KR910008380A - 자기교정 기능을 가진 검출장치 - Google Patents

자기교정 기능을 가진 검출장치 Download PDF

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Publication number
KR910008380A
KR910008380A KR1019900016579A KR900016579A KR910008380A KR 910008380 A KR910008380 A KR 910008380A KR 1019900016579 A KR1019900016579 A KR 1019900016579A KR 900016579 A KR900016579 A KR 900016579A KR 910008380 A KR910008380 A KR 910008380A
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detection
calibration
communication device
signal
characteristic
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KR1019900016579A
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KR0175300B1 (ko
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사또시 시마다
세이꼬 스즈끼
시게끼 쓰찌다니
세이이찌 우가이
마사요시 가네야스
히로시 구로이와
요시히로 요꼬다
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미다 가쓰시게
가부시기가이샤 히다찌 세이사꾸쇼
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
    • G01D5/2417—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying separation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D18/00—Testing or calibrating apparatus or arrangements provided for in groups G01D1/00 - G01D15/00
    • G01D18/002—Automatic recalibration
    • G01D18/006—Intermittent recalibration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P21/00—Testing or calibrating of apparatus or devices covered by the preceding groups
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Combined Controls Of Internal Combustion Engines (AREA)
  • Micromachines (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)

Abstract

내용 없음

Description

자기교정 기능을 가진 검출장치
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명의 일실시예의 기본 구조를 나타낸 단면도,
제2도는 신호처리 수단을 위한 회로도,
제3도는 정전 용량식 압력센서의 동작을 나타낸 도.

Claims (12)

  1. 물리량을 전기량으로 검출하는 검출 시스템이며 검출수단이 이것을 자극하는 수단과, 신호처리 수단을 가지며, 상기 자극수단을 경유하여 검출수단에 교정신호를 공급하고, 검출수단 고유의 응답을 측정하고, 이로서 상기 응답의 변화량에 의거하여 자기 교정과 특성 보정을 행하는 기능을 구비하는 것을 특징으로 하는 검출장치.
  2. 제1항에 있어서, 상기 검출장치가 통신장치를 포함하며, 상기 자기교정과, 상기 특성 교정의 결과를 표시하는 수단을 가지며, 상기 표시수단이 상기 처리수단과 상기 통신장치 중의 하나에 마련되는 것을 특징으로 하는 검출장치.
  3. 제1항에 있어서, 상기 검출 수단과 상기 자극 수단과 처리수단이 실리콘 기질상에 형서되는 것을 특징으로 하는 검출장치.
  4. 제3항에 있어서, 상기 검출수단과, 상기 자극수단이 실리콘 단결정 기질상에 형성되고, 이방성 에칭가공에 의해 산화필름으로 형성되는 마스크나 실리콘 단결정 기질에 형성되는 질화필름으로 형성되는 마스크를 가지고 가공되는 것을 특징으로 하는 검출장치.
  5. 제1항에 있어서, 상기 검출수단과 상기 자극수단이 붕소규산 유리를 거쳐 정진 접합되는 것을 특징으로 하는 검출장치.
  6. 제1항에 있어서, 상기 검출수단이 피에즈 저항소자를 포함한 스트레인 제어레이팅 바듸이고 상기 스트레인 제어레이팅바듸의 중앙부에 형성한 정전용량을 거쳐서 교정전압 신호를 인가하고 상기 피에조저항 소자의 저항을 측정하여 이 변화에 의거하여 감도 교정을 행하는 것을 특징으로 하는 검출장치.
  7. 제1항에 있어서, 상기 검출수단이 지지된 가동전극과 고정전극으로 형성한 가변용량이고, 자극 수단으로서 상기 가동전극과 또 하나의 고정전극에 의해 형성한 정전 용량을 거쳐서 교정전압 신호를 인가하고, 상기 가변용량의 용량을 측정하여 이 변화에 의거하여 감도의 교정을 행하는 것을 특징으로 하는 검출장치.
  8. 제1항에 있어서, 상기 검출수단이 교체전해질을 끼운 양측에 형성된 전극 그리고, 가스 확산막 및 한계전류 측정부로 되고, 자극수단으로서도 소정의 전류를 공급하는 수단으로 되어 이로서 교정전류 신호를 인가하고, 상기 한계전류의 감쇠시간을 측정하여 이 변화에 의거하여 감도의 교정을 행하는 것을 특징으로 하는 검출장치.
  9. 물리량을 전기량으로 검출하기 위한 장치에서의 데이타 처리방법으로서 상기 자극수단을 경유하여 처리 수단으로부터, 검출수단에 교정용 신호를 공급하는 단계와, 상기 검출수단의 특성 응압을 표시하는 신호를 측정하는 단계에 의해 자기교정을 수행하고, 사전 측정한 초기특성과 비교하여 그 변화분에 의거하여, 특성보정처리를 행하는 것을 특징으로 하는 검출장치의 데이타 처리방법.
  10. 제2항에 있어서, 상기 자기 교정 및 특성보정이 통신장치로 부터 받는 지령에 응답함으로서 행하여 지는 것을 특징으로하는 검출장치의 데이타 처리방법.
  11. 제10항에 있어서, 상기 통신장치가 복수의 검출장치와 통신하고, 이들 각 검출장치는 식별코드를 가진 것을 특징으로 하는 검출장치의 데이타 처리방법.
  12. 제10항에 있어서, 상기 통신장치의 통신신호가 전자파 또는 초음파의 단속에 의하여 구성되고, 통신기가 휴대용인 것을 특징으로 하는 검출장치의 데이타 처리방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것
KR1019900016579A 1989-10-20 1990-10-18 자기교정 기능을 가진 검출장치 KR0175300B1 (ko)

