KR20160052402A

KR20160052402A - Apparatus of printing electronic device pattern and method of printing the same

Info

Publication number: KR20160052402A
Application number: KR1020150152234A
Authority: KR
Inventors: 가즈요시 스기하라
Original assignee: 도쿄엘렉트론가부시키가이샤
Priority date: 2014-11-04
Filing date: 2015-10-30
Publication date: 2016-05-12
Also published as: JP6207490B2; JP2016087915A

Abstract

A printing apparatus or a printing method of an electronic device pattern capable of improving the printing property of an electronic device pattern when performing printing a plurality of times on a surface of the printing medium.
A printing apparatus for an electronic device pattern, comprising: a holding member for holding the work plate; a table on which the holding member is mounted; a roller having a liquid film formed on a surface thereof; And a drive control means for controlling the position and driving of the roller based on the analysis result analyzed by the analysis means to perform printing, Wherein the analyzing means calculates any one of a shift amount, a magnification, an orthogonality or a rotation amount with respect to deformation of the work plate as a strain amount of the work plate based on the detection result of detecting the shape of the work plate, Calculating a correction value for controlling either the position or the rotational speed of the roller based on the amount of the strain, And the drive control means controls the roller based on the calculated correction value.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to an electronic device pattern printing apparatus,

The present invention relates to a printing apparatus for an electronic device pattern and a printing method therefor.

As a method for forming a pattern of an electronic device, a printing method has been proposed. BACKGROUND ART [0002] In recent years, patterns of electronic devices have come to be required to have high dimensional accuracy, for example, with the miniaturization of pixels of a liquid crystal display, and as a printing method capable of printing patterns having high dimensional accuracy, (See, for example, Patent Document 1).

In Patent Documents 2 and 3, as an inverted printing method, ink is first applied to the surface of a roller transferring roller (roller), then a roller transferring roller is rotated on a convexing plate (master plate) to remove a part of the ink, Discloses a technique for transferring ink remaining on the surface of a roller transfer motion to a printing medium (work plate).

Japanese Patent Application Laid-Open No. 4-279349 Japanese Patent Application Laid-Open No. 11-58921 Japanese Patent No. 3689536

However, Patent Document 1 does not disclose a method of performing another process (for example, a heating process) after printing on the surface of a substrate, and then further printing on the surface of the substrate. In addition, in the technique disclosed in Patent Document 1, in the case where, for example, the heating process is performed after printing on the surface of the substrate, when the substrate is deformed by heating, a pattern corresponding to the deformation is also printed There is a case that can not be. That is, in the technique disclosed in Patent Document 1, in the case of performing printing a plurality of times on the surface of the substrate, high dimensional accuracy required for printing of the electronic device pattern may not be realized.

SUMMARY OF THE INVENTION In view of the above circumstances, it is an object of the present invention to provide a printing apparatus or a printing method of an electronic device pattern in a case where printing is performed plural times on the surface of a printing medium.

According to one aspect of the present invention, there is provided a printing apparatus for an electronic device pattern, comprising: a holding member for holding the work plate; a table on which the holding member is mounted; a roller having a liquid film formed on the surface; A moving mechanism for applying the liquid film to the work plate by moving the workpiece to the work plate, an analyzing means for analyzing the shape of the work plate, and a controller for controlling the position and driving of the roller based on the analysis result analyzed by the analyzing means And a driving control means for performing printing on the basis of a detection result obtained by detecting the shape of the work plate, wherein the analyzing means calculates, as a strain amount of the work plate, a shift amount, magnification, And calculates one of the position of the roller or the rotational speed based on the calculated strain amount Calculating a correction value for air, and the drive control means, and, for controlling the rollers, there is provided a printing apparatus of an electronic device pattern based on the calculated correction value.

According to another aspect of the present invention, there is provided a printing apparatus for an electronic device pattern, comprising: a holding member for holding the work plate; a table on which the holding member is mounted; a roller having a liquid film formed on the surface; A moving mechanism for applying the liquid film to the work plate by moving the work plate, an analyzing means for analyzing the shape of the work plate, and a controller for controlling the position and driving of the roller based on the analysis result analyzed by the analyzing means, And the analysis means calculates a shift amount, a magnification, an orthogonality degree and a rotation amount related to the deformation of the work plate as a strain amount of the work plate based on the detection result of detecting the shape of the work plate And calculates a correction value for controlling either the position of the roller or the rotational speed based on the calculated amount of strain And the drive control means controls the roller on the basis of the calculated correction value.

According to another aspect of the present invention, there is provided an electronic device pattern printing method for partially removing a liquid film on a roller surface from a relief plate to form an inversion pattern, and thereafter transferring the inversion pattern to a work plate, A holding step for holding the convex plate on the first table, a holding step for holding the work plate on the second table, and a holding step for holding the convex plate on the first table, An inverted pattern forming step of moving a table below the roller and partially removing the liquid film from a convex portion of the surface of the convex plate; And a pattern printing step of transferring the reversal pattern onto the surface of the work plate, Based on a detection result obtained by detecting a phase of the workpiece on the basis of a detection result obtained by detecting a phase of the workpiece, a shift amount, a magnification, an orthogonality degree or a rotation amount relating to the deformation of the workpiece as a strain amount of the workpiece, And the pattern printing step further includes a drive control step of controlling the roller based on the calculated correction value, characterized by further comprising a drive control step of controlling the roller based on the calculated correction value A method of printing a device pattern is provided.

The present invention may be a program for causing a computer to execute the above-described electronic device pattern printing method. The present invention may be a recording medium on which the program is recorded.

According to the printing apparatus of the electronic device pattern or the printing method thereof according to the present invention, the printing property of the electronic device pattern can be improved when printing is performed on the surface of the printing apparatus a plurality of times.

1 is a schematic external view for explaining an example of a printing apparatus of an electronic device pattern according to an embodiment of the present invention.
2 is an explanatory view for explaining a printing method of a printing apparatus for an electronic device pattern according to an embodiment of the present invention.
3 is a schematic external view for explaining an example of the detecting means of the printing apparatus of the electronic device pattern according to the embodiment of the present invention.
4 is an explanatory view for explaining an example of a calibration pattern used in the printing apparatus of the electronic device pattern according to the embodiment of the present invention.
5 is an explanatory view for explaining an example of the amount of strain calculated by the analyzing means of the printing apparatus of the electronic device pattern according to the embodiment of the present invention.
6 is an explanatory view for explaining an example of an adjustment parameter calculated by the analysis means of the printing apparatus of the electronic device pattern according to the embodiment of the present invention.
7 is a flowchart for explaining an example of the operation of the printing apparatus of the electronic device pattern according to the embodiment of the present invention.
8 is an explanatory view for explaining an example of the analysis result (strain amount) of the analysis means of the printing apparatus of the electronic device pattern according to the embodiment of the present invention.
9 is an explanatory view for explaining an example of the correction result (shift amount) of the analyzing means of the printing apparatus of the electronic device pattern according to the embodiment of the present invention.
10 is an explanatory view for explaining an example of a correction result (a shift amount and a rotation amount) of the analyzing means of the printing apparatus of the electronic device pattern according to the embodiment of the present invention.
11 is an explanatory view for explaining an example of a correction result (a shift amount, a rotation amount, and an orthogonality) of an analyzing means of a printing apparatus of an electronic device pattern according to an embodiment of the present invention.
12 is an explanatory view for explaining an example of a correction result (a shift amount, a rotation amount, an orthogonality, and a Y-axis magnification) of an analyzing means of a printing apparatus of an electronic device pattern according to an embodiment of the present invention.
13 is an explanatory view for explaining an example of the correction result (shift amount, rotation amount, orthogonality, Y-axis magnification, and X-axis magnification) of the analyzing means of the printing apparatus of the electronic device pattern according to the embodiment of the present invention.
14 is a flowchart for explaining an example of the operation of the printing apparatus of the electronic device pattern according to the first embodiment of the present invention.
15 is a flowchart for explaining an example of the operation of the printing apparatus of the electronic device pattern according to the first modification of the first embodiment of the present invention.
16 is a flowchart for explaining an example of the operation of the printing apparatus of the electronic device pattern according to the second modification of the first embodiment of the present invention.
17 is an explanatory view for explaining an example of the operation of the printing apparatus of the electronic device pattern according to the second embodiment of the present invention.
18 is a flowchart for explaining an example of the operation of the printing apparatus of the electronic device pattern according to the second embodiment of the present invention.
19 is a flowchart for explaining an example of the operation of the printing apparatus of the electronic device pattern according to the third embodiment of the present invention.
20 is a schematic external view for explaining an example of a blanket structure of a printing apparatus for an electronic device pattern according to an embodiment of the present invention.
21 is a schematic external view for explaining an example of a blanket member tension setting mechanism of an electronic device pattern printing apparatus according to an embodiment of the present invention.
Fig. 22 is a view for explaining the roller outer shape of the printing apparatus of the electronic device pattern according to the embodiment of the present invention. Fig.
23 is a flowchart for explaining an example of a blanket replacement setting operation in the printing apparatus of the electronic device pattern according to the embodiment of the present invention.
Fig. 24 is a view for explaining stress generated by tensile or compressive force. Fig.

