KR20210021908A - 보호막 형성용 복합 시트 롤 - Google Patents
보호막 형성용 복합 시트 롤 Download PDFInfo
- Publication number
- KR20210021908A KR20210021908A KR1020200084196A KR20200084196A KR20210021908A KR 20210021908 A KR20210021908 A KR 20210021908A KR 1020200084196 A KR1020200084196 A KR 1020200084196A KR 20200084196 A KR20200084196 A KR 20200084196A KR 20210021908 A KR20210021908 A KR 20210021908A
- Authority
- KR
- South Korea
- Prior art keywords
- protective film
- forming
- film
- composite sheet
- group
- Prior art date
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J7/00—Adhesives in the form of films or foils
- C09J7/20—Adhesives in the form of films or foils characterised by their carriers
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J163/00—Adhesives based on epoxy resins; Adhesives based on derivatives of epoxy resins
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J7/00—Adhesives in the form of films or foils
- C09J7/40—Adhesives in the form of films or foils characterised by release liners
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L21/6836—Wafer tapes, e.g. grinding or dicing support tapes
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J2203/00—Applications of adhesives in processes or use of adhesives in the form of films or foils
- C09J2203/326—Applications of adhesives in processes or use of adhesives in the form of films or foils for bonding electronic components such as wafers, chips or semiconductors
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J2301/00—Additional features of adhesives in the form of films or foils
- C09J2301/30—Additional features of adhesives in the form of films or foils characterized by the chemical, physicochemical or physical properties of the adhesive or the carrier
- C09J2301/312—Additional features of adhesives in the form of films or foils characterized by the chemical, physicochemical or physical properties of the adhesive or the carrier parameters being the characterizing feature
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68318—Auxiliary support including means facilitating the separation of a device or wafer from the auxiliary support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68327—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used during dicing or grinding
- H01L2221/68336—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used during dicing or grinding involving stretching of the auxiliary support post dicing
Landscapes
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Dicing (AREA)
- Adhesive Tapes (AREA)
- Laminated Bodies (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JPJP-P-2019-149737 | 2019-08-19 | ||
JP2019149737A JP7334087B2 (ja) | 2019-08-19 | 2019-08-19 | 保護膜形成用複合シートロール |
Publications (1)
Publication Number | Publication Date |
---|---|
KR20210021908A true KR20210021908A (ko) | 2021-03-02 |
Family
ID=74603000
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020200084196A KR20210021908A (ko) | 2019-08-19 | 2020-07-08 | 보호막 형성용 복합 시트 롤 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP7334087B2 (ja) |
KR (1) | KR20210021908A (ja) |
CN (1) | CN112397431A (ja) |
TW (1) | TW202111824A (ja) |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007114731A (ja) * | 2005-09-20 | 2007-05-10 | Hitachi Chem Co Ltd | 感光性エレメント |
JP5130768B2 (ja) * | 2007-03-30 | 2013-01-30 | 大日本印刷株式会社 | 光学部材用保護フィルム、光学部材用保護フィルムの製造方法、および光学部材用保護フィルム原反 |
JP2010260897A (ja) * | 2009-04-30 | 2010-11-18 | Furukawa Electric Co Ltd:The | 接着フィルム及びウエハ加工用テープ |
JP5790228B2 (ja) * | 2011-07-19 | 2015-10-07 | 日立化成株式会社 | 接着シート |
JP6776081B2 (ja) * | 2016-09-28 | 2020-10-28 | リンテック株式会社 | 保護膜付き半導体チップの製造方法及び半導体装置の製造方法 |
JP7064857B2 (ja) * | 2017-12-14 | 2022-05-11 | 三星エスディアイ株式会社 | 粘着剤組成物、その溶液、粘着剤層および表面保護フィルム |
-
2019
- 2019-08-19 JP JP2019149737A patent/JP7334087B2/ja active Active
-
2020
- 2020-06-19 TW TW109120690A patent/TW202111824A/zh unknown
- 2020-07-08 KR KR1020200084196A patent/KR20210021908A/ko active Search and Examination
- 2020-07-09 CN CN202010657070.XA patent/CN112397431A/zh active Pending
Also Published As
Publication number | Publication date |
---|---|
JP2021034422A (ja) | 2021-03-01 |
TW202111824A (zh) | 2021-03-16 |
CN112397431A (zh) | 2021-02-23 |
JP7334087B2 (ja) | 2023-08-28 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN108884244B (zh) | 保护膜形成用膜及保护膜形成用复合片 | |
JP7071916B2 (ja) | 保護膜付き半導体チップの製造方法及び半導体装置の製造方法 | |
KR102456771B1 (ko) | 보호막 형성용 필름 및 보호막 형성용 복합 시트 | |
KR20200130235A (ko) | 보호막 형성용 복합 시트 및 보호막이 형성된 반도체 칩의 제조 방법 | |
KR20200125476A (ko) | 보호막 형성용 복합 시트 | |
KR20200138157A (ko) | 지지 시트 및 보호막 형성용 복합 시트 | |
KR102596665B1 (ko) | 보호막 형성용 필름, 보호막 형성용 복합 시트, 검사 방법 및 식별 방법 | |
JP7478524B2 (ja) | 保護膜形成用フィルム、保護膜形成用複合シート、及び保護膜付きワーク加工物の製造方法 | |
KR20210041490A (ko) | 보호막 형성용 필름 및 보호막 형성용 복합 시트 | |
KR20210021908A (ko) | 보호막 형성용 복합 시트 롤 | |
KR102328791B1 (ko) | 보호막 형성용 복합 시트 | |
CN108886023B (zh) | 保护膜形成用膜及保护膜形成用复合片 | |
JP7500169B2 (ja) | 保護膜形成用複合シート | |
KR20200138148A (ko) | 지지 시트 및 보호막 형성용 복합 시트 | |
KR20200138153A (ko) | 보호막 형성용 복합 시트 및 그 제조 방법 | |
JP7497297B2 (ja) | 保護膜形成用複合シート、及び半導体チップの製造方法 | |
KR20210029097A (ko) | 보호막 형성용 필름, 보호막 형성용 복합 시트, 및 보호막이 형성된 워크 가공물의 제조 방법 | |
KR102534931B1 (ko) | 지지 시트 및 보호막 형성용 복합 시트 | |
KR102332694B1 (ko) | 보호막 형성용 필름 및 보호막 형성용 복합 시트 | |
KR20210041497A (ko) | 보호막 형성용 필름 및 보호막 형성용 복합 시트 | |
CN115820153A (zh) | 保护膜形成膜及保护膜形成用复合片 | |
KR20210041496A (ko) | 보호막 형성용 필름 및 보호막 형성용 복합 시트 | |
JP2023147738A (ja) | 保護膜形成フィルム、保護膜形成用複合シート、半導体装置の製造方法、及び保護膜形成フィルムの使用 | |
JP2024008899A (ja) | 保護膜形成フィルム、保護膜形成用複合シート、キット、及び、保護膜形成フィルムの使用 | |
KR20200138155A (ko) | 지지 시트와 그 제조 방법, 및 보호막 형성용 복합 시트와 그 제조 방법 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination |