KR20160067616A - Crystal oscillator package - Google Patents

Crystal oscillator package Download PDF

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Publication number
KR20160067616A
KR20160067616A KR1020140173228A KR20140173228A KR20160067616A KR 20160067616 A KR20160067616 A KR 20160067616A KR 1020140173228 A KR1020140173228 A KR 1020140173228A KR 20140173228 A KR20140173228 A KR 20140173228A KR 20160067616 A KR20160067616 A KR 20160067616A
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KR
South Korea
Prior art keywords
quartz
electrode
piece
reinforcing pattern
quartz crystal
Prior art date
Application number
KR1020140173228A
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Korean (ko)
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KR102029502B1 (en
Inventor
이재상
Original Assignee
삼성전기주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Priority to KR1020140173228A priority Critical patent/KR102029502B1/en
Priority to US14/937,134 priority patent/US9973168B2/en
Publication of KR20160067616A publication Critical patent/KR20160067616A/en
Application granted granted Critical
Publication of KR102029502B1 publication Critical patent/KR102029502B1/en

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    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/19Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02Details
    • H03H9/05Holders; Supports
    • H03H9/10Mounting in enclosures
    • H03H9/1007Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1014Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
    • H03H9/1021Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device the BAW device being of the cantilever type
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02Details
    • H03H9/125Driving means, e.g. electrodes, coils
    • H03H9/13Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
    • H03H9/132Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials characterized by a particular shape

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

A quartz crystal resonator package according to an embodiment of the present invention includes a base substrate having first and second electrode pads formed on an upper surface thereof, A quartz piece fixed on one side of the two-electrode pad and having exciting electrodes electrically connected to the first and second electrode pads respectively formed on upper and lower surfaces thereof and being vibrated by an electrical signal; And may include one reinforcement pattern.

Description

[0001] CRYSTAL OSCILLATOR PACKAGE [0002]

The present invention relates to a quartz crystal package capable of lowering the equivalent series resistance.

The crystal oscillator is used for various purposes such as a frequency oscillator, a frequency adjuster, and a frequency converter. The quartz oscillator uses a crystal with excellent piezoelectric properties as a piezoelectric material, where the quartz serves as a stable mechanical vibration generator.

The crystal is artificially grown in a high-pressure autoclave, cut in a crystal axis, and then processed into a wafer shape by processing the size and shape so as to have desired characteristics.

Equivalent Series Resistance (ESR) is an index that determines the performance of a crystal oscillator. The lower the ESR value, the faster the response and the higher energy efficiency of the crystal oscillator.

The mesa-type oscillator having a flat thick central portion and a peripheral portion thereof is advantageous in that the ESR is low, but the manufacturing is difficult and the risk of breakage is high.

Korean Patent Laid-Open Publication No. 2009-0094981

It is an object of the present invention to provide a crystal oscillator package that can minimize the equivalent series resistance.

A quartz crystal resonator package according to an embodiment of the present invention includes: a base substrate having first and second electrode pads formed on an upper surface thereof, one side fixed to the first and second electrode pads, A quartz crystal having electrically connected excitation electrodes formed on the upper and lower surfaces thereof and vibrated by an electrical signal, and at least one reinforcement pattern formed on the corners of the quartz crystal piece.

The quartz oscillator package according to the present embodiment can remarkably lower the equivalent series resistance (ESR) generated in the quartz crystal through the reinforcing pattern formed on the quartz crystal. It is also possible to reinforce the stiffness of the faucet part of the crystal piece.

1 is a side sectional view of a quartz crystal according to an embodiment of the present invention;
2 is a cross-sectional view taken along line AA in Fig.
3 is a cross-sectional view taken along line BB in Fig.
FIG. 4 is a graph showing changes in ESR of a quartz piece without a reinforcing pattern and a reinforcing piece according to an embodiment of the present invention. FIG.
5 is a schematic view of a quartz crystal resonator package according to another embodiment of the present invention;
Figures 6 and 7 schematically illustrate another embodiment of the present invention.

It is noted that the technical terms used herein are used only to describe specific embodiments and are not intended to limit the invention. It is also to be understood that the technical terms used herein are to be interpreted in a sense generally understood by a person skilled in the art to which the present invention belongs, Should not be construed to mean, or be interpreted in an excessively reduced sense.

Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings. However, the embodiments of the present invention can be modified into various other forms, and the scope of the present invention is not limited to the embodiments described below. Further, the embodiments of the present invention are provided to more fully explain the present invention to those skilled in the art. In addition, the shape and size of elements in the figures may be exaggerated for clarity.