With reference to the accompanying drawings, the present invention will be described using a printing apparatus of an electronic device pattern (hereinafter referred to as " printing apparatus 100 ") according to an exemplary non-limiting embodiment. The present invention can be applied not only to a printing apparatus 100 described below but also to a method of transferring a pattern formed on the surface of a roller (for example, a roller transferring roller) to a predetermined surface (for example, a work plate) Unit, system, or the like).

In the following description, the same or corresponding devices, parts or members described in the accompanying drawings are denoted by the same or corresponding reference numerals, and redundant description is omitted. Further, the drawings are not intended to show a definite relationship between an apparatus, a component or a member, unless specifically described. Accordingly, specific correlations may be determined by those skilled in the art in light of the following non-limiting embodiments.

&Lt; First Embodiment >

The printing apparatus 100 according to the first embodiment of the present invention is described in the following order.

1. Configuration of the printing apparatus (Figs. 1 and 2)

2. Detection means (Figures 3 and 4)

3. Analysis means

3-1 Calculation of the amount of strain (Fig. 5)

3-2 Calculation of the correction value (Fig. 6)

4. Examples of the operation of the printing apparatus (Figs. 7 to 13)

5. Programs and recording media

6. Example 1 (Example of printing apparatus, Figs. 14 to 16)

7. Example 2 (Example of a printing apparatus which also performs position shift adjustment, Figs. 17 and 18)

8. Example 3 (an example of a printing apparatus that also determines the replacement timing, Fig. 19)

[One. Configuration of Printing Apparatus]

The printing apparatus 100 according to the present embodiment will be described with reference to Figs. 1 and 2. Fig. Here, Fig. 1 is a schematic external view for explaining an example of the printing apparatus 100. Fig. Fig. 2 is an explanatory view for explaining a printing method of the printing apparatus 100. Fig. The printing apparatus 100 shown in Fig. 1 is an example, and the printing apparatus according to the present invention is not limited to the one shown in Fig.

In Fig. 1, the X direction is a direction in which the table is moved (the master table Tm, which will be described later, and the conveying direction of the work table Tw). The Y direction is the width direction of the master table Tm or the like in the direction orthogonal to the X direction. The Z direction is a vertical direction (a direction orthogonal to the X direction and the Y direction). The &thetas; direction is a rotation direction about the Z axis.

The printing apparatus 100 is a device that uses a method (inversion printing method) of partially removing a liquid film on the surface of a roller to form an inversion pattern, and then transferring the inversion pattern to a work plate. That is, the printing apparatus 100 forms an inverted pattern on the surface of the roller by synchronizing the rotation operation of the roller and the linear movement of the convex plate (master plate), and synchronizes the rotation operation of the roller and the linear movement of the work plate And the reverse pattern of the surface of the roller is printed (transferred) on the printing medium.

The printing apparatus 100 can be used, for example, as a printing apparatus when manufacturing a pattern (electronic printed device, etc.) of an electronic device. In addition, the printing apparatus 100 can be used as a semiconductor manufacturing apparatus used when a pattern such as line and space is formed on a substrate (substrate), for example, in a semiconductor manufacturing process. The line-and-space can be formed, for example, by printing a silver nano ink.

1, the printing apparatus 100 includes a roller Bk (roller transfer roller, transfer roller, etc.) rotatably supported on a roller support portion Bkp, and a liquid film (not shown) on the surface of the roller Bk And an ink film Ict for forming an ink film (for example, an ink film). The printing apparatus 100 further includes a master table (first table) Tm for holding a convex plate Pr forming an inverted pattern and a work table Pg for holding a work plate Pw to which the reverse pattern is transferred (Second table) Tw.

The printing apparatus 100 further includes detection means 10 (11, 12) for detecting the shape of the workpiece Pw held on the workpiece table Tw, detection means 10 And an analysis means (20) for analyzing the shape of the workpiece (Pw). The printing apparatus 100 according to the present invention may be configured to input the detection result (shape of the work Pw) performed outside the printing apparatus 100 instead of having the detecting means 10 . The printing apparatus 100 according to the present invention may be configured to include either the first detection unit 11 or the second detection unit 12 as the detection unit 10. [

The printing apparatus 100 further includes drive control means 30 (movement correction unit 31M, rotation correction unit 31R, magnification correction unit 31E ) And a guide mechanism Gd for moving the master table Tm and the work table Tw downward (X direction in the figure) of the roller Bk. Here, the master table Tm and the work table Tw may be detachable from the guide mechanism Gd.

The printing apparatus 100 includes a cleaning unit for cleaning the convex portion Pc on the downstream side with respect to the conveying direction of the roller Bk and a cleaning unit for cleaning the surface by organic cleaning, ionic Nized air flow, And a fixing device (heating means) for fixing the pattern printed on the work plate and the like.

2 (a), the printing apparatus 100 rotates the roller Bk using the drive control means 30 in the present embodiment, and uses the ink coater Ict to rotate the ink Bk And supplies the liquid (ink) of the tank Itk to the surface of the roller Bk. Specifically, the printing apparatus 100 sets the front end of the ink coater Ict and the surface of the roller Bk at a predetermined interval, rotates the roller Bk in the Ra direction in the drawing, A liquid (ink) is supplied to a desired area of the surface to a desired film thickness. At this time, the printing apparatus 100 forms a liquid film PTa on the surface of the roller Bk.

Next, the printing apparatus 100 moves the convex plate Pr in the X direction (Mb in the figure) by using the guide mechanism Gd, as shown in Fig. 2 (b) The convex portion Pra of the convex plate Pr is successively brought into contact with the surface of the roller Bk which rotates by the rotation of the roller Bk. At this time, the liquid film (PTa) on the surface of the roller (Bk) is partially removed. That is, the printing apparatus 100 forms the reversal pattern PTb on the surface of the roller Bk.

2 (c), the printing apparatus 100 moves the workpiece Pw in the X direction (Mc in the figure) by using the guide mechanism Gd, and Rc The reversal pattern PTb of the surface of the roller Bk rotating in the direction of the arrow B contacts the surface of the work plate Pw. At this time, the reversal pattern PTb is transferred to the surface of the workpiece Pw. That is, the printing apparatus 100 forms the pattern PTc on the surface of the work plate Pw (the print body).

Thereby, the printing apparatus 100 can print (transfer) the desired pattern PTc on the surface of the workpiece (workpiece Pw).

The roller Bk is a rotating body for transferring the reversal pattern PTb to the work plate Pw. The roller Bk is rotatably supported on the rotary shaft 31r (Fig. 1). The roller Bk is formed by a convex plate Pr and an inverted pattern PTb is formed on the surface of the roller Bk.

In the present embodiment, the roller Bk uses a cylinder in which a water-repellent blanket Bks (FIG. 2) made of silicone is wound around the outer periphery of the roller Bk. The roller Bk may have a structure in which a resin sheet (for example, a silicone resin sheet) is wound around a cylindrical metal body (for example, an elastic body made of polyurethane).

The roller Bk according to the present invention is controlled asynchronously with the forward movement of the convex plate Pr and the work plate Pw by using a pinion, a clutch or a speed reducer (not shown) or the like. Specifically, the roller Bk is driven and controlled by the control of the drive control means 30 based on the correction value determined using the amount of strain calculated from the shape of the work plate Pw do. The roller Bk is rotated in synchronism with the rectilinear motion of the convex plate Pr and the work plate Pw by the rotation correction section 31R (drive control means 30) ) Is rotated around the rotation center. The rollers Bk are driven by driving of the movement correcting unit 31M and / or the magnification correcting unit 31E (drive control means 30), for example, to drive the convex Pr and the work Pw The position of the rotary shaft 31r is shifted in the X direction, the Y direction, and the Z direction in Fig. 1 by synchronous or asynchronous with the linear movement.

Further, the amount of strain and the correction value for controlling the operation of the roller Bk are the same as those described in [3. Interpretation means]. An example of the operation in which the roller Bk is controlled based on the amount of strain and the correction value is described in [4. An example of the operation of the printing apparatus] and an embodiment.

The convexo-Pr is a plate (master plate or the like) having a concavo-convex surface shape. The convex plate Pr uses a flat plate in the present embodiment. Further, the convex plate Pr is mounted on the master table Tm. The convex plate Pr is moved in the X direction (Fig. 2) by the guide mechanism Gd while being loaded on the master table Tm.

The convex portion Pr is formed on the surface of the convex portion Pra corresponding to the reversed pattern of the pattern printed on the workpiece Pw. The convex portion Pr partially removes the liquid (ink) from the liquid film (PTa in Fig. 2) on the surface of the roller Bk by bringing the convex portion Pra into contact with the surface of the roller Bk, (PTb in Fig. 2).

