KR20170053374A - Vacuum gate valve having powder-removal device - Google Patents

Vacuum gate valve having powder-removal device Download PDF

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Publication number
KR20170053374A
KR20170053374A KR1020150155803A KR20150155803A KR20170053374A KR 20170053374 A KR20170053374 A KR 20170053374A KR 1020150155803 A KR1020150155803 A KR 1020150155803A KR 20150155803 A KR20150155803 A KR 20150155803A KR 20170053374 A KR20170053374 A KR 20170053374A
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South Korea
Prior art keywords
disk
powder
disc
valve
protector
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KR1020150155803A
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Korean (ko)
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KR101796681B1 (en
Inventor
서정혁
박자일
홍진
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주식회사 테라텍
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Priority to KR1020150155803A priority Critical patent/KR101796681B1/en
Publication of KR20170053374A publication Critical patent/KR20170053374A/en
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Publication of KR101796681B1 publication Critical patent/KR101796681B1/en

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/04—Construction of housing; Use of materials therefor of sliding valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/30—Details
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/30—Details
    • F16K3/314—Forms or constructions of slides; Attachment of the slide to the spindle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Sliding Valves (AREA)
  • Details Of Valves (AREA)

Abstract

The present invention relates to a vacuum gate valve to be installed between a process chamber and a vacuum pump in a semiconductor manufacturing process and, more specifically, to a vacuum gate valve capable of preventing, when a valve is opened, powder accumulated on the upper side of a disk from being introduced into a disk driving unit within a valve body, by using a powder removing device disposed on the upper side of the disk. The vacuum gate valve having a powder removing device according to the present invention may comprise: a valve body comprising an inlet and an outlet; a disk configured to move forward and downward in a direction perpendicular to a flow path between the inlet and the outlet, thereby opening or closing the flow path; a disk driving unit which is disposed inside the valve body and configured to drive the disk; and a powder removing device configured to remove powder accumulated on the disk at the upper side of the disk when the disk is moved.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a vacuum gate valve having a powder remover,

The present invention relates to a vacuum gate valve with a powder remover, and more particularly to a vacuum gate valve installed between a process chamber of a semiconductor manufacturing process and a vacuum pump.

The vacuum gate valve is installed in the vacuum piping between the process chamber for semiconductor manufacturing and the vacuum pump and is used to shut off the flow path (fluid passage) in the vacuum piping for maintenance and maintenance of the vacuum piping, .

The semiconductor manufacturing process is divided into an exposure process, a development process, a deposition process, and an etching process. In the deposition process, a lot of harmful gas is used, so that a powdery byproduct (hereinafter referred to as "powder") is generated. Such powder accumulates in the vacuum pipe or vacuum gate. Particularly, when the gate valve is opened and closed, the powder accumulates on the upper surface of the disk. When the valve is opened, the powder enters the valve body together with the disk to shorten the life of the vacuum gate valve .

As a conventional technique for solving such a problem, there is a vacuum gate valve disclosed in Korean Patent Registration No. 10-0539691.

The vacuum gate valve according to the prior art is provided with a ring on the inner wall of the flow path formed in the valve so that the powder in the vacuum pipe is drawn into the valve body while maintaining the fluid flow through the flow path when the valve is in the open state There is an advantage to block.

However, in the conventional art, when the valve is opened, there is a problem that the powder deposited on the top surface of the disc is drawn into the valve body together with the disc.

KR 10-0539691 B1 KR 10-0884256 B1 KR 10-1007876 B1

SUMMARY OF THE INVENTION It is an object of the present invention to solve the above problems and provide a vacuum gate valve equipped with a powder remover capable of preventing powder accumulated on a top surface of a disk from being drawn into a disk driving part in a valve body when the valve is opened.

It is another object of the present invention to provide a vacuum gate valve equipped with a powder eliminator capable of preventing the powder present in the flow path of the vacuum pipe or the valve from being drawn into the disk drive of the valve body regardless of whether the valve is opened or closed.

Another object of the present invention is to provide a vacuum gate valve capable of effectively shutting off the pressure at the upper and lower portions of the disk in a state where the valve is closed.

According to an aspect of the present invention, there is provided a vacuum gate valve including a powder eliminator, including: a valve body having an inlet and an outlet; A disc driving unit positioned inside the valve body to drive the disc; And a powder remover for removing the powder deposited on the disc on the disc when the disc is moved.