1 is a side cross-sectional view of a quartz crystal resonator package according to an embodiment of the present invention, which is a cross section cut in a longitudinal direction of a quartz crystal vibrator, and Fig. 2 is a plan view taken along line A-A in Fig. 1 shows a cross section taken along line C-C in Fig.

3 is a cross-sectional view taken along line BB of Fig.

1 to 3, a quartz crystal resonator package 100 according to an embodiment of the present invention includes a base substrate 26a, first and second electrode pads 24a and 24b formed on the upper surface of the base substrate 26a, And excitation electrodes 22a and 22b which are electrically connected to the first and second electrode pads 24a and 24b are provided on the first and second electrode pads 24a and 24b, A support portion 26b formed along the periphery of the base substrate 26a and forming an internal space for accommodating the crystal piece 21, 26b and a lid 27 for sealing the inner space. Here, the base substrate 26a, the support portions 26b, and the leads 27 may be collectively referred to as a package.

The base substrate 26a forms the bottom of the quartz crystal resonator package 100 and may be formed of an insulating ceramic material. For example, the base substrate 26a may be an aluminum oxide sintered body formed by laminating and firing a ceramic green sheet.

First and second electrode pads 24a and 24b may be formed on one side of the upper surface of the base substrate 26a. Further, a supporting portion 26b may be formed along the edge of the base substrate 26a.

A plurality of external electrode pads 24c and 24d for receiving an electric signal from the outside may be provided on the lower surface of the base substrate 26a and one of the plurality of external electrode pads 24c and 24d may be provided on the lower surface of the base substrate 26a, And another one of the plurality of external electrode pads 24c and 24d may be electrically connected to the second electrode pad 24b.

The electrical connection between the first and second electrode pads 24a and 24b and the external electrode pads 24c and 24d may be made by a conductive via (not shown) or the like formed on the base substrate 26a. In addition, a part of the plurality of external electrode pads 24c and 24d can be used as a ground electrode to be grounded.

The first and second electrode pads 24a and 24b are electrically connected to the excitation electrodes 22a and 22b formed on the upper and lower surfaces of the quartz crystal piece 21 to serve as a path for providing electrical signals to the quartz crystal crystal 21 do. Piezoelectric effect can be generated in the quartz piece 21 by the above-mentioned electric signal.

The first and second electrode pads 24a and 24b may be made of a conductive metal material and may be formed of a metal such as Au, Ag, W, Cu, May be formed using at least one metal material selected from the group.

The support portion 26b may be formed along the periphery of the base substrate 26a and may form an internal space for accommodating the modification piece 21 according to the present embodiment together with the base substrate 26a .

The support portion 26b may be made of an insulating ceramic material which is the same material as the base substrate 26a or may be made of a conductive metal alloy material which is the same material as the lead 27. [

The quartz crystal piece 21 can be manufactured by cutting a quartz crystal wafer using a photolithography technique or the like using a piezoelectric substrate polished to a predetermined thickness according to an oscillation frequency or the like.

The quartz crystal piece 21 may be formed in a substantially rectangular shape and may be formed to have the same overall thickness.

The quartz piece 21 according to the present embodiment can be constituted by a quartz piece 21 which is cut into AT cuts and whose thickness sliding vibration is excited by the main vibration.

As a quartz oscillator having a thickness-slip vibration mode as the main vibration, the AT cut quartz crystal is most widely used because of a small change in frequency with respect to a temperature change near room temperature. However, the present invention is not limited thereto.

Excitation electrodes 22a and 22b, connection electrodes 22c and 22d, and a reinforcing pattern may be formed on the crystal piece 21. [

The excitation electrodes (22a, 22b) are arranged at the center portions of both sides of the crystal piece (21). The excitation electrodes 22a and 22b apply an electric signal to the quartz crystal 21 to vibrate the quartz crystal 21 and may be formed in the same shape on both sides of the quartz crystal 21.

The excitation electrodes 22a and 22b according to the present embodiment are formed in a square shape in which square crests are rounded in an arcuate shape. That is, the excitation electrodes 22a and 22b are formed such that the tips of the excitation electrodes 22a and 22b facing the reinforcing pattern 50 are convex toward the reinforcing pattern 50 side. Here, the curvature of the arc-shaped portion may be formed to correspond to or similar to the curvature of the arc formed in the reinforcing pattern 50 described later.

Generally, vibrations generated in the quartz crystal are generated in a circular or oval shape from the center where the excitation electrodes 22a and 22b are formed. The excitation electrodes 22a and 22b according to this embodiment are formed in a shape similar to the shape in which vibration is generated.