The work plate Pw is a printed body on which a pattern is formed. As the work plate Pw, for example, a substrate such as a flat plate, a film, or a sheet is used. The workpiece Pw is mounted on the workpiece table Tw. The workpiece Pw is moved in the X direction (Fig. 2) by the guide mechanism Gd while being loaded on the workpiece table Tw.

The reversal pattern (PTb in Fig. 2) formed on the surface of the roller Bk is transferred to the work plate Pw. That is, the desired pattern (PTc in Fig. 2) is printed on the work plate Pw.

The master table Tm is loaded with a convex plate Pr and fixes the convex plate Pr. The master table Tm fixes the convex plate Pr using, for example, a porous chuck or a vacuum chuck. Further, the master table Tm is moved by the guide mechanism Gd in the conveying direction (X direction in Fig. 1) while the convex plate Pr is fixed.

The work table Tw is to hold the work plate Pw and to fix the work plate Pw. Similarly to the master table Tm, the work table Tw fixes the work plate Pw using, for example, a porous chuck or a vacuum chuck. The work table Tw is moved by the guide mechanism Gd in the transport direction (X direction in Fig. 1) while the work plate Pw is fixed.

The master table Tm and the work table Tw are formed by rotating the loaded convex plate Pr or the work plate Pw in the X direction, the Y direction and the Z direction, the rotational direction with the X direction as the axis, (Not shown) in the rotation direction and the? Direction. Thus, the master table Tm and the work table Tw can adjust the displacement of the position of the convex plate Pr or the work plate Pw.

The detecting means (10) is means for detecting the shape of the work plate. As shown in Fig. 1, the detecting means 10 includes a first detecting portion 11 and a second detecting portion 12 in the present embodiment. The first detection unit 11 and the second detection unit 12 can use a known technique capable of detecting the shape of the workpiece Pw. The configuration and the like of the first detection unit 11 are the same as those described in [2. Detection means].

The analyzing means 20 is means for analyzing the shape of the work plate Pw. The analyzing means 20 calculates the strain amount of the workpiece Pw based on the detection result (for example, the deformation amount) that the detecting means 10 detects the shape of the workpiece Pw And a correction value calculating section 22 for calculating a control value (correction value) for controlling the operation of the roller Bk based on the strain amount calculated by the strain amount calculating section 21. [ The analyzing means 20 may be configured to use a resource (CPU, memory, etc.) such as a controller previously installed in the printing apparatus 100. [ In addition, the analyzing means 20 (the strain amount calculating section 21 and the correction value calculating section 22) Interpretation means].

The drive control means 30 is means for controlling the operation of the roller Bk (rotating position, rotation speed, rotation start timing, etc.). The drive control means 30 includes a rotation correction portion 31R for rotating the roller Bk around the rotation axis 31r and a control portion 31R for controlling (moving) the position of the pattern printed (transferred) on the work plate Pw A movement correcting unit 31M and a magnification correcting unit 31E for controlling (reducing or enlarging) the magnification of the pattern printed (transferred) on the work plate Pw.

The rotation correction section 31R corrects (controls) the rotation speed and the rotation start timing of the roller Bk. Thereby, the rotation correction unit 31R changes the size and position of the pattern printed (transferred) on the work plate Pw. A known technique can be used as a mechanism for the rotation correction unit 31R to change the rotation speed of the roller Bk.

The movement correcting unit 31M corrects (controls) the position of the roller Bk by moving the position of the rotation shaft 31r. Thereby, the movement correcting unit 31M corrects (moves) the position of the pattern to be printed (transferred) to the work plate Pw. A known technique can be used as a mechanism for moving the position of the rotary shaft 31r by the movement correcting unit 31M.

The magnification correction unit 31E corrects (controls) the rotation speed of the roller Bk. The magnification correction section 31E corrects the position of the rotation axis 31r with respect to the workpiece Pw. Thus, the magnification correcting unit 31E corrects (changes) the magnification in the carrying direction of the pattern printed (transferred) to the work plate Pw by changing the rotation speed of the roller Bk. The magnification correction section 31E corrects (changes) the magnification in the direction orthogonal to the carrying direction of the pattern printed (transferred) to the workpiece Pw by tilting the position of the rotating shaft 31r. A known technique may be used as the mechanism for changing the rotation speed of the roller Bk and the mechanism for moving the position of the rotation shaft 31r by the magnification correction section 31E.

The guide mechanism Gd is a mechanism for moving the master table Tm and the work table Tw in the downward direction (the X direction in Fig. 1) of the roller Bk. The guide mechanism Gd uses a linear guide in this embodiment. A known mechanism capable of moving the master table Tm or the like may be used as the guide mechanism Gd.

[2. Detection means]

3 and 4, the first detection section 11 and the second detection section 12 of the detection means 10 according to the present invention will be described. The configuration of the second detection unit 12 is basically the same as the configuration of the first detection unit 11 except that the surface of the roller Bk is not detected, and a description thereof will be omitted. Here, Fig. 3 is a schematic external view for explaining an example of the detecting means according to the present embodiment. Fig. 4 is an explanatory view for explaining an example of a calibration pattern used in the printing apparatus 100. Fig.

3, the first detection unit 11 includes a strobe light source 11a, a half mirror 11c, and an imaging unit (e.g., a CCD (Charge Coupled Device) 11e). The first detection unit 11 includes lenses 11b, 11d, 11f, and 11g as an optical system. The first detection unit 11 irradiates the light emitted from the strobe light source 11a to the rollers Bk and the work plate Pw through the half mirror 11c and the rollers Bk using the image pickup unit 11e, And the image of the surface of the work plate Pw. At this time, the first detection unit 11 uses the lens 11b or the like to condense the light. The first detection unit 11 may further include a TDI (Time Delay Integration) sensor, and may acquire an image with a high SN ratio.

The detection means 10 (the first detection unit 11 and the second detection unit 12) are not limited to those shown in Fig. The printing apparatus 100 according to the present invention may be configured to input detection results previously detected outside the printing apparatus 100 (for example, information on deformation of the work Pw).

The first detecting section 11 detects the reversal pattern PTb formed on the surface of the convex plate Pc by using the imaging section 11e. Further, the first detecting section 11 detects the surface shape (e.g., breakage, abrasion, etc.) of the convex plate Pc. The printing apparatus 100 further includes a first detecting unit 11 for synchronizing the rotating operation of the roller Bk with the rectilinear motion of the convex plate Pc and the work plate Pw in synchronism May be used.

The first detecting section 11 according to the present invention detects the deformation of the surface shape of the workpiece Pw by detecting a calibration pattern previously formed on the surface of the workpiece Pw. That is, the printing apparatus 100 detects deformation of the surface shape of the workpiece Pw by detecting a pre-formed calibration pattern on the surface of the workpiece Pw before deformation of the workpiece Pw.

More specifically, for example, as shown in Fig. 4, the first detection unit 11 detects the calibration pattern PTs1 before the work plate Pw is deformed and the calibration pattern PTs1 after the work plate Pw is deformed DELTA Y of the surface shape of the workpiece Pw can be detected by detecting the differences DELTA X and DELTA Y between the workpiece Pw and the workpiece Pw. The calibration patterns usable in the present invention are not limited to those shown in Fig.

[3. Interpretation means]

The strain amount calculating section 21 of the analyzing means 20 according to the present invention will be described with reference to Fig. The correction value calculating unit 22 of the analyzing means 20 according to the present invention will be described with reference to Fig. 5 is an explanatory view for explaining an example of the amount of strain analyzed by the analyzing means 20 of the printing apparatus 100 according to the present embodiment. 6 is an explanatory view for explaining an example of an adjustment parameter corresponding to the correction value calculated by the analyzing means 20. In Fig. The strain amount and the correction value calculated by the analyzing means 20 (the strain amount calculating section 21 and the correction value calculating section 22) according to the present invention are limited to those shown in Figs. 5 and 6 no.

[3-1 Calculation of Strain Amount]

The strain amount calculating section 21 calculates the strain amount of the work plate Pw. The strain amount calculating section 21 calculates the strain amount of the workpiece Pw based on the detection result detected by the detecting means 10 (for example, the deformation amount of the surface shape of the workpiece Pw). The strain amount calculating section 21 calculates a shift amount, a scaling, an orthogonality, a rotation amount, and other residual errors as the strain amount, for example. Further, the strain amount calculating section 21 may use the information inputted from the outside of the printing apparatus 100 (detection result that has been detected in advance).

More specifically, as shown in Figs. 5A to 5D, the strain amount calculating section 21 decomposes the strain detected by the detecting means 10, (Tx, Ty), magnifications (Ex, Ey), an orthogonality (Co), and a rotation amount (Rw). 5 (e), the strain amount calculating section 21 calculates the in-plane residual errors? X and? Y as other strain amounts.

Here, the deformation amounts (Dx, Dy) can be expressed by the following equations.

