KR890000282B1 - Film type electronic luminance colour display element - Google Patents

Film type electronic luminance colour display element Download PDF

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KR890000282B1
KR890000282B1 KR1019850007655A KR850007655A KR890000282B1 KR 890000282 B1 KR890000282 B1 KR 890000282B1 KR 1019850007655 A KR1019850007655 A KR 1019850007655A KR 850007655 A KR850007655 A KR 850007655A KR 890000282 B1 KR890000282 B1 KR 890000282B1
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deposited
insulating layer
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transparent electrode
green
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KR870004535A (en
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손상호
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주식회사 금성사
허신구
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/12—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof structurally associated with, e.g. formed in or on a common substrate with, one or more electric light sources, e.g. electroluminescent light sources, and electrically or optically coupled thereto

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Abstract

The displayer is manufactured by the processes; (a) forming a lower transparent electrode (2) vacuum-deposited by ITO with a depth of 2000 A and etched on the glass base (1), (b) forming a lower insulation layer (3) VDed by Y2O3 with 3000 A, (c) forming a blue luminescent layer (4) VDed by Sr; Ce, Cl with 4000 A, (d) forming an upper IL (5) VDed by Y2O3 with 3000 A. The green and red parts are formed by above processes with CaS; Ce, Cl and CaS; Eu, Cl. Each upper electrode for green and red is formed smaller by a length ( ) than each lower one.

Description

박막전자발광(EL) 칼라표시소자의 제조방법Manufacturing Method of Thin Film Electroluminescent (EL) Color Display Device

제1도 a,b는 본 발명 방법에 의하여 제조된 박막전자발광(EL) 칼라표시소자의 횡단면도 및 종단면도.1 and 2 are cross-sectional and longitudinal cross-sectional views of a thin film electroluminescent (EL) color display device manufactured by the method of the present invention.

제2도 a,b는 종래 장치의 화소와 본 발명 방법에 의한 화소를 각각 도시한 도면.2A and 2B show pixels of a conventional apparatus and pixels according to the method of the present invention, respectively.

본 발명은 천연칼라 표시소자의 제조방법에 관한 것으로서, 특히 적, 녹, 청색으로 칼라를 재생할 수 있는 박막형 전자발광(EL)표시소자의 제조방법에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a natural color display device, and more particularly, to a method for manufacturing a thin film type electroluminescence (EL) display device capable of reproducing color in red, green, and blue.

일반적으로 박막 EL 표시소자는 유리기판위에 투명전극, 하부절연막, 형광층, 상부절연막, 금소전극을 순서대로 증착하여 금속전극과 투명전극사이에 전압을 인가함으로서 화상이나 정보를 표시하는 소자인데 종래 이러한 박막 EL 표시소자는 2000Å 정도로 ITO 재질을 유리기판위에 증착하여 투명전극으로 하고 Y2O3, si3N4등의 절연체를 3000Å 정도 증착하여 상, 하부 절연막으로 하고 Zns : Mn을 4000-5000Å 정도로 증착하여 형광층을 형성하며 마지막으로 Al을 3000Å 정도로 증착하여 금속전극을 형성한 장치에 15V-200V의 교류전압을 인가함으로서 화상이나 정보를 표시하는 소자이다. 이러한 종래의 박막 EL 표시소자는 형광층이 Zns : Mn으로 되어 있어 전압을 인가할때 Zns : Mn 형광층내에 원자가 여기(exitation)하여 기저(Ground)상태로 떨어질때 나오는 파장 585Å의 오렌지색의 광이 발광되기 때문에 적, 녹, 청의 천연칼라의 표시는 불가능하다.In general, a thin film EL display device displays an image or information by applying a voltage between a metal electrode and a transparent electrode by sequentially depositing a transparent electrode, a lower insulating film, a fluorescent layer, an upper insulating film, and a gold electrode on a glass substrate. In the thin film EL display device, ITO material is deposited on the glass substrate as 2000Å and transparent electrode. Insulators such as Y 2 O 3 , si 3 N 4, etc. are deposited as 3000Å and upper and lower insulating films, and Zns: Mn is 4000 ~ 5000Å. It is a device that displays an image or information by applying an alternating voltage of 15V-200V to a device in which a metal electrode is formed by depositing Al about 3000 Å by forming a fluorescent layer by vapor deposition. In the conventional thin film EL display device, the fluorescent layer is Zns: Mn, and when the voltage is applied, orange light having a wavelength of 585 나오는 emitted when the atoms fall into the ground due to excitation in the Zns: Mn fluorescent layer Since it emits light, it is impossible to display natural colors of red, green, and blue.

