KR20170053374A - Vacuum gate valve having powder-removal device - Google Patents
Vacuum gate valve having powder-removal device Download PDFInfo
- Publication number
- KR20170053374A KR20170053374A KR1020150155803A KR20150155803A KR20170053374A KR 20170053374 A KR20170053374 A KR 20170053374A KR 1020150155803 A KR1020150155803 A KR 1020150155803A KR 20150155803 A KR20150155803 A KR 20150155803A KR 20170053374 A KR20170053374 A KR 20170053374A
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- KR
- South Korea
- Prior art keywords
- disk
- powder
- disc
- valve
- protector
- Prior art date
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
- F16K27/04—Construction of housing; Use of materials therefor of sliding valves
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/30—Details
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/30—Details
- F16K3/314—Forms or constructions of slides; Attachment of the slide to the spindle
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
- F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Sliding Valves (AREA)
- Details Of Valves (AREA)
Abstract
Description
The present invention relates to a vacuum gate valve with a powder remover, and more particularly to a vacuum gate valve installed between a process chamber of a semiconductor manufacturing process and a vacuum pump.
The vacuum gate valve is installed in the vacuum piping between the process chamber for semiconductor manufacturing and the vacuum pump and is used to shut off the flow path (fluid passage) in the vacuum piping for maintenance and maintenance of the vacuum piping, .
The semiconductor manufacturing process is divided into an exposure process, a development process, a deposition process, and an etching process. In the deposition process, a lot of harmful gas is used, so that a powdery byproduct (hereinafter referred to as "powder") is generated. Such powder accumulates in the vacuum pipe or vacuum gate. Particularly, when the gate valve is opened and closed, the powder accumulates on the upper surface of the disk. When the valve is opened, the powder enters the valve body together with the disk to shorten the life of the vacuum gate valve .
As a conventional technique for solving such a problem, there is a vacuum gate valve disclosed in Korean Patent Registration No. 10-0539691.
The vacuum gate valve according to the prior art is provided with a ring on the inner wall of the flow path formed in the valve so that the powder in the vacuum pipe is drawn into the valve body while maintaining the fluid flow through the flow path when the valve is in the open state There is an advantage to block.
However, in the conventional art, when the valve is opened, there is a problem that the powder deposited on the top surface of the disc is drawn into the valve body together with the disc.
SUMMARY OF THE INVENTION It is an object of the present invention to solve the above problems and provide a vacuum gate valve equipped with a powder remover capable of preventing powder accumulated on a top surface of a disk from being drawn into a disk driving part in a valve body when the valve is opened.
It is another object of the present invention to provide a vacuum gate valve equipped with a powder eliminator capable of preventing the powder present in the flow path of the vacuum pipe or the valve from being drawn into the disk drive of the valve body regardless of whether the valve is opened or closed.
Another object of the present invention is to provide a vacuum gate valve capable of effectively shutting off the pressure at the upper and lower portions of the disk in a state where the valve is closed.
According to an aspect of the present invention, there is provided a vacuum gate valve including a powder eliminator, including: a valve body having an inlet and an outlet; A disc driving unit positioned inside the valve body to drive the disc; And a powder remover for removing the powder deposited on the disc on the disc when the disc is moved.
Here, the powder remover includes a slope part formed by reducing the diameter of the powder eliminator to a smaller diameter toward the lower part, and a lower end of the slope part contacts the upper surface of the disk when the disk is moved backward.
In addition, an edge is formed at the lower end of the inclined portion so that the powder can be smoothly removed.
The apparatus may further include a protector disposed vertically movably below the powder remover to block the flow path and the disk driving unit.
In addition, a powder remover seat having an inclined surface corresponding to an inclined portion of the powder remover may be provided on an upper portion of the valve body.
In addition, the upper end of the protector is closely attached to the lower end of the powder remover mounting part.
Here, an O-ring may be installed at the lower end of the powder remover mounting part.
The inclined portion may have a protruding portion formed to be longer than a length of the inclined surface of the seating portion.
Here, when the protector is lowered while the disc is closed, the protruding portion of the powder removing unit blocks a gap between the disc and the bottom of the seating portion to maintain airtightness of the disc driving unit.
In addition, when the protector is lifted while the disc is closed, the disc is lifted up by the protector and directly contacts the lower end of the powder remover seat, thereby maintaining airtightness of the driving unit.
Here, the powder remover may be made of a flexible material so as to be bent inward when the disk rises.