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Application Number Priority Date Filing Date Title
JP1-271666 1989-10-20
JP89-271666 1989-10-20
JP1271666A JPH03134552A (ja) 1989-10-20 1989-10-20 自己較正機能付検出装置

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KR910008380A true KR910008380A (ko) 1991-05-31
KR0175300B1 KR0175300B1 (ko) 1999-05-15

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US (4) US5174884A (ko)
EP (2) EP0606115B1 (ko)
JP (1) JPH03134552A (ko)
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DE (2) DE69032031T2 (ko)

Families Citing this family (63)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3844333A1 (de) * 1988-12-30 1990-07-05 Bosch Gmbh Robert Verfahren und vorrichtung zur korrektur von bauteiltoleranzen bei der verarbeitung von signalen
JPH03134552A (ja) * 1989-10-20 1991-06-07 Hitachi Ltd 自己較正機能付検出装置
US5461916A (en) 1992-08-21 1995-10-31 Nippondenso Co., Ltd. Mechanical force sensing semiconductor device
DE4318891A1 (de) * 1993-06-07 1994-12-08 Mannesmann Ag Elektrochemisches Gasspurenmeßsystem mit Funktionskontrolle
WO1995006259A1 (en) * 1993-08-24 1995-03-02 A/S Brüel & Kjær An apparatus for detecting the malfunctioning of an accelerometer
US5448491A (en) * 1994-03-21 1995-09-05 Square D Company Monitor for an ungrounded system
US5446682A (en) * 1994-03-21 1995-08-29 Square D Company System for calibrating a line isolation monitor
US5450328A (en) * 1994-03-21 1995-09-12 Square D Company System for measuring line to ground impedance
JP2586406B2 (ja) * 1994-10-27 1997-02-26 日本電気株式会社 静電容量型加速度センサ
US5565625A (en) * 1994-12-01 1996-10-15 Analog Devices, Inc. Sensor with separate actuator and sense fingers
US5587518A (en) * 1994-12-23 1996-12-24 Ford Motor Company Accelerometer with a combined self-test and ground electrode
GB9426220D0 (en) * 1994-12-23 1995-02-22 Lucas Ind Plc Vehicle load measuring systems
JP3433401B2 (ja) * 1995-05-18 2003-08-04 アイシン精機株式会社 静電容量型加速度センサ
US5621157A (en) * 1995-06-07 1997-04-15 Analog Devices, Inc. Method and circuitry for calibrating a micromachined sensor
US5596144A (en) * 1995-08-04 1997-01-21 Delco Electronics Corporation Piezoresistive force rebalance accelerometer
DE19601078C2 (de) * 1996-01-13 2000-01-05 Bosch Gmbh Robert Druckkraftsensor
DE19606826A1 (de) * 1996-02-23 1997-08-28 Knorr Bremse Electronic Gmbh Verfahren und Vorrichtung zur Überprüfung eines Sensors
JP3125675B2 (ja) * 1996-03-29 2001-01-22 三菱電機株式会社 容量型センサインターフェース回路
JPH10132848A (ja) * 1996-10-31 1998-05-22 Akebono Brake Ind Co Ltd 半導体加速度センサー
WO1999004226A1 (fr) 1997-07-14 1999-01-28 Matsushita Electric Industrial Co., Ltd. Capteur dote d'une fonction de reglage