본 발명은 천연칼라 EL 표시소자를 개발하고자 적. 녹, 청(R, G, B) 칼라를 낼 수 있는 3가지 형광물질을 사용하고 천연칼라를 얻을 수 있으면서 동시에 고해상도의 표시를 달성하고자 판넬 구조를 층상구조로 하므로서 천연칼라 달성에의 가장 심각한 문제인 전극단자처리를 해결할 수 있는 박막 EL 칼라표시소자의 제조방법을 제공하는 것을 목적으로 한다.The present invention aims to develop a natural color EL display device. It is the most serious problem to achieve natural color by using three fluorescent materials that can give green, blue (R, G, B) color and panel structure in layer structure to achieve high resolution display while attaining natural color. An object of the present invention is to provide a method for manufacturing a thin film EL color display element capable of solving electrode terminal processing.

본 발명의 천연칼라 박막 EL 표시소자의 제조방법은 제1도 a, b를 참조하여 설명하면 다음과 같다. 유리기판(1)위에 ITO 물질을 2000Å정도로 증착하여 사진식 각법으로 에칭하여 하부투명전극(2)을 형성한 다음 Y2O3를 3000Å으로 증착하여 하부절연층(3)을 입힌다. 그 위에 SrS : Ce, Cl을 4000Å 진공증착하여 청색(Blue) 형광층(4)틀 만들고 다시 Y2O3를 3000Å 증착하여 상부절연층(5)을 만들고 다시 Y2O3를 3000Å 증착하여 상부절연층(5)을 만들고 마지막으로 ITO를 2000Å 진공증착하여 상부투명전극(6)을 만들어 청색(B) 발광 EL 표시소자의 판넬(7)을 완성한다. 청색(B)발광 EL 표시소자의 판넬(7)의 상부투명전극(6)위에 SrT1O3절연체로 3000Å 증착하여 중간절연층(8)을 형성한 다음 ITO 물질을 2000Å 정도 수행하여 사진식 각법에 의해 하부투명전극(2')을 만들고 Y2O3를 3000Å으로 증착하여 하부절연층(3')을 입힌다. 이 위에 CaS : Ce, Cl물질을 4000Å 정도 진공증착하여 녹색 형광층(4')을 형성하고 Y2O3를 3000Å 증착하여 상부절연층(5')을 입힌다음 ITO 물질로 상부투명전극(6')을 입혀 녹색(G) 발광 EL 표시판넬(9)을 완성시킨다.The manufacturing method of the natural color thin film EL display device of the present invention will be described with reference to FIGS. The ITO material is deposited on the glass substrate 1 to about 2000 mW and etched by a photolithography method to form the lower transparent electrode 2, and then Y 2 O 3 is deposited to 3000 mW to coat the lower insulating layer 3. On top of that, SrS: Ce, Cl was vacuum-deposited at 4000Å to form a blue fluorescent layer (4), and again Y 2 O 3 was deposited at 3000Å to make an upper insulating layer (5), and Y 2 O 3 was deposited at 3000Å. The insulating layer 5 is formed, and finally, ITO is vacuum-deposited at 2000Å to form the upper transparent electrode 6, thereby completing the panel 7 of the blue (B) light emitting EL display element. The intermediate insulating layer 8 was formed by depositing 3000 Å with SrT10 3 insulator on the upper transparent electrode 6 of the panel 7 of the blue (B) light emitting EL display device, and then performing ITO material about 2000 Å by photolithography. A lower transparent electrode 2 'is formed and Y 2 O 3 is deposited to 3000 Å to coat a lower insulating layer 3'. On top of this, CaS: Ce, Cl materials are vacuum-deposited at about 4000Å to form a green fluorescent layer 4 ', Y 2 O 3 is deposited at 3000Å, and an upper insulating layer 5' is coated thereon, and the upper transparent electrode 6 is made of ITO material. ') To complete the green (G) light emitting EL display panel 9.