Here, the powder remover includes a slope part formed by reducing the diameter of the powder eliminator to a smaller diameter toward the lower part, and a lower end of the slope part contacts the upper surface of the disk when the disk is moved backward.

In addition, an edge is formed at the lower end of the inclined portion so that the powder can be smoothly removed.

The apparatus may further include a protector disposed vertically movably below the powder remover to block the flow path and the disk driving unit.

In addition, a powder remover seat having an inclined surface corresponding to an inclined portion of the powder remover may be provided on an upper portion of the valve body.

In addition, the upper end of the protector is closely attached to the lower end of the powder remover mounting part.

Here, an O-ring may be installed at the lower end of the powder remover mounting part.

The inclined portion may have a protruding portion formed to be longer than a length of the inclined surface of the seating portion.

Here, when the protector is lowered while the disc is closed, the protruding portion of the powder removing unit blocks a gap between the disc and the bottom of the seating portion to maintain airtightness of the disc driving unit.

In addition, when the protector is lifted while the disc is closed, the disc is lifted up by the protector and directly contacts the lower end of the powder remover seat, thereby maintaining airtightness of the driving unit.

Here, the powder remover may be made of a flexible material so as to be bent inward when the disk rises.

Meanwhile, a bypass valve may be installed on one side of the body to adjust the pressure difference between the upper and lower portions of the disk before opening the vacuum gate valve.

According to the configuration of the present invention, when the valve is opened, the powder accumulated on the upper surface of the disk is prevented from being introduced into the disk driving part inside the valve body through the powder remover located above the disk.

Further, by making the inclined portion of the powder remover longer than the length of the inclined surface of the powder remover mounting portion, it is possible to prevent powder present in the flow path of the vacuum pipe or the valve from being introduced into the disk driving portion of the valve body, irrespective of whether the valve is opened or closed.

In addition, by providing an O-ring at the lower end of the powder remover mounting portion, the airtightness of the disk driving portion can be maximized and the pressure at the upper and lower portions of the disk can be effectively blocked in the closed state of the valve.

1 is a sectional view showing an open state of a vacuum gate valve according to the present invention;
2 is a sectional view showing a closed state of a vacuum gate valve according to the present invention.
3 is a perspective view of a powder remover according to the present invention.
Fig. 4 is a longitudinal sectional view of XX in Fig. 3; Fig.
5 is a perspective view of a disk fixed to a disk base according to the present invention;
FIG. 6 is a partial vertical sectional view of FIG. 5, showing an operating state for indicating the vertical movement of the disk;
FIGS. 7A through 7E are operation states showing a process of closing a vacuum gate valve according to an embodiment of the present invention; FIGS.
FIGS. 8A to 8D are operation states showing a process of opening a vacuum gate valve according to an embodiment of the present invention; FIGS.

Hereinafter, the structure and effect of a vacuum gate valve having a powder eliminator (hereinafter, abbreviated as a vacuum gate valve) according to a preferred embodiment of the present invention will be described with reference to the accompanying drawings. The 'powder' described below refers to powdery by-products generated during the semiconductor manufacturing process.

FIG. 1 is a cross-sectional view showing an open state of a vacuum gate valve according to the present invention, FIG. 2 is a sectional view showing a closed state of a vacuum gate valve according to the present invention, FIG. 3 is a perspective view of a powder eliminator according to the present invention, 4 is a longitudinal sectional view taken along line XX of FIG. 3, FIG. 5 is a perspective view of a disk fixed to a disk base according to the present invention, and FIG. 6 is a partial vertical sectional view of FIG. .

1 to 5, a vacuum gate valve 100 according to the present invention includes a valve body 120 in which an inlet 112 and an outlet 114 are formed, and a valve body 120 in which an inlet 112 and an outlet 114 are formed. A disk driving part for driving the disk 132 positioned inside the valve body 120 and a disk driving part for driving the disk 132 installed on the flow path, And a powder remover 150 for removing the powder accumulated on the upper surface of the disk 132 when the disk 132 is moved.

An inlet 112 connected to the process chamber for manufacturing a semiconductor device and an outlet 114 connected to the vacuum pump are formed in the valve body 120, respectively. The inlet 112 and the outlet 114 may be installed at various positions of the valve body 120 but symmetrically installed at the top and bottom of the valve body 120 to facilitate the movement of the disk 132 desirable.