DE19739903A1 (de) * 1997-09-11 1999-04-01 Bosch Gmbh Robert Sensorvorrichtung
AU3517600A (en) * 1999-03-17 2000-10-04 Input/Output, Inc. Calibration of sensors
US6758080B1 (en) 1999-03-17 2004-07-06 Input/Output, Inc. Calibration of sensors
US6836238B1 (en) * 2001-10-09 2004-12-28 Escort Inc. Police radar/laser detector with integral vehicle parameter display using a vehicle interface
EP1185843B1 (de) * 1999-06-15 2004-10-06 Siemens Aktiengesellschaft Messumformer
DE10046958B4 (de) * 1999-09-27 2009-01-02 Denso Corp., Kariya-shi Kapazitive Vorrichtung zum Erfassen einer physikalischen Grösse
NO313605B1 (no) 1999-12-13 2002-10-28 Optoplan As Fremgangsmate og system for kalibrering av en konverteringsenhet i et fiberoptisk sensorhode
DE10065833C2 (de) * 2000-12-28 2002-11-14 Balluff Gmbh Parametrierbarer Sensor und Verfahren zur Parametrierung eines Sensors
DE10131760B4 (de) * 2001-06-30 2012-06-21 Robert Bosch Gmbh Verfahren zum Testen eines Sensors
US6510628B1 (en) * 2001-10-31 2003-01-28 Caterpillar Inc Method and apparatus for determining a contact force of a work tool
DE10162334A1 (de) * 2001-12-18 2003-07-03 Endress & Hauser Gmbh & Co Kg Feldgerät und ein Verfahren zur Kalibrierung eines Feldgerätes
US7004030B2 (en) * 2002-09-27 2006-02-28 Oki Electric Industry Co., Ltd. Acceleration sensor
DE10357870B4 (de) * 2003-12-11 2013-02-07 Robert Bosch Gmbh Sensor mit symmetrischer Begrenzung eines Signals
US7043960B1 (en) * 2004-06-17 2006-05-16 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Self-calibrating pressure transducer
DE102004039463A1 (de) * 2004-08-14 2006-02-23 Hella Kgaa Hueck & Co. Sensor und Verfahren zur Kalibrierung eines Sensors
ATE394665T1 (de) * 2005-04-01 2008-05-15 Mettler Toledo Ag Verfahren und vorrichtung zur funktionskontrolle eines sensors
WO2006130534A2 (en) * 2005-05-31 2006-12-07 Borgwarner Inc. Method of actuator control
JP4758145B2 (ja) * 2005-06-03 2011-08-24 シチズンホールディングス株式会社 接触燃焼式ガスセンサ
US7293466B2 (en) * 2005-07-19 2007-11-13 Hitachi, Ltd. Bolt with function of measuring strain
DE102006005835A1 (de) * 2006-02-08 2007-08-16 Logicdata Electronic & Software Entwicklungs Gmbh Schaltungsanordnung und Verfahren zur Kalibrierung einer Sensoranordnung, insbesondere für motorisch verstellbare Möbel, sowie Messverstärker und Sensoranordnung
JP2007212292A (ja) * 2006-02-09 2007-08-23 Mitsubishi Electric Corp 磁気検出装置
CN100514010C (zh) * 2006-03-28 2009-07-15 中国科学院声学研究所 具有在线自标定功能的水听器
CN101000249B (zh) * 2007-01-04 2011-01-26 钟胜 柔性铰链电容传感器机芯及使用该机芯的传感器
EP1962063B1 (fr) * 2007-02-21 2010-11-17 EM Microelectronic-Marin SA Procédé de test automatique d'un circuit électronique à capteur capacitif, et circuit électronique pour sa mise en oeuvre
