KR100539691B1 - Vacuum gate valve - Google Patents
Vacuum gate valve Download PDFInfo
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- KR100539691B1 KR100539691B1 KR1020050048939A KR20050048939A KR100539691B1 KR 100539691 B1 KR100539691 B1 KR 100539691B1 KR 1020050048939 A KR1020050048939 A KR 1020050048939A KR 20050048939 A KR20050048939 A KR 20050048939A KR 100539691 B1 KR100539691 B1 KR 100539691B1
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- gate valve
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- fluid passage
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67772—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving removal of lid, door, cover
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/029—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with two or more gates
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/0254—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor being operated by particular means
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/22—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with sealing faces shaped as surfaces of solids of revolution
- F16K3/24—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with sealing faces shaped as surfaces of solids of revolution with cylindrical valve members
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K35/00—Means to prevent accidental or unauthorised actuation
- F16K35/02—Means to prevent accidental or unauthorised actuation to be locked or disconnected by means of a pushing or pulling action
- F16K35/027—Means to prevent accidental or unauthorised actuation to be locked or disconnected by means of a pushing or pulling action the locking mechanism being actuated by pushing or pulling the valve actuator, the valve actuator being rotated subsequently to bring the valve closure element in the desired position
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
- F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Details Of Valves (AREA)
- Sliding Valves (AREA)
Abstract
진공 게이트밸브에 관하여 개시한다. 본 발명의 장치는, 디스크와; 엑츄에이터와; 유입부, 유출부, 유체통로 및 디스크 유출입구멍이 형성된 몸체가 있는 진공 게이트밸브에 있어서, 디스크 전단에 연결되어 디스크와 연동됨으로써 디스크가 디스크 유출입구멍의 내측에 위치되면 디스크 유출입구멍 전단에 위치되어 유체통로의 내측벽에 밀착되는 링이 구비되는 것을 특징으로 한다. 본 발명에 의하면, 진공 게이트밸브가 열려있는 경우에는 링에 의하여 유체통로를 통한 유체의 흐름은 그대로 유지되고 공정 중에 발생한 부산물이 게이트밸브 몸체 내부에 축적되는 현상을 방지 할 수 있다.A vacuum gate valve is disclosed. The apparatus of the present invention comprises a disk; An actuator; A vacuum gate valve having a body formed with an inlet, an outlet, a fluid passage, and a disc outlet hole, wherein the disc is connected to the front end of the disc and interlocked with the disc, so that the disc is positioned at the front of the disc outlet inlet when the disc is located inside the disc outlet. And a ring in close contact with the inner wall of the passage. According to the present invention, when the vacuum gate valve is open, the flow of the fluid through the fluid passage by the ring is maintained as it is, and it is possible to prevent a phenomenon in which by-products generated during the process accumulate inside the gate valve body.
Description
본 발명은 진공 게이트밸브에 관한 것으로서, 특히 디스크가 슬라이딩되는 영역에 이물질이 축적되는 것을 방지하는 진공 게이트밸브에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum gate valve, and more particularly, to a vacuum gate valve for preventing foreign matter from accumulating in a region in which a disk slides.
반도체 및 LCD 제조장치의 공정챔버 출구측과 진공펌프 사이에는 배관 및 진공펌프 등 부대설비의 보수, 유지시 배관 라인의 개폐를 위하여 진공 게이트밸브가 설치된다. 종래의 진공 게이트밸브의 작동방식으로는, 수동 개폐와 자동 개폐로 구분되며, 자동 개폐방식에는 압축 공기 또는 전기 구동 방식이 있다. A vacuum gate valve is installed between the process chamber outlet of the semiconductor and LCD manufacturing apparatus and the vacuum pump for opening and closing of the piping line during maintenance and maintenance of auxiliary equipment such as piping and vacuum pump. As a conventional operation method of the vacuum gate valve, it is divided into manual opening and closing and automatic opening and closing, there is a compressed air or electric drive method.
