KR910008528A - 위치결정 장치 - Google Patents
위치결정 장치 Download PDFInfo
- Publication number
- KR910008528A KR910008528A KR1019900015469A KR900015469A KR910008528A KR 910008528 A KR910008528 A KR 910008528A KR 1019900015469 A KR1019900015469 A KR 1019900015469A KR 900015469 A KR900015469 A KR 900015469A KR 910008528 A KR910008528 A KR 910008528A
- Authority
- KR
- South Korea
- Prior art keywords
- carriage
- positioning device
- coordinate direction
- displaceable
- coil system
- Prior art date
Links
- 238000006073 displacement reaction Methods 0.000 claims 4
- 230000003068 static effect Effects 0.000 claims 1
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D3/00—Control of position or direction
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70716—Stages
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
- B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
- B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
- B23Q1/62—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides
- B23Q1/621—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides a single sliding pair followed perpendicularly by a single sliding pair
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
- G05B19/19—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path
- G05B19/39—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path using a combination of the means covered by at least two of the preceding groups G05B19/21, G05B19/27 and G05B19/33
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/37—Measurements
- G05B2219/37275—Laser, interferometer
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/49—Nc machine tool, till multiple
- G05B2219/49271—Air bearing slide, hydraulic, electromagnetic bearing
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/49—Nc machine tool, till multiple
- G05B2219/49276—Floating, air, magnetic suspension xy table, sawyer motor, xenetics
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/49—Nc machine tool, till multiple
- G05B2219/49284—Two cascaded slides, large range sits on small range, piggyback
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
- Mechanical Engineering (AREA)
- Human Computer Interaction (AREA)
- Manufacturing & Machinery (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Control Of Position Or Direction (AREA)
- Machine Tool Units (AREA)
- Machine Tool Positioning Apparatuses (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
내용 없음
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명에 따른 위치결정 장치의 제1실시예의 평면도,
제2도는 제1도의 Ⅱ-Ⅱ선에 따라 취한 확대단면도,
제3도는 제1도의 Ⅲ-Ⅲ선에 따라 취한 확대 단면도.
Claims (4)
- 베이스에 대해 적어도 두 좌표방향(X,Y)으로 변위 가능한 캐리지를 포함하며, 상기 좌표방향에서 캐리지에 대해 변위 가능한 테이블의 변위를 위한 위치 결정 장치에 있어서, 작동시, 테이블은 자석 시스템과 코일 시스템의 로렌쯔힘에 의해서만 캐리지에 결합되며, 상기 좌표방향(X,Y)에 횡으로의 제3좌표 방향(Z)에서 관찰된 베이스와 테이블 사이에서 작동하는 정적가스 베어링에 의해 결정된 캐리지에 대해 위치를 점유하는 것을 특징으로 하는 위치 결정 장치.
- 제1항에 있어서, 위치결정 장치는 한 좌표방향(X)에 변위 가능한 캐리지를 위해 지지체 및 안내부에 고정된 코일 시스템과 캐리지에 고정된 다른 코일 시스템으로 제공되며 반면, 테이블은 변위를 위한 선형선기 모터를 구성하여 서로에 상응하며 X좌표 방향 및 Y좌표 방향으로 캐리지에 대해 테이블을 안내하는 상기 두 코일 시스템의 상대쪽에 배치된 자석 시스템으로 제공되는 것을 특징으로 하는 위치 결정 장치
- 제1항에 있어서, 위치결정 장치는 X좌표 방향으로 변위가능한 제1지지체와 Y좌표 방향으로 변위 가능한 제2지지체에 의해 안내된 캐리지로 제공되며 반면,테이블은 변위를 위한 선형선기 모터를 구성하여 서로에 상응하며 X좌표 및 Y좌표 방향으로 캐리지에 대하여 테이블의 안내를 하는 캐리지내의 코일 시스템 상대쪽에 배치된 자석 시스템으로 제공되는 것을 특징으로 하는 위치 결정 장치.