The strain amount calculating unit 21 calculates the amount of shift Tx, Ty, the magnification (Ex, Ey), the degree of orthogonality (Co) based on the equations (1) and (2) And the rotation amount Rw and the in-plane residual errors? X and? Y. The strain amount calculating section 21 may calculate the shift amounts Tx and Ty, for example, using the Lagrangian undetermined multiplier method.

[3-2 Calculation of correction value]

The correction value calculating section 22 calculates a correction value for controlling the roller Bk based on the strain amount calculated by the strain amount calculating section 21. [ Here, the correction value is a value corresponding to the strain amount (shift amount (Tx, Ty), magnification (Ex, Ey), orthogonality degree (Co), and rotation amount Rw) calculated by the strain amount calculating section to be. That is, the correction value is a value corresponding to the amount of deformation of the surface shape of the workpiece Pw. The printing apparatus 100 sets an adjustment parameter used when the drive control means 30 controls (moves, rotates) the roller Bk, based on the correction value.

Specifically, as shown in Fig. 6, the correction value calculating section 22 calculates correction values corresponding to the following adjustment parameters (1) to (6). 6 illustrates a diagram Img1 for explaining the relationship between the roller Bk and the workpiece Pw and a pattern PTc printed on the workpiece Pw with respect to the adjustment parameters M1 to M6, FIG.

(1) Adjustment parameter M1

(2) Adjustment of reduction in the X direction (pressing of the roller) Parameter M2

(3) Adjustment of the reduction in the Y direction (inclination of the roller in the Z direction) The parameter M3

(4) Adjustment in the Y direction (slope of the XY plane of the roller) Parameter M4

(5) Adjustment of X-direction magnification (roller deceleration) Parameter M5

(6) Adjustment of X-direction reduction (roller acceleration) Parameter M6

The printing apparatus 100 also uses the movement correcting unit 31M to change the magnification and the amount by which the roller (roller Bk) is pressed into the object (workpiece Pw) on the basis of the adjustment parameter M2 . The printing apparatus 100 uses the movement correcting unit 31M and the magnification correcting unit 31E to calculate the correction amount of the pattern (pattern PTc) printed on the object (workpiece Pw) on the basis of the adjustment parameter M3 The magnification in the Y direction can be changed. The printing apparatus 100 can use the movement correcting unit 31M to change the rotational position of the pattern (pattern PTc) printed on the object (workpiece Pw) on the basis of the adjustment parameter M4. The printing apparatus 100 uses the rotation correction section 31R to adjust the X direction of the pattern (pattern PTc) printed on the object (workpiece Pw) by using the adjustment parameters M5 and M6 ) Can be changed.

[4. Example of Operation of Printing Apparatus]

An example of the operation of the printing apparatus 100 according to the present embodiment will be described with reference to Figs. 7 and 8 to 13. Fig. Here, Fig. 7 is a flowchart for explaining an example of the operation of the printing apparatus 100. Fig. 8 is an explanatory view for explaining an example of the analysis result (strain amount) of the analyzing means 20 of the printing apparatus 100. Fig. 9 is an explanatory view for explaining an example of the correction result (correction of the shift amount) of the analyzing means 20 of the printing apparatus 100. Fig. 10 is an explanatory view for explaining an example of the correction result (correction of the shift amount and the rotation amount) of the analyzing means 20 of the printing apparatus 100. Fig. 11 is an explanatory view for explaining an example of the correction result (correction of shift amount, rotation amount and orthogonality) of the analysis means 20 of the printing apparatus 100. Fig. 12 is an explanatory view for explaining an example of the correction results (correction of shift amount, rotation amount, orthogonality, and Y-axis magnification) of the analysis means 20 of the printing apparatus 100. 13 is an explanatory view for explaining an example of a correction result (correction amount of shift amount, rotation amount, orthogonality, Y-axis magnification and X-axis magnification) of the analyzing means 20 of the printing apparatus 100. 8 to 13 show contour lines of the amount of strain on the surface (XY plane) of the workpiece Pw, the direction of the arrows indicates the direction of the strain, and the lengths of the arrows indicate the amount of strain.

As shown in Fig. 7, in step S701, the printing apparatus 100 starts the printing operation based on the information input to the printing apparatus 100. Fig. After the start, the printing apparatus 100 proceeds to step S702.

In step S702, the detecting means 10 (printing apparatus 100) detects the surface shape (deformation amount) of the work plate Pw as a detecting step. Thereafter, the printing apparatus 100 proceeds to step S703. Also, the printing apparatus 100 may use a method of inputting the amount of deformation measured or calculated in advance in step S702.

In step S703, the analyzing unit 20 (printing apparatus 100) uses the strain amount calculating unit 21 as an analyzing step to calculate, based on the detection result (deformation amount) detected in step S702, The amount of shift (Tx, Ty), the magnification (Ex, Ey), the degree of orthogonality (Co), and the amount of rotation (Rw). The strain amount calculating section 21 calculates, for example, the strain amount shown in Fig. Thereafter, the printing apparatus 100 proceeds to step S704.

In step S704, the analysis unit 20 uses the correction value calculation unit 22 as the analysis step to calculate (i) the correction value regarding the shift amount. The correction value calculating section 22 calculates the amount of strain (deformation of the workpiece Pw) shown in Fig. 8, for example, in Fig. 9 when the adjustment parameter is set based on the calculated correction value of the shift amount The pattern can be printed as the amount of strain shown.

Further, the analyzing means 20 also calculates (ii) a correction value relating to the amount of rotation. When the adjustment parameter is also set on the basis of the calculated correction value of the rotation amount, the correction value calculating section 22 calculates the correction amount for the amount of rotation as shown in Fig. 10, for example, can do.

Further, the analyzing means 20 also calculates (iii) a correction value relating to the degree of orthogonality. When the adjustment parameter is also set based on the calculated correction value of the degree of orthogonality, the correction value calculating section 22 calculates the correction value by using the strain amount shown in Fig. 10 as the strain amount shown in Fig. 11, can do.

Further, the analyzing means 20 also calculates (iv) a correction value relating to the Y-axis magnification. When the adjustment parameter is also set on the basis of the calculated correction value of the Y-axis magnification, the correction value calculating section 22 calculates the strain amount shown in, for example, Fig. 11 as the strain amount shown in Fig. It is possible to print.

Further, the analyzing means 20 also calculates (v) a correction value concerning the X-axis magnification. When the adjustment parameter is also set on the basis of the calculated correction value of the X-axis magnification, the correction value calculating section 22 calculates the strain amount shown in Fig. 12 as the strain amount shown in Fig. 13, It is possible to print.

Here, the printing apparatus 100 uses a correction value (adjustment parameter) including at least one of the correction amounts of the shift amount, the rotation amount, the orthogonality, the Y-axis magnification, and the X- The pattern to be printed may be modified and printed with a desired printing precision (dimensional precision). That is, the printing apparatus 100 performs an operation of printing a pattern on the workpiece Pw (using a combination of adjustment parameters (correction values) having a desired dimensional accuracy to print with a desired printing precision (dimensional accuracy) (Step S705 to be described later) may be controlled.

Thereafter, the printing apparatus 100 proceeds to step S705.

In step S705, the printing apparatus 100 holds the convex plate Pc on the master table Tm as a convex-plate holding step. Further, the printing apparatus 100 holds the workpiece Pw on the workpiece table Tw as a workpiece holding step. Further, the printing apparatus 100 conveys the retained relief plate Pc and the work plate Pw below the roller Bk. At this time, the printing apparatus 100 partially removes the liquid film on the surface of the roller Bk from the convex portion Pca on the surface of the convex plate Pc and forms the reverse pattern PTb (Fig. 2) . Further, the printing apparatus 100 transfers (prints) the reversal pattern PTb to the surface of the workpiece Pw as a pattern printing step.

Here, the printing apparatus 100 controls the position and drive (rotation speed, etc.) of the roller Bk by using the correction value (adjustment parameter) calculated in step S704 at the time of transferring the reversal pattern PTb. Thereby, the printing apparatus 100 can transfer (print) the deformed pattern to the surface of the work plate Pw based on the correction value.

Thereafter, the printing apparatus 100 proceeds to step S706.

In step S706, the analyzing unit 20 (printing apparatus 100) calculates the in-plane residual errors? X and? Y using the correction value calculating unit 22. Thereafter, the printing apparatus 100 proceeds to step S707. Further, the printing apparatus 100 may proceed to step S707 without performing step S706.

In step S707, the printing apparatus 100 determines whether or not the printing operation is ended. The printing apparatus 100 can determine whether or not to terminate the printing operation based on the information input to the printing apparatus 100, for example. If it is determined that the printing operation is ended, the printing apparatus 100 proceeds to END in the figure and ends the printing operation. If it is determined that the printing operation is not to end, the printing apparatus 100 returns to step S702 to repeat the printing operation.