A flow path passing through the upper and lower portions of the valve body 120 is formed between the inlet port 112 and the outlet port 114. The disk drive unit 140 drives the disk 132 in the vertical direction It moves backward and opens and closes the passage.

The disk driving portion is a portion that is located inside the valve body and drives the disk 132. The disk driving portion includes a cylinder 144 in which a piston 142 is installed so as to be able to move back and forth by pneumatic or hydraulic pressure, (Not shown) connected to the link, a disk base 134 fixed to the disk 132 and connected to the rotation axis to allow the disk 132 to move back and forth . Here, the disc base 134 is preferably installed in the disc accommodation space 124 above the cylinder 144.

The disk base 134 is preferably formed in a rectangular shape with one side thereof opened. The wheels 135 may be installed on both sides of the disk so as to reciprocate in the disk accommodating space 124.

The disk drive unit and the protector driving unit to be described later are examples of the actuator of the disk actuator and the protector actuator disclosed in Korean Patent Publication No. 10-08844256, and a detailed description thereof will be omitted. . However, the present invention is not limited thereto and may be implemented in various other ways.

A through hole 132a is formed at both edges of the disk 132 and a pin hole 134a is formed on both side frames of the disk base 134 corresponding to the through hole 132a. A spring installation space 134b is provided in the pinhole 134a so that the coil spring 138 can be installed therein. The lower end of the fixing pin 136, which penetrates the through hole 132a and the pinhole 134a, (136a) for controlling the elastic force of the spring (138) is formed.

The disk 132 can be closely fixed to the disk base by the elastic force of the coil spring 138. On the other hand, when the disk 132 receives an external force toward the image side, When lifted up, can be lifted from the disk base 134 by a predetermined distance d (see FIGS. 1 and 6).

As shown in FIG. 3, the powder remover 150 is provided with a seating protrusion 152 so as to be seated in a powder remover seating part 1220 to be described later, and has a cylindrical shape at a lower part thereof, The inclined portion 154 is formed.

In addition, the powder remover 150 may be bent inward when it is subjected to a force due to the rise of the disk 132, and may be located in the original position again by the restoring force when the disk 132 is lowered. For this purpose, it is preferable to use a flexible material such as NBR (acrylonitrile-butadiene rubber), silicone, fluorine rubber, and teflon. Although not shown in the figure, it may be formed of a stainless steel corrugated pipe.

The inclined portion 154 has a protruding portion (see FIG. 7B) formed to be relatively longer than the length of the inclined surface 1224 of the powder remover seating portion 1220, and a powder removing portion An edge 154a may be formed.

The powder remover 150 removes the powder deposited on the disc 132 from the upper portion of the disc 132. Specifically, during the opening of the vacuum gate valve 100, the lower end of the inclined portion 154 comes into contact with the upper surface of the disk 132 to sweep down the powder deposited on the disk 132 8C).

The protector 160 is formed in a cylindrical shape and serves to cut off the flow path and the disk driving unit. The protector 160 is vertically movably installed below the powder remover 150. Here, the vertical movement of the protector 160 may be performed by injecting compressed air into the valve body 120 or by a protector driving unit.

The valve body 120 includes a drive case 122 and a powder remover mount 1220 having a through hole formed at one side of the drive case 122.

The inner circumferential surface of the powder eliminator mounting portion 1220 forms an inclined surface 1224 corresponding to the inclined portion 154 of the powder remover 150 as the diameter of the through hole decreases downward.

The lower end of the seating part 1220 is brought into close contact with the upper end of the protector 160 as shown in FIG. 2 when the vacuum gate valve 100 is opened. When the vacuum gate valve 100 is closed, And is in close contact with the upper surface of the disk 132 as well.

An O-ring insertion groove 1226 is formed at the lower end of the powder eliminator mounting portion 1220 so that an O-ring 1228 is inserted and fixed. The O-ring 1228 maximizes the airtightness of the disk driving unit by shutting off the disk driving unit when the disk 132 is opened and closed, and effectively prevents the pressure on the disk 132 from being lowered when the vacuum gate valve 100 is closed have.