그런데 진공 게이트밸브를 통하여 배기되는 것은 유체뿐만 아니라 반도체 및 LCD 제조공정중에 발생한 파우더 등의 부산물도 배기되게 되므로 게이트밸브 내측에는 어느 정도의 그 부산물이 쌓이게 된다. 특히, 그 부산물이 게이트밸브를 개폐하는 디스크가 슬라이딩되는 영역에 쌓이게 되면 게이트밸브의 개폐가 원활하지 못하여 작동 불량이 발생하게 된다.By the way, the exhaust through the vacuum gate valve is not only a fluid, but also by-products such as powder generated during the semiconductor and LCD manufacturing process are exhausted, so that some by-products are accumulated inside the gate valve. In particular, when the by-products accumulate in the sliding area of the disk for opening and closing the gate valve, the opening and closing of the gate valve is not smooth and malfunction occurs.
따라서 본 발명이 이루고자 하는 기술적 과제는 공정 중에 발생하는 부산물에 의한 작동불능 현상을 방지할 수 있는 진공 게이트밸브를 제공하는 데 있다.Therefore, the technical problem to be achieved by the present invention is to provide a vacuum gate valve that can prevent the malfunction of the by-products generated during the process.
상기 기술적 과제를 달성하기 위한 본 발명에 따른 진공 게이트밸브는: 디스크와; 상기 디스크를 슬라이딩시키는 엑츄에이터와; 유입구를 포함하는 유입부, 유출구를 포함하는 유출부, 상기 유입부와 유출부를 연결하는 유체통로 및 상기 유체통로를 열도록 디스크가 슬라이딩되었을 때 상기 디스크가 자신의 내측에 위치되도록 형성된 디스크 유출입구멍이 형성된 몸체가 있는 진공 게이트밸브에 있어서,상기 디스크 전단에 연결되어 상기 디스크와 연동됨으로써 상기 디스크가 상기 디스크 유출입구멍의 내측에 위치되면 상기 디스크 유출입구멍 전단에 위치되어 상기 유체통로의 내측벽에 밀착되는 링과; 상기 몸체에 설치되되, 상기 유입부와 상기 유출부를 연결하는 보조 게이트밸브용 유체통로가 있는 보조 게이트밸브용 몸체와; 상기 보조 게이트밸브용 유체통로를 개폐하는 보조 게이트밸브용 디스크와;상기 보조 게이트밸브용 유체통로를 개폐하도록 상기 보조 게이트밸브용 디스크를 슬라이딩시키는 보조 게이트밸브용 엑츄에이터가 구비되는 것을 특징으로 한다.Vacuum gate valve according to the present invention for achieving the above technical problem: a disk; An actuator for sliding the disk; An inlet including an inlet, an outlet including an outlet, a fluid passage connecting the inlet and an outlet, and a disc outlet inlet formed so that the disc is positioned inside thereof when the disc is slid to open the fluid passage. A vacuum gate valve having a formed body, wherein the disk is connected to the front end of the disk and interlocks with the disk so that the disk is positioned in front of the disk inlet opening and is in close contact with the inner wall of the fluid passage. A ring; An auxiliary gate valve body installed on the body and having a fluid passage for an auxiliary gate valve connecting the inlet and the outlet; And an auxiliary gate valve disc for opening and closing the auxiliary gate valve fluid passage; and an auxiliary gate valve actuator for sliding the auxiliary gate valve disc to open and close the auxiliary gate valve fluid passage.
삭제delete
이 때, 상기 디스크 및 링은 상기 엑츄에이터에 의하여 슬라이딩되는 하나의 플레이트 상에 설치되되, 상기 링이 설치된 상기 플레이트의 소정영역에는 구멍이 형성되어 있는 것을 특징으로 한다. 또한, 상기 디스크는 상기 엑츄에이터에 의하여 슬라이딩되는 플레이트 상에 설치되고, 상기 링은 상기 플레이트에 마련된 구멍에 설치되어도 좋다. 그리고 상기 디스크는 상기 플레이트와 밀착되지 않도록 설치되며, 상기 플레이트에 있어서 상기 디스크가 설치되는 영역에는 상하로 관통하는 복수 개의 구멍이 형성되어도 좋다.At this time, the disk and the ring is installed on one plate which is slid by the actuator, characterized in that a hole is formed in a predetermined region of the plate in which the ring is installed. In addition, the disk may be provided on a plate slid by the actuator, and the ring may be provided in a hole provided in the plate. The disk may be provided not to be in close contact with the plate, and a plurality of holes penetrating up and down may be formed in an area of the plate where the disk is installed.
삭제delete
이하, 첨부한 도면들을 참조하여 본 발명의 바람직한 실시예들을 상세히 설명한다. Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.