DE102007051885A1 (de) * 2007-10-30 2009-05-07 Lucas Automotive Gmbh Technik zum Überprüfen eines Kraftfahrzeug-Sensors
DE102008040529B4 (de) * 2008-07-18 2021-05-06 Robert Bosch Gmbh Fehlerkorrekturverfahren und Fehlerkorrekturvorrichtung für einen Beschleunigungssensor
JP4894840B2 (ja) * 2008-10-08 2012-03-14 株式会社デンソー 物理量検出装置
US8554615B2 (en) * 2009-02-24 2013-10-08 Board Of Trustees Of Michigan State University Context-induced wireless network transport for content and profile information
DE102010029903A1 (de) * 2010-06-10 2011-12-15 Robert Bosch Gmbh Sensoranordnung und Verfahren zur Online-Überwachung einer Sensoranordnung
US9065358B2 (en) * 2011-07-11 2015-06-23 Taiwan Semiconductor Manufacturing Company, Ltd. MEMS structure and method of forming same
JP2013122380A (ja) * 2011-12-09 2013-06-20 Seiko Instruments Inc 加速度信号処理装置
US9335396B2 (en) * 2013-03-12 2016-05-10 Freescale Semiconductor, Inc. MCU-based compensation and calibration for MEMS devices
US20140361793A1 (en) * 2013-05-30 2014-12-11 Tech4Imaging Llc Interactive and Adaptive Data Acquisition System for Use with Electrical Capacitance Volume Tomography
DE202014006185U1 (de) * 2013-08-12 2014-11-26 Horiba Ltd. Kraftstoffverbrauch-Berechnungseinheit, Kraftstoffverbrauch-Berechnungsprogramm, Kraftstoffverbrauch-Messgerät und Abgas-Messgerät
US9110115B2 (en) 2013-08-13 2015-08-18 Tech4Imaging Llc Modular stretchable and flexible capacitance sensors for use with electrical capacitance volume tomography and capacitance sensing applications
US9901282B2 (en) 2015-04-27 2018-02-27 Tech4Imaging Llc Multi-phase flow decomposition using electrical capacitance volume tomography sensors
US10488236B2 (en) 2016-02-23 2019-11-26 Tech4Imaging Llc Velocity vector field mapping using electrical capacitance sensors
US9958408B2 (en) 2016-05-11 2018-05-01 Tech4Imaging Llc Smart capacitance sensors for use with electrical capacitance volume tomography and capacitance sensing applications
KR101663815B1 (ko) * 2016-06-03 2016-10-10 (주)테크윈시스템 초음파 레벨 자동 측정장치
US10281422B2 (en) 2016-09-12 2019-05-07 Tech4Imaging Llc Displacement current phase tomography for imaging of lossy medium
US10502655B2 (en) 2017-03-07 2019-12-10 Tech4Imaging Llc Magnetic pressure sensors system for measurement and imaging of steel mass
DE102018111380A1 (de) * 2017-05-24 2018-11-29 HELLA GmbH & Co. KGaA Verfahren zur Kalibrierung mindestens eines Sensors
US10705043B2 (en) 2017-05-31 2020-07-07 Tech4Imaging Llc Multi-dimensional approach to imaging, monitoring, or measuring systems and processes utilizing capacitance sensors