As described above, according to the printing apparatus 100 of the electronic device pattern or the printing method (printing operation) of the electronic device pattern according to the present embodiment, the analysis result obtained by analyzing the deformation amount (strain amount) of the substrate (workpiece Pw) The pattern to be printed can be modified. That is, according to the printing apparatus 100 or the printing method according to the present embodiment, for example, when printing is performed a plurality of times on the surface of the substrate (workpiece Pw), and before printing, It is possible to print a pattern in a pattern corresponding to the deformation of the printed pattern accompanying deformation of the printed body when the pattern is overlaid (superimposed) on one pattern after the object is deformed.

Thus, according to the printing apparatus 100 or the printing method according to the present invention, even when the substrate is deformed, the printing property (dimensional accuracy) of the printed pattern can be improved and the printing productivity of the pattern can be improved . Further, according to the printing apparatus 100 or the printing method according to the present embodiment, the dimensional accuracy of the printed pattern can be improved, so that it is possible to prevent the occurrence of defects in the printing pattern due to the reduction in dimensional accuracy of the pattern. According to the printing apparatus 100 or its printing method, for example, in a case where another process (for example, a heating process) is performed after a pattern is printed on the surface of the substrate and then another printing is performed on the surface of the printing medium , Even when the substrate is deformed by another process (heating), a pattern corresponding to the deformation can be further printed.

[5. Program and recording medium]

The program according to the present embodiment is a method for printing an electronic device pattern that partially removes a liquid film on the surface of a roller to form an inversion pattern and then transfers the inversion pattern to a work plate, A holding step for holding the convex plate on the first table, a holding step for holding the work plate on the second table, and a holding step for holding the convex plate on the first table, An inverted pattern forming step of moving a table below the roller and partially removing the liquid film from a convex portion of the surface of the convex plate; And a pattern printing step of transferring the reversal pattern onto the surface of the work plate, Calculating a strain amount of the work plate based on the detection result of detecting the shape and calculating a correction value for controlling the roller based on the calculated strain amount; And a driving control step of controlling the position and driving of the roller based on the correction value. According to this, the same effect as the printing apparatus 100 or the printing method according to the embodiment of the present embodiment can be obtained.

The present embodiment may be a recording medium that can be read by a computer that records the program. The recording medium on which the program is recorded includes a flexible disk (FD), a compact disk-ROM (CD-ROM), a compact disk-read only memory (CD-R), a digital versatile disk , A semiconductor memory such as ROM, a memory card, a HDD (Hard Disc Drive), and other computer readable memories can be used. The recording medium on which the program is recorded may be a program (so-called differential file) installed in an existing printing apparatus via a network or the like.

The printing apparatus according to this embodiment will be described using the printing apparatus according to the embodiment.

[Example 1]

An example of the operation (printing method) of the printing apparatus according to the first embodiment will be described with reference to Fig. Here, Fig. 14 is a flowchart for explaining an example of the operation of the printing apparatus according to the present embodiment.

As shown in Fig. 14, the printing apparatus according to the present embodiment starts printing operation based on the information input to the printing apparatus in step S1401. After the start, the printing apparatus proceeds to step S1402.

In step S1402, the printing apparatus according to the present embodiment inputs correction values from outside the printing apparatus. Thereafter, the printing apparatus proceeds to step S1403.

In step S1403, the printing apparatus according to the present embodiment sets the adjustment parameter using the correction value input in step S1402. Thereafter, the printing apparatus proceeds to step S1404.

In step S1404, the printing apparatus according to the present embodiment holds the convex plate Pw in the master table Tm, holds the work plate Pw in the work table Tw, Pc and the work plate Pw are conveyed below the roller Bk. After the conveyance, the printing apparatus proceeds to step S1405.

In step S1405, the printing apparatus according to the present embodiment forms the reversal pattern PTb on the surface of the roller Bk using the convex plate Pw. Thereafter, the printing apparatus proceeds to step S1406.

In step S1406, the printing apparatus according to the present embodiment transfers (prints) the reversal pattern PTb to the surface of the work plate Pw. Here, the printing apparatus controls the position and drive (rotation speed, etc.) of the roller Bk by using the adjustment parameters set in step S1403 at the time of transferring the reversal pattern PTb. Thereby, the printing apparatus can transfer (print) the deformed pattern to the surface of the work plate Pw based on the correction value. The printing apparatus may also deform the pattern transferred to the surface of the workpiece Pw by using a fine mechanism incorporated in the master table Tm and the workpiece table Tw.

Thereafter, the printing apparatus proceeds to step S1407.

In step S1407, the printing apparatus according to the embodiment determines whether or not the printing operation is completed. The printing apparatus can determine whether to end the printing operation based on, for example, information input to the printing apparatus. When it is determined that the printing operation is ended, the printing apparatus proceeds to END in the drawing and ends the printing operation. If it is determined that the printing operation is not to end, the printing apparatus returns to step S1402 to repeat the printing operation.

As described above, the printing apparatus according to the first embodiment can obtain the same effect as the printing apparatus 100 according to the embodiment or the printing method thereof.

[Modified Example 1 of Example 1]

An example of the operation (printing method) of the printing apparatus according to the first modification of the first embodiment will be described with reference to Fig. Here, Fig. 15 is a flowchart for explaining an example of the operation of the printing apparatus according to the first modification of the first embodiment.

As shown in Fig. 15, the printing apparatus according to the present modification starts printing operation based on the information input to the printing apparatus in step S1501. Here, in this modified example, the printing apparatus is configured to calculate the amount of strain (for example, the shift amount Tx, Ty), the magnification (Ex, Ey), the degree of orthogonality Co or the amount of rotation Rw, (? x,? y), etc.) is input. Thereafter, the printing apparatus proceeds to step S1502.

In step S1502, the printing apparatus according to the present modification calculates a correction value based on the amount of strain input from the outside of the printing apparatus. Thereafter, the printing apparatus proceeds to step S1503.

In step S1503, a predetermined allowable value is also input to the printing apparatus according to the present modification. Here, the predetermined allowable value is a value corresponding to the dimensional accuracy of the pattern at the time of printing and other specifications of the printing apparatus. The predetermined allowable value may be a value predetermined in the experiment or calculation. The predetermined allowable value may be a value in consideration of, for example, a deviation in position due to the distribution of the nip pressure of the roller Bk, a detection error of the detection means 10, and the like.

Thereafter, the printing apparatus proceeds to step S1504.

In step S1504, the printing apparatus according to the present modification sets the adjustment parameter using the correction value calculated in step S1502. Specifically, the printing apparatus selects a combination of adjustment parameters or adjustment parameters (for example, M1 to M6 in Fig. 6) that achieve the predetermined allowable value inputted in step S1503.

Thereafter, the printing apparatus proceeds to step S1505.

In the steps S1505 to S1508, the printing apparatus according to the present modification transfers the reversal pattern to the surface of the work plate Pw (as in the printing apparatus according to the embodiment 1 (steps S1404 to S1407 in Fig. 14) Print).

As described above, the printing apparatus according to the first modification of the first embodiment can obtain the same effects as the printing apparatus 100 according to the embodiment, the printing method thereof, and the printing apparatus according to the first embodiment.

[Modified Example 2 of Embodiment 1]

An example of the operation (calculating operation of the correction value) of the printing apparatus according to the second modification of the first embodiment will be described with reference to Fig. Here, FIG. 16 is a flowchart for explaining an example of the operation of the printing apparatus according to the second modification of the first embodiment. The other operations of the printing apparatus according to the present modified example are the same as those of the printing apparatus according to the first embodiment, and a description thereof will be omitted.

As shown in Fig. 16, the printing apparatus according to the present modification starts calculating the correction value based on the information input to the printing apparatus in step S1601. After the start, the printing apparatus proceeds to step S1602.

In step S1602, the printing apparatus according to the present modification calculates a correction value relating to the shift amount. Thereafter, the printing apparatus proceeds to step S1603.

In step S1603, the printing apparatus according to the present modification determines whether or not the operation of calculating the correction value has ended. Specifically, the printing apparatus can determine whether or not the residual strain amount when corrected by using the calculated correction value is within a predetermined range, and determine that the operation for calculating the correction value ends when it is within the predetermined range . When it is determined that the operation of calculating the correction value is ended, the printing apparatus proceeds to END in the figure and ends the operation of calculating the correction value. If it is determined that the operation of calculating the correction value is not to end, the printing apparatus proceeds to step S1604.

In step S1604, the printing apparatus according to the present modification calculates a correction value relating to the rotation amount. Thereafter, the printing apparatus proceeds to step S1605.

In step S1605, the printing apparatus according to the present modification determines whether or not the operation of calculating the correction value is ended, similarly to step S1603. When it is determined that the operation of calculating the correction value is ended, the printing apparatus proceeds to END in the figure and ends the operation of calculating the correction value. If it is determined that the operation of calculating the correction value is not to be ended, the printing apparatus proceeds to step S1606.