[실시예 1]Example 1
도 1a는 본 발명의 실시예에 따른 진공 게이트밸브가 열렸을 때의 개략도이고, 도 1b는 본 발명의 실시예에 따른 진공 게이트밸브가 닫혔을 때의 개략도이며, 도 1c는 도 1a와 같이 본 발명의 실시예에 따른 진공 게이트밸브가 열렸을 때를 보다 명확하게 표현하기 위하여 일부 구성요소만을 도시한 개략도이다.Figure 1a is a schematic diagram when the vacuum gate valve according to an embodiment of the present invention, Figure 1b is a schematic diagram when the vacuum gate valve according to an embodiment of the present invention, Figure 1c is the present invention as shown in Figure 1a In order to more clearly express when the vacuum gate valve according to the embodiment of the schematic diagram showing only some components.
도 1a 내지 도 1c를 참조하면, 본 발명의 실시예에 따른 진공 게이트밸브는 몸체와(110), 디스크(120)와, 디스크(120)를 슬라이딩시키는 엑츄에이터(actuator, 130) 및 링(ring, 140)을 포함하여 이루어진다. 1A to 1C, a vacuum gate valve according to an exemplary embodiment of the present invention includes a body 110, a disk 120, an actuator 130 for sliding the disk 120, and a ring, 140).
몸체(110)에는 유입구를 포함하는 유입부(미도시), 유출구를 포함하는 유출부(미도시), 유입부와 유출부를 연결하는 유체통로(111) 및 디스크 유출입구멍(미도시)이 있다. 유체통로(111)를 개방하도록 디스크(120)가 슬라이딩되었을 때 디스크(120)는 디스크 유출입구멍 내측에 위치된다.The body 110 includes an inlet (not shown) including an inlet, an outlet (not shown) including an outlet, a fluid passage 111 connecting the inlet and an outlet, and a disc outlet inlet (not shown). When the disk 120 is slid to open the fluid passage 111, the disk 120 is located inside the disk outlet hole.
링(140)은 디스크(130)와 연동되어 슬라이딩되도록 디스크(120) 전단에 연결된다. 그리고 링(140)은 디스크(120)가 디스크 유출입구멍의 내측에 위치되면, 즉 진공 게이트밸브가 열려있는 경우에는 디스크 유출입구멍 전단에 위치되며 유체통로(111)의 내측벽에 밀착되도록 설치된다. The ring 140 is connected to the front end of the disk 120 to slide in conjunction with the disk 130. In addition, when the disk 120 is positioned inside the disk outlet port, that is, when the vacuum gate valve is open, the ring 140 is positioned in front of the disk outlet port and is installed to be in close contact with the inner wall of the fluid passage 111.
따라서 진공 게이트밸브가 열려있는 경우에는 링(140)에 의하여 유체통로(111)를 통한 유체의 흐름은 그대로 유지되고 공정 중에 발생한 부산물이 디스크 유출입구멍, 즉 게이트밸브 몸체 내부에 쌓이는 것이 방지되게 된다.Therefore, when the vacuum gate valve is open, the flow of the fluid through the fluid passage 111 is maintained by the ring 140 and the by-products generated during the process are prevented from accumulating in the disc inlet / outlet, that is, the gate valve body.
본 발명에 따른 실시예에서는 디스크(120)와 링(140)의 원활한 연동과 디스크(120)가 슬라이딩되는 영역에서의 부산물의 축적을 효율적으로 방지하기 위하여 하나의 플레이트(150) 상에 디스크(120) 및 링(140)을 설치하였다. 이 때, 플레이트(150)에 있어서 링(140)이 설치되는 영역에는 구멍이 형성되어야 함은 자명하다. 한편, 플레이트(150) 소정영역에 구멍을 형성하고 링(140)을 그 구멍 내측에 설치하여도 좋다. 또한, 디스크(120)는 틈이 생기도록 플레이트(150)에 밀착되지 않게 설치되며, 플레이트(150)에 있어서 디스크(120)가 설치되는 영역에는 상하로 관통하는 복수 개의 구멍이 형성되어도 좋다.In the embodiment according to the present invention in order to prevent the smooth interlocking of the disk 120 and the ring 140 and the accumulation of by-products in the region in which the disk 120 is slid, the disk 120 on one plate 150 ) And ring 140 were installed. At this time, it is obvious that a hole should be formed in the region where the ring 140 is installed in the plate 150. On the other hand, a hole may be formed in a predetermined region of the plate 150 and the ring 140 may be provided inside the hole. In addition, the disk 120 may be provided not to be in close contact with the plate 150 so as to form a gap, and a plurality of holes penetrating up and down may be formed in the region where the disk 120 is installed in the plate 150.