상부 투명전극(6')을 입힐때는 하부절연층(3')의 끝부분이 약간 드러나게 길이(l)만큼의 부위는 증착하지 않는다. 녹색(G) 발광표시판넬(9)의 상부투명전극(6')위에 SrTiO3절연체로 3000Å 증착하여 중간절연층(8')을 형성한 다음 ITO물질을 2000Å 정도 입혀 사진식 각법에 의해 하부투명전극(2")을 만들고 Y2O3를 3000Å 증착하여 하부절연층(3")을 만든다. 이 위에 CoS : Eu, Cl 물질을 4000Å 증착하여 적색(R)형광층(4")을 형성하고 Y2O3를 3000Å 증착하여 상부절연층(5")을 만든뒤 마지막으로 콘트라스트를 증대하기 위해 마지막 전국은 Al을 3000Å 정도 증착하여 금속전극(6")을 형성하여 적색(R) 발광표시판넬(10)을 완성한다. Al 금속전극(6")을 증착할때도 하부절연층(3")이 들어나게 길이(l)만큼의 부위는 증착하지 않는다. 이와같이 만들어진 층상구조의 천연칼라 박막 EL 소자에서 X 전극(6, 6', 6")과 Y전극(2, 2', 2")은 전극(2와 6, 2'와 6', 2"와 6")에 영상신호(11), 색도변환회로(12), 영상증폭회로(13), 변조회로(14) 및 동기회로(15)를 거친 R, G, B색신호를 받는다. 구동회로(A, B, C)가 연결되어 각기 독립적으로 화상이나 정보를 천연칼라로 표시할 수 있다.When the upper transparent electrode 6 'is coated, a portion of the length l is not deposited so that the end portion of the lower insulating layer 3' is slightly exposed. An intermediate insulating layer 8 'was formed by depositing 3000 Å with SrTiO 3 insulator on the upper transparent electrode 6' of the green (G) light emitting display panel 9, and then coating the ITO material with about 2000 하부 and lowering it by photolithography. An electrode 2 "is formed and Y 2 O 3 is deposited at 3000Å to form a lower insulating layer 3". On top of this, CoS: Eu, Cl materials are deposited to form red (R) fluorescence layer 4 "by depositing 4000Å and Y 2 O 3 is deposited to make upper insulation layer 5". Finally, to increase contrast In the last country, Al is deposited at about 3000Å to form a metal electrode 6 "to complete the red (R) light emitting display panel 10. Even when the Al metal electrode 6" is deposited, the lower insulating layer 3 "is deposited. In this way, the portions of the length l are not deposited. In the layered natural color thin film EL element thus formed, the X electrodes 6, 6 ', 6 "and the Y electrodes 2, 2', 2" are On the electrodes 2 and 6, 2 'and 6', 2 "and 6", the image signal 11, the chroma conversion circuit 12, the image amplification circuit 13, the modulation circuit 14 and the synchronization circuit 15 Receives the R, G, and B color signals through the driving circuits A, B, and C, which are connected to each other to display images and information in a natural color independently.

다음으로 천연칼라 EL 표시소자의 실현에 있어서, 가장 어려운 것으로 알려진 R 판넬(10), G 판넬(9), B판넬(7)의 X전극(6, 6', 6")과 Y전극(2, 2', 2")의 단자처리 해결방법을 설명한다. EL 표시판넬의 X전극(6, 6', 6"), Y전극(2, 2', 2")은 모두 2000-3000Å의 두께로 ITO나 Al을 증착하여 사진식 각법으로 예칭하여 형성한 폭 200-300μm의 박막전극이다.Next, in the realization of the natural color EL display element, the X electrodes 6, 6 ', 6 "and Y electrodes 2 of the R panel 10, the G panel 9, and the B panel 7 which are known to be the most difficult. , 2 ', 2 ") will be described. The X electrodes (6, 6 ', 6 ") and the Y electrodes (2, 2', 2") of the EL display panel are all formed by depositing ITO or Al with a thickness of 2000-3000 예 and depositing them by photographic angle method. It is a thin film electrode of 200-300μm.