In step S1606, the printing apparatus according to the present modification calculates a correction value relating to the magnification in the X direction (FIG. 1) of the pattern to be printed. Here, the printing apparatus may also calculate a correction value relating to the magnification in the Y direction (FIG. 1) of the pattern to be printed. Thereafter, the printing apparatus proceeds to step S1607.

In step S1607, the printing apparatus according to the present modification determines whether or not the operation of calculating the correction value is ended, similarly to step S1603. When it is determined that the operation of calculating the correction value is ended, the printing apparatus proceeds to END in the figure and ends the operation of calculating the correction value. If it is determined that the operation of calculating the correction value is not to be terminated, the printing apparatus proceeds to step S1608.

In step S1608, the printing apparatus according to the present modification calculates a correction value relating to orthogonality. Thereafter, the printing apparatus proceeds to END in the figure, and ends the operation of calculating the correction value.

As described above, the printing apparatus according to the second modification of the first embodiment can obtain the same effects as those of the printing apparatus 100 according to the embodiment, the printing method thereof, and the printing apparatus according to the first embodiment.

The printing apparatus according to the second modification of the first embodiment can select a correction value to be calculated on the basis of a predetermined allowable value. For example, the accuracy of the pattern to be printed or the ease of contents to be corrected, It is possible to select to calculate the desired correction value (or a combination thereof) in accordance with the function loaded in the memory.

[Example 2]

An example of the operation (printing method) of the printing apparatus according to the second embodiment will be described with reference to Figs. 17 and 18. Fig. Here, Fig. 17 is an explanatory view for explaining an example of the operation of the printing apparatus according to the present embodiment. 18 is a flowchart for explaining an example of the operation of the printing apparatus according to the present embodiment.

The printing apparatus according to the present embodiment carries out a printing method in consideration of abrasion of the roller Bk which occurs when the surface of the roller Bk is pressed against the convex plate Pc or the like in the reverse printing method. 17 (b) and 17 (c), the positional shift amount? Dm calculated is used to calculate the distance between the roller Bk, the convex plate Pc, and the workpiece Pw, (Gap), and synchronizes the rotation operation of the roller Bk with the linear movement of the convex plate Pc and the work plate Pw. This will be described in detail below.

As shown in Fig. 18, the printing apparatus according to the present embodiment starts printing operation based on the information input to the printing apparatus in step S1801. After the start, the printing apparatus proceeds to step S1802.

In step S1802, the correction value is input from the outside of the printing apparatus in the printing apparatus according to the present embodiment. Thereafter, the printing apparatus proceeds to step S1803.

In step S1803, the printing apparatus according to the present embodiment analyzes the position shift amount? Dm (FIG. 17 (b)). First, the printing apparatus detects the state of the surface of the roller Bk using the first detecting unit 11 (Fig. 3). Here, the printing apparatus detects the abrasion portion and the abrasion amount of the surface of the roller Bk. Next, the printing apparatus calculates the positional displacement amount? Dm based on the detection result detected by the first detection unit 11.

Here, the printing apparatus may be configured such that the first detecting unit 11 is not used and a new detecting unit (detecting unit) is used. The printing apparatus may be a method of selecting the position shift amount? Dm by using a correspondence map between the wear amount and the position shift amount that is stored in advance.

In the printing apparatus according to the present embodiment, the first detection unit 11 corresponds to second detection means described in the claims.

Thereafter, the printing apparatus proceeds to step S1804.

In step S1804, the printing apparatus according to this embodiment sets the adjustment parameter using the correction value input in step S1802 and the position shift amount? Dm calculated in step S1803. Thereafter, the printing apparatus proceeds to step S1805.

In steps S1805 to S1808, the printing apparatus according to this embodiment transfers (prints) the reversal pattern to the surface of the work plate Pw in the same manner as the printing apparatus according to the embodiment 1 (steps S1404 to S1407) . In this embodiment, the printing apparatus uses the drive control means 30 (the movement correcting unit 31M, the rotation correcting unit 31R) on the basis of the positional shift amount? Dm calculated in this embodiment, The distance between the convex plate Pc and the work plate Pw is corrected and the rotation operation of the roller Bk is synchronized with the linear movement of the convex plate Pc and the work plate Pw (Fig. 17 (b) , Fig. 17 (c)].

As described above, the printing apparatus according to the second embodiment can obtain the same effect as the printing apparatus 100 according to the embodiment or the printing method thereof.

The printing apparatus according to the second embodiment is capable of correcting the rotational movement of the roller Bk and the movement of the convex plate Pc and the workpiece Pw by using the calculated positional shift amount? Dm even when the roller Bk is worn Since the operation can be synchronized, the dimensional accuracy of the printed pattern can be improved.

[Example 3]

An example of the operation (printing method) of the printing apparatus according to the third embodiment will be described with reference to Fig. Here, Fig. 19 is an explanatory view for explaining an example of the operation of the printing apparatus according to the present embodiment.

The printing apparatus according to the present embodiment carries out a printing method in consideration of abrasion of the roller Bk which occurs when the surface of the roller Bk is pressed against the convex plate Pc or the like in the reverse printing method. That is, the printing apparatus according to the present embodiment further includes a determination unit that determines whether or not to replace the roller Bk based on the wear of the roller Bk. This will be described in detail below.

As shown in Fig. 19, the printing apparatus according to the present embodiment starts printing operation based on the information input to the printing apparatus in step S1901. After the start, the printing apparatus proceeds to step S1902.

In step S1902, the correction value is input from the outside of the printing apparatus in the printing apparatus according to the present embodiment. Thereafter, the printing apparatus proceeds to step S1903.

In step S1903, the printing apparatus according to the present embodiment sets adjustment parameters. Specifically, the printing apparatus first detects the state of the surface of the roller Bk using the first detection unit 11 (Fig. 3). Here, the printing apparatus detects the amount of abrasion on the surface of the roller Bk, the position of abrasion, and the like. The printing apparatus may also detect the amount of wear of the surface of the roller Bk by detecting the shape of the reversal pattern PTb (FIG. 3) on the surface of the roller Bk. The printing apparatus also detects the amount of wear on the surface of the roller Bk by comparing the portion where the reversal pattern PTb is formed on the surface of the roller Bk and the portion where the reversal pattern PTb is not formed do.

Next, the printing apparatus calculates the correction value on the basis of the detection result detected by the first detection unit 11. The printing apparatus is provided with an adjustment parameter (e.g., a correction parameter) for adjusting the film thickness of the liquid film (PTa in Fig. 2A) formed on the surface of the roller Bk based on the amount of wear of the roller Bk, (M2 in Fig. 6).

Thereafter, the printing apparatus proceeds to step S1904.

In steps S1904 to S1906, the printing apparatus according to this embodiment transfers (prints) the reversal pattern to the surface of the work plate Pw in the same manner as the printing apparatus according to the embodiment 1 (steps S1404 to S1406) . Thereafter, the printing apparatus proceeds to step S1907.

In step S1907, the printing apparatus according to the present embodiment determines whether or not to replace the roller Bk. Specifically, the printing apparatus can use the determination means to determine whether or not to replace the roller Bk based on the amount of wear of the surface of the roller Bk detected in step S1903. The printing apparatus may judge that the roller Bk is exchanged when, for example, the wear amount exceeds a predetermined amount. When it is determined that the roller Bk is exchanged, the printing apparatus proceeds to END in the figure and ends the printing operation. If it is determined that the roller Bk is not to be replaced, the printing apparatus proceeds to step S1908.

In step S1908, the printing apparatus according to the embodiment determines whether or not the printing operation is ended. The printing apparatus can determine whether to end the printing operation based on, for example, information input to the printing apparatus. When it is determined that the printing operation is ended, the printing apparatus proceeds to END in the drawing and ends the printing operation. If it is determined that the printing operation is not to be terminated, the printing apparatus returns to step S1902 to repeat the printing operation.

As described above, the printing apparatus according to the third embodiment can obtain the same effect as the printing apparatus 100 according to the embodiment or the printing method thereof.

Further, the printing apparatus according to the third embodiment can determine the replacement timing of the roller Bk based on the detected wear amount. Further, the printing apparatus according to the third embodiment can determine the replacement time of the roller Bk, thereby preventing the printing failure due to the abrasion of the roller Bk.

&Lt; Second Embodiment >

Next, the printing apparatus 100 according to the second embodiment will be described. The main configuration of the printing apparatus 100 of the electronic device pattern of Fig. 1 and the printing method of the printing apparatus 100 of the electronic device pattern of Fig. 2 are the same as those of the first embodiment except for the points described below, .

The inversion printing method using the roller Bk (roller transfer copper) can easily obtain the dimensional accuracy required for printing the electronic device pattern as compared with the conventional printing method.

