KR910008380A - 자기교정 기능을 가진 검출장치 - Google Patents
자기교정 기능을 가진 검출장치 Download PDFInfo
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- KR910008380A KR910008380A KR1019900016579A KR900016579A KR910008380A KR 910008380 A KR910008380 A KR 910008380A KR 1019900016579 A KR1019900016579 A KR 1019900016579A KR 900016579 A KR900016579 A KR 900016579A KR 910008380 A KR910008380 A KR 910008380A
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- detection
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
- G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
- G01D5/2417—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying separation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D18/00—Testing or calibrating apparatus or arrangements provided for in groups G01D1/00 - G01D15/00
- G01D18/002—Automatic recalibration
- G01D18/006—Intermittent recalibration
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P21/00—Testing or calibrating of apparatus or devices covered by the preceding groups
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Combined Controls Of Internal Combustion Engines (AREA)
- Micromachines (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Abstract
내용 없음
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명의 일실시예의 기본 구조를 나타낸 단면도,
제2도는 신호처리 수단을 위한 회로도,
제3도는 정전 용량식 압력센서의 동작을 나타낸 도.
Claims (12)
- 물리량을 전기량으로 검출하는 검출 시스템이며 검출수단이 이것을 자극하는 수단과, 신호처리 수단을 가지며, 상기 자극수단을 경유하여 검출수단에 교정신호를 공급하고, 검출수단 고유의 응답을 측정하고, 이로서 상기 응답의 변화량에 의거하여 자기 교정과 특성 보정을 행하는 기능을 구비하는 것을 특징으로 하는 검출장치.
- 제1항에 있어서, 상기 검출장치가 통신장치를 포함하며, 상기 자기교정과, 상기 특성 교정의 결과를 표시하는 수단을 가지며, 상기 표시수단이 상기 처리수단과 상기 통신장치 중의 하나에 마련되는 것을 특징으로 하는 검출장치.
- 제1항에 있어서, 상기 검출 수단과 상기 자극 수단과 처리수단이 실리콘 기질상에 형서되는 것을 특징으로 하는 검출장치.
- 제3항에 있어서, 상기 검출수단과, 상기 자극수단이 실리콘 단결정 기질상에 형성되고, 이방성 에칭가공에 의해 산화필름으로 형성되는 마스크나 실리콘 단결정 기질에 형성되는 질화필름으로 형성되는 마스크를 가지고 가공되는 것을 특징으로 하는 검출장치.
- 제1항에 있어서, 상기 검출수단과 상기 자극수단이 붕소규산 유리를 거쳐 정진 접합되는 것을 특징으로 하는 검출장치.
- 제1항에 있어서, 상기 검출수단이 피에즈 저항소자를 포함한 스트레인 제어레이팅 바듸이고 상기 스트레인 제어레이팅바듸의 중앙부에 형성한 정전용량을 거쳐서 교정전압 신호를 인가하고 상기 피에조저항 소자의 저항을 측정하여 이 변화에 의거하여 감도 교정을 행하는 것을 특징으로 하는 검출장치.
- 제1항에 있어서, 상기 검출수단이 지지된 가동전극과 고정전극으로 형성한 가변용량이고, 자극 수단으로서 상기 가동전극과 또 하나의 고정전극에 의해 형성한 정전 용량을 거쳐서 교정전압 신호를 인가하고, 상기 가변용량의 용량을 측정하여 이 변화에 의거하여 감도의 교정을 행하는 것을 특징으로 하는 검출장치.
- 제1항에 있어서, 상기 검출수단이 교체전해질을 끼운 양측에 형성된 전극 그리고, 가스 확산막 및 한계전류 측정부로 되고, 자극수단으로서도 소정의 전류를 공급하는 수단으로 되어 이로서 교정전류 신호를 인가하고, 상기 한계전류의 감쇠시간을 측정하여 이 변화에 의거하여 감도의 교정을 행하는 것을 특징으로 하는 검출장치.