구동회로(A, B, C)에 따라 R전극(2"과 6"), G전극(2'과 6'), B전극(2와 6)이 각각 독립적으로 구동하기 위해서는 X전극(6, 6', 6")은 X전극대로, Y전극(2, 2', 2")은 Y전극대로 절연되어야 한다. 이런 이유로 인해 제1도에서 절연성이 높은 물질인 SrTiO3절연체로 중간절연층(8, 8')을 3000Å 증착하였으며 X전극(6, 6', 6")과 Y전극(2, 2', 2")을 각각 높이(L)만큼 띄워 이끌어내고 X전극(6', 6")과 전극(2', 2")의 끝부위를 길이(l)만큼 띄워 놓았다. 전극접속부위를 길이(l)만큼 띄워 놓음으로서 전극간의 절연성을 유지하고 제조공정상에서 일어나는 쇼트를 방지할 수 있다.In order to independently drive the R electrodes 2 "and 6", the G electrodes 2 'and 6', and the B electrodes 2 and 6 according to the driving circuits A, B, and C, the X electrodes 6, 6 ', 6 ") should be insulated as the X electrode, and Y electrodes 2, 2', 2" as the Y electrode. For this reason, the intermediate insulating layers (8, 8 ') were deposited at 3000Å with SrTiO 3 insulator, which is a highly insulating material in FIG. 1, and the X electrodes (6, 6', 6 ") and the Y electrodes (2, 2 ', 2). ") Were drawn by height L, respectively, and the ends of the X electrodes 6 'and 6" and the electrodes 2' and 2 "were floated by the length l. By floating the electrode connection portion by the length (l), it is possible to maintain the insulation between the electrodes and to prevent the short circuit occurring in the manufacturing process.

제2도를 참조하여 본 발명에 의한 층상구조의 박막 EL 표시소자의 고해상도에 대해 설명한다. 종래의 표시장치인 브라운관이나 액정표시소자(LCD)의 천연칼라 화소는 적, 녹, 청색 각 화소가 제2도의 가처럼 횡으로 나열되어 있어 화소길이가 d이지만 본 발명의 층상구조의 박막 EL 표시소자의 천연칼라 화소는 제2도의 나처럼 적, 녹, 청 스트립이 층상구조를 하고 있어 화소길이가 대략 1/4d로 된다. 따라서 본 발명에 의한 박막 EL 표시소자의 표시해상도는 종래의 표시소자에 비해 4배정도 향상되는 것이다.With reference to FIG. 2, the high resolution of the thin film EL display element of the layer structure by this invention is demonstrated. In the conventional color display CRT and the natural color pixels of the liquid crystal display device (LCD), the red, green, and blue pixels are arranged horizontally as shown in Fig. 2, so that the pixel length is d, but the thin film EL display having the layer structure of the present invention is d. The natural color pixel of the device has a layered structure of red, green, and blue strips, as shown in FIG. 2, and the pixel length is approximately 1 / 4d. Therefore, the display resolution of the thin film EL display device according to the present invention is improved by about four times as compared with the conventional display device.

이상에서 설명된 바와같이 본 발명에 의하면, 적, 녹, 청의 발광판넬이 적층구조로 되면서 EL 소자의 천연칼라 표시해상도 및 선예도가 종래의 것보다 전체에 걸쳐 약 4배 이상 증가되는 것이고, 특히 적, 녹, 청의 발광판넬의 단자처리를 매우 간단한 방법으로 이루도록 한 것이다.As described above, according to the present invention, the red, green, and blue light emitting panels have a laminated structure, and the natural color display resolution and sharpness of the EL element are increased by about four times or more than the conventional ones. Termination of light emitting panel of green, green, and blue is done in a very simple way.