Meanwhile, a bypass valve may be installed on one side of the body to adjust the pressure difference between the upper and lower portions of the disk before opening the vacuum gate valve.
According to the configuration of the present invention, when the valve is opened, the powder accumulated on the upper surface of the disk is prevented from being introduced into the disk driving part inside the valve body through the powder remover located above the disk.
Further, by making the inclined portion of the powder remover longer than the length of the inclined surface of the powder remover mounting portion, it is possible to prevent powder present in the flow path of the vacuum pipe or the valve from being introduced into the disk driving portion of the valve body, irrespective of whether the valve is opened or closed.
In addition, by providing an O-ring at the lower end of the powder remover mounting portion, the airtightness of the disk driving portion can be maximized and the pressure at the upper and lower portions of the disk can be effectively blocked in the closed state of the valve.
1 is a sectional view showing an open state of a vacuum gate valve according to the present invention;
2 is a sectional view showing a closed state of a vacuum gate valve according to the present invention.
3 is a perspective view of a powder remover according to the present invention.
Fig. 4 is a longitudinal sectional view of XX in Fig. 3; Fig.
5 is a perspective view of a disk fixed to a disk base according to the present invention;
FIG. 6 is a partial vertical sectional view of FIG. 5, showing an operating state for indicating the vertical movement of the disk;
FIGS. 7A through 7E are operation states showing a process of closing a vacuum gate valve according to an embodiment of the present invention; FIGS.
FIGS. 8A to 8D are operation states showing a process of opening a vacuum gate valve according to an embodiment of the present invention; FIGS.
Hereinafter, the structure and effect of a vacuum gate valve having a powder eliminator (hereinafter, abbreviated as a vacuum gate valve) according to a preferred embodiment of the present invention will be described with reference to the accompanying drawings. The 'powder' described below refers to powdery by-products generated during the semiconductor manufacturing process.
FIG. 1 is a cross-sectional view showing an open state of a vacuum gate valve according to the present invention, FIG. 2 is a sectional view showing a closed state of a vacuum gate valve according to the present invention, FIG. 3 is a perspective view of a powder eliminator according to the present invention, 4 is a longitudinal sectional view taken along line XX of FIG. 3, FIG. 5 is a perspective view of a disk fixed to a disk base according to the present invention, and FIG. 6 is a partial vertical sectional view of FIG. .
1 to 5, a
An
A flow path passing through the upper and lower portions of the
The disk driving portion is a portion that is located inside the valve body and drives the
The
The disk drive unit and the protector driving unit to be described later are examples of the actuator of the disk actuator and the protector actuator disclosed in Korean Patent Publication No. 10-08844256, and a detailed description thereof will be omitted. . However, the present invention is not limited thereto and may be implemented in various other ways.
A through
The
As shown in FIG. 3, the
In addition, the
The
The
The
The
The inner circumferential surface of the powder
The lower end of the
An O-
A
The
Hereinafter, the process of closing the vacuum gate valve according to the embodiment of the present invention will be described.
7a to 7e are diagrams showing an operation state of the vacuum gate valve according to the embodiment of the present invention. FIG. 7a shows a state in which the valve is opened, FIG. 7b shows a state in which the protector is lowered immediately before the valve is closed 7c is a view showing a state in which the disk advances and the flow path is cut off, and 7d is a view showing a state in which the protector is raised in a state of 7c.
When the semiconductor process is in progress, the semiconductor process chamber must remain in a vacuum state, so that the
Before the
Next, as shown in 7c, the
In this state, when the
Hereinafter, a process of opening the vacuum gate valve according to the embodiment of the present invention will be described.
8A to 8D are diagrams showing an operation state of the vacuum gate valve according to the embodiment of the present invention. FIG. 8A shows a state in which the valve is closed. FIG. 8B shows a state in which the protector is lowered in a state 8a. 8c is a view showing a state of the disc during a backward movement, 8d is a state in which the disc is completely retracted and a channel is opened, and 8d is a state in which the protector is raised in a state of 8c.
First, when the
Therefore, as shown in FIG. 8A, the upper and lower pressures of the
When the upper and lower pressures of the
If the disc is reversed in this state, as shown in Fig. 8C, the powder deposited on the upper surface of the disc is washed down by the lower end of the inclined portion.
Next, as shown in FIG. 8D, when the disc is reversed, the flow path above and below the
The vacuum gate valve according to the embodiment of the present invention is capable of preventing the powder accumulated on the upper surface of the disk from entering the disk driving part inside the valve body through the powder remover located above the disk when the valve is opened.