A bypass valve 170 may be provided on the side of the valve body 120 to adjust the pressure difference between the upper and lower sides of the disk before the vacuum gate valve 100 is opened. Generally, before the vacuum gate valve 100 is opened, the inlet 112 on the upper side of the disk 132 is at an atmospheric pressure of 760 torr, and the outlet 114 at the lower side of the disk 132 is in a vacuum state. Therefore, if the vacuum gate valve 100 is opened in this state, it may damage the vacuum pump due to the pressure difference between the disk and the lower portion.

The bypass valve 170 functions to regulate the pressure of the inlet port 112 and the outlet port 114 through the bypass flow path 172 from 1 Torr to 100 Torr in the middle area and is automatically closed when the pressure reaches the pressure port.

Hereinafter, the process of closing the vacuum gate valve according to the embodiment of the present invention will be described.

7a to 7e are diagrams showing an operation state of the vacuum gate valve according to the embodiment of the present invention. FIG. 7a shows a state in which the valve is opened, FIG. 7b shows a state in which the protector is lowered immediately before the valve is closed 7c is a view showing a state in which the disk advances and the flow path is cut off, and 7d is a view showing a state in which the protector is raised in a state of 7c.

When the semiconductor process is in progress, the semiconductor process chamber must remain in a vacuum state, so that the valve 100 is opened as shown in FIG. 7A. The upper end of the protector 160 and the lower end of the powder remover mounting part 1220 are in close contact with each other so that the air tightness of the disk driving part can be maintained.

Before the valve 100 is closed, as shown in FIG. 7B, the protector 160 is lowered to provide a disc moving space between the disc 132 and the powder remover 150.

Next, as shown in 7c, the disk 132 advances to block the flow path in the valve 100. [ At this time, due to the protruding portion of the powder remover 150, a gap g is generated between the lower end of the powder remover mounting portion 1220 and the upper surface of the disk 132. In spite of this gap g, So that the powder in the flow path can be prevented from being drawn into the inside of the valve body 100. On the other hand, the powder in the vacuum pipe is accumulated on the upper surface of the disk 132 by the vibration due to the movement of the disk 132.

In this state, when the protector 160 rises as in 7d, the valve 100 is completely closed. At this time, the inclined portion 152 of the powder remover 150 is bent inside the flow path in a state of being in contact with the disk 132 by the raised protector 160 and the lower end of the powder remover mounting portion 1220 is separated from the disk 132 . As a result, the flow path above and below the disk 132 is disconnected and the airtightness of the disk drive can be maintained.

Hereinafter, a process of opening the vacuum gate valve according to the embodiment of the present invention will be described.

8A to 8D are diagrams showing an operation state of the vacuum gate valve according to the embodiment of the present invention. FIG. 8A shows a state in which the valve is closed. FIG. 8B shows a state in which the protector is lowered in a state 8a. 8c is a view showing a state of the disc during a backward movement, 8d is a state in which the disc is completely retracted and a channel is opened, and 8d is a state in which the protector is raised in a state of 8c.

First, when the valve 100 is closed, as described above, when a pressure difference occurs between the upper and lower portions of the disk and the valve 100 is instantly opened, the upper and lower pressure differentials of the disk 132 cause damage to the vacuum pump You can give.

Therefore, as shown in FIG. 8A, the upper and lower pressures of the disc 132 are adjusted through the bypass passage 172 by opening the Faip valve 170. In the process of opening the PIPATH valve 170, turbulence is generated in the vacuum pipe, and the powder in the vacuum pipe is accumulated on the upper surface of the disk by the turbulence.

When the upper and lower pressures of the disc 132 are adjusted, the protector 160 pushing the disc 132 upward is lowered as shown in FIG. 8B. When the protector 160 descends, the disc 132 is freely movable, and the inclined portion 154 of the powder removing unit 150 is restored to the inclined surface of the powder removing unit 1220, (1224). At this time, the lower end of the inclined portion is kept in contact with the upper surface of the disk.

If the disc is reversed in this state, as shown in Fig. 8C, the powder deposited on the upper surface of the disc is washed down by the lower end of the inclined portion.

Next, as shown in FIG. 8D, when the disc is reversed, the flow path above and below the disc 132 in the disconnected state is opened again. After the disc is retracted, the protector is lifted again as shown at 8e.