[실시예 2]Example 2
본 실시예에 따른 진공 게이트밸브에는 시스템, 즉 진공펌프를 재가동 하는 경우에 펌프측에 순간적인 과부하가 생기지 않도록, 보조 게이트밸브가 더 설치되어 있다. 이하에서, 상술한 제1 실시예에 따른 진공 게이트 밸브는 메인 게이트밸브라 한다.The vacuum gate valve according to the present embodiment is further provided with an auxiliary gate valve so that a momentary overload does not occur on the pump side when the system, i.e., the vacuum pump is restarted. Hereinafter, the vacuum gate valve according to the first embodiment described above is called a main gate valve.
도 2a 내지 도 2c는 보조 게이트밸브가 더 설치된 본 발명의 실시예에 따른 진공 게이트밸브의 작동을 설명하기 위한 개략도들이다.2a to 2c are schematic views for explaining the operation of the vacuum gate valve according to an embodiment of the present invention further provided with an auxiliary gate valve.
도 2a 내지 도 2c를 참조하면, 메인 게이트밸브에 있어서 링(140)은 플레이트(150)에 형성된 구멍 내측에 설치되어 있고, 디스크(120)는 플레이트(150)로부터 이격되도록 플레이트(150) 상에 설치되며, 플레이트(150)에 있어서 디스크(120)가 설치되는 영역에는 상하로 관통하는 복수 개의 구멍이 형성되어 있다.2A to 2C, in the main gate valve, the ring 140 is installed inside the hole formed in the plate 150, and the disk 120 is disposed on the plate 150 so as to be spaced apart from the plate 150. In the plate 150, a plurality of holes penetrating up and down are formed in an area where the disk 120 is installed.
보조 게이트밸브는 메인 게이트밸브와 같이 몸체(210), 디스크(220) 및 엑츄에이터를 포함하여 이루어진다. 이 때, 보조 게이트밸브의 몸체(210)에 형성된 유체통로(211)(이하에서, 보조 유체통로라 한다.)는 상술한 메인 게이트밸브의 유입부(112) 및 유출부(113)와 각각 연결된다. 이 때, 보조 게이트의 몸체(210)를 별도로 메인 게이트밸브에 설치하였지만 메인 게이트밸브 몸체 자체에 보조 게이트밸브의 몸체를 형성하여도 좋다.The auxiliary gate valve includes a body 210, a disc 220, and an actuator like the main gate valve. At this time, the fluid passage 211 (hereinafter, referred to as an auxiliary fluid passage) formed in the body 210 of the auxiliary gate valve is connected to the inlet 112 and the outlet 113 of the main gate valve described above, respectively. do. At this time, although the body 210 of the auxiliary gate is separately installed in the main gate valve, the body of the auxiliary gate valve may be formed in the main gate valve body itself.
본 실시예에 따른 진공 게이트밸브의 작동을 설명하면, 진공 배관 및 펌프 등 부대설비의 보수, 유지를 위해 시스템을 정지한 경우에는, 도 2a와 같이 메인 게이트밸브의 유체통로 및 보조 게이트밸브의 유체통로(211)를 닫은 상태로 유지한다. 그리고 시스템, 즉 진공펌프를 재가동하는 경우에는 펌프측에 순간적인 과부하가 생기지 않도록, 도 2b와 같이 보조 게이트밸브의 유체통로(211)만을 오픈(open)시킨다. 따라서 챔버 내의 공기 등은 보조 유체통로(211) 및 메인 게이트밸브의 디스크(120)와 플레이트(150) 사이의 틈을 통하여 진공펌프쪽으로 빨려나가게 된다. 그 다음에, 도 2c와 같이 메인 게이트밸브를 오픈(open)시키면 챔버 내의 공기 등은 메인 게이트밸브의 유체통로를 통하여 진공펌프측으로 빨려나가게 되고 챔버는 진공으로 유지되게 된다. Referring to the operation of the vacuum gate valve according to the present embodiment, when the system is stopped for maintenance and maintenance of auxiliary equipment such as vacuum pipes and pumps, the fluid passage of the main gate valve and the fluid of the auxiliary gate valve as shown in FIG. The passage 211 is kept closed. In the case of restarting the system, that is, the vacuum pump, only the fluid passage 211 of the auxiliary gate valve is opened as shown in FIG. 2B so as not to cause an instant overload on the pump side. Therefore, the air in the chamber is sucked toward the vacuum pump through the gap between the auxiliary fluid passage 211 and the disk 120 and the plate 150 of the main gate valve. Then, as shown in FIG. 2C, when the main gate valve is opened, air or the like in the chamber is sucked to the vacuum pump side through the fluid passage of the main gate valve, and the chamber is maintained in vacuum.