- 제1항, 제2항 또는 제3항에 있어서, 위치결정 장치는 테이블에 결합되고 그 작동시 위치신호가 제어 장치의 차동 신호를 결정하며, 그 테이블의 단부 위치를 한정하며, 상기 제어장치가 동시에 작동하는 캐리지의 제1피드백 제어와 테이블의 제2피트백 제어를 포함하며 제1피트백 제어에서 관련된 자석시스템과 코일 시스템의 선형힘-전류 범위에서 테이블의 제2피트백 제어에 의해 결정된 가장자리 내에서 캐리지의 위치를 확실히 하는 일련의 세트 포인트를 발생시키는 공통세트 포인트 발전기를 가지는 위치센서로 제공되는 것을 특징으로 하는 위치결정 장치.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL8902471A NL8902471A (nl) | 1989-10-05 | 1989-10-05 | Tweetraps positioneerinrichting. |
NL8902471 | 1989-10-05 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR910008528A true KR910008528A (ko) | 1991-05-31 |
KR0154513B1 KR0154513B1 (ko) | 1998-12-15 |
Family
ID=19855399
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019900015469A KR0154513B1 (ko) | 1989-10-05 | 1990-09-28 | 위치결정 장치 |
Country Status (6)
Country | Link |
---|---|
US (1) | US5120034A (ko) |
EP (1) | EP0421527B1 (ko) |
JP (1) | JP3016088B2 (ko) |
KR (1) | KR0154513B1 (ko) |
DE (1) | DE69010610T2 (ko) |
NL (1) | NL8902471A (ko) |
Families Citing this family (53)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL9100421A (nl) * | 1991-03-08 | 1992-10-01 | Asm Lithography Bv | Ondersteuningsinrichting met een kantelbare objecttafel alsmede optisch lithografische inrichting voorzien van een dergelijke ondersteuningsinrichting. |
JP2714502B2 (ja) * | 1991-09-18 | 1998-02-16 | キヤノン株式会社 | 移動ステージ装置 |
EP0583035B1 (en) * | 1992-08-12 | 1996-11-27 | Koninklijke Philips Electronics N.V. | Transmission mechanism, positioning device provided with such a transmission mechanism and lithographic device provided with such a positioning device |
KR950003660A (ko) * | 1992-08-12 | 1995-02-17 | 제이지에이롤프스 | 변속 기구, 변속 기구를 구비한 위치 설정 장치 및, 위치 설정 장치를 구비한 리도그래픽 장치 |
GB9223716D0 (en) * | 1992-11-12 | 1992-12-23 | British Aerospace | An aircraft landing gear trolley |
DE4307482A1 (de) * | 1993-03-10 | 1994-09-22 | Max Rhodius Gmbh | Werkzeugmaschine |
US7365513B1 (en) | 1994-04-01 | 2008-04-29 | Nikon Corporation | Positioning device having dynamically isolated frame, and lithographic device provided with such a positioning device |
US6989647B1 (en) | 1994-04-01 | 2006-01-24 | Nikon Corporation | Positioning device having dynamically isolated frame, and lithographic device provided with such a positioning device |
US5874820A (en) * | 1995-04-04 | 1999-02-23 | Nikon Corporation | Window frame-guided stage mechanism |
US5528118A (en) | 1994-04-01 | 1996-06-18 | Nikon Precision, Inc. | Guideless stage with isolated reaction stage |
US5850280A (en) | 1994-06-16 | 1998-12-15 | Nikon Corporation | Stage unit, drive table, and scanning exposure and apparatus using same |
US6721034B1 (en) | 1994-06-16 | 2004-04-13 | Nikon Corporation | Stage unit, drive table, and scanning exposure apparatus using the same |
JP3484684B2 (ja) * | 1994-11-01 | 2004-01-06 | 株式会社ニコン | ステージ装置及び走査型露光装置 |
US6246204B1 (en) | 1994-06-27 | 2001-06-12 | Nikon Corporation | Electromagnetic alignment and scanning apparatus |
US5623853A (en) * | 1994-10-19 | 1997-04-29 | Nikon Precision Inc. | Precision motion stage with single guide beam and follower stage |
US6008500A (en) * | 1995-04-04 | 1999-12-28 | Nikon Corporation | Exposure apparatus having dynamically isolated reaction frame |