Further, by making the inclined portion of the powder remover longer than the length of the inclined surface of the powder remover mounting portion, it is possible to prevent powder present in the flow path of the vacuum pipe or the valve from being introduced into the disk driving portion of the valve body, irrespective of whether the valve is opened or closed.
While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is clearly understood that the same is by way of illustration and example only and is not to be taken in conjunction with the present invention. It is to be understood that various equivalents and modifications may be substituted for those at the time of the present application.
100: vacuum gate valve 110: inlet
112: outlet 114: outlet
120: valve body 122: drive part case
124: Disk accommodating space 132: Disk
134: Disk base 150: Powder remover
152: mounting projection 154:
160: Protector 170: Bypass valve
172: bypass flow path 1220: powder remover mounting part
1224:
Claims (12)
A disk that moves forward and backward in a direction perpendicular to a flow path between the inlet and the outlet and opens and closes the flow path;
A disk drive disposed within the valve body to drive the disk; And
And a powder remover for removing the powder deposited on the disc on the disc when the disc is moved.
Wherein the inclined portion is formed in a cylindrical shape and is formed by decreasing the diameter toward the lower side, and the lower end of the inclined portion abuts the upper surface of the disc when the disc is moved backward.
Wherein the edge of the vacuum degasser is formed so that the powder removal can be smoothly performed.
And a protector disposed vertically movably below the powder eliminator to block the flow path and the disc driving unit. ≪ Desc / Clms Page number 19 >
And a powder remover seat having an inclined surface corresponding to an inclined portion of the powder remover, is provided at an upper portion of the valve body.
And the upper end of the protector is brought into close contact with the vacuum cleaner.
Characterized in that an O-ring is provided in the vacuum cleaner.
And a protruding portion protruding from the surface of the mounting portion, the protruding portion being formed to be longer than the length of the inclined surface of the mounting portion.
When the protector is lowered while the disc is closed,
Wherein the protruding portion of the powder removing unit covers a gap between the disc and the bottom of the seating unit to maintain the airtightness of the disc driving unit.
When the protector is raised while the disc is closed,
Wherein the disk is lifted upward by the protector to directly contact the lower end of the powder remover mounting part to maintain the airtightness of the driving part.
Characterized in that the vacuum gate valve is made of a flexible material so that it can be bent inward when the disk rises.
And a bypass valve for adjusting a pressure difference between the upper and lower portions of the disk before opening the vacuum gate valve.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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KR1020150155803A KR101796681B1 (en) | 2015-11-06 | 2015-11-06 | Vacuum gate valve having powder-removal device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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KR1020150155803A KR101796681B1 (en) | 2015-11-06 | 2015-11-06 | Vacuum gate valve having powder-removal device |
Publications (2)
Publication Number | Publication Date |
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KR20170053374A true KR20170053374A (en) | 2017-05-16 |
KR101796681B1 KR101796681B1 (en) | 2017-12-01 |
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KR1020150155803A KR101796681B1 (en) | 2015-11-06 | 2015-11-06 | Vacuum gate valve having powder-removal device |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111609162A (en) * | 2020-06-12 | 2020-09-01 | 蓝晶晶 | Pipeline gate valve |
KR20200002304U (en) * | 2019-04-10 | 2020-10-21 | 주식회사 테라텍 | Pressure fluctuation preventing device applied to vacuum gate valve |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102173561B1 (en) * | 2019-04-10 | 2020-11-03 | 주식회사 테라텍 | Slide type vaccum gate valve |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE29623103U1 (en) * | 1996-10-23 | 1997-11-06 | Zimmermann & Jansen GmbH, 52355 Düren | Gate valve, in particular pipe bridge gate valve |
JP2003343743A (en) * | 2002-05-29 | 2003-12-03 | Tomoe Tech Res Co | Triple eccentricity type butterfly valve |
JP2011190907A (en) * | 2010-03-16 | 2011-09-29 | Okm:Kk | Ball valve and seat ring for ball valve |
-
2015
- 2015-11-06 KR KR1020150155803A patent/KR101796681B1/en active IP Right Grant
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20200002304U (en) * | 2019-04-10 | 2020-10-21 | 주식회사 테라텍 | Pressure fluctuation preventing device applied to vacuum gate valve |
CN111609162A (en) * | 2020-06-12 | 2020-09-01 | 蓝晶晶 | Pipeline gate valve |
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KR101796681B1 (en) | 2017-12-01 |
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