In the case where the excitation electrodes of the excitation electrodes 22a and 22b are formed like arcs, the excitation electrodes 22a and 22b are disposed in the portions where no vibration is generated, so that the reduction of the vibration efficiency can be minimized.

The connection electrodes 22c and 22d are connected to the excitation electrodes 22a and 22b at one side and electrically connected to the first and second electrode pads 24a and 24b at the other side via the conductive adhesive 23. [

Each of the connection electrodes 22c and 22d can be formed on both sides of one side of the crystal piece 21. In this case, since the both sides of the quartz piece 21 can be formed in the same shape, they can be bonded to the base substrate 26a without distinguishing between the upper and lower sides.

At least one of the connection electrodes 22c and 22d is connected to the excitation electrodes 22a and 22b through the connection electrode 22g. Therefore, the connection electrodes 22g can be disposed on both sides of the crystal piece 21, respectively.

The excitation electrodes 22a and 22b and the connection electrodes 22c and 22d and the connection electrode 22g may be made of a metal film formed of a material such as chromium, nickel, gold, or silver by sputtering or vapor deposition . However, the present invention is not limited thereto.

The quartz piece 21 thus configured can be fixed in the inner space formed by one side of the base substrate 26a and the supporting portion 26b. Specifically, the quartz crystal piece 21 is formed such that the first and second electrode pads 24a and 24b formed on the base substrate 26a and the excitation electrodes 22a and 22b formed on the upper and lower surfaces of the quartz crystal piece 21 are electrically connected to each other The conductive adhesive 23 can be bonded.

The excitation electrodes 22a and 22b may be electrically connected to the first and second electrode pads 24a and 24b via the connection electrode 22g and the connection electrodes 22c and 22d.

The lid 27 may be disposed on the upper end of the support portion 26b to seal the inner space in which the quartz crystal piece 21 is mounted and may be disposed to close the inner space, And can be fixedly connected to the support portion 26b.

The quartz oscillator is greatly influenced by the operation efficiency and quality due to external environmental changes and contamination. Therefore, in order to protect the quartz crystal 21 from the environment outside the package 100 and the contaminants, leak rate should be very low.

To this end, the inside of the package 100 is hermetically sealed by the lid 27. In addition, the inner space of the package 100 may be vacuumed or filled with an inert gas such as nitrogen, helium, or argon.

In addition, the quartz piece 31 according to the present embodiment may have at least one reinforcing pattern 50.

The reinforcing pattern 50 is arranged outside the remaining electrodes 22a and 22b along the periphery of the quartz piece 21. [ For example, the reinforcing pattern 50 is formed on the nip portion of the quartz crystal piece 21, and can be disposed at a certain distance from the excitation electrodes 22a and 22b.

The reinforcing pattern 50 is formed on both sides of the quartz crystal piece 21 and is disposed to face all the vertexes of the quartz crystal piece 21 formed in a rectangular shape. Therefore, the reinforcing pattern 50 can reinforce the rigidity of the nipple portion of the correction piece 21 and protect the nipple portion from external force.

Further, the reinforcing pattern 50 reinforces the thickness of the neck portion of the quartz piece 21, thereby suppressing unnecessary vibration from occurring in the neck portion. As a result, the ESR of the quartz piece 21 can be lowered.

Each of the reinforcing patterns 50 according to the present embodiment may be formed in a triangular shape as a whole and the long side opposite to the excitation electrodes 22a and 22b of the three sides of the triangle shape is a concave arc shape inward of the reinforcing pattern 50 As shown in FIG. At this time, the curvature of the arc may be formed to be equal to or similar to the curvature of the arc formed on the facing excitation electrodes 22a, 22b.

Also, the reinforcing pattern 50 according to the present embodiment may include the dummy electrode 22f and the connection electrodes 22c and 22d.

The connection electrodes 22c and 22d are formed on one side of the quartz crystal substrate 21 and electrically connected to the excitation electrodes 22a and 22b and are electrically connected to the base substrate 26a 1, and the second electrode pads 24a and 24b.

That is, the connection electrodes 22c and 22d function to electrically connect the excitation electrodes 22a and 22b to the electrode pads. In this shape, the connection electrodes 22c and 22d are formed in the same shape as the dummy electrode 22f, Together with the function of.

The dummy electrode 22f is formed at the opposite side of the connection electrodes 22c and 22d. That is, the dummy electrode 22f may be formed in the shape and size corresponding to the connection electrodes 22c and 22d at the other side of the quartz piece 21 without the connection electrodes 22c and 22d. Like the connection electrodes 22c and 22d, are formed on both sides of the crystal piece 21 and can be connected to each other.