WO1996038764A1 (en) * | 1995-05-30 | 1996-12-05 | Philips Electronics N.V. | Lithographic device with a three-dimensionally positionable mask holder |
TW318255B (ko) * | 1995-05-30 | 1997-10-21 | Philips Electronics Nv | |
TW316874B (ko) * | 1995-05-30 | 1997-10-01 | Philips Electronics Nv | |
US5760564A (en) * | 1995-06-27 | 1998-06-02 | Nikon Precision Inc. | Dual guide beam stage mechanism with yaw control |
KR100226599B1 (ko) * | 1995-09-04 | 1999-10-15 | 미따라이 하지메 | 구동제어장치 및 방법 |
JP3002142B2 (ja) * | 1996-10-07 | 2000-01-24 | キヤノン株式会社 | 移動ステージ装置および半導体焼付け装置 |
US5815246A (en) * | 1996-12-24 | 1998-09-29 | U.S. Philips Corporation | Two-dimensionally balanced positioning device, and lithographic device provided with such a positioning device |
JP3155936B2 (ja) * | 1997-06-26 | 2001-04-16 | キヤノン株式会社 | リニアモータとステージ装置及びこれを用いた走査型露光装置やデバイス製造方法 |
US6003230A (en) * | 1997-10-03 | 1999-12-21 | Massachusetts Institute Of Technology | Magnetic positioner having a single moving part |
US6054784A (en) * | 1997-12-29 | 2000-04-25 | Asm Lithography B.V. | Positioning device having three coil systems mutually enclosing angles of 120° and lithographic device comprising such a positioning device |
TWI242113B (en) * | 1998-07-17 | 2005-10-21 | Asml Netherlands Bv | Positioning device and lithographic projection apparatus comprising such a device |
US6144118A (en) * | 1998-09-18 | 2000-11-07 | General Scanning, Inc. | High-speed precision positioning apparatus |
TW526630B (en) * | 1998-11-10 | 2003-04-01 | Asml Netherlands Bv | Actuator and transducer |
US6721045B1 (en) | 1999-09-07 | 2004-04-13 | Applied Materials, Inc. | Method and apparatus to provide embedded substrate process monitoring through consolidation of multiple process inspection techniques |
US6693708B1 (en) | 1999-09-07 | 2004-02-17 | Applied Materials, Inc. | Method and apparatus for substrate surface inspection using spectral profiling techniques |
US6707544B1 (en) | 1999-09-07 | 2004-03-16 | Applied Materials, Inc. | Particle detection and embedded vision system to enhance substrate yield and throughput |
US6707545B1 (en) | 1999-09-07 | 2004-03-16 | Applied Materials, Inc. | Optical signal routing method and apparatus providing multiple inspection collection points on semiconductor manufacturing systems |
US7012684B1 (en) | 1999-09-07 | 2006-03-14 | Applied Materials, Inc. | Method and apparatus to provide for automated process verification and hierarchical substrate examination |
US6813032B1 (en) | 1999-09-07 | 2004-11-02 | Applied Materials, Inc. | Method and apparatus for enhanced embedded substrate inspection through process data collection and substrate imaging techniques |
US6630995B1 (en) | 1999-09-07 | 2003-10-07 | Applied Materials, Inc. | Method and apparatus for embedded substrate and system status monitoring |
TW546551B (en) | 1999-12-21 | 2003-08-11 | Asml Netherlands Bv | Balanced positioning system for use in lithographic apparatus |
US20020196336A1 (en) * | 2001-06-19 | 2002-12-26 | Applied Materials, Inc. | Method and apparatus for substrate imaging |
US6903346B2 (en) * | 2001-07-11 | 2005-06-07 | Nikon Corporation | Stage assembly having a follower assembly |
US6888289B2 (en) * | 2002-07-16 | 2005-05-03 | Baldor Electric Company | Multi-axes, sub-micron positioner |
