KR910008528A - 위치결정 장치 - Google Patents

위치결정 장치 Download PDF

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Publication number
KR910008528A
KR910008528A KR1019900015469A KR900015469A KR910008528A KR 910008528 A KR910008528 A KR 910008528A KR 1019900015469 A KR1019900015469 A KR 1019900015469A KR 900015469 A KR900015469 A KR 900015469A KR 910008528 A KR910008528 A KR 910008528A
Authority
KR
South Korea
Prior art keywords
carriage
positioning device
coordinate direction
displaceable
coil system
Prior art date
Application number
KR1019900015469A
Other languages
English (en)
Other versions
KR0154513B1 (ko
Inventor
반 엥게렌 게라르드
게라르두스 보우버 아드리아누스
Original Assignee
프레데릭 얀 스미트
엔. 브이. 필립스 글로아이람펜파브리켄
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 프레데릭 얀 스미트, 엔. 브이. 필립스 글로아이람펜파브리켄 filed Critical 프레데릭 얀 스미트
Publication of KR910008528A publication Critical patent/KR910008528A/ko
Application granted granted Critical
Publication of KR0154513B1 publication Critical patent/KR0154513B1/ko

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Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D3/00—Control of position or direction
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70716—Stages
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/62—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides
    • B23Q1/621—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides a single sliding pair followed perpendicularly by a single sliding pair
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/19—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path
    • G05B19/39—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path using a combination of the means covered by at least two of the preceding groups G05B19/21, G05B19/27 and G05B19/33
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/37—Measurements
    • G05B2219/37275—Laser, interferometer
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/49—Nc machine tool, till multiple
    • G05B2219/49271—Air bearing slide, hydraulic, electromagnetic bearing
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/49—Nc machine tool, till multiple
    • G05B2219/49276—Floating, air, magnetic suspension xy table, sawyer motor, xenetics
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/49—Nc machine tool, till multiple
    • G05B2219/49284—Two cascaded slides, large range sits on small range, piggyback

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Mechanical Engineering (AREA)
  • Human Computer Interaction (AREA)
  • Manufacturing & Machinery (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Control Of Position Or Direction (AREA)
  • Machine Tool Units (AREA)
  • Machine Tool Positioning Apparatuses (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

내용 없음

Description

위치결정 장치
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명에 따른 위치결정 장치의 제1실시예의 평면도,
제2도는 제1도의 Ⅱ-Ⅱ선에 따라 취한 확대단면도,
제3도는 제1도의 Ⅲ-Ⅲ선에 따라 취한 확대 단면도.

Claims (4)

  1. 베이스에 대해 적어도 두 좌표방향(X,Y)으로 변위 가능한 캐리지를 포함하며, 상기 좌표방향에서 캐리지에 대해 변위 가능한 테이블의 변위를 위한 위치 결정 장치에 있어서, 작동시, 테이블은 자석 시스템과 코일 시스템의 로렌쯔힘에 의해서만 캐리지에 결합되며, 상기 좌표방향(X,Y)에 횡으로의 제3좌표 방향(Z)에서 관찰된 베이스와 테이블 사이에서 작동하는 정적가스 베어링에 의해 결정된 캐리지에 대해 위치를 점유하는 것을 특징으로 하는 위치 결정 장치.
  2. 제1항에 있어서, 위치결정 장치는 한 좌표방향(X)에 변위 가능한 캐리지를 위해 지지체 및 안내부에 고정된 코일 시스템과 캐리지에 고정된 다른 코일 시스템으로 제공되며 반면, 테이블은 변위를 위한 선형선기 모터를 구성하여 서로에 상응하며 X좌표 방향 및 Y좌표 방향으로 캐리지에 대해 테이블을 안내하는 상기 두 코일 시스템의 상대쪽에 배치된 자석 시스템으로 제공되는 것을 특징으로 하는 위치 결정 장치
  3. 제1항에 있어서, 위치결정 장치는 X좌표 방향으로 변위가능한 제1지지체와 Y좌표 방향으로 변위 가능한 제2지지체에 의해 안내된 캐리지로 제공되며 반면,테이블은 변위를 위한 선형선기 모터를 구성하여 서로에 상응하며 X좌표 및 Y좌표 방향으로 캐리지에 대하여 테이블의 안내를 하는 캐리지내의 코일 시스템 상대쪽에 배치된 자석 시스템으로 제공되는 것을 특징으로 하는 위치 결정 장치.
  4. 제1항, 제2항 또는 제3항에 있어서, 위치결정 장치는 테이블에 결합되고 그 작동시 위치신호가 제어 장치의 차동 신호를 결정하며, 그 테이블의 단부 위치를 한정하며, 상기 제어장치가 동시에 작동하는 캐리지의 제1피드백 제어와 테이블의 제2피트백 제어를 포함하며 제1피트백 제어에서 관련된 자석시스템과 코일 시스템의 선형힘-전류 범위에서 테이블의 제2피트백 제어에 의해 결정된 가장자리 내에서 캐리지의 위치를 확실히 하는 일련의 세트 포인트를 발생시키는 공통세트 포인트 발전기를 가지는 위치센서로 제공되는 것을 특징으로 하는 위치결정 장치.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019900015469A 1989-10-05 1990-09-28 위치결정 장치 KR0154513B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL8902471A NL8902471A (nl) 1989-10-05 1989-10-05 Tweetraps positioneerinrichting.
NL8902471 1989-10-05

Publications (2)

Publication Number Publication Date
KR910008528A true KR910008528A (ko) 1991-05-31
KR0154513B1 KR0154513B1 (ko) 1998-12-15

Family

ID=19855399

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019900015469A KR0154513B1 (ko) 1989-10-05 1990-09-28 위치결정 장치

Country Status (6)

Country Link
US (1) US5120034A (ko)
EP (1) EP0421527B1 (ko)
JP (1) JP3016088B2 (ko)
KR (1) KR0154513B1 (ko)
DE (1) DE69010610T2 (ko)
NL (1) NL8902471A (ko)

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Also Published As

Publication number Publication date
EP0421527B1 (en) 1994-07-13
EP0421527A1 (en) 1991-04-10
DE69010610D1 (de) 1994-08-18
JPH03142136A (ja) 1991-06-17
US5120034A (en) 1992-06-09
KR0154513B1 (ko) 1998-12-15
JP3016088B2 (ja) 2000-03-06
NL8902471A (nl) 1991-05-01
DE69010610T2 (de) 1995-02-23

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