이와 같이 본 발명의 제2 실시예에 따른 진공 게이트밸브는 메인 게이트밸브와 보조 게이트밸브로 이루어져 진공펌프의 흡입량을 조절할 수 있으므로, 시스템 운전 초기에도 진공펌프 등의 설비에 과부하가 발생되지 않아서 진공펌프 및 부대설비의 손상을 방지할 수 있다.As described above, the vacuum gate valve according to the second embodiment of the present invention includes a main gate valve and an auxiliary gate valve to adjust the suction amount of the vacuum pump, so that an overload does not occur in equipment such as a vacuum pump even at the beginning of system operation. And damage to auxiliary equipment.
이하에서는 본 발명의 실시예에 따른 게이트밸브의 엑츄에이터에 대하여 설명한다. 이 때, 후술하는 엑츄에이터는 메인 게이트밸브 및 보조 게이트밸브에 공통하는 것이다. 단, 후술하는 엑츄에이터는 변형이 가능한 것이므로 본 발명의 권리범위가 반드시 이에 국한되는 것은 아니다. Hereinafter, the actuator of the gate valve according to the embodiment of the present invention will be described. At this time, the actuators described later are common to the main gate valve and the auxiliary gate valve. However, the actuator described below is capable of modification, and thus the scope of the present invention is not necessarily limited thereto.
도 1a 내지 도 2b를 참조하면, 엑츄에이터(130)는 압축공기에 의하여 작동하는 뉴메틱(pneumatic) 타입으로서, 외부에서 공급되는 압축공기에 의해 왕복운동하는 피스톤(131)이 있는 에어실린더(air cylinder, 132)와, 피스톤(131)과 디스크(120 또는 220)를 연결하는 링크(133)를 포함하여 이루어진다. 피스톤(131)을 사이에 두고 있는 에어실린더(132)의 양단에는 각각 외부에 마련된 압축공기 공급장치와 연결되는 유입구(134, 135)가 형성된다. 따라서 메인 게이트밸브 또는 보조 게이트밸브의 몸체에 형성된 유체통로가 클로즈(close)되도록 디스크(120 또는 130)를 슬라이딩시키는 경우에는 에어실린더의 일단에 형성된 유입구(134)를 통하여 압축공기가 에어실린더(132)로 유입되고, 유체통로가 오픈(open)되도록 디스크(120 또는 220)를 슬라이딩시키는 경우에는 에어실린더의 타단에 형성된 유입구(135)를 통하여 압축공기가 에어실린더(132)로 유입된다. 한편, 링크(133)가 디스크(120)와 피스톤(131)을 연결하기 위해서는 링크(133)의 소정영역이 몸체(110 또는 210)와 에어실린더(132) 내부에 삽입되어야 한다. 따라서 몸체와 에어실린더에는 소정의 구멍이 형성되게 되고, 그 구멍을 통하여 이물질이 유입될 수 있다. 이를 방지하기 위하여, 몸체(110 또는 210)와 에어실린더(132)를 연결하되 노출된 링크(133)의 소정영역을 밀봉하도록 벨로우즈(bellows)(136)가 설치된다.1A to 2B, the actuator 130 is a pneumatic type operated by compressed air, and has an air cylinder having a piston 131 reciprocating by compressed air supplied from the outside. , 132, and a link 133 connecting the piston 131 and the disk 120 or 220. At both ends of the air cylinder 132 having the piston 131 therebetween, inlets 134 and 135 are connected to the compressed air supply device provided outside. Therefore, when sliding the disk 120 or 130 so that the fluid passage formed in the body of the main gate valve or the auxiliary gate valve is closed (close), the compressed air through the inlet 134 formed in one end of the air cylinder 132 In the case of sliding the disk 120 or 220 so that the fluid passage is opened, compressed air is introduced into the air cylinder 132 through an inlet 135 formed at the other end of the air cylinder. Meanwhile, in order for the link 133 to connect the disk 120 and the piston 131, a predetermined region of the link 133 needs to be inserted into the body 110 or 210 and the air cylinder 132. Therefore, a predetermined hole is formed in the body and the air cylinder, and foreign matter may flow through the hole. In order to prevent this, a bellows 136 is installed to connect the body 110 or 210 to the air cylinder 132 and seal a predetermined area of the exposed link 133.