US7869000B2 (en) * | 2004-11-02 | 2011-01-11 | Nikon Corporation | Stage assembly with lightweight fine stage and low transmissibility |
US7417714B2 (en) * | 2004-11-02 | 2008-08-26 | Nikon Corporation | Stage assembly with measurement system initialization, vibration compensation, low transmissibility, and lightweight fine stage |
US7468589B2 (en) * | 2006-01-13 | 2008-12-23 | Asml Netherlands B.V. | Lithographic apparatus having a controlled motor, and motor control system and method |
CN101790673B (zh) * | 2007-06-27 | 2013-08-28 | 布鲁克斯自动化公司 | 用于自轴承电机的位置反馈 |
KR101496654B1 (ko) * | 2007-06-27 | 2015-02-27 | 브룩스 오토메이션 인코퍼레이티드 | 리프트 능력 및 감소된 코깅 특성들을 가지는 전동기 고정자 |
CN102007366B (zh) | 2007-06-27 | 2014-06-18 | 布鲁克斯自动化公司 | 多维位置传感器 |
US8283813B2 (en) | 2007-06-27 | 2012-10-09 | Brooks Automation, Inc. | Robot drive with magnetic spindle bearings |
US8823294B2 (en) | 2007-06-27 | 2014-09-02 | Brooks Automation, Inc. | Commutation of an electromagnetic propulsion and guidance system |
US9752615B2 (en) * | 2007-06-27 | 2017-09-05 | Brooks Automation, Inc. | Reduced-complexity self-bearing brushless DC motor |
KR20100056468A (ko) | 2007-07-17 | 2010-05-27 | 브룩스 오토메이션 인코퍼레이티드 | 챔버 벽들에 일체화된 모터들을 갖는 기판 처리 장치 |
DE102012000664B4 (de) * | 2012-01-17 | 2014-07-10 | Mirjana Jovanovic | Vorrichtung zur Erzeugung von dreidimmensionalen Objekten |
US9507276B2 (en) | 2012-10-09 | 2016-11-29 | Koninklijke Philips N.V. | Positioning device, control device and control method |
CN102940509A (zh) * | 2012-12-10 | 2013-02-27 | 深圳市海曼医疗设备有限公司 | 一种超声诊断仪操作台 |
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Publication number | Priority date | Publication date | Assignee | Title |
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DE1477579C3 (de) * | 1960-09-13 | 1974-01-03 | Hellmut Dipl.-Ing. 7300 Esslingen-Liebersbronn Mueller | Vorrichtung zum Bearbeiten von Werkstücken |
CH436751A (de) * | 1966-05-31 | 1967-05-31 | Contraves Ag | Koordinatograph |
JPS5313272A (en) * | 1976-07-23 | 1978-02-06 | Hitachi Ltd | Precision planar moving plate |
US4492356A (en) * | 1982-02-26 | 1985-01-08 | Hitachi, Ltd. | Precision parallel translation system |
JPS5961132A (ja) * | 1982-09-30 | 1984-04-07 | Fujitsu Ltd | 電子ビ−ム露光装置 |
JPS60150950A (ja) * | 1984-01-20 | 1985-08-08 | Hitachi Ltd | 案内装置 |
JPH0727042B2 (ja) * | 1986-12-02 | 1995-03-29 | キヤノン株式会社 | ステ−ジ装置 |
-
1989
- 1989-10-05 NL NL8902471A patent/NL8902471A/nl not_active Application Discontinuation
-
1990
- 1990-09-28 KR KR1019900015469A patent/KR0154513B1/ko not_active IP Right Cessation
- 1990-10-01 EP EP90202582A patent/EP0421527B1/en not_active Expired - Lifetime
- 1990-10-01 DE DE69010610T patent/DE69010610T2/de not_active Expired - Fee Related
- 1990-10-04 US US07/594,520 patent/US5120034A/en not_active Expired - Lifetime
- 1990-10-05 JP JP2266526A patent/JP3016088B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0421527B1 (en) | 1994-07-13 |
EP0421527A1 (en) | 1991-04-10 |
DE69010610D1 (de) | 1994-08-18 |
JPH03142136A (ja) | 1991-06-17 |
US5120034A (en) | 1992-06-09 |
KR0154513B1 (ko) | 1998-12-15 |
JP3016088B2 (ja) | 2000-03-06 |
NL8902471A (nl) | 1991-05-01 |
DE69010610T2 (de) | 1995-02-23 |
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