KR20180084984A - 칠러 장치 - Google Patents

칠러 장치 Download PDF

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Publication number
KR20180084984A
KR20180084984A KR1020187017702A KR20187017702A KR20180084984A KR 20180084984 A KR20180084984 A KR 20180084984A KR 1020187017702 A KR1020187017702 A KR 1020187017702A KR 20187017702 A KR20187017702 A KR 20187017702A KR 20180084984 A KR20180084984 A KR 20180084984A
Authority
KR
South Korea
Prior art keywords
chiller device
chiller
Prior art date
Application number
KR1020187017702A
Other languages
English (en)
Other versions
KR102006013B1 (ko
Inventor
데이이치로 우에다
다쿠야 이시마쓰
후미유키 호소이
Original Assignee
신와 콘트롤즈 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 신와 콘트롤즈 가부시키가이샤 filed Critical 신와 콘트롤즈 가부시키가이샤
Publication of KR20180084984A publication Critical patent/KR20180084984A/ko
Application granted granted Critical
Publication of KR102006013B1 publication Critical patent/KR102006013B1/ko

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B49/00—Arrangement or mounting of control or safety devices
    • F25B49/02—Arrangement or mounting of control or safety devices for compression type machines, plants or systems
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F11/00—Control or safety arrangements
    • F24F11/89—Arrangement or mounting of control or safety devices
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F5/00—Air-conditioning systems or apparatus not covered by F24F1/00 or F24F3/00, e.g. using solar heat or combined with household units such as an oven or water heater
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B1/00—Compression machines, plants or systems with non-reversible cycle
    • F25B41/003—
    • F25B41/062—
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B5/00—Compression machines, plants or systems, with several evaporator circuits, e.g. for varying refrigerating capacity
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B5/00—Compression machines, plants or systems, with several evaporator circuits, e.g. for varying refrigerating capacity
    • F25B5/02—Compression machines, plants or systems, with several evaporator circuits, e.g. for varying refrigerating capacity arranged in parallel
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K1/00—Details of thermometers not specially adapted for particular types of thermometer
    • G01K1/02—Means for indicating or recording specially adapted for thermometers
    • G01K1/026—Means for indicating or recording specially adapted for thermometers arrangements for monitoring a plurality of temperatures, e.g. by multiplexing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67063—Apparatus for fluid treatment for etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2700/00—Sensing or detecting of parameters; Sensors therefor
    • F25B2700/21—Temperatures

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Sustainable Development (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Air Conditioning Control Device (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Other Air-Conditioning Systems (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
KR1020187017702A 2015-12-21 2016-12-14 칠러 장치 KR102006013B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2015248618A JP6053907B1 (ja) 2015-12-21 2015-12-21 チラー装置
JPJP-P-2015-248618 2015-12-21
PCT/JP2016/087164 WO2017110608A1 (ja) 2015-12-21 2016-12-14 チラー装置

Publications (2)

Publication Number Publication Date
KR20180084984A true KR20180084984A (ko) 2018-07-25
KR102006013B1 KR102006013B1 (ko) 2019-07-31

Family

ID=57582210

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020187017702A KR102006013B1 (ko) 2015-12-21 2016-12-14 칠러 장치

Country Status (5)

Country Link
JP (1) JP6053907B1 (ko)
KR (1) KR102006013B1 (ko)
CN (1) CN108474594B (ko)
TW (1) TWI646292B (ko)
WO (1) WO2017110608A1 (ko)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6884387B2 (ja) * 2017-10-30 2021-06-09 伸和コントロールズ株式会社 液体温調装置及びそれを用いた温調方法
CN107975908B (zh) * 2017-11-03 2020-10-20 广东美的制冷设备有限公司 空调器的开合结构控制方法、空调器和可读存储介质
EP3584515B1 (en) * 2018-06-19 2023-08-23 Weiss Technik GmbH Test chamber and method
WO2020100206A1 (ja) * 2018-11-13 2020-05-22 Smc株式会社 マルチ‐チラー
JP6624623B1 (ja) * 2019-06-26 2019-12-25 伸和コントロールズ株式会社 温度制御装置及び温調装置
JP7357915B2 (ja) * 2019-10-07 2023-10-10 伸和コントロールズ株式会社 水素冷却装置、水素供給システム及び冷凍機
CN110822750A (zh) * 2019-12-11 2020-02-21 郑州长城科工贸有限公司 基于级联型闭环pid调节的流体温度控制***及控制方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5721875A (en) 1980-07-14 1982-02-04 Canon Inc Photosensor
US6775996B2 (en) * 2002-02-22 2004-08-17 Advanced Thermal Sciences Corp. Systems and methods for temperature control
JP2008075919A (ja) * 2006-09-20 2008-04-03 Apisute:Kk チラー装置
JP2011247567A (ja) * 2010-05-31 2011-12-08 Nishiyama Corp 低温蓄熱冷却装置
JP5377653B2 (ja) * 2009-09-10 2013-12-25 三菱電機株式会社 空気調和装置
JP5721875B1 (ja) * 2014-02-24 2015-05-20 伸和コントロールズ株式会社 チラー装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3323223A1 (de) * 1983-06-28 1985-01-10 Eckhard Dr.-Ing. 4630 Bochum Beese Verfahren und kaeltezentrale zur direkten wetterkuehlung ueber eine vielzahl von wetterkuehlern
MY114473A (en) * 1997-04-08 2002-10-31 Daikin Ind Ltd Refrigerating system
CN201382624Y (zh) * 2009-01-23 2010-01-13 马兴国 一种单元组合式并联制冷机组
CN101929753A (zh) * 2010-02-09 2010-12-29 重庆远雄制冷成套设备有限公司 双工况制冰制冷水的制冷***
US8959940B2 (en) * 2010-02-12 2015-02-24 Mitsubishi Electric Corporation Refrigeration cycle apparatus
CN102305505A (zh) * 2011-07-22 2012-01-04 武汉市汉立电器有限公司 恒温冷水机组及其控制方法
CN102734994B (zh) * 2012-05-21 2014-04-02 佛山市顺德区和而泰电子科技有限公司 制冷***变频制冷温度的控制方法及***
JP5774225B2 (ja) * 2012-07-24 2015-09-09 三菱電機株式会社 空気調和装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5721875A (en) 1980-07-14 1982-02-04 Canon Inc Photosensor
US6775996B2 (en) * 2002-02-22 2004-08-17 Advanced Thermal Sciences Corp. Systems and methods for temperature control
JP2008075919A (ja) * 2006-09-20 2008-04-03 Apisute:Kk チラー装置
JP5377653B2 (ja) * 2009-09-10 2013-12-25 三菱電機株式会社 空気調和装置
JP2011247567A (ja) * 2010-05-31 2011-12-08 Nishiyama Corp 低温蓄熱冷却装置
JP5721875B1 (ja) * 2014-02-24 2015-05-20 伸和コントロールズ株式会社 チラー装置

Also Published As

Publication number Publication date
KR102006013B1 (ko) 2019-07-31
TWI646292B (zh) 2019-01-01
TW201734389A (zh) 2017-10-01
CN108474594A (zh) 2018-08-31
JP2017116118A (ja) 2017-06-29
CN108474594B (zh) 2020-06-30
JP6053907B1 (ja) 2016-12-27
WO2017110608A1 (ja) 2017-06-29

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E701 Decision to grant or registration of patent right
GRNT Written decision to grant