상술한 바와 같이 본 발명에 따른 진공 게이트밸브에 의하면, 진공 게이트밸브가 열려있는 경우에는 링에 의하여 유체통로를 통한 유체의 흐름은 그대로 유지되고 공정 중에 발생한 부산물의 축적이 방지되게 된다.As described above, according to the vacuum gate valve according to the present invention, when the vacuum gate valve is open, the flow of the fluid through the fluid passage is maintained by the ring and the accumulation of by-products generated during the process is prevented.
또한, 메인 게이트밸브와 보조 게이트밸브로 이루어져 진공펌프의 흡입량을 조절할 수 있으므로, 시스템 운전 초기에도 진공펌프 등의 설비에 과부하가 발생되지 않아서 진공펌프 및 부대설비의 손상을 방지 할 수 있으며, 종래의 방식보다 보수유지비용을 크게 절감 할 수 있고, 잔공펌프 등의 손상으로 인한 장비 휴지시간을 단축하여 생산성을 향상시킬 수 있다. In addition, since the suction amount of the vacuum pump can be adjusted by the main gate valve and the auxiliary gate valve, the overload does not occur in the equipment such as the vacuum pump even at the beginning of the system operation, thereby preventing damage to the vacuum pump and the auxiliary equipment. The maintenance cost can be greatly reduced than the method, and the downtime of the equipment due to damage of the remnant pump can be reduced to improve productivity.
본 발명은 상기 실시예들에만 한정되지 않으며, 본 발명의 기술적 사상 내에서 당 분야의 통상의 지식을 가진 자에 의해 많은 변형이 가능함은 명백하다.The present invention is not limited to the above embodiments, and it is apparent that many modifications are possible by those skilled in the art within the technical spirit of the present invention.
도 1a는 본 발명의 실시예에 따른 진공 게이트밸브가 열렸을 때의 개략도;1A is a schematic diagram when a vacuum gate valve is opened in accordance with an embodiment of the present invention;
도 1b는 본 발명의 실시예에 따른 진공 게이트밸브가 닫혔을 때의 개략도;1B is a schematic diagram when a vacuum gate valve in accordance with an embodiment of the present invention is closed;
도 1c는 도 1a와 같이 본 발명의 실시예에 따른 진공 게이트밸브가 열렸을 때를 보다 명확하게 표현하기 위하여 일부 구성요소만을 도시한 개략도; 및FIG. 1C is a schematic view showing only some components in order to more clearly express when a vacuum gate valve according to an embodiment of the present invention is opened as shown in FIG. 1A; And
도 2a 내지 도 2c는 보조 게이트밸브가 더 설치된 본 발명의 실시예에 따른 진공 게이트밸브의 작동을 설명하기 위한 개략도들이다.2a to 2c are schematic views for explaining the operation of the vacuum gate valve according to an embodiment of the present invention further provided with an auxiliary gate valve.