The dummy electrode 22f is not electrically connected to the excitation electrodes 22a and 22b or the electrode pads 24a and 24b. However, the present invention is not limited thereto, and it is possible to electrically connect to the excitation electrodes 22a and 22b and the electrode pads 24a and 24b, if necessary.

This reinforcing pattern 50 may be formed together in the process of forming the excitation electrodes 22a and 22b on the crystal piece 21. Therefore, the reinforcing pattern 50 may be formed of the same material as the excitation electrodes 22a and 22b, and may be formed to have the same thickness. However, the present invention is not limited thereto.

In the quartz crystal resonator package 100 according to the present embodiment having the above-described structure, the ESR value of the quartz crystal piece 21 can be lowered by providing the reinforcing pattern 50.

FIG. 4 is a graph illustrating changes in ESR of a quartz crystal piece without a reinforcing pattern and a reinforcing pattern according to an embodiment of the present invention. FIG. Here, the abscissa represents the change in the aspect ratio of the excitation electrode.

Referring to FIG. 4, it can be seen that the ESR of the quartz crystal according to the present embodiment is lower than that of the quartz crystal having no reinforcement pattern.

Also, it can be seen that as the aspect ratio of the excitation electrode increases, the ESR value of the quartz piece having no reinforcing pattern is not lowered below a critical value (for example, 1.01), but the quartz crystal according to the present embodiment is continuously lowered.

Therefore, when the quartz crystal according to this embodiment is used, it can be seen that the ESR can be remarkably lowered as compared with the case of using a conventional quartz crystal having no reinforcing pattern.

The present invention is not limited to the above-described embodiments, and various modifications are possible.

FIG. 5 is a schematic view of a quartz crystal resonator package according to another embodiment of the present invention, and shows a cross section corresponding to FIG. 2.

5, the quartz crystal resonator package 200 according to the present embodiment has the triangular shape of the reinforcing pattern 50 of the above-described embodiment, and the sides facing the excitation electrodes 22a and 22b are not arc- .

Therefore, the reinforcing pattern 50 is formed in a complete triangular shape. The corresponding portions of the excitation electrodes 22a and 22b are also formed as rectilinear sides, not arc-shaped.

At this time, the sides of the excitation electrodes 22a and 22b and the inner side of the reinforcing pattern 50 may be parallel to each other. However, the present invention is not limited thereto.

On the other hand, it is also possible to combine the configuration of this embodiment and the configuration of the above-described embodiment. For example, the reinforcing pattern 50 having an inner side arc shape and the excitation electrodes 22a and 22b having a linear portion of the corners constitute the quartz crystal 21, or the reinforcing pattern 50 having an inner side linear shape and the reinforcing pattern 50 having an arc- It is possible to make various modifications such as constituting the quartz crystal piece 21 with the excitation electrodes 22a and 22b.

6 and 7 are diagrams schematically showing still another embodiment of the present invention. 6 and 7, in the quartz crystal resonator packages 300 and 400, the reinforcing pattern 50 is formed at the nose portion of the quartz crystal piece 21, and the excitation electrodes 22a and 22b are arranged correspondingly The reinforcing pattern 50 and the excitation electrodes 22a and 22b can be deformed in various forms.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the scope of the invention is not limited to the disclosed exemplary embodiments, but, on the contrary, is intended to cover various modifications and equivalent arrangements included within the spirit and scope of the appended claims. And will be apparent to those skilled in the art.

For example, in the above-described embodiment, the piezoelectric device is described as an example of a crystal piece and a package having the crystal piece. The present invention is not limited thereto, and the oscillation circuit element for oscillating the crystal oscillator may be applied to a crystal oscillator provided in the package.

100 to 400: crystal oscillator package
21: Correction
22a, 22b: Excited electrode
22c and 22d: connection electrodes
22f: dummy electrode
22g: connecting electrode
23: Conductive adhesive
24a, 24b: first and second electrode pads
26a: Base substrate
26b:
27: Lead
50: reinforcement pattern

Claims (17)