On the other hand, a blanket (Bks) such as a silicone resin adhered to the surface of the roller (Bk) comes into contact with the convex or printed substrate at the time of printing, and is gradually damaged, increasing the number of times of printing and increasing pattern defects . Therefore, it is necessary to replace the blanks (Bks) damaged beyond the allowable range. However, if the blanket Bks is adhered to the roller Bk, the downtime of the printing apparatus 100 becomes long so that it is not easy to remove the blanket Bks from the roller Bk and replace it with a new blanket Bks , Productivity is lowered. Further, since the state of the blanket Bks is changed each time the new blanket Bks is exchanged, mechanical differences easily occur and it is difficult to perform uniform high-precision processing.

In order to facilitate the exchange of the blanks (Bks), for example, as disclosed in Japanese Patent Laid-Open No. 2007-203547, a tension tension is defined as a tension tension in which both ends of a blanket are gripped to extend the blanket, Means are also being used. However, if the surface is damaged in a state in which the blanket is stretched, the damaged portion is likely to be enlarged, and the blanket may become unusable due to some damage.

Therefore, the printing apparatus 100 according to the second embodiment provides a blanket Bks which is easy to be replaced with a blanket Bks and which is resistant to damage without adding tensile force or the like to the blanket Bks. Further, when the blanket (Bks) is damaged and the pattern defect is increased, and the damage of the blanket (Bks) exceeds the permissible value, the blanket (Bks) can be easily replaced and the downtime of the apparatus is greatly reduced A printing apparatus 100 is provided.

The method of mounting the blanket Bks on the roller Bk according to the present embodiment is not limited to the method of forming the pattern Bk on the surface of the roller Bk (A device, a device, a unit, a system, or the like) to a predetermined surface (for example, a work plate).

The printing apparatus 100 according to the second embodiment of the present invention will be described in the following order.

1. Configuration of blanket member and blanket installation jig

2. Example of operation of printing device

[One. Configuration of Blanket Member and Blanket Installation Jig]

20 to 23, the structure of a blanket mounting jig for tension-winding the blanket member and the roller copper according to the present embodiment will be mainly described.

20A shows a configuration of the blanket member 200 including the water repellent blanket Bks made of silicone rubber wound around the roller Bk of the printing apparatus 100 according to the present embodiment. Fig.

Fig. 20 (b) is a cross-sectional view taken along line A-A of Fig. 20 (a). 20 (a), the water-repellent blanket Bks (hereinafter also referred to as " blanks ") is smaller than the base plate 201 and is attached on the base plate 201. [

The base plate 201 is a base layer of a blanket (Bks) in which a liquid film is formed on the surface, and is formed of a metal or the like whose elastic modulus is smaller than the blanket (Bks) by one or more digits.

20 (b), the blanket Bks is made of, for example, a polyurethane layer 101 of 0.8 mm, a PET (polyethylene terephthalate) layer 102 of 0.25 mm and a PDMS Polydimethylsiloxane) layer 103 as shown in FIG. This blanket Bks is attached to the base plate 201. As the base plate 201, for example, a metal plate such as a stainless steel-nickel alloy thin plate having a thickness of 0.1 mm and a thickness difference of ± 5 μm or less can be mentioned.

Between the blanket Bk and the base plate 201, a PET layer 102 is preferably interposed. However, the blanket Bk may be directly fixed to the base plate 201 without the PET layer 102 interposed therebetween.

Hereinafter, preferred forms of the base plate 201 of the blanket member 200 will be described. Since it is not desired to add an external force such as a tensile force to the blanket Bks as much as possible, it is preferable to make the elastic coefficient of the base plate used for the blanket member 200 as large as possible.

As shown in Fig. 24, in general, the stress generated by the tensile or compressive force is obtained by dividing the force (load) F acting on the member by the sectional area A of the member.

σ = F / A (σ: stress, F: load, A: cross-sectional area)

When the elongation due to the load F of this member is represented by delta, the elongation?

? = FL / EA (?: elongation, F: load, L: length, E: longitudinal elastic modulus, A:

In the relation between force and elongation, EA / L is equivalent to the spring constant of the bar, and can be regarded as a parameter responsible for tensile or compressive stiffness.

If the 隆 M of the base plate 201 is made as large as possible with respect to the elongation 隆 B of the blanket member 200, the elongation of the blanket member 200 can be suppressed to be equal to or smaller than the elongation of the base plate 201. For example, when a stainless steel-nickel alloy is used as the base plate 201, if the cross-sectional area of the base plate 201 is the same, the elastic modulus is different by two digits. As a result, even when a tensile force is applied to the blanket member 200 of the present embodiment, it can be suppressed to an elongation of 1 / 100th or less as compared with the conventional method of adding tension to a blanket unit.

Attachment is done, for example, using spray pools. Both ends of the base plate 201 (in this embodiment, a stainless steel-nickel alloy thin plate) are fixed to the mounting metal member 202 used for installation on the roller Bk. Laser welding, electron beam welding, or the like may be used as long as the base plate 201 is not deformed when the base plate 201 and the mounting metal member 202 are fixed. Alternatively, the mounting metal member may be divided into two parts and mechanically fastened by them.

21 (a) is a view showing a state in which the blanket member 200 is wound around the roller Bk. Fig. 21 (b) is a cross-sectional view taken along the line B-B in Fig. 21 (a).

One of the mounting metal members 202 is inserted into the groove 205 formed on the outer periphery of the roller Bk and is pressed by the pressing metal member 206 and fixed to the roller Bk by the screw 207. In this state, the blanket member 200 is wound around the roller Bk.

The other mounting metal member 202 of the blanket member 200 is inserted into the insertion groove 212 provided in the additional winding shaft 211 of the blanket member tensioning mechanism 210 embedded in the roller Bk. Both ends of the additional take-up shaft 211 are rotatably fixed by a guide shaft built in the roller Bk. A pushing spring 213 is embedded in the insertion groove 212, so that it is fixed in the groove 212 without rattling. One end of the additional take-up shaft 211 protrudes from the end face of the roller Bk and is connected to the reduction gear drive portion 214 equipped with the brake shown in Fig. The additional winding shaft 211 is rotated in the winding direction of the blanket member 200 and a tensile force is applied to the blanket member 200 by the reduction gear drive portion 214 to which the brake is applied so that the roller Bk is not rattled, .

The roller Bk thus configured is rotatably mounted on the roller support portion Bkp of the printing press 100 via the rotary shaft 31r.

Fig. 22 is a view for explaining the outer shape of the roller Bk for winding the blanket member 200. Fig. The outer shape of the roller Bk is substantially cylindrical as shown in Fig. Here, the substantially cylindrical shape is defined as follows. That is, the second cylinder has a structure in which at least a second cylinder having a width d _ri and a second taper cylinder having a width d _{t with} a smaller diameter toward the outside are provided on both sides of the first cylinder. Or a structure in which a third cylinder is provided outside the second taper cylinder as shown in Fig.

The blanket member 200 is tension-wound on the roller Bk, but a force is applied to displace the blanket member 200 at the time of printing. Since the blanket member 200 is prevented from being displaced by this force, a step is provided in the outer shape of the roller Bk. The central portion of the roller Bk is flattened with a width d _ri which is larger than the width dB of the blanket Bks (see Fig. 20). The outer side is larger than the width taken _ro d, outside the width of the end width d _ri dM (see Fig. 20) of the base plate 201 such as a metal thin plate to a gentle tapered shape. The level difference may be about 1 to 2 mm of a metal thin plate. If an extreme step is provided, wrinkles or the like may be formed on the base plate 201 such as a metal thin plate, which is not preferable. The both end portions of the blanket member 200 may be bent to such an extent that deformation such as wrinkles does not occur in the base plate 201.

[2. Example of Operation of Printing Apparatus]

Next, a process of exchanging the blanket using the printing apparatus 100 configured as described above will be described. Here, FIG. 23 is a flowchart showing an example of a blanket exchange step according to the present embodiment.

The printing apparatus 100 according to the present embodiment forms the reversal pattern PTb by partially removing the liquid film on the surface of the roller Bk from the convex plate Pc as described above with reference to Fig. , And the reversal printing method for transferring the reversal pattern (PTb) to the work plate (Pw) is used. This will be described in detail below.

23 is a flowchart showing a process of installing the blankets Bks used in the printing process on the rollers Bk before the start of printing or exchanging the blankets Bks provided on the rollers Bk Fig.

It is assumed that the blanket Bks is removed from the surface of the roller Bk when the blanket Bks is installed or replaced by the blanket exchange step according to the present embodiment.

The mounting metal member 202 which is one end of the blanket member 200 is inserted into the groove 205 formed in the roller Bk in step S601 and the pressing metal member 206 is used to press the roller (Bk).

The roller Bk is slowly rotated in step S602 so that the other one of the mounting metal members 202 of the blanket member 200 is pivoted to the additional winding axis of the blanket member tensioning mechanism 210 buried in the roller Bk 211 into the insertion grooves 212 provided in the insertion holes 212. A pushing spring 213 is embedded in the insertion groove 212, so that it is fixed in the groove 212 without rattling.