< 도면의 주요 부분에 대한 참조번호의 설명 ><Description of Reference Numbers for Main Parts of Drawings>
110 : 게이트밸브의 몸체 111 : 게이트밸브의 유체통로 110: body of the gate valve 111: fluid passage of the gate valve
112 : 게이트밸브의 유입부 113 : 게이트밸브의 유출부 120 : 디스크 130 : 엑츄에이터112: inlet of the gate valve 113: outlet of the gate valve 120: disk 130: actuator
140 : 링 150 : 플레이트140: ring 150: plate
210 : 보조 게이트밸브용 몸체210: body for the auxiliary gate valve
211 : 보조 게이트밸브용 유체통로211: fluid passage for auxiliary gate valve
Claims (5)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
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| KR1020050048939A KR100539691B1 (en) | 2005-06-08 | 2005-06-08 | Vacuum gate valve |
| PCT/KR2005/002827 WO2006132455A1 (en) | 2005-06-08 | 2005-08-26 | Vacuum gate valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020050048939A KR100539691B1 (en) | 2005-06-08 | 2005-06-08 | Vacuum gate valve |
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| KR100539691B1 true KR100539691B1 (en) | 2005-12-29 |
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| KR1020050048939A KR100539691B1 (en) | 2005-06-08 | 2005-06-08 | Vacuum gate valve |
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| KR (1) | KR100539691B1 (en) |
| WO (1) | WO2006132455A1 (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20200113543A (en) * | 2019-03-25 | 2020-10-07 | (주) 엔피홀딩스 | Gate valve assembly and water processing system having the same |
| KR20200119607A (en) | 2019-04-10 | 2020-10-20 | 주식회사 테라텍 | Slide type vaccum gate valve |
| KR20200002293U (en) | 2019-04-10 | 2020-10-20 | 주식회사 테라텍 | A sealing device applied to a vacuum gate valve |
| KR20200002304U (en) | 2019-04-10 | 2020-10-21 | 주식회사 테라텍 | Pressure fluctuation preventing device applied to vacuum gate valve |
| KR102270688B1 (en) | 2020-05-06 | 2021-06-28 | 안무아 | Vacuum gate valve |
| KR20230136954A (en) | 2022-03-21 | 2023-10-04 | 주식회사 아스트로텍 | Vacuum gate valve and vacuum system having the same |
| KR20240015983A (en) | 2022-07-28 | 2024-02-06 | 고병혁 | Sensor-integrated vacuum valve for pressure control and vacuum system having the same |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5044366B2 (en) | 2007-11-02 | 2012-10-10 | 株式会社ブイテックス | Vacuum gate valve and gate opening / closing method using the same |
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|---|---|---|---|---|
| US4010928A (en) * | 1974-12-27 | 1977-03-08 | Xomox Corporation | Piston-operated parallel-slide gate valve |
| JPS62242184A (en) * | 1986-04-09 | 1987-10-22 | Hitachi Zosen Corp | Cleaning method for valve plate whole surface seal type gate valve |
| JPH01254373A (en) * | 1988-04-01 | 1989-10-11 | Stopinc Ag | Lower immobile plate of three plate type gate valve for metallurgical vessel |
| US6681790B2 (en) * | 2001-10-03 | 2004-01-27 | Itt Manufacturing Enterprises, Inc. | Ported slide gate valve with gate motion to break scale build up |
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2005
- 2005-06-08 KR KR1020050048939A patent/KR100539691B1/en active IP Right Grant
- 2005-08-26 WO PCT/KR2005/002827 patent/WO2006132455A1/en active Application Filing
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20200113543A (en) * | 2019-03-25 | 2020-10-07 | (주) 엔피홀딩스 | Gate valve assembly and water processing system having the same |
| KR102234010B1 (en) * | 2019-03-25 | 2021-03-30 | 주식회사 에이씨엔 | Gate valve assembly and water processing system having the same |
| KR20200119607A (en) | 2019-04-10 | 2020-10-20 | 주식회사 테라텍 | Slide type vaccum gate valve |
| KR20200002293U (en) | 2019-04-10 | 2020-10-20 | 주식회사 테라텍 | A sealing device applied to a vacuum gate valve |
| KR20200002304U (en) | 2019-04-10 | 2020-10-21 | 주식회사 테라텍 | Pressure fluctuation preventing device applied to vacuum gate valve |
| KR102270688B1 (en) | 2020-05-06 | 2021-06-28 | 안무아 | Vacuum gate valve |
| KR20230136954A (en) | 2022-03-21 | 2023-10-04 | 주식회사 아스트로텍 | Vacuum gate valve and vacuum system having the same |
| KR20240015983A (en) | 2022-07-28 | 2024-02-06 | 고병혁 | Sensor-integrated vacuum valve for pressure control and vacuum system having the same |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2006132455A1 (en) | 2006-12-14 |
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