A base substrate having first and second electrode pads formed on an upper surface thereof;
A quartz piece fixed on one side of the first and second electrode pads and having exciting electrodes electrically connected to the first and second electrode pads formed on upper and lower surfaces thereof and being vibrated by an electrical signal; And
At least one reinforcing pattern formed at a nip portion of the crystal piece;
.
[2] The method of claim 1,
Wherein the quartz crystal package is formed in a triangular shape at the quartz portion of the rectangle.
In the second aspect,
And is formed on both sides of the quartz crystal piece.
The method of claim 1, wherein at least one of the reinforcing patterns comprises:
And electrically connected to the excitation electrode.
The method of claim 1, wherein at least one of the reinforcing patterns comprises:
And electrically connecting the excitation electrode and the first electrode pad.
The method according to claim 2,
And the sides facing the excitation electrode are formed in a straight line.
7. The plasma display panel as claimed in claim 6,
And a nip portion facing the reinforcing pattern is formed as a straight side.
The method according to claim 2,
And the side opposite to the excitation electrode is formed into a concave arc inward of the reinforcing pattern.
The plasma display panel of claim 8,
And a side opposite to the reinforcing pattern is formed into a convex arc shape toward the reinforcing pattern side.
10. The method of claim 9,
Wherein the curvature of the arc formed at the nip portion of the excitation electrode and the curvature of the arc formed at the reinforcing pattern are formed with the same curvature.
The method according to claim 1,
A quartz oscillator package formed as a whole with the same thickness.
Modification;
A plurality of excitation electrodes formed at the center of the modification piece;
A plurality of connection electrodes formed on one side of the quartz crystal; And
At least one dummy electrode formed on the other side of the modification member;
.
The liquid crystal display device according to claim 1,
Wherein the long side is formed in a triangular shape facing the excitation electrode.
Modification;
A plurality of excitation electrodes formed at the center of the modification piece; And
At least one reinforcing pattern disposed outside the remaining electrode along the periphery of the modification piece;
.
15. The method according to claim 14,
And a quartz portion of the quartz crystal piece, respectively.
15. The method of claim 14, wherein at least one of the reinforcing patterns comprises:
And electrically connected to the excitation electrode.
15. The method according to claim 14,
And is formed to have the same thickness as the excitation electrode.

KR1020140173228A 2014-12-04 2014-12-04 Crystal oscillator package KR102029502B1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
KR1020140173228A KR102029502B1 (en) 2014-12-04 2014-12-04 Crystal oscillator package
US14/937,134 US9973168B2 (en) 2014-12-04 2015-11-10 Crystal vibrator package

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020140173228A KR102029502B1 (en) 2014-12-04 2014-12-04 Crystal oscillator package

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KR20160067616A true KR20160067616A (en) 2016-06-14
KR102029502B1 KR102029502B1 (en) 2019-10-07

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Publication number Priority date Publication date Assignee Title
JP6863328B2 (en) * 2018-04-04 2021-04-21 Tdk株式会社 Piezoelectric elements and vibration devices

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09167919A (en) * 1995-12-14 1997-06-24 Mitsumi Electric Co Ltd Surface mounted crystal oscillator
KR20090094981A (en) 2008-03-04 2009-09-09 삼성전기주식회사 Package of crystal oscillator
JP2011061418A (en) * 2009-09-09 2011-03-24 Nippon Dempa Kogyo Co Ltd Crystal vibration chip and crystal vibration device

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007104042A (en) 2005-09-30 2007-04-19 Kyocera Kinseki Corp Crystal resonation element and manufacturing method thereof
JP5296113B2 (en) * 2010-02-25 2013-09-25 日本電波工業株式会社 Method for manufacturing piezoelectric vibrating piece, piezoelectric vibrating piece and piezoelectric device
JP2013165404A (en) * 2012-02-10 2013-08-22 Seiko Instruments Inc Vibration device and oscillator
JP2013258519A (en) * 2012-06-12 2013-12-26 Nippon Dempa Kogyo Co Ltd Piezoelectric vibration piece and piezoelectric device
JP6133697B2 (en) * 2013-06-12 2017-05-24 日本電波工業株式会社 Piezoelectric vibrating piece, piezoelectric device, and method of manufacturing piezoelectric device
US20150188025A1 (en) * 2013-12-30 2015-07-02 Nihon Dempa Kogyo Co., Ltd. Container for electronic component and electronic component

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09167919A (en) * 1995-12-14 1997-06-24 Mitsumi Electric Co Ltd Surface mounted crystal oscillator
KR20090094981A (en) 2008-03-04 2009-09-09 삼성전기주식회사 Package of crystal oscillator
JP2011061418A (en) * 2009-09-09 2011-03-24 Nippon Dempa Kogyo Co Ltd Crystal vibration chip and crystal vibration device

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US9973168B2 (en) 2018-05-15
US20160163956A1 (en) 2016-06-09
KR102029502B1 (en) 2019-10-07

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