc. Deterministic magnetorheological finishing
SE510932C2 (sv) * 1997-02-17 1999-07-12 Volvo Ab Användning av en anordning för reproducerbar ytbearbetning av en provyta i samband med utveckling av lacker, lackerade detaljer eller poleringsutrustning för bilindustrin
US6306011B1 (en) * 1998-05-11 2001-10-23 Dynetics Corporation System for controlling the size and surface geometry of an orifice
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US6257957B1 (en) 1999-12-01 2001-07-10 Gerber Coburn Optical Inc. Tactile feedback system
DE10314625B3 (de) * 2003-04-01 2004-10-14 Optotech Optikmaschinen Gmbh Verfahren und Vorrichtung zum Nacharbeiten von Präzisionsoberflächen
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JP5886596B2 (ja) * 2011-10-28 2016-03-16 Fdk株式会社 研磨バイト及びそれを用いた表面処理装置
CN102672549A (zh) * 2012-03-23 2012-09-19 辽宁科技大学 大曲面磁力研磨抛光装置
US9157010B2 (en) * 2012-07-18 2015-10-13 Cabot Microelectronics Corporation Magnetorheological fluid for ultrasmooth polishing
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JP2019014004A (ja) * 2017-07-06 2019-01-31 日本特殊陶業株式会社 セラミック製品の製造方法
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100395168B1 (ko) * 2000-06-29 2003-08-21 송치성 자기연마장치

Also Published As

Publication number Publication date
KR940007404B1 (ko) 1994-08-18
US5076026A (en) 1991-12-31
JPH0777704B2 (ja) 1995-08-23
DE69014283D1 (de) 1995-01-05
DE69014283T2 (de) 1995-05-18
EP0431553A3 (en) 1991-11-27
JPH03178767A (ja) 1991-08-02
EP0431553A2 (en) 1991-06-12
EP0431553B1 (en) 1994-11-23

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