The vacuum gate valve according to the embodiment of the present invention is capable of preventing the powder accumulated on the upper surface of the disk from entering the disk driving part inside the valve body through the powder remover located above the disk when the valve is opened.

Further, by making the inclined portion of the powder remover longer than the length of the inclined surface of the powder remover mounting portion, it is possible to prevent powder present in the flow path of the vacuum pipe or the valve from being introduced into the disk driving portion of the valve body, irrespective of whether the valve is opened or closed.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is clearly understood that the same is by way of illustration and example only and is not to be taken in conjunction with the present invention. It is to be understood that various equivalents and modifications may be substituted for those at the time of the present application.

100: vacuum gate valve 110: inlet
112: outlet 114: outlet
120: valve body 122: drive part case
124: Disk accommodating space 132: Disk
134: Disk base 150: Powder remover
152: mounting projection 154:
160: Protector 170: Bypass valve
172: bypass flow path 1220: powder remover mounting part
1224:

Claims (12)

A valve body having an inlet and an outlet;
A disk that moves forward and backward in a direction perpendicular to a flow path between the inlet and the outlet and opens and closes the flow path;
A disk drive disposed within the valve body to drive the disk; And
And a powder remover for removing the powder deposited on the disc on the disc when the disc is moved. The powder removing apparatus according to claim 1,
Wherein the inclined portion is formed in a cylindrical shape and is formed by decreasing the diameter toward the lower side, and the lower end of the inclined portion abuts the upper surface of the disc when the disc is moved backward. 3. The apparatus according to claim 2, wherein, at the lower end of the inclined portion,
Wherein the edge of the vacuum degasser is formed so that the powder removal can be smoothly performed. 3. The method of claim 2,
And a protector disposed vertically movably below the powder eliminator to block the flow path and the disc driving unit. ≪ Desc / Clms Page number 19 > 5. The method of claim 4,
And a powder remover seat having an inclined surface corresponding to an inclined portion of the powder remover, is provided at an upper portion of the valve body. 6. The powder remover according to claim 5,
And the upper end of the protector is brought into close contact with the vacuum cleaner. 7. The powder remover according to claim 6,
Characterized in that an O-ring is provided in the vacuum cleaner. The apparatus according to claim 5,
And a protruding portion protruding from the surface of the mounting portion, the protruding portion being formed to be longer than the length of the inclined surface of the mounting portion. 9. The method of claim 8,
When the protector is lowered while the disc is closed,
Wherein the protruding portion of the powder removing unit covers a gap between the disc and the bottom of the seating unit to maintain the airtightness of the disc driving unit. 9. The method of claim 8,
When the protector is raised while the disc is closed,
Wherein the disk is lifted upward by the protector to directly contact the lower end of the powder remover mounting part to maintain the airtightness of the driving part. The powder removing apparatus according to claim 10,
Characterized in that the vacuum gate valve is made of a flexible material so that it can be bent inward when the disk rises. 12. The valve according to any one of claims 1 to 11, wherein, at one side of the valve body,
And a bypass valve for adjusting a pressure difference between the upper and lower portions of the disk before opening the vacuum gate valve.
KR1020150155803A 2015-11-06 2015-11-06 Vacuum gate valve having powder-removal device KR101796681B1 (en)

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KR101796681B1 KR101796681B1 (en) 2017-12-01

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111609162A (en) * 2020-06-12 2020-09-01 蓝晶晶 Pipeline gate valve
KR20200002304U (en) * 2019-04-10 2020-10-21 주식회사 테라텍 Pressure fluctuation preventing device applied to vacuum gate valve

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102173561B1 (en) * 2019-04-10 2020-11-03 주식회사 테라텍 Slide type vaccum gate valve

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE29623103U1 (en) * 1996-10-23 1997-11-06 Zimmermann & Jansen GmbH, 52355 Düren Gate valve, in particular pipe bridge gate valve
JP2003343743A (en) * 2002-05-29 2003-12-03 Tomoe Tech Res Co Triple eccentricity type butterfly valve
JP2011190907A (en) * 2010-03-16 2011-09-29 Okm:Kk Ball valve and seat ring for ball valve

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20200002304U (en) * 2019-04-10 2020-10-21 주식회사 테라텍 Pressure fluctuation preventing device applied to vacuum gate valve
CN111609162A (en) * 2020-06-12 2020-09-01 蓝晶晶 Pipeline gate valve

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