- 물리량을 전기량으로 검출하기 위한 장치에서의 데이타 처리방법으로서 상기 자극수단을 경유하여 처리 수단으로부터, 검출수단에 교정용 신호를 공급하는 단계와, 상기 검출수단의 특성 응압을 표시하는 신호를 측정하는 단계에 의해 자기교정을 수행하고, 사전 측정한 초기특성과 비교하여 그 변화분에 의거하여, 특성보정처리를 행하는 것을 특징으로 하는 검출장치의 데이타 처리방법.
- 제2항에 있어서, 상기 자기 교정 및 특성보정이 통신장치로 부터 받는 지령에 응답함으로서 행하여 지는 것을 특징으로하는 검출장치의 데이타 처리방법.
- 제10항에 있어서, 상기 통신장치가 복수의 검출장치와 통신하고, 이들 각 검출장치는 식별코드를 가진 것을 특징으로 하는 검출장치의 데이타 처리방법.
- 제10항에 있어서, 상기 통신장치의 통신신호가 전자파 또는 초음파의 단속에 의하여 구성되고, 통신기가 휴대용인 것을 특징으로 하는 검출장치의 데이타 처리방법.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1-271666 | 1989-10-20 | ||
JP89-271666 | 1989-10-20 | ||
JP1271666A JPH03134552A (ja) | 1989-10-20 | 1989-10-20 | 自己較正機能付検出装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR910008380A true KR910008380A (ko) | 1991-05-31 |
KR0175300B1 KR0175300B1 (ko) | 1999-05-15 |
Family
ID=17503194
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019900016579A KR0175300B1 (ko) | 1989-10-20 | 1990-10-18 | 자기교정 기능을 가진 검출장치 |
Country Status (5)
Country | Link |
---|---|
US (4) | US5174884A (ko) |
EP (2) | EP0606115B1 (ko) |
JP (1) | JPH03134552A (ko) |
KR (1) | KR0175300B1 (ko) |
DE (2) | DE69032031T2 (ko) |
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IT1213111B (it) * | 1986-07-24 | 1989-12-07 | Nicotra Sistemi | Trasduttore singolo/multiplo, atto a rilevare una o piu' grandezze fisiche di diversa natura o variabili elettriche convenzionali. |
DE3627241A1 (de) * | 1986-08-12 | 1988-02-18 | Bosch Gmbh Robert | Schaltung und verfahren zur ueberpruefung elektronischer sensoren |
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-
1989
- 1989-10-20 JP JP1271666A patent/JPH03134552A/ja active Pending
-
1990
- 1990-10-10 US US07/595,824 patent/US5174884A/en not_active Expired - Lifetime
- 1990-10-11 DE DE69032031T patent/DE69032031T2/de not_active Expired - Fee Related
- 1990-10-11 EP EP94103628A patent/EP0606115B1/en not_active Expired - Lifetime
- 1990-10-11 DE DE69016346T patent/DE69016346T3/de not_active Expired - Fee Related
- 1990-10-11 EP EP90119524A patent/EP0423622B2/en not_active Expired - Lifetime
- 1990-10-18 KR KR1019900016579A patent/KR0175300B1/ko not_active IP Right Cessation
-
1992
- 1992-12-07 US US07/985,654 patent/US5391283A/en not_active Expired - Lifetime
-
1994
- 1994-11-14 US US08/339,709 patent/US5429736A/en not_active Expired - Lifetime
-
1995
- 1995-05-30 US US08/452,698 patent/US5574211A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US5391283A (en) | 1995-02-21 |
US5429736A (en) | 1995-07-04 |
KR0175300B1 (ko) | 1999-05-15 |
US5574211A (en) | 1996-11-12 |
JPH03134552A (ja) | 1991-06-07 |
DE69032031D1 (de) | 1998-03-12 |
DE69032031T2 (de) | 1998-10-01 |
DE69016346T3 (de) | 2000-02-03 |
EP0606115B1 (en) | 1998-02-04 |
EP0423622B1 (en) | 1995-01-25 |
EP0423622B2 (en) | 1999-06-02 |
US5174884A (en) | 1992-12-29 |
DE69016346T2 (de) | 1995-05-24 |
EP0606115A1 (en) | 1994-07-13 |
EP0423622A1 (en) | 1991-04-24 |
DE69016346D1 (de) | 1995-03-09 |
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