Claims (1)

유리기판위에 하부 투명전극, 하부절연층, 형광층, 상부절연층, 금속전극을 순서대로 증착하여된 박막전자발광(EL) 표시소자의 제조방법에 있어서, 하부절연층(3)위에 SrS : Ce, Cl을 4000Å 진공증착하여 청색형광층(4)을 형성한 다음 다시 Y2O3를 3000Å 증착하여 상부 절연층(5)을 만든위에 ITO를 2000Å 진공증착하여 상부투명전극(6)을 형성하고 ; 상부투명전극(6)위에 SrTiO3를 3000Å 증착하여 중간절연층(8)을 형성한 다음 ITO를 2000Å 증착하여 사진식 각법으로 녹색용 하부 투명전극(2')을 만든위에 Y2O3를 3000Å 증착하여 하부 절연층(3')을 형성한 다음 CaS : Ce, Cl을 4000Å 진공증착하여 녹색 형광층(4')을 형성하며 ; 그위에 다시 Y2O3를 3000Å 증착하여 절연층(5')을 만든위에 ITO를 증착하여 녹색용 상부투명전극(6')을 형성하되 하부절연층(3')보다 길이(l)만큼 작게 형성하고 ; 녹색용 상부투명전극(6')위에 SrTiO3를 3000Å 증착하여 중간절연층(8')을 형성한 다음 ITO를 2000Å 증착하여 사진식 각법으로 적색용 하부투명전극(2')을 만든위에 Y2O3를 3000Å 증착하여 하부절연층(3")을 만든뒤 이위에 CaS ; Eu, Cl을 4000Å 증착하여 적색형광층(4")을 형성하며 ; 그위에 Y2O3를 3000Å 증착하여 상부절연층(5")을 만든뒤 Al을 3000Å 증착하여 금속전극(6")을 형성하되 Al금속전극(6")이 하부절연층(3")보다 길이(l)만큼 작게되도록 하여 층간이 형성되도록한 박막전자발광(EL)칼라표시소자의 제조방법.In the method of manufacturing a thin film electroluminescence (EL) display device in which a lower transparent electrode, a lower insulating layer, a fluorescent layer, an upper insulating layer, and a metal electrode are sequentially deposited on a glass substrate, SrS: Ce is deposited on the lower insulating layer 3. In addition, 4000 Å vacuum was deposited to form a blue fluorescence layer (4), and then Y 2 O 3 was 3,000 Å deposited to form an upper insulating layer (5). ; 3000Å of SrTiO 3 is deposited on the upper transparent electrode (6) to form an intermediate insulating layer (8), and then 2000Å of ITO is deposited to form Y 2 O 3 on the lower surface of the green transparent electrode (2 '). Depositing to form a lower insulating layer 3 ', and then depositing CaS: Ce, Cl in vacuum at 4000 kPa to form a green fluorescent layer 4'; On top of that, Y 2 O 3 is deposited again 3000Å to form an insulating layer 5 ', and ITO is deposited to form a green upper transparent electrode 6', which is smaller than the lower insulating layer 3 'by a length (l). To form; "To 3000Å depositing a SrTiO 3 on the intermediate insulating layer (8 green upper transparent electrode 6 'for) the forming a next Y 2 of ITO on top made of a 2000Å deposited lower for red transparent electrode by photo expression gakbeop 2' Depositing 3000 Å of O 3 to form a lower insulating layer 3 ", and depositing 4,000 Å of CaS; Eu and Cl thereon to form a red fluorescent layer 4 "; The upper insulating layer (5 ") is formed by depositing 3000Å of Y 2 O 3 thereon, and the metal layer (6") is formed by depositing 3000Å of Al, but the Al metal electrode (6 ") is lower than the lower insulating layer (3"). A method of manufacturing a thin film electroluminescence (EL) color display device, the interlayer being formed by making it as small as the length (l).
KR1019850007655A 1985-10-17 1985-10-17 Film type electronic luminance colour display element KR890000282B1 (en)

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KR890000282B1 true KR890000282B1 (en) 1989-03-13

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