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4225851A (en) * 1979-03-22 1980-09-30 General Electric Company Self-calibrated subcarrier telemetry system
JPS562548A (en) * 1979-06-22 1981-01-12 Nissan Motor Co Ltd Controller for air fuel ratio of internal combustion engine
US4556472A (en) * 1982-04-19 1985-12-03 Board Of Governors For Higher Education, State Of Ri Computerized device for pulsed potential voltammetric measurement of oxygen using a membrance covered polarographic electrode
JPS6131952A (ja) * 1984-07-25 1986-02-14 Horiba Ltd 自動校正機能付濃度計
FR2578323B1 (fr) * 1985-03-01 1987-11-20 Metravib Sa Capteur integre de grandeurs mecaniques a effet capacitif et procede de fabrication.
JPS61212753A (ja) * 1985-03-18 1986-09-20 Fujikura Ltd 酸素センサ−の自己診断方法
GB2174812B (en) * 1985-03-19 1989-06-21 Honda Motor Co Ltd Oxygen concentration system
US4638669A (en) * 1985-05-07 1987-01-27 Massachusetts Institute Of Technology Quantum tunneling cantilever accelerometer
US4679434A (en) * 1985-07-25 1987-07-14 Litton Systems, Inc. Integrated force balanced accelerometer
US4673870A (en) * 1985-08-07 1987-06-16 The United States Of America As Represented By The Secretary Of The Army Automated calibration technique for non-field perturbing (electrically small) electromagnetic field sensors
DE3542397A1 (de) * 1985-11-30 1987-06-04 Philips Patentverwaltung Anordnung zur funktionspruefung von piezoelektrischen beschleunigungsaufnehmern
IT1213111B (it) * 1986-07-24 1989-12-07 Nicotra Sistemi Trasduttore singolo/multiplo, atto a rilevare una o piu' grandezze fisiche di diversa natura o variabili elettriche convenzionali.
DE3627241A1 (de) * 1986-08-12 1988-02-18 Bosch Gmbh Robert Schaltung und verfahren zur ueberpruefung elektronischer sensoren
GB8723339D0 (en) * 1987-10-05 1987-11-11 Kellett M A Transducer control circuits
JPH0827247B2 (ja) * 1987-11-04 1996-03-21 株式会社豊田中央研究所 広帯域空燃比センサおよび検出装置
CA1330265C (en) * 1988-09-23 1994-06-21 Craig W. White Self-calibrating accelerometer
US5163325A (en) * 1988-09-23 1992-11-17 Automotive Systems Laboratory, Inc. Self-compensating accelerometer
JPH0623782B2 (ja) * 1988-11-15 1994-03-30 株式会社日立製作所 静電容量式加速度センサ及び半導体圧力センサ
US5103667A (en) * 1989-06-22 1992-04-14 Ic Sensors, Inc. Self-testable micro-accelerometer and method
JPH03134552A (ja) * 1989-10-20 1991-06-07 Hitachi Ltd 自己較正機能付検出装置

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US5391283A (en) 1995-02-21
US5429736A (en) 1995-07-04
KR0175300B1 (ko) 1999-05-15
US5574211A (en) 1996-11-12
JPH03134552A (ja) 1991-06-07
DE69032031D1 (de) 1998-03-12
DE69032031T2 (de) 1998-10-01
DE69016346T3 (de) 2000-02-03
EP0606115B1 (en) 1998-02-04
EP0423622B1 (en) 1995-01-25
EP0423622B2 (en) 1999-06-02
US5174884A (en) 1992-12-29
DE69016346T2 (de) 1995-05-24
EP0606115A1 (en) 1994-07-13
EP0423622A1 (en) 1991-04-24
DE69016346D1 (de) 1995-03-09

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