The braking gear drive unit 214 with the brake connected to one end of the additional take-up shaft 211 is driven to slowly apply the tensile force to the blanket member 200, And is wound on the roller Bk without occurrence of the roller. It is confirmed that the blanket member 200 is reliably wound and the braking of the reduction gear drive portion 214 equipped with the brake is operated to stop the movement of the additional take-up shaft 211 completely.

In step S604, the winding status is confirmed, and if there is no problem such as wrinkles, the replacement operation is terminated. In step S604, the winding state is checked, and if a problem such as wrinkles is found, the process returns to step S602 to retry the installation work.

With the blanket member 200 and the blanket member tensioning mechanism 210 described above, the replacement of the blanket Bks can be easily performed in a short time. Further, since the replacement work of the blanket Bks is easy, it is easy to automate the exchange of the blanket Bks.

The blanket member 200 thus installed is firmly fixed to the roller Bk. On the other hand, since the elastic coefficient of the base plate 201 is two or more digits larger than the elastic modulus of the blanket Bks, even if a large tensile force is applied to the blanket member 200, an external force such as a tensile force acts on the blanket Bks itself I never do that. As a result, the damage to the blanks (Bks) is significantly reduced as compared with the conventional printing apparatus in which the blanket (Bks) itself is fixed to the roller (Bk) by applying a tensile force thereto for fixation. This greatly increases the number of times of use (life) of the blankets Bks.

At the time of replacing the blanket Bks, the blanket Bks can be exchanged without directly touching the blanket Bks, and the blanket Bks can be prevented from being contaminated or damaged. Further, since the blanket member 200 is manufactured in advance, the machine precision such as the flatness of the blanket member 200 can be grasped before being installed in the printing apparatus 100. As a result, the mounting accuracy of the blanket (Bks) can be known only after installation in the printing apparatus 100 as in the prior art, while the efficiency of the replacement operation and the reproducibility of the blanket setting performance in exchange are remarkably improved. Thereby, the correction printing shown in the first embodiment can be performed with higher accuracy.

Since the roller Bk for mounting the blanket member 200 is formed in a substantially cylindrical shape and the blanket member 200 can be held without changing the posture of the blanket member 200 without being shifted sideways during printing, There is no change in performance.

As described above, according to the blanket member 200 and the blanket member tension jig 210 of the present embodiment, the replacement operation of the blanket Bks is very easy and a stable blanket (Bks) installation performance can be realized. The printing apparatus 100 of the electronic device pattern incorporating these mechanisms also provides a blanket which is easy to replace the blanks Bks and which is resistant to damage without adding tension to the blanks Bks. Further, when the blanket is damaged and the pattern defect is increased to exceed the permissible value, the replacement can be easily performed, and the downtime of the apparatus due to the replacement of the blankets (Bks) can be reduced. In addition, since the number of times of use of the blanket (Bks) is increased, the electronic device can be manufactured at a lower cost than that manufactured in the conventional printing process.

Although the present invention has been described with reference to the embodiments of the present invention, the present invention is not limited to the above-described embodiments, but can be variously modified or modified in accordance with the appended claims.

For example, an electromagnet may be built in the roller and the base plate of the blanket member may be fixed to the roll on the entire surface. In this case, the blanket member can also be pressed against a slight deviation, and the printing performance can be further improved.

In addition, for example, in the above embodiment, the reversal printing method is used, but the printing apparatus 100 according to the present invention is not limited to this. For example, the present invention is also applicable to printing by the iron plate printing method, the gravure printing method, and the silk screen printing method. In this case, the roller Bk in the embodiment can be replaced with a plate cylinder. The roller Bk may be in the form of a flat plate rather than a roller. The substrate to be printed is suitably used for a flexible plastic substrate such as PC or PET, but may be used for a substrate other than a flexible substrate such as a glass substrate or a semiconductor substrate. The printing apparatus 100 according to the present invention is capable of printing an electronic device pattern.

100: printing device of electronic device pattern
10: Detection means
11:
12:
20: Analysis means (strain amount calculating section, correction value calculating section)
30: drive control means
31E: magnification correction section
31M:
31R:
31r:
Bk: Roller (roller transfer copper)
Bkp: roller support
Bks: Water repellent blanket
Gd: Linear guide (guide mechanism)
Ict: Ink Coater
Itk: Ink tank
M1, M2, M3, M4, M5, M6: Adjustment parameters
Pc: relief plate (master plate, etc.)
Pca: convex part of the relief plate
Pw: work plate (printed body, etc.)
PTa: liquid film (ink film, etc.)
PTb: Inversion pattern
PTc: pattern (print pattern, etc.)
PTs1, PTs2: Calibration pattern
Tm, Tma, Tmb: master table (first table)
Tw, Twa, Twb: Work table (second table)
Dx, Dy: strain
Tx, Ty: Shift amount
Ex, Ey: Scale
Co: Orthogonal
Rw: Rotation amount
εx, εy: residual error in plane
200: blanket member
201: Base plate
202: installation metal member
205: Home
206: pressing metal member
207: Screw
210: blanket member tensioning mechanism
211: Additional winding axis
212: insertion groove
213:
214: Reduction gear drive unit with brake

Claims

A printing apparatus for an electronic device pattern,
A holding member for holding the work plate,
A table on which said holding member is mounted;
A roller having a liquid film on its surface,
A moving mechanism for applying the liquid film to the work plate by relatively moving the table;
An analyzing means for analyzing the shape of the work plate,
And drive control means for controlling the position and drive of the roller based on the analysis result analyzed by the analysis means,
Lt; / RTI &
Wherein the analyzing means calculates any one of a shift amount, a magnification, an orthogonality or a rotation amount with respect to deformation of the work plate as a strain amount of the work plate based on the detection result of detecting the shape of the work plate, Calculating a correction value for controlling either the position of the roller or the rotational speed based on the amount of the strain,
Wherein the drive control means controls the roller based on the calculated correction value,
A device for printing an electronic device pattern.

A printing apparatus for an electronic device pattern,
A holding member for holding the work plate,
A table on which said holding member is mounted;
A roller having a liquid film on its surface,
A moving mechanism for applying the liquid film to the work plate by relatively moving the table;
An analyzing means for analyzing the shape of the work plate,
And drive control means for controlling the position and drive of the roller based on the analysis result analyzed by the analysis means,
Lt; / RTI &
The analyzing means calculates a shift amount, a magnification, an orthogonality, and a rotation amount relating to deformation of the work plate as a strain amount of the work plate based on the detection result of detecting the shape of the work plate, A correction value for controlling either the position of the roller or the rotation speed is calculated based on the amount of rotation of the roller,
Wherein the drive control means controls the roller based on the calculated correction value,
A device for printing an electronic device pattern.

3. The method according to claim 1 or 2,
Further comprising detecting means for detecting a shape of the work plate,
Wherein said analyzing means analyzes the shape of said work plate based on a detection result detected by said detecting means.

3. The method according to claim 1 or 2,
Further comprising second detecting means for detecting the shape of the roller,
Wherein the drive control means controls the rotation start timing of the roller by using also the detection result detected by the second detection means.

5. The method of claim 4,
Further comprising determining means for determining a replacement timing of the roller,
Wherein the judging means judges whether or not to replace the roller based on the detection result detected by the second detecting means and / or the number of times of printing the roller.

3. The method according to claim 1 or 2,
Wherein an inverted printing method is used in which an inverted pattern is formed by partially removing a liquid film on the surface of the roller from a relief plate, and then the inverted pattern is transferred to a work plate.

3. The method according to claim 1 or 2,
And a blanket member having an elastic modulus smaller than that of said blanket by one or more digits and having a base layer to which said blanket is attached,
Wherein the blanket member is wound and fixed on the roller.

8. The method of claim 7,
Wherein the base layer is a metal layer.

8. The method of claim 7,
Wherein the blanket member has a PET layer between the blanket and the base layer.

8. The method of claim 7,
Wherein the blanket member is fixed to the roller at both ends of the base layer to which the blanket is not attached.

A method of printing an electronic device pattern in which a reversal pattern is formed by partially removing a liquid film on the surface of a roller from a relief plate and thereafter transferring the reversal pattern to a work plate,
An analysis step of analyzing the shape of the work plate,
A convex holding step of holding the convex plate in the first table,
A work plate holding step of holding the work plate in the second table,
An inverted pattern forming step of moving the first table holding the relief plate to the lower side of the roller and partially removing the liquid film from a convex portion of the surface of the relief plate;
And a pattern printing step of moving the second table holding the work plate below the roller and transferring the reversal pattern to the surface of the work plate,
The analyzing step may calculate one of a shift amount, a magnification, an orthogonality, and a rotation amount with respect to deformation of the work plate as a strain amount of the work plate based on the detection result of detecting the shape of the work plate, Calculating a correction value for controlling either the position of the roller or the rotational speed based on the amount of the strain,
Wherein the pattern printing step further includes a drive control step of controlling the roller based on the calculated correction value,
And printing the electronic device pattern.

A recordable computer recording medium storing a program for causing a computer to execute a method of printing an electronic device pattern according to claim 11.